PROCESS FOR ASSEMBLING TWO WAFERS AND CORRESPONDING DEVICE
    22.
    发明申请
    PROCESS FOR ASSEMBLING TWO WAFERS AND CORRESPONDING DEVICE 有权
    组装两个波形和对应装置的方法

    公开(公告)号:US20120161292A1

    公开(公告)日:2012-06-28

    申请号:US13330146

    申请日:2011-12-19

    CPC classification number: H01L29/0657 H01L21/76251 H01L29/16

    Abstract: A process for assembling a first wafer and a second wafer each bevelled on their peripheries includes excavating the bevelled peripheral part of at least one first side of the first wafer to create a deposit bordering the region excavated in the material of the first wafer. The first side and a second side of the second wafer are then bonded together.

    Abstract translation: 一种组装第一晶片和第二晶片的方法,每个在它们的周边上都是倾斜的,包括挖掘第一晶片的至少一个第一侧的斜切周边部分,以形成与在第一晶片的材料中挖出的区域接壤的沉积物。 然后将第二晶片的第一面和第二面接合在一起。

    METHOD FOR FORMING INTEGRATED CIRCUITS ON A STRAINED SEMICONDUCTOR SUBSTRATE
    23.
    发明申请
    METHOD FOR FORMING INTEGRATED CIRCUITS ON A STRAINED SEMICONDUCTOR SUBSTRATE 有权
    在应变半导体衬底上形成集成电路的方法

    公开(公告)号:US20120094470A1

    公开(公告)日:2012-04-19

    申请号:US13240769

    申请日:2011-09-22

    Abstract: A method for forming an electronic circuit on a strained semiconductor substrate, including the steps of: forming, on a first surface of a semiconductor substrate, electronic components defining electronic chips to be sawn; and forming at least portions of a layer of a porous semiconductor material on the side of a second surface of the semiconductor substrate, opposite to the first surface, to bend the semiconductor substrate.

    Abstract translation: 一种在应变半导体衬底上形成电子电路的方法,包括以下步骤:在半导体衬底的第一表面上形成限定要锯切的电子芯片的电子部件; 以及在所述半导体衬底的与所述第一表面相对的一侧的所述一侧上形成多孔半导体材料层的至少一部分以弯曲所述半导体衬底。

    METHOD FOR MAKING A SEMI-CONDUCTING SUBSTRATE LOCATED ON AN INSULATION LAYER
    24.
    发明申请
    METHOD FOR MAKING A SEMI-CONDUCTING SUBSTRATE LOCATED ON AN INSULATION LAYER 有权
    制造位于绝缘层上的半导体衬底的方法

    公开(公告)号:US20100289123A1

    公开(公告)日:2010-11-18

    申请号:US12679271

    申请日:2008-09-26

    Inventor: Aomar Halimaoui

    Abstract: A method for making a silicon layer extending on an insulation layer, including the steps of forming a silicon-germanium layer on at least a portion of a silicon wafer; transforming portions of the silicon-germanium layer into porous silicon pads; growing a monocrystalline silicon layer on the silicon-germanium layer and on the porous silicon pads; removing the silicon-germanium layer; oxidizing the porous silicon pads; and depositing an insulation material on the silicon layer.

    Abstract translation: 一种用于制造在绝缘层上延伸的硅层的方法,包括以下步骤:在硅晶片的至少一部分上形成硅 - 锗层; 将硅 - 锗层的部分转变成多孔硅垫; 在硅 - 锗层和多孔硅垫上生长单晶硅层; 去除硅 - 锗层; 氧化多孔硅垫; 以及在所述硅层上沉积绝缘材料。

    Method of forming porous silicon in a silicon substrate, in particular for improving the performance of an inductive circuit
    28.
    发明授权
    Method of forming porous silicon in a silicon substrate, in particular for improving the performance of an inductive circuit 有权
    在硅衬底中形成多孔硅的方法,特别是用于改善电感电路的性能

    公开(公告)号:US06287936B1

    公开(公告)日:2001-09-11

    申请号:US09304887

    申请日:1999-05-04

    CPC classification number: H01L28/10 H01L21/3063 H01L27/0688 H01L27/08

    Abstract: The method is for forming porous silicon in a silicon substrate, in particular for improving the quality factor of an inductive circuit produced on a silicon semiconductor wafer which also incorporates integrated transistors. The rear face of the wafer, already incorporating the transistors and the inductive circuit on its front face, is placed in contact with an acid electrolyte containing hydrofluoric acid and at least one other acid. An anodic oxidation of the silicon of the wafer at the rear face is carried out so as to convert this silicon into porous silicon over a predetermined height from the rear face which is in contact with the electrolyte.

    Abstract translation: 该方法用于在硅衬底中形成多孔硅,特别是用于改善在还包含集成晶体管的硅半导体晶片上产生的感应电路的品质因数。 已经将晶体管和感应电路结合在其前表面上的晶片的后表面与含有氢氟酸和至少一种其它酸的酸性电解液接触。 在背面进行晶片的硅的阳极氧化,以便将其从与电解质接触的背面预定的高度转化为多孔硅。

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