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公开(公告)号：US10746526B2
公开(公告)日：2020-08-18
申请号：US15920492
申请日：2018-03-14
发明人： Shiori Kaji , Hideaki Fukuzawa , Tomohiko Nagata , Akio Hori , Yoshihiko Fuji
摘要： According to one embodiment, a strain sensing element includes a film unit being deformable, a first and a second magnetic unit, and a strain sensor. The first magnetic unit is provided on the film unit and is arranged with the film unit in a first direction. The first magnetic unit includes a first magnetic body layer and a first intermediate magnetic layer. The second magnetic unit is provided on the film unit and is arranged with the first magnetic unit in a second direction crossing the first direction. The second magnetic unit includes a second magnetic body layer and a second intermediate magnetic layer. The strain sensor is provided on the film unit between the first magnetic unit and the second magnetic unit. An electrical characteristic of the strain sensor changes according to a deformation of the film unit.
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2.发明申请公开(公告)号：US20190239760A9
公开(公告)日：2019-08-08
申请号：US15421283
申请日：2017-01-31
发明人： Yoshihiko Fuji , Hideaki Fukuzawa , Shiori Kaji
CPC分类号： A61B5/02141 , B81B3/0078 , B81B2201/0257 , B81B2201/06 , G01L1/125 , G01L9/0041 , G01L9/16 , G06F3/0414 , H04R3/00 , H04R19/04 , H04R23/00 , H04R23/006 , H04R31/006 , H04R2201/003 , H04R2410/03 , H04R2420/07 , H04R2499/11
摘要： According to one embodiment, a strain sensing element provided on a deformable substrate includes: a first magnetic layer; a second magnetic layer; a spacer layer; and a bias layer. Magnetization of the second magnetic layer changes according to deformation of the substrate. The spacer layer is provided between the first magnetic layer and the second magnetic layer. The second magnetic layer is provided between the spacer layer and the bias layer. The bias layer is configured to apply a bias to the second magnetic layer.
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公开(公告)号：US10345162B2
公开(公告)日：2019-07-09
申请号：US15246964
申请日：2016-08-25
发明人： Akiko Yuzawa , Hideaki Fukuzawa , Kei Masunishi , Yoshihiro Higashi , Michiko Hara , Yoshihiko Fuji
IPC分类号： G01L1/22
摘要： According to one embodiment, a sensor includes a first sensor unit, a first stacked body, and a film unit. The first sensor unit includes a first magnetic layer, a second magnetic layer, and a first intermediate layer, the first intermediate layer being provided between the first magnetic layer and the second magnetic layer. The first stacked body includes a third magnetic layer, a fourth magnetic layer, and a second intermediate layer, the second intermediate layer being provided between the third magnetic layer and the fourth magnetic layer. The film unit is deformable. A portion of the film unit is disposed between the first sensor unit and the first stacked body.
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公开(公告)号：US10246324B2
公开(公告)日：2019-04-02
申请号：US15701633
申请日：2017-09-12
发明人： Hideaki Fukuzawa , Tatsuya Ohguro , Akihiro Kojima , Yoshiaki Sugizaki , Mariko Takayanagi , Yoshihiko Fuji , Akio Hori , Michiko Hara
摘要： According to one embodiment, a strain and pressure sensing device includes a semiconductor circuit unit and a sensing unit. The semiconductor circuit unit includes a semiconductor substrate and a transistor. The transistor is provided on a semiconductor substrate. The sensing unit is provided on the semiconductor circuit unit, and has space and non-space portions. The non-space portion is juxtaposed with the space portion. The sensing unit further includes a movable beam, a strain sensing element unit, and first and second buried interconnects. The movable beam has fixed and movable portions, and includes first and second interconnect layers. The fixed portion is fixed to the non-space portion. The movable portion is separated from the transistor and extends from the fixed portion into the space portion. The strain sensing element unit is fixed to the movable portion. The first and second buried interconnects are provided in the non-space portion.
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公开(公告)号：US10234343B2
公开(公告)日：2019-03-19
申请号：US15807020
申请日：2017-11-08
发明人： Yoshihiko Fuji , Kei Masunishi , Hideaki Fukuzawa , Yoshihiro Higashi , Michiko Hara , Akio Hori , Tomohiko Nagata , Shiori Kaji , Akiko Yuzawa
IPC分类号： G01L9/00 , G01L1/22 , A61B5/021 , G01L1/12 , A61B5/024 , H04R1/02 , H04R19/00 , G01L1/20 , G01L5/16 , G06F3/041 , A61B5/00 , H04R1/04 , H04R7/00 , H04R19/04
摘要： According to one embodiment, a pressure sensor includes a film part, and a sensing unit. A circumscribing rectangle circumscribing a configuration of a film surface of the film part has a first side, a second side, a third side connected to one end of the first side and one end of the second side, a fourth side connected to one other end of the first side and one other end of the second side, and a centroid of the circumscribing rectangle. The circumscribing rectangle includes a first region enclosed by the first side, line segments connecting the centroid to the one end of the first side, and to the one other end of the first side. The sensing unit includes sensing elements provided on a portion of the film surface overlapping the first region. Each sensing element includes a first, second magnetic layers, and a spacer layer.
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6.发明申请公开(公告)号：US20180321102A1
公开(公告)日：2018-11-08
申请号：US16038240
申请日：2018-07-18
发明人： Yoshihiko FUJI , Hideaki Fukuzawa , Akio Hori , Shiori Kaji
CPC分类号： G01L9/16 , G01L9/0042 , G01L9/0044
摘要： A strain detection element is provided above a deformable membrane. Moreover, this strain detection element includes an electrode and a stacked body, the stacked body including: a first magnetic layer whose magnetization direction is variable according to a deformation of the membrane; a second magnetic layer provided facing the first magnetic layer; and an intermediate layer provided between these first magnetic layer and second magnetic layer, and at least part of the first magnetic layer is amorphous, and the electrode includes a metal layer configured from a Cu—Ag alloy.
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公开(公告)号：US10082435B2
公开(公告)日：2018-09-25
申请号：US14742453
申请日：2015-06-17
发明人： Kazuaki Okamoto , Akio Hori , Hideaki Fukuzawa , Yoshihiko Fuji , Akiko Yuzawa
CPC分类号： G01L9/0041 , G01L9/0047 , G01L9/008 , G01L9/16
摘要： A pressure sensor according to an embodiment includes: a support member; a membrane supported by the support and having flexibility; and a strain detection element formed on the membrane. The strain detection element includes a first magnetic layer formed on the membrane and having a magnetization, a second magnetic layer having a magnetization, and an intermediate layer formed between the first magnetic layer and the second magnetic layer. A direction of at least one of the magnetization of the first magnetic layer and the magnetization of the second magnetic layer changes relatively to that of the other depending on a strain of the membrane. Moreover, the membrane includes an oxide layer that includes aluminum.
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公开(公告)号：US09999356B2
公开(公告)日：2018-06-19
申请号：US14813783
申请日：2015-07-30
发明人： Alexander Devin Giddings , Hideaki Fukuzawa , Yoshihiko Fuji , Hiromi Yuasa , Michiko Hara , Shuichi Murakami
CPC分类号： A61B5/021 , A61B5/02108 , G01B7/24 , G01L1/125
摘要： A strain sensor element comprises a laminated film which has a magnetic free layer, a spacer layer, and a magnetic reference layer. The free layer has a variable magnetization direction and a out-of-plane magnetization direction. The reference layer has a variable magnetization direction which is pinned more strongly than the magnetization of the free layer. The spacer layer provided between the free layer and the reference layer. A pair of electrodes is provided with a plane of the laminated film. A substrate is provided with either of the pair electrodes and can be strained. The rotation angle of the magnetization of the free layer is different from the rotation angle of the magnetization of the reference layer when the substrate is distorted. Electrical resistance is changed depending on the magnetization angle between the free layer and the reference layer, which allows the element to operate as a strain sensor.
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公开(公告)号：US20180045752A1
公开(公告)日：2018-02-15
申请号：US15724385
申请日：2017-10-04
发明人： Hideaki Fukuzawa , Michiko Hara , Yoshihiko Fuji , Yoshihiro Higashi , Shiori Kaji , Akio Hori , Tomohiko Nagata , Akiko Yuzawa , Akira Kikitsu
IPC分类号： G01P15/105 , G01P15/08
CPC分类号： G01P15/105 , G01P15/0802 , G01P2015/0805
摘要： According to one embodiment, an inertial sensor includes a base portion, a weight portion, a connection portion, and a first sensing element unit. The connection portion connects the weight portion and the base portion and is capable of being deformed in accordance with a change in relative position of the weight portion with respect to the position of the base portion. The first sensing element unit is provided on a first portion of the connection portion and includes a first magnetic layer, a second magnetic layer, and a nonmagnetic first intermediate layer. The nonmagnetic first intermediate layer is provided between the first magnetic layer and the second magnetic layer.
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公开(公告)号：US09841444B2
公开(公告)日：2017-12-12
申请号：US14574437
申请日：2014-12-18
CPC分类号： G01R19/0092 , G01R33/093
摘要： According to one embodiment, a current sensor includes a first sensor element and a power line. The first sensor element includes a first electrode, a second electrode, and a first stacked body. The first stacked body is provided between the first electrode and the second electrode. The first stacked body includes a first magnetic layer, a second magnetic layer and a first intermediate layer. The second magnetic layer is provided between the first magnetic layer and the second electrode. The first intermediate layer is provided between the first magnetic layer and the second magnetic layer. The first intermediate layer is nonmagnetic. A magnetization of the second magnetic layer changes according to a magnetic field generated by a current flowing through the power line. At least a portion of the second magnetic layer is amorphous.
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