摘要:
An exposure method using an energy beam exposure apparatus capable of controlling magnitude relation between blurs of energy beam in first and second directions for exposing a pattern on a sample in the apparatus in a state in which the blur of energy beam in one direction of the first and second directions is set smaller than the blur of energy beam in the other direction comprises adjusting the magnitude relation of the blurs of energy beam in the first and second directions, adjusting the direction of the sample in the apparatus on the basis of the pattern and the magnitude relation of the blurs of energy beam in the first and second directions, and projecting the pattern onto the sample by exposing the sample to the energy beam and using shape correction of the pattern needed to compensate blurs of energy beam in the first and second directions.
摘要:
An improved process of vitrifying a radioactive liquid waste by absorbing a radioactive liquid waste into a glass frit cartridge made of molded glass fibers and heat-melting the cartridge to vitrify the liquid waste. The invention is characterized by absorbing a radioactive liquid waste containing ruthenium into the glass frit cartridge together with a reducing agent. By the process of the invention, the formation of gaseous ruthenium is effectively suppressed during the heat-melting.
摘要:
A method for treating synthetic pulp particles, which includes treating a slurry of synthetic pulp particles having a Schopper-Riegler freeness of more than 30.degree.SR by a concentration provided with a rotary filter bed to lower the freeness not more than 30.degree.SR, water-washing the synthetic pulp particles in the state where the freeness is not more than 30.degree.SR, and dispersing the synthetic pulp particles in water to restore the freeness to more than 30.degree.SR.
摘要:
A cake of synthetic fibrid, which is formed by pressing to hydroextract a slurry of synthetic fibrid, pulverizing the compression product, and compressing the pulverization product again to solidity it in the form of a plate-like cake.
摘要:
A wire harness continuity inspection method according to the invention includes: a referring step of referring to auxiliary device-based wiring information to specify a first terminal of a first electrical component and a second terminal of a second electrical component connected by a circuit line, which are described in the auxiliary device-based wiring information; a first specifying step of referring to region-based connector/wiring information to specify a first electrical wire of which one end is connected to the first terminal of the first electrical component, described in the region-based connector/wiring information; and a first determining step of determining whether the terminal connected to the other end of the first electrical wire is identical to the second terminal of the second electrical component.
摘要:
In a photomask in which a device pattern, an alignment mark and a superimposition inspection mark are formed on a light transmitting base, each of the alignment mark and the superimposition inspection mark includes a main mark portion, and first and second auxiliary pattern portions. The main mark portion is constituted of one of a space pattern and a line pattern, the pattern having a linear width to be resolved on a photosensitive film formed on a semiconductor wafer, and each of the first and second auxiliary pattern portions includes an auxiliary pattern constituted of one of a repeated pattern of a space pattern and a repeated pattern of a line pattern, the repeated pattern having a linear width not to be resolved on the photosensitive film. The pitch of the repeated pattern is equal to the minimum pitch of the device pattern.
摘要:
An optical disc signal processing apparatus is provided which comprises a rotation control section for measuring and outputting the number of edges within a predetermined time for a binary signal obtained from an RF signal reproduced from an optical disc on which information is recorded, a detecting section for detecting a missing portion of the RF signal, and a parameter control section for, when a missing portion of the RF signal is not detected, calculating and outputting a rotation control parameter for controlling a rotation of the optical disc based on the number of edges obtained by the rotation control section, and when a missing portion of the RF signal is detected, controlling the rotation control parameter so that an influence of the missing portion of the RF signal is suppressed.
摘要:
The invention relates to a control unit of an electric power conversion apparatus that can decrease the high-order harmonic content generated by resonance of the inductance component of the primary wiring connecting an AC-power supply 20 and the electric power conversion apparatus and a capacitor connected as a filter even if distortion occurs in an input current waveform.
摘要:
A freeze valve for a molten glass discharging nozzle is disposed at the bottom of a glass melting furnace. The freeze valve has at least two sets of temperature control units provided around the nozzle and arranged in series in the longitudinal direction of the nozzle, and an ejector for ejecting a high-pressure gas disposed at the lower end of the nozzle and adapted to eject the high-pressure gas toward the axis of the nozzle. Each of the temperature control units includes heating and cooling means so as to heat and cool independently both the upper and lower portions of the nozzle.