公开(公告)号：US12191402B2

公开(公告)日：2025-01-07

申请号：US17288847

申请日：2019-10-24

Applicant: Sciosense B.V.

Inventor： Alessandro Faes ,  Jörg Siegert ,  Willem Frederik Adrianus Besling ,  Remco Henricus Wilhelmus Pijnenburg

IPC: H01L29/84 ,  H01L21/306 ,  H01L21/768

Abstract: In an embodiment a method includes providing a semiconductor body, forming a sacrificial layer above a surface of the semiconductor body, applying a diaphragm on the sacrificial layer and removing the sacrificial layer by introducing an etchant into openings of the diaphragm, wherein applying the diaphragm comprises applying a first layer, reducing a roughness of a surface of the first layer facing away from the semiconductor body thereby providing a processed surface, and patterning and structuring the first layer to form the openings.

公开(公告)号：US11454562B2

公开(公告)日：2022-09-27

申请号：US17053135

申请日：2019-04-10

Applicant: Sciosense B.V.

Inventor： Alberto Maccioni ,  Willem Frederik Adrianus Besling ,  Olaf Wunnicke ,  Casper Van Der Avoort ,  Remco Henricus Wilhelmus Pijnenburg ,  Anderson Pires Singulani

IPC: G01L27/00 ,  G01L9/12 ,  G01D5/24 ,  G01L9/00

Abstract: A sensor arrangement and a method of operating a sensor arrangement are disclosed. In an embodiment, a sensor arrangement includes a pressure sensor realized as a capacitive pressure sensor, a capacitance-to-digital converter, a test circuit and a switching circuit coupling the capacitance-to-digital converter and the test circuit to the pressure sensor.

公开(公告)号：US11427465B2

公开(公告)日：2022-08-30

申请号：US17043397

申请日：2019-04-25

Applicant: Sciosense B.V.

Inventor： Olaf Wunnicke ,  Frederik Willem Maurits Vanhelmont ,  Willem Frederik Adrianus Besling ,  Remco Henricus Wilhelmus Pijnenburg ,  Casper Van Der Avoort ,  Anderson Pires Singulani ,  Martijn Goossens

IPC: B81B7/00 ,  G01L9/00 ,  G01L9/12

Abstract: In an embodiment a system includes a sensor including a base having a base electrode and a first membrane suspended above the base, wherein the first membrane has a first membrane electrode, wherein the first membrane is configured to deflect with respect to the base electrode in response to an environmental condition, and wherein the sensor is configured to measure a capacitance between the base electrode and the first membrane electrode. The system further includes a first device of the system configured to generate electrical interference signals, a first electrically conductive shield layer positioned between the sensor and the first device of the system, wherein the first electrically conductive shield layer defines a plurality of first apertures extending through the first electrically conductive shield layer and a dielectric material disposed in the plurality of first apertures.

公开(公告)号：US11001495B2

公开(公告)日：2021-05-11

申请号：US16312002

申请日：2017-06-14

Applicant: Sciosense B.V.

Inventor： Willem Frederik Adrianus Besling ,  Casper Van Der Avoort ,  Coenraad Cornelis Tak ,  Remco Henricus Wilhelmus Pijnenburg ,  Olaf Wunnicke ,  Hendrik Bouman

IPC: B81B7/00 ,  B81C1/00 ,  G01D11/24

Abstract: The sensor package comprises a carrier (1) including electric conductors (13), an ASIC device (6) and a sensor element (7), which is integrated in the ASIC device (6). A dummy die or interposer (4) is arranged between the carrier (1) and the ASIC device (6). The dummy die or interposer (4) is fastened to the carrier (1), and the ASIC device (6) is fastened to the dummy die or interposer (4).

公开(公告)号：US20200348198A1

公开(公告)日：2020-11-05

申请号：US16758680

申请日：2018-11-16

Applicant: Sciosense B.V.

Inventor： Willem Frederik Adrianus Besling ,  Casper Van Der Avoort ,  Remco Henricus Wilhelmus Pijnenburg ,  Olaf Wunnicke ,  Jörg Siegert ,  Alessandro Faes

IPC: G01L9/00 ,  G01L19/00 ,  G01L9/12

Abstract: Capacitive pressure sensors and other devices are disclosed. In an embodiment a semiconductor device includes a first electrode, a cavity over the first electrode and a second electrode including a suspended membrane over the cavity and electrically conductive anchor trenches laterally surrounding the cavity, wherein the anchor trenches include an inner anchor trench and an outer anchor trench, the outer anchor trench having rounded corners.

公开(公告)号：US20200340875A1

公开(公告)日：2020-10-29

申请号：US16958269

申请日：2019-01-10

Applicant: Sciosense B.V.

Inventor： Willem Frederik Adrianus Besling ,  Remco Henricus Wilhelmus Pijnenburg ,  Kailash Vijayakumar ,  Jörg Siegert ,  Alessandro Faes

IPC: G01L9/00

Abstract: A capacitive sensor is disclosed. In an embodiment a semiconductor device includes a die including a capacitive pressure sensor integrated on a CMOS circuit, wherein the capacitive pressure sensor includes a first electrode and a second electrode separated from one another by a cavity, the second electrode including a suspended tensile membrane, and wherein the first electrode is composed of one or more aluminum-free layers containing Ti.