Liquid dilution device
    21.
    发明授权

    公开(公告)号:US06789571B2

    公开(公告)日:2004-09-14

    申请号:US10060681

    申请日:2002-01-30

    IPC分类号: G05D1103

    摘要: A liquid diluting device, with a small and simple structure, is capable of reliably sealing and simply changing dilution concentration. Diluent passages are formed in a first body, and a connecting passage for introducing special liquid connects to these diluent passages. A cylindrical dial covering an opening section of the connecting passage is rotatably provided on an outer section of the first body, a plurality of jets passing through from the inside to the outside are formed in conjunction with this cylindrical dial, and the diameters of the plurality of jets are different. A liquid supply passage is set at a position opposite the connecting passage, so that the cylindrical dial is sandwiched between the liquid supply passage and the connecting passage, and the connecting passage and the liquid supply passage are connected by a jet having a diameter matching the dilution factor to introduce special liquid from the liquid supply passage to one of the diluent passages. In this way, by rotatably attaching the cylindrical dial in which the plurality of jets are formed to the first body, it is possible to have a small and simple structure, and also to easily change the dilution factor by merely turning the dial.

    Turbo vacuum pump
    22.
    发明授权
    Turbo vacuum pump 有权
    涡轮真空泵

    公开(公告)号:US08172515B2

    公开(公告)日:2012-05-08

    申请号:US12365314

    申请日:2009-02-04

    摘要: A turbo vacuum pump comprising a suction part 23A that sucks gas in an axial direction; a discharge part 50 that discharges the gas sucked by the suction part 23A, the discharge part 50 having a plurality of rotating impellers 70, 80 and a stationary impeller 71 arranged so as to be opposed to each of the plurality of rotating impellers 70, 80; and a rotating shaft 21 that rotates the plurality of rotating impellers 70, 80, wherein the plurality of rotating impellers 70, 80 include at least one stage of a first turbine impeller 70 for discharging the sucked gas in the axial direction, the first turbine impeller 70 being fixed to a suction-part-side end face 15 of the rotating shaft 21, and at least one stage of a second turbine impeller 80 fixed to the rotating shaft 21 that extends through the second turbine impeller 80, the second turbine impeller 80 being arranged downstream of the first turbine impeller 70.

    摘要翻译: 涡轮真空泵,包括沿轴向吸入气体的吸入部23A; 排出部分50,其排出由抽吸部分23A吸入的气体,排出部分50具有多个旋转叶轮70,80和固定叶轮71,其被布置成与多个旋转叶轮70,80中的每一个相对 ; 以及使多个旋转叶轮70,80旋转的旋转轴21,其中,多个旋转叶轮70,80包括用于沿着轴向排出吸入气体的第一涡轮机叶轮70的至少一级,第一涡轮叶轮 70被固定到旋转轴21的吸入部侧端面15,以及固定到旋转轴21上的第二涡轮机叶轮80的至少一个台阶,其延伸穿过第二涡轮机叶轮80,第二涡轮机叶轮80 布置在第一涡轮叶轮70的下游。

    Turbo vacuum pump and semiconductor manufacturing apparatus having the same
    23.
    发明授权
    Turbo vacuum pump and semiconductor manufacturing apparatus having the same 有权
    涡轮真空泵和具有相同功能的半导体制造装置

    公开(公告)号:US07717684B2

    公开(公告)日:2010-05-18

    申请号:US10921197

    申请日:2004-08-19

    IPC分类号: F04B35/04

    摘要: A turbo vacuum pump is suitable for evacuating a corrosive process gas or evacuating a gas containing reaction products. The turbo vacuum pump includes a casing having an intake port, a pump section comprising rotor blades and stator blades housed in the casing, bearings for supporting the rotor blades, a motor for rotating the rotor blades; and a rotating shaft comprising a first rotating shaft to which the rotor blades are attached, and a second rotating shaft to which a motor rotor of the motor is attached.

    摘要翻译: 涡轮真空泵适用于抽空腐蚀性工艺气体或排空含有反应产物的气体。 涡轮真空泵包括具有进气口的壳体,包括转子叶片和容纳在壳体中的定子叶片的泵部分,用于支撑转子叶片的轴承,用于旋转转子叶片的马达; 以及旋转轴,其包括安装有转子叶片的第一旋转轴和安装有马达的马达转子的第二旋转轴。

    Liquid diluting device
    24.
    发明授权
    Liquid diluting device 失效
    液体稀释装置

    公开(公告)号:US07108014B2

    公开(公告)日:2006-09-19

    申请号:US10511764

    申请日:2003-03-17

    IPC分类号: F16K11/00

    摘要: A diluent passage 12 to introduce special liquid and a rinse liquid supply passage 13 which is separate from the diluent passage 12 are formed in the main body 10, and a plurality of jets are disposed at a cylindrical dial 18. A water convey passage is formed to connect two positions at the rinse liquid supply passage 13 where pressure difference occurs therebetween to the other jets 19b, 19c except the jet 19a through which the special liquid is introduced. When water flows in the rinse liquid supply passage 13, the water is introduced to the water convey passage due to the pressure difference of the rinse liquid supply passage 13. The water rinses the other jets 19b, 19c except for the jet 19a through which the special liquid is introduced. Therefore, adjusting changes or choking of the jets 19b, 19c which have not been used for a considerable time can be prevented.

    摘要翻译: 在主体10中形成有用于引入特殊液体的稀释剂通道12和与稀释液通道12分离的冲洗液体供给通道13,多个喷嘴设置在圆筒形表盘18上。 形成水输送通道,以将冲洗液体供应通道13的两个位置连接到其间的压力差与其它喷嘴19b,19c之间的位置,除了引入特殊液体的喷嘴19a之外。 当水在冲洗液供给通道13中流动时,由于冲洗液供给通道13的压力差,水被导入水输送通道。 除了引入特殊液体的喷嘴19a之外,水冲洗其它喷嘴19b,19c。 因此,可以防止调整未被使用了相当长的时间的喷嘴19b,19c的变化或阻塞。

    Liquid diluting device
    25.
    发明申请
    Liquid diluting device 失效
    液体稀释装置

    公开(公告)号:US20050217744A1

    公开(公告)日:2005-10-06

    申请号:US10511764

    申请日:2003-03-17

    IPC分类号: B01F3/08 B01F5/04 B01F15/00

    摘要: A diluent passage 12 to introduce special liquid and a rinse liquid supply passage 13 which is separate from the diluent passage 12 are formed in the main body 10, and a plurality of jets are disposed at a cylindrical dial 18. A water convey passage is formed to connect two positions at the rinse liquid supply passage 13 where pressure difference occurs therebetween to the other jets 19b, 19c except the jet 19a through which the special liquid is introduced. When water flows in the rinse liquid supply passage 13, the water is introduced to the water convey passage due to the pressure difference of the rinse liquid supply passage 13. The water rinses the other jets 19b, 19c except for the jet 19a through which the special liquid is introduced. Therefore, adjusting changes or choking of the jets 19b, 19c which have not been used for a considerable time can be prevented.

    摘要翻译: 在主体10中形成有用于引入特殊液体的稀释剂通道12和与稀释液通道12分离的冲洗液体供给通道13,多个喷嘴设置在圆筒形表盘18上。 形成水输送通道,以将冲洗液体供应通道13的两个位置连接到其间的压力差与其它喷嘴19b,19c之间的位置,除了引入特殊液体的喷嘴19a之外。 当水在冲洗液供给通道13中流动时,由于冲洗液供给通道13的压力差,水被导入水输送通道。 除了引入特殊液体的喷嘴19a之外,水冲洗其它喷嘴19b,19c。 因此,可以防止调整未被使用了相当长的时间的喷嘴19b,19c的变化或阻塞。

    Apparatus for controlling magnetic levitation system
    26.
    发明授权
    Apparatus for controlling magnetic levitation system 失效
    磁悬浮系统控制装置

    公开(公告)号:US06359767B1

    公开(公告)日:2002-03-19

    申请号:US09521667

    申请日:2000-03-08

    IPC分类号: H01H4700

    CPC分类号: H01F7/1872 F01L9/04 H02N15/00

    摘要: A control apparatus in a magnetic levitation system for controlling attraction and/or repulsion forces created from a pair of electromagnets to levitate an object therebetween at a predetermined target position in a contactless manner, in response to a displacement of the object from the target position. The control apparatus includes a start/stop detector, a phase compensation circuit, an integrator, and a switching circuit. The start/stop detector detects a start and stop of a levitation control procedure and generates a control signal having a predetermined time duration when either of the start and stop of the levitation control procedure is detected. The compensation circuit provides a compensation signal to compensate AC currents flowing through the electromagnet so that the displacement of the object from the target position becomes zero. The integrator integrates the compensation signal. The switching circuit outputs the compensation signal when the control signal is not generated from the start/stop detector, and the integrated compensation signal when the control signal is generated. Therefore, the magnetic forces from the electromagnets to the object gradually varies at the beginning and ending of the procedure and hence the object is gradually levitated and seated.

    摘要翻译: 一种磁悬浮系统中的控制装置,用于控制由一对电磁体产生的吸引力和/或排斥力,以响应于物体从目标位置的移位而以非接触方式在预定的目标位置悬浮其间的物体。 控制装置包括启动/停止检测器,相位补偿电路,积分器和开关电路。 启动/停止检测器检测悬浮控制程序的开始和停止,并且当检测到悬浮控制程序的开始和停止中的任一个时,产生具有预定持续时间的控制信号。 补偿电路提供补偿信号以补偿流过电磁体的AC电流,使得物体从目标位置的位移变为零。 积分器集成了补偿信号。 当控制信号不从起动/停止检测器产生时,开关电路输出补偿信号,并且当产生控制信号时输出积分补偿信号。 因此,电磁体对物体的磁力在程序的开始和结束时逐渐变化,因此物体逐渐悬浮并固定。

    Turbo vacuum pump
    27.
    发明授权
    Turbo vacuum pump 有权
    涡轮真空泵

    公开(公告)号:US07938619B2

    公开(公告)日:2011-05-10

    申请号:US12320356

    申请日:2009-01-23

    IPC分类号: F01D1/10

    摘要: A turbo vacuum pump of the present invention includes a suction part for sucking gas in an axial direction; a discharge section in which rotating impellers and stationary impellers are alternately arranged; a rotating shaft for rotating the rotating impellers; and a turbine impeller part fixed to the suction side end face of the rotating shaft. The rotating impellers include one or more turbine impellers for discharging the sucked gas in the axial direction, and one or more centrifugal impellers, located downstream of the one or more turbine impellers, for further discharging the discharged gas by a centrifugal drag effect. The one or more centrifugal impellers are fixed to the rotating shaft passing therethrough. The one or more turbine impellers are included in the turbine impeller part.

    摘要翻译: 本发明的涡轮式真空泵包括:用于沿轴向抽吸气体的吸入部; 排出部,其中旋转叶轮和固定叶轮交替布置; 用于旋转旋转叶轮的旋转轴; 以及固定在旋转轴的吸入侧端面的涡轮叶轮部。 旋转的叶轮包括用于沿轴向排出吸入气体的一个或多个涡轮叶轮,以及位于一个或多个涡轮叶轮下游的一个或多个离心式叶轮,用于通过离心牵引效应进一步排出排出的气体。 一个或多个离心式叶轮固定在通过其的旋转轴上。 一个或多个涡轮叶轮包括在涡轮叶轮部分中。

    Turbo vacuum pump
    28.
    发明申请
    Turbo vacuum pump 有权
    涡轮真空泵

    公开(公告)号:US20090142183A1

    公开(公告)日:2009-06-04

    申请号:US12320356

    申请日:2009-01-23

    IPC分类号: F04D13/12

    摘要: A turbo vacuum pump of the present invention includes a suction part for sucking gas in an axial direction; a discharge section in which rotating impellers and stationary impellers are alternately arranged; a rotating shaft for rotating the rotating impellers; and a turbine impeller part fixed to the suction side end face of the rotating shaft. The rotating impellers include one or more turbine impellers for discharging the sucked gas in the axial direction, and one or more centrifugal impellers, located downstream of the one or more turbine impellers, for further discharging the discharged gas by a centrifugal drag effect. The one or more centrifugal impellers are fixed to the rotating shaft passing therethrough. The one or more turbine impellers are included in the turbine impeller part.

    摘要翻译: 本发明的涡轮式真空泵包括:用于沿轴向抽吸气体的吸入部; 排出部,其中旋转叶轮和固定叶轮交替布置; 用于旋转旋转叶轮的旋转轴; 以及固定在旋转轴的吸入侧端面的涡轮叶轮部。 旋转的叶轮包括用于沿轴向排出吸入气体的一个或多个涡轮叶轮,以及位于一个或多个涡轮叶轮下游的一个或多个离心式叶轮,用于通过离心牵引效应进一步排出排出的气体。 一个或多个离心式叶轮固定在通过其的旋转轴上。 一个或多个涡轮叶轮包括在涡轮叶轮部分中。

    Spray Device
    29.
    发明申请
    Spray Device 审中-公开
    喷雾装置

    公开(公告)号:US20080142617A1

    公开(公告)日:2008-06-19

    申请号:US11664799

    申请日:2005-10-05

    IPC分类号: B05B1/00

    摘要: A spray device which can spray a liquid without using a pump and does not cause dripping of a material liquid at a spray port is provided.The spray device comprises a housing 2, a material liquid tank 6 attached to or stored in the housing 2 and reserving a predetermined material liquid, a spray portion 20 having a spray port for spraying the material liquid to the outside, a liquid passage 8 having the material liquid tank 6 communicate with the spray portion 20, and liquid passing adjusting unit 10 for applying resistance to a flow of the material liquid in the liquid passage 8, and the liquid passage 8 is arranged so that the flow direction of the material liquid in the liquid passage 8 is coaxial with the spray direction of the spray portion 20.

    摘要翻译: 提供一种可以喷射液体而不使用泵并且不会在喷雾口处引起液体物质液滴的喷雾装置。 喷射装置包括壳体2,附接到或存储在壳体2中并储存预定材料液体的材料液体罐6,具有用于将材料液体喷射到外部的喷射口的喷射部分20,具有 材料液罐6与喷射部20连通,并且液体通道8中的液体流动施加阻力的液体通过调节单元10和液体通道8被布置成使得材料液体的流动方向 在液体通道8中与喷射部分20的喷射方向同轴。

    Liquid dilution device
    30.
    发明授权
    Liquid dilution device 失效
    液体稀释装置

    公开(公告)号:US06929033B2

    公开(公告)日:2005-08-16

    申请号:US10293601

    申请日:2002-11-14

    摘要: A liquid dilution device is provided to prevent choking at a jet for adjusting the flow amount of a special liquid. In the liquid dilution device in which the special liquid from a liquid supply passage 33 of a liquid intake device 29, is introduced to a diluent passage 12 formed in a main body 10 through a jet 22, an air intake opening 37 and a plug 38 to open and close the air intake opening 37 are provided at the liquid intake device 29 to connect the liquid supply passage 33 and atmospheric air. At the state that air from the air intake opening can be introduced to the diluent passage 12 through the jet 22 with the plug 38 opened, high velocity air passes through the jet 22 due to negative pressure generated at the diluent passage 12, by making water pass through the diluent passage 12. Due to the high velocity air, the special liquid stuck to the jet 22 is removed and the jet 22 is cleaned.

    摘要翻译: 提供液体稀释装置以防止在喷嘴处的窒息以调节特殊液体的流量。 在来自液体进入装置29的液体供应通道33的特殊液体通过喷射器22被引入形成在主体10中的稀释剂通道12的液体稀释装置中,进气口37和塞子38 打开和关闭进气口37设置在液体进入装置29处,以连接液体供应通道33和大气。 在打开插头38的情况下,来自进气口的空气能够通过喷射器22被引入稀释剂通道12,由于在稀释剂通道12产生的负压,高速空气通过喷射器22,通过使水 通过稀释剂通道12。 由于高速空气,粘附到射流22的特殊液体被去除并且喷射22被清洁。