公开(公告)号：US20190165756A1

公开(公告)日：2019-05-30

申请号：US16202503

申请日：2018-11-28

Applicant: SEIKO EPSON CORPORATION

Inventor： Shiro MURAKAMI ,  Atsushi MATSUO ,  Shinya AOKI ,  Masashi SHIMURA ,  Ryuta NISHIZAWA

IPC: H03H9/02 ,  H03H9/05 ,  H03H9/10 ,  H03H9/13 ,  H03H9/19 ,  G06F1/16

Abstract: A vibrator device includes a base, a relay substrate that is supported by the base, and a vibrator element that is supported by the relay substrate. In addition, the vibrator element includes a vibration substrate formed of a piezoelectric single-crystalline body and an excitation electrode disposed on the vibration substrate. In addition, the relay substrate includes a substrate formed of the piezoelectric single-crystalline body. A crystal axis of the substrate and a crystal axis of the vibration substrate are shifted from each other.

公开(公告)号：US20190006575A1

公开(公告)日：2019-01-03

申请号：US16023057

申请日：2018-06-29

Applicant: Seiko Epson Corporation

Inventor： Keiichi YAMAGUCHI ,  Seiichiro OGURA ,  Masahiro OSHIO ,  Ryuta NISHIZAWA

IPC: H01L41/09 ,  H01L41/053 ,  H01L41/047 ,  H01L41/22

Abstract: A frequency adjustment method of a vibrator element includes preparing a vibrator element that has a vibrating arm, a first weight placed on one principal surface of the vibrating arm, and a second weight placed on the other principal surface of the vibrating arm, in which the first weight has a non-overlapping region which does not overlap the second weight in a plan view in a normal direction of the principal surface, preparing a substrate including a wiring portion, and fixing the vibrator element to the substrate by causing the other principal surface side of the vibrator element to face the substrate side, and irradiating the non-overlapping region of the first weight with an energy ray from one principal surface side, removing a portion of the non-overlapping region of the first weight, and adjusting a resonance frequency of the vibrating arm.

公开(公告)号：US20180274922A1

公开(公告)日：2018-09-27

申请号：US15928472

申请日：2018-03-22

Applicant: Seiko Epson Corporation

Inventor： Ryuta NISHIZAWA ,  Shiro MURAKAMI ,  Keiichi YAMAGUCHI ,  Keiji NAKAGAWA

IPC: G01C19/5663 ,  B60G17/019

Abstract: A vibration device includes a vibration element that has a plurality of terminals, a base that has a plurality of electrical connection terminals, and a board that has a wiring portion which electrically connects the plurality of electrical connection terminal and the plurality of terminals to each other, and that supports the vibration element with respect to the base. The board has a base fixing portion fixed to the base, a vibration element mounting portion on which the vibration element is mounted, and at least one beam portion which couples the base fixing portion and the vibration element mounting portion to each other. At least the one beam portion has a first portion which extends in a first direction and a second portion which extends in a second direction intersecting the first direction.

公开(公告)号：US20150276404A1

公开(公告)日：2015-10-01

申请号：US14666679

申请日：2015-03-24

Applicant: Seiko Epson Corporation

Inventor： Ryuta NISHIZAWA ,  Keiji NAKAGAWA

IPC: G01C19/5642

CPC classification number: G01C19/5642 ,  G01C19/5614

Abstract: A physical quantity detection circuit includes a filter circuit, and a synchronous detection circuit that is provided at a downstream of the filter circuit and detects a signal in response to a physical quantity contained in an output signal of a vibrating element based on a drive signal for driving the vibrating element. The filter circuit has a cutoff frequency between a resonance frequency in a drive mode and a resonance frequency in a detection mode of the vibrating element and contains the resonance frequency in the drive mode in a passband.

Abstract translation: 物理量检测电路包括滤波电路和同步检测电路，该电路设置在滤波电路的下游，并且根据包含在振动元件的输出信号中的物理量基于驱动信号检测信号 驱动振动元件。 滤波器电路具有在驱动模式中的谐振频率与振动元件的检测模式中的谐振频率之间的截止频率，并且包含通带中的驱动模式中的谐振频率。

公开(公告)号：US20130291639A1

公开(公告)日：2013-11-07

申请号：US13874807

申请日：2013-05-01

Applicant: SEIKO EPSON CORPORATION

Inventor： Ryuta NISHIZAWA

IPC: G01C19/56 ,  G01C25/00

CPC classification number: G01C19/56 ,  G01C19/5621 ,  G01C19/5628 ,  G01C25/00 ,  Y10T29/42

Abstract: A vibrating piece includes a driving arm at least partially formed by a piezoelectric body, the driving arm including a first surface spreading along the direction of excited vibration, a second surface on the opposite side of the first surface, a first side surface configured to connect the first surface and the second surface, and a second side surface arranged on the opposite side of the first side surface and configured to connect the first surface and the second surface. The vibrating piece includes first electrodes arranged at least on one surface side of the first surface and the second surface and second electrodes arranged on at least one surface side of the first side surface and the second side surface. The first electrodes are provided asymmetrically with respect to an equally dividing plane of the driving arm orthogonal to the direction of the excited vibration of the driving arm.

Abstract translation: 振动片包括至少部分地由压电体形成的驱动臂，所述驱动臂包括沿着激励振动的方向扩展的第一表面，在所述第一表面的相对侧上的第二表面，被配置为连接 第一表面和第二表面，以及布置在第一侧表面的相对侧上并被配置为连接第一表面和第二表面的第二侧表面。 振动片包括布置在第一表面的至少一个表面侧上的第一电极和布置在第一侧表面和第二侧表面的至少一个表面侧上的第二表面和第二电极。 第一电极相对于与驱动臂的激励振动的方向正交的驱动臂的等分平面非对称地设置。

公开(公告)号：US20240283425A1

公开(公告)日：2024-08-22

申请号：US18651849

申请日：2024-05-01

Applicant: SEIKO EPSON CORPORATION

Inventor： Junichi TAKEUCHI ,  Tomoyuki KAMAKURA ,  Ryuta NISHIZAWA ,  Yukihiro HASHI

IPC: H03H9/09 ,  H03H9/05 ,  H03H9/125

CPC classification number: H03H9/09 ,  H03H9/0514 ,  H03H9/125

Abstract: A resonator device includes: a base; a resonator element that includes a resonator substrate and an electrode; a conductive layer that is disposed on the base; a metal bump that is disposed between the conductive layer and the resonator element, and that electrically couples the conductive layer and the electrode while bonding the conductive layer and the resonator element; and at least one of a first low elastic modulus layer that is interposed between the base and the conductive layer, that overlaps the metal bump in a plan view of the base, and that has an elastic modulus smaller than that of the metal bump, and a second low elastic modulus layer that is interposed between the resonator substrate and the electrode, that overlaps the metal bump in the plan view of the base, and that has an elastic modulus smaller than that of the metal bump.

公开(公告)号：US20230127801A1

公开(公告)日：2023-04-27

申请号：US17970657

申请日：2022-10-21

Applicant: SEIKO EPSON CORPORATION

Inventor： Shigeru SHIRAISHI ,  Hiyori SAKATA ,  Keiichi YAMAGUCHI ,  Ryuta NISHIZAWA

IPC: H03H9/215 ,  H01L41/18 ,  H01L41/332 ,  G01C19/5628

Abstract: A method for manufacturing a vibration element includes, a base film forming step of forming a first base film at a first substrate surface of a quartz crystal substrate in first and second vibrating arm forming regions, a protective film forming step of forming a first protective film in a bank portion forming region of the first base film, and a dry-etching step of dry-etching the quartz crystal substrate through the first base film and the first protective film.

公开(公告)号：US20220385236A1

公开(公告)日：2022-12-01

申请号：US17826216

申请日：2022-05-27

Applicant: Seiko Epson Corporation

Inventor： Ryuta NISHIZAWA ,  Junichi TAKEUCHI

IPC: H03B5/32 ,  H03H9/05 ,  H03H9/08

Abstract: A resonator device includes a resonator element, a base which has a first surface and a second surface that are in front-back relation, and in which the resonator element is arranged at the first surface, an integrated circuit provided to the base, a lid which has an inner surface opposed to the resonator element, and an outer surface in a front-back relationship with the inner surface, and which is bonded to the base so as to house the resonator element, and a radiation layer which is arranged at the inner surface of the lid, and is higher in emissivity than the lid.

公开(公告)号：US20210119579A1

公开(公告)日：2021-04-22

申请号：US17072124

申请日：2020-10-16

Applicant: Seiko Epson Corporation

Inventor： Ryuta NISHIZAWA ,  Atsushi MATSUO ,  Keiichi YAMAGUCHI ,  Byonhaku YU

IPC: H03B5/32 ,  H03B5/04

Abstract: A vibration element includes: a quartz crystal substrate having a first vibration part and a second vibration part; a pair of first excitation electrodes formed at two main surfaces of the quartz crystal substrate, at the first vibration part; and a pair of second excitation electrodes formed in such a way as to sandwich the second vibration part in a direction of thickness of the quartz crystal substrate, at the second vibration part. At least one second excitation electrode of the pair of second excitation electrodes is formed at an inclined surface inclined to at least one of the two main surfaces.

公开(公告)号：US20200292314A1

公开(公告)日：2020-09-17

申请号：US16813807

申请日：2020-03-10

Applicant: Seiko Epson Corporation

Inventor： Ryuta NISHIZAWA ,  Shiro MURAKAMI ,  Keiichi YAMAGUCHI

IPC: G01C19/5733

Abstract: A vibrator device includes a base, a relay substrate supported by the base, and a vibrating element supported by the relay substrate, the relay substrate includes a base mount that is directly or indirectly fixed to the base, a vibrating element mount on which the vibrating element is mounted, and a beam that couples the base mount and the vibrating element mount, and parts of the vibrating element mount that are coupled to the vibrating element are positioned on both sides of the base mount while interposing the base mount therebetween in a plan view.