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公开(公告)号：US11703530B2
公开(公告)日：2023-07-18
申请号：US17672097
申请日：2022-02-15
CPC分类号： G01R27/02 , G01R25/00 , G01R31/382 , G01R17/105 , G01R27/08 , G01R27/14
摘要： According to one embodiment, a sensor includes an element part, and a control circuit part. The element part includes first and second elements. Each of the first and second elements includes a first magnetic element and a first conductive member. The control circuit part includes a first current circuit, a differential circuit, and a phase detection circuit. The first current circuit is configured to supply a first current to the first conductive member. The differential circuit is configured to output a differential signal corresponding to a difference of a first signal and a second signal. The first signal corresponds to a change in a first electrical resistance of the first magnetic element of the first element. The second signal corresponds to a change in a second electrical resistance of the first magnetic element of the second element. The phase detection circuit is configured to perform a phase detection of the differential signal.
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公开(公告)号：US20220221534A1
公开(公告)日：2022-07-14
申请号：US17410717
申请日：2021-08-24
IPC分类号： G01R33/09
摘要： According to one embodiment, a magnetic sensor includes a base body, a magnetic member, and an element part. The base body includes a base body end portion. A direction from the base body toward the magnetic member is along a first direction. The element part includes a first magnetic element and a second magnetic element. A position of the first magnetic element and a position of the second magnetic element in a second direction are between a position of the base body end portion in the second direction and a position of the magnetic member in the second direction. The second direction crosses the first direction. A first distance along the second direction between the base body end portion and the element part is greater than a second distance along the second direction between the element part and the magnetic member.
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公开(公告)号：US11137281B2
公开(公告)日：2021-10-05
申请号：US16281157
申请日：2019-02-21
摘要： According to one embodiment, a sensor includes a structure body, an element portion, and a power line. The structure body includes a supporter and a film portion. The film portion is supported by the supporter and includes an end portion. The end portion is aligned with a first direction and supported by the supporter. The element portion includes a first element provided at the film portion. The first element includes a first magnetic layer, a first opposing magnetic layer provided between the first magnetic layer and the film portion, and a first nonmagnetic layer provided between the first magnetic layer and the first opposing magnetic layer. A second direction from the first opposing magnetic layer toward the first magnetic layer crosses the first direction. The power line is electrically insulated from the element portion. The power line includes a portion aligned with the first direction.
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公开(公告)号：US10481027B2
公开(公告)日：2019-11-19
申请号：US16145763
申请日：2018-09-28
发明人： Yoshihiko Fuji , Michiko Hara , Kei Masunishi , Yoshihiro Higashi , Shiori Kaji , Akiko Yuzawa , Akio Hori , Tomohiko Nagata , Kazuaki Okamoto , Kenji Otsu , Shotaro Baba
摘要： According to one embodiment, a sensor includes a deformable film portion, a first sensing element and a second sensing element. The first sensing element is fixed to the film portion, and includes a first magnetic layer of a first material, a first opposing magnetic layer, and a first intermediate layer. The first intermediate layer is provided between the first magnetic layer and the first opposing magnetic layer. The second sensing element is fixed to the film portion, and includes a second magnetic layer of a second material, a second opposing magnetic layer, and a second intermediate layer. The second material is different from the first material. The second intermediate layer is provided between the second magnetic layer and the second opposing magnetic layer.
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公开(公告)号：US10345162B2
公开(公告)日：2019-07-09
申请号：US15246964
申请日：2016-08-25
发明人： Akiko Yuzawa , Hideaki Fukuzawa , Kei Masunishi , Yoshihiro Higashi , Michiko Hara , Yoshihiko Fuji
IPC分类号： G01L1/22
摘要： According to one embodiment, a sensor includes a first sensor unit, a first stacked body, and a film unit. The first sensor unit includes a first magnetic layer, a second magnetic layer, and a first intermediate layer, the first intermediate layer being provided between the first magnetic layer and the second magnetic layer. The first stacked body includes a third magnetic layer, a fourth magnetic layer, and a second intermediate layer, the second intermediate layer being provided between the third magnetic layer and the fourth magnetic layer. The film unit is deformable. A portion of the film unit is disposed between the first sensor unit and the first stacked body.
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公开(公告)号：US10234343B2
公开(公告)日：2019-03-19
申请号：US15807020
申请日：2017-11-08
发明人： Yoshihiko Fuji , Kei Masunishi , Hideaki Fukuzawa , Yoshihiro Higashi , Michiko Hara , Akio Hori , Tomohiko Nagata , Shiori Kaji , Akiko Yuzawa
IPC分类号： G01L9/00 , G01L1/22 , A61B5/021 , G01L1/12 , A61B5/024 , H04R1/02 , H04R19/00 , G01L1/20 , G01L5/16 , G06F3/041 , A61B5/00 , H04R1/04 , H04R7/00 , H04R19/04
摘要： According to one embodiment, a pressure sensor includes a film part, and a sensing unit. A circumscribing rectangle circumscribing a configuration of a film surface of the film part has a first side, a second side, a third side connected to one end of the first side and one end of the second side, a fourth side connected to one other end of the first side and one other end of the second side, and a centroid of the circumscribing rectangle. The circumscribing rectangle includes a first region enclosed by the first side, line segments connecting the centroid to the one end of the first side, and to the one other end of the first side. The sensing unit includes sensing elements provided on a portion of the film surface overlapping the first region. Each sensing element includes a first, second magnetic layers, and a spacer layer.
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公开(公告)号：US20190017891A1
公开(公告)日：2019-01-17
申请号：US15908626
申请日：2018-02-28
发明人： Kenji Otsu , Yoshihiko Fuji , Akiko Yuzawa , Michiko Hara , Yoshihiro Higashi , Shiori Kaji , Kazuaki Okamoto , Shotaro Baba , Tomohiko Nagata
IPC分类号： G01L9/00 , H01L41/113 , H01L41/047 , H01L41/053 , H01L41/04
摘要： According to one embodiment, a sensor includes a first film, a first sensor portion, and first to fourth terminals. The first film includes first to second electrode layers, and a piezoelectric layer. The first film is deformable. The first sensor portion is fixed to a portion of the first film. A first direction from the portion of the first film toward the first sensor portion is aligned with a direction from the second electrode layer toward the first electrode layer. The first sensor portion includes first to second sensor conductive layers, first to second magnetic layers, and a first intermediate layer. The first terminal is electrically connected to the first electrode layer. The second terminal is electrically connected to the second electrode layer. The third terminal is electrically connected to the first sensor conductive layer. The fourth terminal is electrically connected to the second sensor conductive layer.
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公开(公告)号：US20180210041A1
公开(公告)日：2018-07-26
申请号：US15689221
申请日：2017-08-29
发明人： Shotaro Baba , Yoshihiko Fuji , Kei Masunishi , Michiko Hara , Akiko Yuzawa , Shiori Kaji , Tomohiko Nagata , Yoshihiro Higashi , Kenji Otsu , Kazuaki Okamoto
CPC分类号： G01R33/091 , A61B2562/0247 , G01B7/31 , G01D5/245 , G01L9/16 , G01R33/093 , G02B7/08 , H04R19/04
摘要： According to one embodiment, a sensor includes a support body, a film portion, a first sensing element, and a structure body. The first sensing element is fixed to the film portion, and includes a first magnetic layer, a first opposing magnetic layer, and a first intermediate layer. The structure body includes a first region overlapping the support body, and a second region being continuous with the first region and overlapping the film portion. The structure body includes a first structure body layer, a first opposing structure body layer, and a first structure body intermediate layer. The first opposing structure body layer is provided between the first structure body layer and the support body and between the first structure body layer and the film portion. The first structure body intermediate layer is provided between the first structure body layer and the first opposing structure body layer.
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公开(公告)号：US20180045752A1
公开(公告)日：2018-02-15
申请号：US15724385
申请日：2017-10-04
发明人： Hideaki Fukuzawa , Michiko Hara , Yoshihiko Fuji , Yoshihiro Higashi , Shiori Kaji , Akio Hori , Tomohiko Nagata , Akiko Yuzawa , Akira Kikitsu
IPC分类号： G01P15/105 , G01P15/08
CPC分类号： G01P15/105 , G01P15/0802 , G01P2015/0805
摘要： According to one embodiment, an inertial sensor includes a base portion, a weight portion, a connection portion, and a first sensing element unit. The connection portion connects the weight portion and the base portion and is capable of being deformed in accordance with a change in relative position of the weight portion with respect to the position of the base portion. The first sensing element unit is provided on a first portion of the connection portion and includes a first magnetic layer, a second magnetic layer, and a nonmagnetic first intermediate layer. The nonmagnetic first intermediate layer is provided between the first magnetic layer and the second magnetic layer.
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公开(公告)号：US09841444B2
公开(公告)日：2017-12-12
申请号：US14574437
申请日：2014-12-18
CPC分类号： G01R19/0092 , G01R33/093
摘要： According to one embodiment, a current sensor includes a first sensor element and a power line. The first sensor element includes a first electrode, a second electrode, and a first stacked body. The first stacked body is provided between the first electrode and the second electrode. The first stacked body includes a first magnetic layer, a second magnetic layer and a first intermediate layer. The second magnetic layer is provided between the first magnetic layer and the second electrode. The first intermediate layer is provided between the first magnetic layer and the second magnetic layer. The first intermediate layer is nonmagnetic. A magnetization of the second magnetic layer changes according to a magnetic field generated by a current flowing through the power line. At least a portion of the second magnetic layer is amorphous.
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