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公开(公告)号：US12019092B2
公开(公告)日：2024-06-25
申请号：US17680263
申请日：2022-02-24
发明人： Kei Masunishi , Yasushi Tomizawa , Etsuji Ogawa , Ryunosuke Gando , Shiori Kaji , Hiroki Hiraga , Fumito Miyazaki , Daiki Ono , Kengo Uchida
IPC分类号： G01P15/097 , B81B3/00
CPC分类号： G01P15/097 , B81B3/0021 , B81B2201/0235
摘要： According to one embodiment, a sensor a sensor includes a base, a first support portion fixed to the base, and a first movable portion supported by the first support portion. The first movable portion includes first and second movable base portions, a connecting base portion, first and second movable beams, and first and second movable conductive portions. The first movable beam includes a first beam end portion, a first beam other end portion, and a first beam intermediate portion. The second movable beam includes a second beam end portion, a second beam other end portion, and a second beam intermediate portion. The first movable conductive portion includes a first crossing conductive portion, a first extending conductive portion, and a first other extending conductive portion. The second movable conductive portion includes a second crossing conductive portion, a second extending conductive portion, and a second other extending conductive portion.
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公开(公告)号：US20190285436A1
公开(公告)日：2019-09-19
申请号：US16119373
申请日：2018-08-31
发明人： Yoshihiko FUJI , Keiju Yamada , Kei Masunishi , Michiko Hara , Yoshihiro Higashi , Kazuaki Okamoto , Shiori Kaji
摘要： According to one embodiment, a sensor includes a sensing element portion and a first magnetic portion. The sensing element portion includes a supporter, a deformable film portion supported by the supporter, and a first element including a magnetic layer and being provided at the film portion. The first magnetic portion is separated from the sensing element portion. The first magnetic portion includes a plurality of first holes. A width of one of the plurality of first holes along a second direction is narrower than a length of the sensing element portion along the second direction and wider than a length of the first element along the second direction. The second direction crosses a first direction from the film portion toward the first element.
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公开(公告)号：US09952112B2
公开(公告)日：2018-04-24
申请号：US14721523
申请日：2015-05-26
CPC分类号： G01L9/16 , A61B5/02141 , A61B2562/0247 , A61B2562/028 , A61B2562/12
摘要： According to an embodiment, a pressure sensor includes a support part, a flexible membrane part, and a magnetoresistive element. The flexible membrane part is supported by the support part, and includes a first region and a second region with rigidity lower than rigidity of the first region. The magnetoresistive element is provided on the membrane part, and includes a first magnetic layer, a second magnetic layer, and a spacer layer provided between the first magnetic layer and the second magnetic layer.
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公开(公告)号：US09921114B2
公开(公告)日：2018-03-20
申请号：US15388629
申请日：2016-12-22
发明人： Yoshihiko Fuji , Kei Masunishi , Hideaki Fukuzawa , Yoshihiro Higashi , Michiko Hara , Akio Hori , Tomohiko Nagata , Shiori Kaji , Akiko Yuzawa
IPC分类号： G01L1/22 , G01L1/12 , G01L5/16 , G01L9/00 , H04R1/02 , H04R1/04 , H04R7/00 , H04R19/00 , G06F3/041 , A61B5/00 , A61B5/021 , A61B5/024 , G01L1/20 , H04R19/04
CPC分类号： G01L1/2287 , A61B5/02141 , A61B5/02438 , A61B5/7475 , G01L1/12 , G01L1/205 , G01L1/2262 , G01L1/2293 , G01L5/161 , G01L9/0051 , G06F3/041 , G06F3/0414 , G06F2203/04105 , H04R1/028 , H04R1/04 , H04R7/00 , H04R19/005 , H04R19/04 , H04R2499/11
摘要： According to one embodiment, a pressure sensor includes a film part, and a sensing unit. A circumscribing rectangle circumscribing a configuration of a film surface of the film part has a first side, a second side, a third side connected to one end of the first side and one end of the second side, a fourth side connected to one other end of the first side and one other end of the second side, and a centroid of the circumscribing rectangle. The circumscribing rectangle includes a first region enclosed by the first side, line segments connecting the centroid to the one end of the first side, and to the one other end of the first side. The sensing unit includes sensing elements provided on a portion of the film surface overlapping the first region. Each sensing element includes a first, second magnetic layers, and a spacer layer.
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公开(公告)号：US09829398B2
公开(公告)日：2017-11-28
申请号：US14721497
申请日：2015-05-26
CPC分类号： G01L1/22 , A61B5/021 , A61B5/02141 , A61B5/05 , A61B5/6898 , A61B5/7475 , A61B2562/0204 , A61B2562/0247 , A61B2562/028 , G01L1/125 , G01L9/007
摘要： According to an embodiment, a pressure sensor includes a substrate, a support part, a flexible membrane part, and a magnetoresistive element. The support part is adhered on the substrate by using a first adhesive material with a first Young's modulus and a second adhesive material with a second Young's modulus different from the first Young's modulus. The membrane part is supported by the support part. The magnetoresistive element is provided on the membrane part, and includes a first magnetic layer, a second magnetic layer, and a spacer layer provided between the first magnetic layer and the second magnetic layer.
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公开(公告)号：US11834326B2
公开(公告)日：2023-12-05
申请号：US17461835
申请日：2021-08-30
发明人： Kei Masunishi , Yasushi Tomizawa , Etsuji Ogawa , Ryunosuke Gando , Shiori Kaji , Hiroki Hiraga , Fumito Miyazaki , Daiki Ono
IPC分类号： B81B3/00
CPC分类号： B81B3/0021 , B81B2201/0235 , B81B2201/0271 , B81B2201/0278 , B81B2203/04 , B81B2203/06
摘要： According to one embodiment, a sensor includes a first detection element. The first detection element includes a base body, a first support member fixed to the base body, a conductive first movable member, and a first conductive part fixed to the base body. The first movable member includes first, second, third, fourth and fifth movable parts. In a second direction crossing a first direction from the base body toward the first movable member, the third movable part is between the first and second movable parts. In the second direction, the fourth movable part is between the first and third movable parts. In the second direction, the fifth movable part is between the third and second movable parts. The first movable part is supported by the first support member. The second, third, fourth and fifth movable parts are separated from the base body.
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公开(公告)号：US11656079B2
公开(公告)日：2023-05-23
申请号：US17445922
申请日：2021-08-25
发明人： Hiroki Hiraga , Ryunosuke Gando , Yasushi Tomizawa , Fumito Miyazaki , Daiki Ono , Kei Masunishi , Etsuji Ogawa
IPC分类号： G01C19/5677 , G01C19/5733 , G01C19/5726
CPC分类号： G01C19/5677 , G01C19/5726 , G01C19/5733
摘要： According to one embodiment, a sensor includes a sensor part. The sensor part includes a supporter and a movable part. The movable part includes a movable member located around the supporter in a first plane, and a plurality of structure members located between the supporter and the movable member. The structure members have bent shapes. The structure members connect the movable member with the supporter. The movable member is capable of vibrating. The movable part has the supporter as a center of rotational symmetry. The movable part has a plurality of mirror planes. The mirror planes pass through the center of the rotational symmetry and cross the first plane.
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公开(公告)号：US11630121B2
公开(公告)日：2023-04-18
申请号：US17446587
申请日：2021-08-31
发明人： Kei Masunishi , Yasushi Tomizawa , Etsuji Ogawa , Ryunosuke Gando , Shiori Kaji , Hiroki Hiraga , Fumito Miyazaki
IPC分类号： G01P15/08
摘要： According to one embodiment, a sensor includes a first detection element, and a processing part. The first detection element includes a base body, a first supporter fixed to the base body, a first movable part, first and second counter conductive parts. The first movable part is supported by the first supporter and separated from the base body. The first movable part includes a first movable base part supported by the first supporter, a second movable base part connected with the first movable base part, a first movable beam including a first beam, and a second movable beam including a second beam. The first beam includes a first end portion and a first other end portion. The second beam includes a second end portion and a second other end portion. The first counter conductive part faces the first movable beam. The second counter conductive part faces the second movable beam.
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公开(公告)号：US20210175035A1
公开(公告)日：2021-06-10
申请号：US17017253
申请日：2020-09-10
发明人： Hiroaki YAMAZAKI , Kei Masunishi
摘要： According to one embodiment, a MEMS element includes a first member, and an element part. The element part includes a first fixed electrode fixed to the first member, a first movable electrode facing the first fixed electrode, a first conductive member electrically connected to the first movable electrode, and a second conductive member electrically connected to the first movable electrode. The first conductive member and the second conductive member support the first movable electrode to be separated from the first fixed electrode in a first state before a first electrical signal is applied between the second conductive member and the first fixed electrode. The first conductive member and the second conductive member are in a broken state in a second state after the first electrical signal is applied between the second conductive member and the first fixed electrode.
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公开(公告)号：US10481027B2
公开(公告)日：2019-11-19
申请号：US16145763
申请日：2018-09-28
发明人： Yoshihiko Fuji , Michiko Hara , Kei Masunishi , Yoshihiro Higashi , Shiori Kaji , Akiko Yuzawa , Akio Hori , Tomohiko Nagata , Kazuaki Okamoto , Kenji Otsu , Shotaro Baba
摘要： According to one embodiment, a sensor includes a deformable film portion, a first sensing element and a second sensing element. The first sensing element is fixed to the film portion, and includes a first magnetic layer of a first material, a first opposing magnetic layer, and a first intermediate layer. The first intermediate layer is provided between the first magnetic layer and the first opposing magnetic layer. The second sensing element is fixed to the film portion, and includes a second magnetic layer of a second material, a second opposing magnetic layer, and a second intermediate layer. The second material is different from the first material. The second intermediate layer is provided between the second magnetic layer and the second opposing magnetic layer.
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