摘要:
A liquid diluting device, with a small and simple structure, is capable of reliably sealing and simply changing dilution concentration. Diluent passages are formed in a first body, and a connecting passage for introducing special liquid connects to these diluent passages. A cylindrical dial covering an opening section of the connecting passage is rotatably provided on an outer section of the first body, a plurality of jets passing through from the inside to the outside are formed in conjunction with this cylindrical dial, and the diameters of the plurality of jets are different. A liquid supply passage is set at a position opposite the connecting passage, so that the cylindrical dial is sandwiched between the liquid supply passage and the connecting passage, and the connecting passage and the liquid supply passage are connected by a jet having a diameter matching the dilution factor to introduce special liquid from the liquid supply passage to one of the diluent passages. In this way, by rotatably attaching the cylindrical dial in which the plurality of jets are formed to the first body, it is possible to have a small and simple structure, and also to easily change the dilution factor by merely turning the dial.
摘要:
A turbo vacuum pump comprising a suction part 23A that sucks gas in an axial direction; a discharge part 50 that discharges the gas sucked by the suction part 23A, the discharge part 50 having a plurality of rotating impellers 70, 80 and a stationary impeller 71 arranged so as to be opposed to each of the plurality of rotating impellers 70, 80; and a rotating shaft 21 that rotates the plurality of rotating impellers 70, 80, wherein the plurality of rotating impellers 70, 80 include at least one stage of a first turbine impeller 70 for discharging the sucked gas in the axial direction, the first turbine impeller 70 being fixed to a suction-part-side end face 15 of the rotating shaft 21, and at least one stage of a second turbine impeller 80 fixed to the rotating shaft 21 that extends through the second turbine impeller 80, the second turbine impeller 80 being arranged downstream of the first turbine impeller 70.
摘要:
A turbo vacuum pump is suitable for evacuating a corrosive process gas or evacuating a gas containing reaction products. The turbo vacuum pump includes a casing having an intake port, a pump section comprising rotor blades and stator blades housed in the casing, bearings for supporting the rotor blades, a motor for rotating the rotor blades; and a rotating shaft comprising a first rotating shaft to which the rotor blades are attached, and a second rotating shaft to which a motor rotor of the motor is attached.
摘要:
A diluent passage 12 to introduce special liquid and a rinse liquid supply passage 13 which is separate from the diluent passage 12 are formed in the main body 10, and a plurality of jets are disposed at a cylindrical dial 18. A water convey passage is formed to connect two positions at the rinse liquid supply passage 13 where pressure difference occurs therebetween to the other jets 19b, 19c except the jet 19a through which the special liquid is introduced. When water flows in the rinse liquid supply passage 13, the water is introduced to the water convey passage due to the pressure difference of the rinse liquid supply passage 13. The water rinses the other jets 19b, 19c except for the jet 19a through which the special liquid is introduced. Therefore, adjusting changes or choking of the jets 19b, 19c which have not been used for a considerable time can be prevented.
摘要:
A diluent passage 12 to introduce special liquid and a rinse liquid supply passage 13 which is separate from the diluent passage 12 are formed in the main body 10, and a plurality of jets are disposed at a cylindrical dial 18. A water convey passage is formed to connect two positions at the rinse liquid supply passage 13 where pressure difference occurs therebetween to the other jets 19b, 19c except the jet 19a through which the special liquid is introduced. When water flows in the rinse liquid supply passage 13, the water is introduced to the water convey passage due to the pressure difference of the rinse liquid supply passage 13. The water rinses the other jets 19b, 19c except for the jet 19a through which the special liquid is introduced. Therefore, adjusting changes or choking of the jets 19b, 19c which have not been used for a considerable time can be prevented.
摘要:
A control apparatus in a magnetic levitation system for controlling attraction and/or repulsion forces created from a pair of electromagnets to levitate an object therebetween at a predetermined target position in a contactless manner, in response to a displacement of the object from the target position. The control apparatus includes a start/stop detector, a phase compensation circuit, an integrator, and a switching circuit. The start/stop detector detects a start and stop of a levitation control procedure and generates a control signal having a predetermined time duration when either of the start and stop of the levitation control procedure is detected. The compensation circuit provides a compensation signal to compensate AC currents flowing through the electromagnet so that the displacement of the object from the target position becomes zero. The integrator integrates the compensation signal. The switching circuit outputs the compensation signal when the control signal is not generated from the start/stop detector, and the integrated compensation signal when the control signal is generated. Therefore, the magnetic forces from the electromagnets to the object gradually varies at the beginning and ending of the procedure and hence the object is gradually levitated and seated.
摘要:
A turbo vacuum pump of the present invention includes a suction part for sucking gas in an axial direction; a discharge section in which rotating impellers and stationary impellers are alternately arranged; a rotating shaft for rotating the rotating impellers; and a turbine impeller part fixed to the suction side end face of the rotating shaft. The rotating impellers include one or more turbine impellers for discharging the sucked gas in the axial direction, and one or more centrifugal impellers, located downstream of the one or more turbine impellers, for further discharging the discharged gas by a centrifugal drag effect. The one or more centrifugal impellers are fixed to the rotating shaft passing therethrough. The one or more turbine impellers are included in the turbine impeller part.
摘要:
A turbo vacuum pump of the present invention includes a suction part for sucking gas in an axial direction; a discharge section in which rotating impellers and stationary impellers are alternately arranged; a rotating shaft for rotating the rotating impellers; and a turbine impeller part fixed to the suction side end face of the rotating shaft. The rotating impellers include one or more turbine impellers for discharging the sucked gas in the axial direction, and one or more centrifugal impellers, located downstream of the one or more turbine impellers, for further discharging the discharged gas by a centrifugal drag effect. The one or more centrifugal impellers are fixed to the rotating shaft passing therethrough. The one or more turbine impellers are included in the turbine impeller part.
摘要:
A spray device which can spray a liquid without using a pump and does not cause dripping of a material liquid at a spray port is provided.The spray device comprises a housing 2, a material liquid tank 6 attached to or stored in the housing 2 and reserving a predetermined material liquid, a spray portion 20 having a spray port for spraying the material liquid to the outside, a liquid passage 8 having the material liquid tank 6 communicate with the spray portion 20, and liquid passing adjusting unit 10 for applying resistance to a flow of the material liquid in the liquid passage 8, and the liquid passage 8 is arranged so that the flow direction of the material liquid in the liquid passage 8 is coaxial with the spray direction of the spray portion 20.
摘要:
A liquid dilution device is provided to prevent choking at a jet for adjusting the flow amount of a special liquid. In the liquid dilution device in which the special liquid from a liquid supply passage 33 of a liquid intake device 29, is introduced to a diluent passage 12 formed in a main body 10 through a jet 22, an air intake opening 37 and a plug 38 to open and close the air intake opening 37 are provided at the liquid intake device 29 to connect the liquid supply passage 33 and atmospheric air. At the state that air from the air intake opening can be introduced to the diluent passage 12 through the jet 22 with the plug 38 opened, high velocity air passes through the jet 22 due to negative pressure generated at the diluent passage 12, by making water pass through the diluent passage 12. Due to the high velocity air, the special liquid stuck to the jet 22 is removed and the jet 22 is cleaned.