-
21.
公开(公告)号:US11066739B2
公开(公告)日:2021-07-20
申请号:US16285297
申请日:2019-02-26
Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
Inventor: Shunpei Yamazaki , Tetsunori Maruyama , Yuki Imoto , Hitomi Sato , Masahiro Watanabe , Mitsuo Mashiyama , Kenichi Okazaki , Motoki Nakashima , Takashi Shimazu
IPC: H01L21/02 , H01L29/24 , H01L29/66 , H01L29/786 , C23C14/34 , B28B11/24 , C04B35/64 , C04B35/453 , C23C14/08
Abstract: There have been cases where transistors formed using oxide semiconductors are inferior in reliability to transistors formed using amorphous silicon. Thus, in the present invention, a semiconductor device including a highly reliable transistor formed using an oxide semiconductor is manufactured. An oxide semiconductor film is deposited by a sputtering method, using a sputtering target including an oxide semiconductor having crystallinity, and in which the direction of the c-axis of a crystal is parallel to a normal vector of the top surface of the oxide semiconductor. The target is formed by mixing raw materials so that its composition ratio can obtain a crystal structure.
-
公开(公告)号:US10205062B2
公开(公告)日:2019-02-12
申请号:US16120851
申请日:2018-09-04
Applicant: Semiconductor Energy Laboratory Co., Ltd.
Inventor: Yoshiaki Oikawa , Shingo Eguchi , Mitsuo Mashiyama , Masatoshi Kataniwa , Hironobu Shoji , Masataka Nakada , Satoshi Seo
Abstract: An object is to provide a highly reliable light emitting device which is thin and is not damaged by external local pressure. Further, another object is to manufacture a light emitting device with a high yield by preventing defects of a shape and characteristics due to external stress in a manufacture process. A light emitting element is sealed between a first structure body in which a fibrous body is impregnated with an organic resin and a second structure body in which a fibrous body is impregnated with an organic resin, whereby a highly reliable light emitting device which is thin and has intensity can be provided. Further, a light emitting device can be manufactured with a high yield by preventing defects of a shape and characteristics in a manufacture process.
-
公开(公告)号:US20150060890A1
公开(公告)日:2015-03-05
申请号:US14511742
申请日:2014-10-10
Applicant: Semiconductor Energy Laboratory Co., Ltd.
Inventor: Yoshiaki Oikawa , Shingo Eguchi , Mitsuo Mashiyama , Masatoshi Kataniwa , Hironobu Shoji , Masataka Nakada , Satoshi Seo
IPC: H01L33/44
CPC classification number: H01L33/44 , H01L51/003 , H01L51/5237 , H01L51/524 , H01L51/5253 , H01L51/56 , H01L2227/323 , H01L2227/326
Abstract: An object is to provide a highly reliable light emitting device which is thin and is not damaged by external local pressure. Further, another object is to manufacture a light emitting device with a high yield by preventing defects of a shape and characteristics due to external stress in a manufacture process. A light emitting element is sealed between a first structure body in which a fibrous body is impregnated with an organic resin and a second structure body in which a fibrous body is impregnated with an organic resin, whereby a highly reliable light emitting device which is thin and has intensity can be provided. Further, a light emitting device can be manufactured with a high yield by preventing defects of a shape and characteristics in a manufacture process.
Abstract translation: 目的是提供一种非常可靠的发光装置,该发光装置薄且不被外部局部压力损坏。 此外,另一个目的是通过在制造过程中防止由于外部应力引起的形状和特性的缺陷而以高产率制造发光器件。 发光元件被密封在其中纤维体浸渍有机树脂的第一结构体和其中纤维体浸渍有机树脂的第二结构体之间,由此可靠的发光器件是薄的和 可以提供强度。 此外,通过防止制造过程中的形状和特性的缺陷,可以以高产率制造发光器件。
-
-