利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

158 条记录 (耗时 0.026 秒)

    Gas supply unit, substrate processing apparatus and supply gas setting method
    1.
    发明授权
    Gas supply unit, substrate processing apparatus and supply gas setting method 有权
    气体供应单元，基板处理装置和供气设定方法

    公开(公告)号：US09441791B2

    公开(公告)日：2016-09-13

    申请号：US13691125

    申请日：2012-11-30

    申请人： TOKYO ELECTRON LIMITED

    发明人： Kenetsu Mizusawa ,  Keiki Ito ,  Masahide Itoh

    IPC分类号： F17D1/04 ,  G05D11/13 ,  C23C16/455 ,  C23C16/52 ,  H01L21/67 ,  H01J37/32

    CPC分类号： F17D1/04 ,  C23C16/45512 ,  C23C16/45561 ,  C23C16/52 ,  G05D11/132 ,  H01J37/3244 ,  H01J37/32449 ,  H01L21/67069 ,  H01L21/67253 ,  Y10T137/0329 ,  Y10T137/0335 ,  Y10T137/0352 ,  Y10T137/2496 ,  Y10T137/87346

    摘要： A gas supply unit, for supplying a gas into a processing chamber in which a substrate is processed, includes a plurality of gas supply sources, a mixing line for mixing a plurality of gases supplied from the gas supply sources to make a gaseous mixture, a multiplicity of branch lines for branching the gaseous mixture to be supplied to a multiplicity of places in the processing chamber, and an additional gas supply unit for supplying a specified additional gas to a gaseous mixture flowing in at least one branch line. The gas supply unit also includes pressure gauges and valves for adjusting gas flow rates in the branch lines, respectively, and a pressure ratio controller for controlling that gaseous mixtures branched into the branch lines to have a specified pressure ratio by adjusting opening degrees of the valves based on measurement results obtained by using the pressure gauges.

    摘要翻译： 用于将气体供给到其中处理基板的处理室中的气体供给单元包括多个气体供给源，用于混合从气体供给源供给的多个气体以形成气体混合物的混合管线， 用于将要供应到处理室中的多个位置的气体混合物进行分支的分支管线的多个，以及用于向在至少一条分支管线中流动的气体混合物供应特定附加气体的附加气体供应单元。 气体供应单元还包括用于分别调节分支管线中的气体流量的压力计和阀，以及压力比控制器，用于通过调节阀的开度来控制分支成分支管路的气体混合物以具有规定的压力比 基于通过使用压力计获得的测量结果。

    AUTOMATIC CONTROL ELEMENT WITH UNIFORMLY-DISTRIBUTED STEPPING FREQUENCY
    2.
    发明申请
    AUTOMATIC CONTROL ELEMENT WITH UNIFORMLY-DISTRIBUTED STEPPING FREQUENCY 有权
    具有均匀分布式步进频率的自动控制元件

    公开(公告)号：US20160038956A1

    公开(公告)日：2016-02-11

    申请号：US14419158

    申请日：2013-11-18

    申请人： JIANGSU UNIVERSITY

    发明人： Xingye ZHU ,  Junping LIU ,  Shouqi YUAN ,  Hong LI ,  Jianyuan JIANG ,  Xingfa LIU

    IPC分类号： B05B7/04 ,  A01G25/00

    CPC分类号： B05B7/0425 ,  A01G25/00 ,  B01F5/0498 ,  B01F5/064 ,  B05B3/06 ,  Y10T137/2562 ,  Y10T137/87265 ,  Y10T137/87346

    摘要： The present invention discloses an automatic control element with uniformly-distributed stepping frequency, comprising a sprinkler and a fluidic element connected to the sprinkler, an outlet cover plate being secured onto an outlet of the fluidic element. A water inlet and a first air supply pore are formed symmetrically on the fluidic element, and a second air supply pore is formed on the water inlet. A water distributor is formed on the sprinkler, a water tank is provided on the outer side of the sprinkler, and the water distributor is in communication with an inner cavity of the water tank. A signal nozzle is provided on the wall of the water tank, and the signal nozzle is connected to the water inlet via a conduit.

    摘要翻译： 本发明公开了一种具有均匀分布的步进频率的自动控制元件，包括喷洒器和连接到喷洒器的流体元件，出口盖板固定在流体元件的出口上。 在流体元件上对称地形成进水口和第一供气孔，并且在进水口上形成第二供气孔。 在喷洒器上形成水分配器，在喷洒器的外侧设置有水箱，水分配器与水箱的内腔连通。 信号喷嘴设置在水箱的壁上，信号喷嘴通过导管连接到进水口。

    Device for cycling blast or suction air in a sheet processing machine
    3.
    发明授权
    Device for cycling blast or suction air in a sheet processing machine 失效
    用于在片材加工机中循环爆炸或吸入空气的装置

    公开(公告)号：US07584957B2

    公开(公告)日：2009-09-08

    申请号：US11344806

    申请日：2006-02-01

    申请人： Holger Edinger

    发明人： Holger Edinger

    IPC分类号： B65H29/32

    CPC分类号： B65H7/16 ,  B65H3/08 ,  B65H3/48 ,  B65H5/22 ,  B65H2406/00 ,  B65H2406/412 ,  B65H2406/42 ,  B65H2801/21 ,  Y10T137/87346

    摘要： A device for controlling blast and/or suction air in a sheet processing machine, especially a printing press, includes a rotary valve for making ready different positive and negative pressure levels during a work cycle. The rotary valve is connected as a bypass parallel to a supply line between a consumer or load and a positive and negative pressure source. The rotary valve is connected at an input side thereof with the ambient air.

    摘要翻译： 用于在片材加工机械，特别是印刷机中控制鼓风和/或吸入空气的装置包括一个旋转阀，用于在工作循环期间使准备不同的正压和负压水平。 旋转阀作为旁路连接到消费者或负载与正负压源之间的供应管线。 旋转阀在其输入侧与环境空气连接。

    Chemical dispenser
    5.
    发明授权
    Chemical dispenser 有权
    化学分配器

    公开(公告)号：US07487795B2

    公开(公告)日：2009-02-10

    申请号：US11133044

    申请日：2005-05-19

    申请人： William F. Sand

    发明人： William F. Sand

    IPC分类号： G05D11/03

    CPC分类号： B01F3/0861 ,  B01F5/0421 ,  B01F5/043 ,  B01F2003/0896 ,  Y10T137/87346 ,  Y10T137/87595 ,  Y10T137/87603

    摘要： An improved chemical dispenser includes a plurality of eductors for drawing chemical into a diluent to produce an effluent, each eductor of the plurality selectively discharging via a baffle tube into a single common discharge tube. The effluent flow parameters are insufficient to cause effluent from a selected eductor to flow into a chemical source coupled to a non-selected eductor, and are insufficient to draw chemical from a non-selected eductor into the effluent from a selected eductor.

    摘要翻译： 改进的化学分配器包括用于将化学品吸入稀释剂以产生流出物的多个喷射器，每个喷射器通过挡板管选择性地排放到单个公共放电管中。 流出物流量参数不足以导致来自选定喷射器的流出物流入与未选择的喷射器相连的化学源，并且不足以将化学品从未选择的喷射器吸入来自所选喷射器的流出物中。

    Variable Resistance Fluid Controller
    6.
    发明申请
    Variable Resistance Fluid Controller 有权
    可变电阻流体控制器

    公开(公告)号：US20080283134A1

    公开(公告)日：2008-11-20

    申请号：US11814423

    申请日：2006-07-18

    申请人： Geoff C. Gerhardt ,  Christopher C. Charlton

    发明人： Geoff C. Gerhardt ,  Christopher C. Charlton

    IPC分类号： F04B49/00

    CPC分类号： G01N30/34 ,  Y10T137/7737 ,  Y10T137/8597 ,  Y10T137/85986 ,  Y10T137/87346 ,  Y10T137/87539 ,  G01N30/6095

    摘要： A fluid controller apparatus controls fluid flow, such as a solvent gradient flow, in a chromatography system. An apparatus includes a fluid-gradient controller having a fluid reservoir for containing a pump fluid and a pumping device connected to the fluid reservoir for receiving the pump fluid. The pumping device is in fluid communication with parallel-configured first and second solvent lines. The first and second solvent lines each contain a restrictor element and a solvent reservoir. During operation, the pumping device causes the pump fluid to flow through the first and second solvent lines in relation to their respective restriction devices. The pump fluid displaces solvent within the solvent reservoirs. The displaced solvent is mixed to form a solvent gradient.

    摘要翻译： 流体控制器装置在色谱系统中控制流体流，例如溶剂梯度流。 一种装置包括具有用于容纳泵流体的流体储存器和连接到用于接收泵流体的流体储存器的泵送装置的流体梯度控制器。 泵送装置与平行配置的第一和第二溶剂管线流体连通。 第一和第二溶剂管线各自包含限流元件和溶剂储存器。 在操作期间，泵送装置使泵流体相对于它们各自的限制装置流过第一和第二溶剂管线。 泵流体置换溶剂容器内的溶剂。 将置换的溶剂混合以形成溶剂梯度。

    Chemical dispenser
    7.
    发明申请
    Chemical dispenser 有权

    公开(公告)号：US20060260704A1

    公开(公告)日：2006-11-23

    申请号：US11133044

    申请日：2005-05-19

    申请人： William Sand

    发明人： William Sand

    IPC分类号： F04F5/10

    CPC分类号： B01F3/0861 ,  B01F5/0421 ,  B01F5/043 ,  B01F2003/0896 ,  Y10T137/87346 ,  Y10T137/87595 ,  Y10T137/87603

    摘要： An improved chemical dispenser includes a plurality of eductors for drawing chemical into a diluent to produce an effluent, each eductor of the plurality selectively discharging via a baffle tube into a single common discharge tube. The effluent flow parameters are insufficient to cause effluent from a selected eductor to flow into a chemical source coupled to a non-selected eductor, and are insufficient to draw chemical from a non-selected eductor into the effluent from a selected eductor.

    Liquid treatment injector
    8.
    发明授权
    Liquid treatment injector 失效
    液体处理注射器

    公开(公告)号：US07125003B1

    公开(公告)日：2006-10-24

    申请号：US10785231

    申请日：2004-02-25

    申请人： Kemp E Falkner

    发明人： Kemp E Falkner

    IPC分类号： B01F3/04

    CPC分类号： B01F5/0413 ,  Y10S261/75 ,  Y10T137/87346

    摘要： A reagent injector and/or aerator for aqueous fluids can use a variety of different removable end caps to adapt a venturi to different types of water treatment systems. The invention is adjustable because the end caps can be removed and springs that activate poppet valves can be changed to accommodate changes in the pressure or flow requirements of the system in which it is used. In addition to, or instead of, atmospheric air, reagent chemical solutions or gasses can be entrained into a flowing water stream by the venturi.

    摘要翻译： 用于含水流体的试剂注射器和/或曝气器可以使用各种不同的可移除端盖来使文丘里管适应不同类型的水处理系统。 本发明是可调节的，因为可以去除端盖，并且可以改变激活提升阀的弹簧以适应其使用的系统的压力或流量要求的变化。 除了或代替大气之外，试剂化学溶液或气体可以被文丘里管夹带在流动的水流中。

    Valve
    10.
    发明申请
    Valve 失效
    阀

    公开(公告)号：US20040216785A1

    公开(公告)日：2004-11-04

    申请号：US10474733

    申请日：2003-10-14

    发明人： Michael Joseph Bowe ,  John William Stairmand

    IPC分类号： F17D001/00

    CPC分类号： F16K1/443 ,  Y10T137/2115 ,  Y10T137/87346

    摘要： A valve assembly (10) comprises a vortex chamber (14) with an axial outlet port (20), a main inlet port (16) for a fluid to be controlled, and a substantially tangential inlet port (25); the fluid enters through an inlet chamber (13) in which is a mechanical valve (26) movable so as to obstruct fluid flow into the vortex chamber (14). A duct (24) links the inlet chamber (13) to the tangential inlet port (25) of the vortex chamber. The position of the mechanical valve (26) affects the flow of fluid through the duct (24), so the vortex chamber (14) amplifies the effect of the mechanical valve. Further movement of the valve (26) closes off flow altogether (40). The assembly may include a weir (36) in the outlet, to separate gas and liquid phases.

    摘要翻译： 阀组件（10）包括具有轴向出口（20），用于待控制流体的主入口（16）和基本切向的入口（25）的涡流室（14）。 流体通过入口室（13）进入，其中机械阀（26）可移动以阻止流体流入涡流室（14）。 管道（24）将入口室（13）连接到涡流室的切向入口（25）。 机械阀（26）的位置影响通过管道（24）的流体的流动，因此涡流室（14）放大机械阀的作用。 阀（26）的进一步运动完全关闭流（40）。 组件可以包括出口中的堰（36），以分离气相和液相。