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    Strain sensing element and pressure sensor
    2.
    发明授权
    Strain sensing element and pressure sensor 有权

    公开(公告)号：US09952030B2

    公开(公告)日：2018-04-24

    申请号：US14887749

    申请日：2015-10-20

    申请人： Kabushiki Kaisha Toshiba

    发明人： Shiori Kaji ,  Hideaki Fukuzawa ,  Tomohiko Nagata ,  Akio Hori ,  Yoshihiko Fuji

    IPC分类号： G01L9/00 ,  G01B7/24 ,  G01B7/16 ,  G01L9/16

    CPC分类号： G01B7/24 ,  G01B7/18 ,  G01L9/0042 ,  G01L9/16

    摘要： According to one embodiment, a strain sensing element includes a film unit being deformable, a first and a second magnetic unit, and a strain sensor. The first magnetic unit is provided on the film unit and is arranged with the film unit in a first direction. The first magnetic unit includes a first magnetic body layer and a first intermediate magnetic layer. The second magnetic unit is provided on the film unit and is arranged with the first magnetic unit in a second direction crossing the first direction. The second magnetic unit includes a second magnetic body layer and a second intermediate magnetic layer. The strain sensor is provided on the film unit between the first magnetic unit and the second magnetic unit. An electrical characteristic of the strain sensor changes according to a deformation of the film unit.

    Pressure sensor, audio microphone, blood pressure sensor, and touch panel
    4.
    发明授权
    Pressure sensor, audio microphone, blood pressure sensor, and touch panel 有权
    压力传感器，音频麦克风，血压传感器和触摸屏

    公开(公告)号：US09176014B2

    公开(公告)日：2015-11-03

    申请号：US13927886

    申请日：2013-06-26

    申请人： KABUSHIKI KAISHA TOSHIBA

    发明人： Yoshihiko Fuji ,  Hideaki Fukuzawa ,  Michiko Hara ,  Yoshihiro Higashi ,  Akio Hori ,  Tomohiko Nagata ,  Shiori Kaji ,  Akiko Yuzawa

    IPC分类号： G01L7/00 ,  G01L7/08 ,  G01L9/00 ,  G01L1/12 ,  G01L9/16 ,  H04R1/00

    CPC分类号： G01L1/12 ,  G01L9/0044 ,  G01L9/0048 ,  G01L9/16 ,  H04R1/00 ,  H04R15/00 ,  H04R2410/00

    摘要： According to one embodiment, a pressure sensor includes a substrate, a first electrode, a second electrode, a first magnetic layer, a second magnetic, a spacer layer, a third magnetic layer. The substrate includes a first region and a second region. The first electrode is provided on the first region. The second electrode is provided on the first electrode. The first magnetic layer is provided between the first electrode and the second electrode. The second magnetic layer is provided between the first electrode and the first magnetic layer or between the first magnetic layer and the second electrode. The spacer layer is provided between the first magnetic layer and the second magnetic layer in a stacking direction of layers from the first electrode to the second electrode. The third magnetic layer is provided continuously with the second magnetic layer on the second region.

    摘要翻译： 根据一个实施例，压力传感器包括基板，第一电极，第二电极，第一磁性层，第二磁性体，间隔层，第三磁性层。 衬底包括第一区域和第二区域。 第一电极设置在第一区域上。 第二电极设置在第一电极上。 第一磁性层设置在第一电极和第二电极之间。 第二磁性层设置在第一电极和第一磁性层之间或第一磁性层和第二电极之间。 间隔层在从第一电极到第二电极的层的堆叠方向上设置在第一磁性层和第二磁性层之间。 第三磁性层与第二区域上的第二磁性层连续地提供。

    PRESSURE SENSOR
    5.
    发明申请
    PRESSURE SENSOR 有权
    压力传感器

    公开(公告)号：US20150266717A1

    公开(公告)日：2015-09-24

    申请号：US14584625

    申请日：2014-12-29

    申请人： Kabushiki Kaisha Toshiba

    发明人： Kazuaki OKAMOTO ,  Hideaki Fukuzawa ,  Yoshihiko Fuji ,  Akiko Yuzawa ,  Akio Hori ,  Kei Masunishi

    IPC分类号： B81B3/00

    CPC分类号： B81B3/0051 ,  B81B3/0091 ,  B81B2201/0257 ,  B81B2201/0264 ,  G01L1/12 ,  G01L9/16 ,  G01L17/00 ,  H01L41/12 ,  H01L41/125

    摘要： According to one embodiment, a pressure sensor includes: a support section; a film section; and a strain sensing element. The film section is supported by the support section and deformable. The film section includes a first film and a second film. The first film includes a first region located in a central part and a second region located in a peripheral part around the first region. The second film is provided on the first region. The strain sensing element is provided on part of the second region. The strain sensing element includes a first magnetic layer; a second magnetic layer; and an intermediate layer. Magnetization of the first magnetic layer changes in response to deformation of the second region. The intermediate layer is provided between the first magnetic layer and the second magnetic layer.

    摘要翻译： 根据一个实施例，压力传感器包括：支撑部分; 电影部分 和应变传感元件。 薄膜部分由支撑部分支撑并且可变形。 薄膜部分包括第一薄膜和第二薄膜。 第一膜包括位于中心部分的第一区域和位于围绕第一区域的周边部分中的第二区域。 在第一区域设置第二胶片。 应变传感元件设置在第二区域的一部分上。 应变传感元件包括第一磁性层; 第二磁性层; 和中间层。 响应于第二区域的变形，第一磁性层的磁化改变。 中间层设置在第一磁性层和第二磁性层之间。

    MICROPHONE PACKAGE
    6.
    发明申请
    MICROPHONE PACKAGE 有权
    麦克风包装

    公开(公告)号：US20140137658A1

    公开(公告)日：2014-05-22

    申请号：US14045153

    申请日：2013-10-03

    申请人： Kabushiki Kaisha Toshiba

    发明人： Yoshihiro HIGASHI ,  Yoshihiko Fuji ,  Michiko Hara ,  Akiko Yuzawa ,  Shiori Kaji ,  Tomohiko Nagata ,  Akio Hori ,  Hideaki Fukuzawa

    IPC分类号： G01L1/12

    CPC分类号： H04R19/04 ,  H04R1/04 ,  H04R7/10

    摘要： According to one embodiment, a microphone package includes: a pressure sensing element including a film and a device; and a cover. The film generates strain in response to pressure. The device includes: a first electrode; a second electrode; and a first magnetic layer. The first magnetic layer is provided between the first electrode and the second electrode and has a first magnetization. The cover includes: an upper portion; and a side portion. The side portion is magnetic and provided depending on the first magnetization and the second magnetization.

    摘要翻译： 根据一个实施例，麦克风封装包括：压力感测元件，包括薄膜和装置; 和封面。 该膜响应于压力而产生应变。 该装置包括：第一电极; 第二电极; 和第一磁性层。 第一磁性层设置在第一电极和第二电极之间并且具有第一磁化。 盖子包括：上部; 和侧部。 侧部是磁性的并根据第一磁化和第二磁化而提供。

    PRESSURE SENSOR
    8.
    发明申请
    PRESSURE SENSOR 审中-公开

    公开(公告)号：US20180356308A1

    公开(公告)日：2018-12-13

    申请号：US16106587

    申请日：2018-08-21

    申请人： Kabushiki Kaisha Toshiba

    发明人： Kazuaki OKAMOTO ,  Akio Hori ,  Hideaki Fukuzawa ,  Yoshihiko Fuji ,  Akiko Yuzawa

    IPC分类号： G01L9/00 ,  G01L9/16

    CPC分类号： G01L9/0041 ,  G01L9/0047 ,  G01L9/008 ,  G01L9/16

    摘要： A pressure sensor according to an embodiment includes: a support member; a membrane supported by the support and having flexibility; and a strain detection element formed on the membrane. The strain detection element includes a first magnetic layer formed on the membrane and having a magnetization, a second magnetic layer having a magnetization, and an intermediate layer formed between the first magnetic layer and the second magnetic layer. A direction of at least one of the magnetization of the first magnetic layer and the magnetization of the second magnetic layer changes relatively to that of the other depending on a strain of the membrane. Moreover, the membrane includes an oxide layer that includes aluminum.