Method for making a photomask assembly incorporating a porous frame
    22.
    发明授权
    Method for making a photomask assembly incorporating a porous frame 失效
    制造包含多孔框架的光掩模组件的方法

    公开(公告)号:US07476474B2

    公开(公告)日:2009-01-13

    申请号:US11340384

    申请日:2006-01-25

    CPC分类号: G03F1/64 C03B19/12 Y02P40/57

    摘要: A photomask assembly is described having a frame for supporting a transparent pellicle above a photomask substrate, defining a closed pellicle space overlaying the substrate. The frame is formed of a porous material configured to allow the pellicle space to be purged with an inert gas within a reasonable processing time period, thereby removing any harmful chemicals that might be present. The frame preferably is made by a method that includes preparing a gel by a sol-gel process, drying the gel, and partially densifying the dry gel. The resulting frame has a gas permeability to oxygen or nitrogen higher than about 10 ml.mm/cm2.min.MPa, an average pore size between 0.001 micrometer and 10 micrometers, and a coefficient of thermal expansion between 0.01 ppm/° C. and 10 ppm/° C.

    摘要翻译: 描述了一种光掩模组件,其具有用于在光掩模基板上方支撑透明防护薄膜的框架,限定覆盖基板的封闭的薄膜空间。 框架由多孔材料形成,其被配置为允许防护薄膜空间在合理的处理时间段内用惰性气体吹扫,从而去除可能存在的任何有害化学物质。 框架优选通过包括通过溶胶 - 凝胶法制备凝胶,干燥凝胶并部分致密化干凝胶的方法制备。 所得到的框架对氧气或氮气的气体渗透性高于约10毫升/厘米2 /分钟,平均孔径在0.001微米至10微米之间,热膨胀系数在0.01ppm /℃和 10 ppm /°C

    Method for making a photomask assembly incorporating a porous frame
    23.
    发明申请
    Method for making a photomask assembly incorporating a porous frame 失效
    制造包含多孔框架的光掩模组件的方法

    公开(公告)号:US20060141371A1

    公开(公告)日:2006-06-29

    申请号:US11340384

    申请日:2006-01-25

    IPC分类号: A47G1/12 G03F1/14 G03F1/00

    CPC分类号: G03F1/64 C03B19/12 Y02P40/57

    摘要: A photomask assembly is described having a frame for supporting a transparent pellicle above a photomask substrate, defining a closed pellicle space overlaying the substrate. The frame is formed of a porous material configured to allow the pellicle space to be purged with an inert gas within a reasonable processing time period, thereby removing any harmful chemicals that might be present. The frame preferably is made by a method that includes preparing a gel by a sol-gel process, drying the gel, and partially densifying the dry gel. The resulting frame has a gas permeability to oxygen or nitrogen higher than about 10 ml.mm/cm2.min.MPa, an average pore size between 0.001 micrometer and 10 micrometers, and a coefficient of thermal expansion between 0.01 ppm/° C. and 10 ppm/° C.

    摘要翻译: 描述了一种光掩模组件,其具有用于在光掩模基板上方支撑透明防护薄膜的框架,限定覆盖基板的封闭的薄膜空间。 框架由多孔材料形成,其被配置为允许防护薄膜空间在合理的处理时间段内用惰性气体吹扫,从而去除可能存在的任何有害化学物质。 框架优选通过包括通过溶胶 - 凝胶法制备凝胶,干燥凝胶并部分致密化干凝胶的方法制备。 所得到的框架对氧气或氮气的气体渗透性高于约10毫升/厘米3·秒/秒/秒·秒·分钟·MPa,平均孔径在0.001微米至10微米之间,并且热膨胀系数 在0.01ppm /℃和10ppm /℃之间。

    Photomask assembly incorporating a porous frame
    26.
    发明授权
    Photomask assembly incorporating a porous frame 失效
    包含多孔框架的光掩模组合

    公开(公告)号:US07014961B2

    公开(公告)日:2006-03-21

    申请号:US10646356

    申请日:2003-08-22

    IPC分类号: G03F1/14 G03B27/62

    CPC分类号: G03F1/64 C03B19/12 Y02P40/57

    摘要: A photomask assembly is described having a frame for supporting a transparent pellicle above a photomask substrate, defining a closed pellicle space overlaying the substrate. The frame is formed of a porous material configured to allow the pellicle space to be purged with an inert gas within a reasonable processing time period, thereby removing any harmful chemicals that might be present. The frame preferably is made by a method that includes preparing a gel by a sol-gel process, drying the gel, and partially densifying the dry gel. The resulting frame has a gas permeability to oxygen or nitrogen higher than about 10 ml.mm/cm2.min.MPa, an average pore size between 0.001 micrometer and 10 micrometers, and a coefficient of thermal expansion between 0.01 ppm/° C. and 10 ppm/° C.

    摘要翻译: 描述了一种光掩模组件,其具有用于在光掩模基板上方支撑透明防护薄膜的框架,限定覆盖基板的封闭的薄膜空间。 框架由多孔材料形成,其被配置为允许防护薄膜空间在合理的处理时间段内用惰性气体吹扫,从而去除可能存在的任何有害化学物质。 框架优选通过包括通过溶胶 - 凝胶法制备凝胶,干燥凝胶并部分致密化干凝胶的方法制备。 所得到的框架对氧气或氮气的气体渗透性高于约10毫升/厘米3·秒/秒/秒·秒·分钟·MPa,平均孔径在0.001微米至10微米之间,并且热膨胀系数 在0.01ppm /℃和10ppm /℃之间。

    Method for preventing warpage of gel plates during sintering

    公开(公告)号:US06669892B2

    公开(公告)日:2003-12-30

    申请号:US10006983

    申请日:2001-12-04

    IPC分类号: C04B35624

    摘要: A new method is disclosed for producing thin plates by sintering a thin gel plate (e.g., silica) made using a sol-gel process, which substantially eliminates warpage of the plate during the sintering step. Sintering a sol-gel based silica plate to a dense glass typically causes significant shrinkage, and this can cause the plate to curl, especially around its edges. This phenomenon is referred to as warpage. In the method of the invention, the sintering step is performed while the gel plate is mounted on a support surface, separated by a thin layer of refractory powder. At the high sintering temperature, the powder partially fuses and sticks to both the gel plate and the support surface, which prevents non-uniform stresses in the gel plate from warping the plate.