公开(公告)号：US06416169B1

公开(公告)日：2002-07-09

申请号：US09718420

申请日：2000-11-24

申请人： Arthur M. Gooray ,  George J. Roller ,  Joseph M. Crowley ,  Paul C. Galambos ,  Frank J. Peter ,  Kevin R. Zavadil ,  Richard C. Givler

发明人： Arthur M. Gooray ,  George J. Roller ,  Joseph M. Crowley ,  Paul C. Galambos ,  Frank J. Peter ,  Kevin R. Zavadil ,  Richard C. Givler

IPC分类号： B41J204

CPC分类号： B41J2/14 ,  B41J2002/043

摘要： A piston structure is movably mounted within a fluid chamber. Movement of the piston structure towards a faceplate causes a portion of the fluid between the piston and the faceplate to be forced out of the nozzle hole in the faceplate, forming a drop or jet of the fluid. Viscous forces that are generated by the flow of fluid along a working surface of the piston structure toward and away from the nozzle hole generate a force that resists the movement of the piston structure. This resistance force tends to slow the piston motion, and prevents the piston from contacting the faceplate. In various embodiments, the fluid chamber is defined by a cylinder structure. The piston structure moves within the cylinder structure. The cylinder structure and the faceplate define the fluid chamber. The cylinder structure and the piston structure are designed to cooperate so that the movement of the piston structure within the cylinder structure ejects fluid according to various design criteria. In various embodiments, a free space is provided between the faceplate and the piston structure at its maximum displacement towards the faceplate.

摘要翻译： 活塞结构可移动地安装在流体室内。 活塞结构朝向面板的运动导致活塞和面板之间的流体的一部分被迫离开面板中的喷嘴孔，形成液体的液滴或射流。 由流体沿着活塞结构的工作表面朝向和远离喷嘴孔流动产生的粘性力产生抵抗活塞结构的运动的力。 该阻力往往会减慢活塞运动，并防止活塞接触面板。 在各种实施例中，流体室由气缸结构限定。 活塞结构在气缸结构内移动。 气缸结构和面板限定流体室。 气缸结构和活塞结构被设计成配合，使得活塞结构在气缸结构内的运动根据各种设计标准喷射流体。 在各种实施例中，在朝向面板的最大位移处，在面板和活塞结构之间提供自由空间。

公开(公告)号：US06350015B1

公开(公告)日：2002-02-26

申请号：US09718495

申请日：2000-11-24

申请人： Arthur M. Gooray ,  George J. Roller ,  Joseph M. Crowley, Jr. ,  Paul C. Galambos ,  Frank J. Peter ,  Kevin R. Zavadil ,  Richard C. Givler ,  D. Russell Humphreys ,  Jeffry J. Sniegowski

发明人： Arthur M. Gooray ,  George J. Roller ,  Joseph M. Crowley, Jr. ,  Paul C. Galambos ,  Frank J. Peter ,  Kevin R. Zavadil ,  Richard C. Givler ,  D. Russell Humphreys ,  Jeffry J. Sniegowski

IPC分类号： B41J204

CPC分类号： B41J2/14 ,  B41J2002/041

摘要： The systems and methods of the present invention operate by magnetically driving a fluid ejector. In various exemplary embodiments, a primary coil and a secondary coil are situated in the ejector. The ejector has a movable piston usable to eject fluid through a nozzle hole. The piston may be resiliently mounted and biased to an at-rest position. A drive signal is applied to cause current to flow in the primary coil. The current flow generates a magnetic field that induces a current in the secondary coil. Either the primary coil or the secondary coil or associated with the piston and the other is associated with a fixed structure of the ejector. As a result, a magnetic force is generated that pushes the piston either toward a faceplate so that a drop of fluid is ejected through the nozzle hole in the faceplate or away from the faceplate so that fluid fills in a fluid chamber between the piston and the faceplate. When the drive signal is turned off, the piston resiliently returns to its at-rest position, thereby either refilling the ejected fluid or ejecting a drop of fluid through the nozzle hole in the faceplate. In various other embodiments, the faceplate is made of a magnetic material, such as a ferrous material, or is coated with or connected to a magnetic material. A second primary coil or a permanent magnet may be included in various other embodiments. In various embodiments, switching the direction of the current changes the magnetic force between attraction and repulsion.

摘要翻译： 本发明的系统和方法通过磁驱动流体喷射器来操作。 在各种示例性实施例中，初级线圈和次级线圈位于喷射器中。 喷射器具有用于将流体喷射通过喷嘴孔的活动活塞。 活塞可以弹性安装并偏置到静止位置。 施加驱动信号以使电流在初级线圈中流动。 电流产生在次级线圈中产生电流的磁场。 初级线圈或次级线圈或与活塞相关联的线圈或者与线圈相关联的另一个线圈与喷射器的固定结构相关联。 结果，产生磁力将活塞推向面板，使得一滴液体通过面板中的喷嘴孔或离开面板喷射，使得流体填充在活塞和活塞之间的流体室中 面板。 当驱动信号关闭时，活塞弹性地返回到其静止位置，从而重新填充喷射的流体或者通过面板中的喷嘴孔喷射一滴液体。 在各种其他实施例中，面板由诸如铁类材料的磁性材料制成，或者被涂覆或连接到磁性材料。 在各种其他实施例中可以包括第二初级线圈或永磁体。 在各种实施例中，切换电流的方向改变吸引力和排斥之间的磁力。

公开(公告)号：US5974867A

公开(公告)日：1999-11-02

申请号：US961345

申请日：1997-10-30

申请人： Fred K. Forster ,  Paul C. Galambos ,  Bernhard H. Weigl ,  Mark R. Holl

发明人： Fred K. Forster ,  Paul C. Galambos ,  Bernhard H. Weigl ,  Mark R. Holl

IPC分类号： B01F13/00 ,  B01J19/00 ,  G01N11/04 ,  G01N13/00 ,  G01N35/08 ,  G01N21/78

CPC分类号： B01F13/0059 ,  B01F13/0093 ,  B01J19/0093 ,  G01N11/04 ,  G01N13/00 ,  B01F2005/0031 ,  G01N35/085 ,  Y10S366/01

摘要： Methods and apparatuses including programmed computers are provided for determining the initial concentration of diffusible particles in a sample stream introduced into a system wherein the sample stream which contains the diffusible particles flows in adjacent laminar flow with an indicator stream containing an indicator substance capable of exhibiting an observable change at a known concentration of the diffusible particles.

摘要翻译： 提供包括编程计算机的方法和装置用于确定引入系统的样品流中的可扩散颗粒的初始浓度，其中包含可扩散颗粒的样品流在相邻层流中流动，其中含有指示物质的指示物流能够显示出 在可扩散颗粒的已知浓度下可观察到的变化。

公开(公告)号：US08293089B1

公开(公告)日：2012-10-23

申请号：US12610409

申请日：2009-11-02

申请人： Conrad D. James ,  Paul C. Galambos ,  Mark S. Derzon ,  Darin C. Graf ,  Kenneth R. Pohl ,  Chris J. Bourdon

发明人： Conrad D. James ,  Paul C. Galambos ,  Mark S. Derzon ,  Darin C. Graf ,  Kenneth R. Pohl ,  Chris J. Bourdon

IPC分类号： B01D57/02 ,  B03C5/02

CPC分类号： B03C1/288 ,  B03C1/30 ,  B03C5/005 ,  B03C5/026 ,  B03C2201/18

摘要： Systems and methods for combining dielectrophoresis, magnetic forces, and hydrodynamic forces to manipulate particles in channels formed on top of an electrode substrate are discussed. A magnet placed in contact under the electrode substrate while particles are flowing within the channel above the electrode substrate allows these three forces to be balanced when the system is in operation. An optical detection scheme using near-confocal microscopy for simultaneously detecting two wavelengths of light emitted from the flowing particles is also discussed.

摘要翻译： 讨论了组合介电电泳，磁力和流体动力以操纵形成在电极基底顶部的通道中的颗粒的系统和方法。 当在电极基板上方的通道中流动粒子时，在电极基板下面接触的磁体允许这三个力在系统运行时平衡。 还讨论了使用近共聚焦显微镜同时检测从流动颗粒发射的两个波长的光的光学检测方案。

公开(公告)号：US06472332B1

公开(公告)日：2002-10-29

申请号：US09723243

申请日：2000-11-28

申请人： Arthur M. Gooray ,  George J. Roller ,  Joseph M. Crowley ,  Paul C. Galambos ,  Frank J. Peter ,  Kevin R. Zavadil ,  Richard C. Givler ,  Randy J. Shul ,  Christi Willison Gober

发明人： Arthur M. Gooray ,  George J. Roller ,  Joseph M. Crowley ,  Paul C. Galambos ,  Frank J. Peter ,  Kevin R. Zavadil ,  Richard C. Givler ,  Randy J. Shul ,  Christi Willison Gober

IPC分类号： H01L21302

CPC分类号： H01L21/3088 ,  B41J2/16 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1639 ,  B81B2201/038 ,  H01L21/30655

摘要： Structures for use in conjunction with surface micromachined structures are formed using a two-step etching process. In various exemplary embodiments, the two-step etching process comprises a modified Bosch etch. According to various exemplary embodiments of the two-step etch, first mask and second masks are used to prepare a layer for etching one or more desired structures. The first mask is used to define at least one large feature. The second mask is used to define at least one small feature (small as compared to the at least one large feature). The second mask is formed over the first mask which is formed over the layer. In the first etching step, the at least one small feature is etched into the layer. Then, the second mask is removed using the chemical rinsing agent. In the second etching step, the at least one large feature is etched into the layer such that the at least one small feature propagates further into the layer ahead of the at least one large feature. The first mask is then removed. Other surface micromachined methods and structures are provided as well.

摘要翻译： 与表面微加工结构结合使用的结构使用两步蚀刻工艺形成。 在各种示例性实施例中，两步蚀刻工艺包括经修改的博世蚀刻。 根据两步蚀刻的各种示例性实施例，使用第一掩模和第二掩模来制备蚀刻一个或多个所需结构的层。 第一个掩模用于定义至少一个大的特征。 第二个掩模用于定义至少一个小特征（与至少一个大特征相比较小）。 第二掩模形成在形成在该层上的第一掩模上。 在第一蚀刻步骤中，至少一个小特征被蚀刻到该层中。 然后，使用化学漂洗剂除去第二面罩。 在第二蚀刻步骤中，至少一个大特征被蚀刻到层中，使得至少一个小特征进一步传播到至少一个大特征之前的层中。 然后删除第一个面具。 还提供了其他表面微加工方法和结构。

公开(公告)号：US06419335B1

公开(公告)日：2002-07-16

申请号：US09718480

申请日：2000-11-24

申请人： Arthur M. Gooray ,  George J. Roller ,  Joseph M. Crowley ,  Paul C. Galambos ,  Frank J. Peter ,  Kevin R. Zavadil ,  Richard C. Givler ,  William M. Lindenfelser

发明人： Arthur M. Gooray ,  George J. Roller ,  Joseph M. Crowley ,  Paul C. Galambos ,  Frank J. Peter ,  Kevin R. Zavadil ,  Richard C. Givler ,  William M. Lindenfelser

IPC分类号： B41J2938

CPC分类号： B41J2/14 ,  B41J2002/043

摘要： An electronic drive system applies a drive signal to an electrostatically actuated device such that a resulting electric field has a constant force. In various exemplary embodiments, the electronic drive system applies a drive signal to an electrostatically actuated fluid ejector that has a piston and a faceplate including a nozzle hole. A dielectric fluid to be ejected is supplied between the piston and the faceplate. The drive signal is applied to one of the piston and the faceplate. The drive signal generates an electric field across the fluid between the piston and the faceplate. The electric field causes the piston to be electrostatically attracted towards the faceplate so that a jet or drop of fluid is ejected through the nozzle hole of the faceplate. According to exemplary embodiments, the drive signal is from a constant current source or is reduced over the course of its lifetime. Further, according to various exemplary embodiments, the drive signal is of a suitable high frequency to reduce the potential of electrochemical reactions or electrical breakdown, or both. The drive signal may also be a bi-polar drive signal to reduce the possibility of electrochemical reactions.

摘要翻译： 电子驱动系统将驱动信号施加到静电致动装置，使得所产生的电场具有恒定的力。 在各种示例性实施例中，电子驱动系统将驱动信号施加到具有活塞和包括喷嘴孔的面板的静电驱动流体喷射器。 待喷射的介质流体供应在活塞和面板之间。 驱动信号被施加到活塞和面板中的一个。 驱动信号通过活塞和面板之间的流体产生电场。 电场导致活塞被静电吸引到面板上，使得喷射或液滴流过面板的喷嘴孔。 根据示例性实施例，驱动信号来自恒定电流源，或者在其寿命期间减小。 此外，根据各种示例性实施例，驱动信号具有合适的高频率，以减少电化学反应或电击穿的可能性，或者两者。 驱动信号也可以是双极驱动信号，以减少电化学反应的可能性。

公开(公告)号：US06409311B1

公开(公告)日：2002-06-25

申请号：US09718476

申请日：2000-11-24

申请人： Arthur M. Gooray ,  George J. Roller ,  Joseph M. Crowley ,  Paul C. Galambos ,  Frank J. Peter ,  Kevin R. Zavadil ,  Richard C. Givler

发明人： Arthur M. Gooray ,  George J. Roller ,  Joseph M. Crowley ,  Paul C. Galambos ,  Frank J. Peter ,  Kevin R. Zavadil ,  Richard C. Givler

IPC分类号： B41J204

CPC分类号： B41J2/14314

摘要： A bi-directional fluid ejector according to the systems and methods of this invention operates on the principle of electrostatic attraction. In various exemplary embodiments, the fluid ejector includes a sealed dual diaphragm arrangement, an electrode arrangement that is parallel and opposite to the sealed diaphragms, and a structure which contains the fluid to be ejected. A diaphragm chamber containing a relatively incompressible fluid is situated behind, and is sealed by, the diaphragms. At least one nozzle hole is formed in a faceplate of the ejector over one of the diaphragms. A drive signal is applied to at least one electrode of the electrode arrangement to generate an electrostatic field between the electrode and a first one of the diaphragms. The first diaphragm is attracted towards the electrode by an electrostatic force into a deformed shape due to the electrostatic field. Upon deforming, pressure is transmitted to a second one of the sealed diaphragms. The transmitted pressure and the relatively incompressible nature of the fluid contained within the sealed diaphragm chamber causes the second diaphragm to deflect in the opposite direction to force fluid through at least one of the at least one nozzle hole. After a drop is ejected, the movement is reversed, either through normal resilient restoration actions of the deformed diaphragm and/or through an applied force.

摘要翻译： 根据本发明的系统和方法的双向流体喷射器基于静电吸引的原理进行操作。 在各种示例性实施例中，流体喷射器包括密封的双隔膜装置，与密封隔膜平行和相对的电极装置，以及包含要喷射的流体的结构。 包含相对不可压缩流体的隔膜室位于隔膜的后面并被隔膜密封。 在喷射器的面板中的一个隔膜上形成至少一个喷嘴孔。 将驱动信号施加到电极装置的至少一个电极，以在电极和第一隔膜之间产生静电场。 第一隔膜由于静电场而被静电力吸引到变形的形状中。 在变形时，压力被传递到密封隔膜中的第二个。 包含在密封隔膜室内的流体的透过压力和相对不可压缩的性质导致第二隔膜在相反方向上偏转以迫使流体通过至少一个喷嘴孔中的至少一个。 在液滴被弹出之后，运动通过变形膜片的正常弹性恢复动作和/或通过施加的力来反转。