ULTRASONIC TRANSDUCERS AND METHODS OF MANUFACTURING THE SAME
    25.
    发明申请
    ULTRASONIC TRANSDUCERS AND METHODS OF MANUFACTURING THE SAME 有权
    超声波传感器及其制造方法

    公开(公告)号:US20160051226A1

    公开(公告)日:2016-02-25

    申请号:US14665213

    申请日:2015-03-23

    CPC classification number: H04R31/006 B06B1/0292

    Abstract: An ultrasonic transducer module may comprise: an ultrasonic transducer comprising a substrate, a thin film separated from the substrate, a support portion for supporting the thin film, and a first electrode pad on the substrate; and/or a circuit board comprising a main body, an opening in the main body for accommodating the thin film, and a second electrode pad attached to the first electrode pad. An ultrasonic transducer may comprise: a substrate; a plurality of first electrode layers on the substrate, with spaces between the first electrode layers; an insulating layer between the substrate and the first electrode layers; a support portion on the first electrode layers; a thin film supported by the support portion, with cavities between each of the first electrode layers and the thin film; and/or a second electrode layer on the thin film.

    Abstract translation: 超声换能器模块可以包括:超声波换能器,包括基底,与基底分离的薄膜,支撑薄膜的支撑部分和在基底上的第一电极垫; 和/或电路板,包括主体,用于容纳薄膜的主体中的开口,以及附接到第一电极焊盘的第二电极焊盘。 超声换能器可以包括:基底; 在所述基板上的多个第一电极层,在所述第一电极层之间具有空间; 在所述基板和所述第一电极层之间的绝缘层; 第一电极层上的支撑部分; 由所述支撑部支撑的薄膜,在所述第一电极层和所述薄膜中的每一个之间具有空腔; 和/或薄膜上的第二电极层。

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