Energy beam exposure method and exposure apparatus
    21.
    发明授权
    Energy beam exposure method and exposure apparatus 失效
    能量束曝光方法和曝光装置

    公开(公告)号:US06897454B2

    公开(公告)日:2005-05-24

    申请号:US10443856

    申请日:2003-05-23

    摘要: An exposure method using an energy beam exposure apparatus capable of controlling magnitude relation between blurs of energy beam in first and second directions for exposing a pattern on a sample in the apparatus in a state in which the blur of energy beam in one direction of the first and second directions is set smaller than the blur of energy beam in the other direction comprises adjusting the magnitude relation of the blurs of energy beam in the first and second directions, adjusting the direction of the sample in the apparatus on the basis of the pattern and the magnitude relation of the blurs of energy beam in the first and second directions, and projecting the pattern onto the sample by exposing the sample to the energy beam and using shape correction of the pattern needed to compensate blurs of energy beam in the first and second directions.

    摘要翻译: 一种使用能量束曝光装置的曝光方法,能量束曝光装置能够控制能量束在第一和第二方向上的模糊之间的大小关系,用于在第一和第二方向上的能量束的一个方向上的能量束的模糊的状态下暴露在装置中的样品上的图案 并且将第二方向设定为小于在另一方向上的能量束的模糊包括调整能量束在第一和第二方向上的模糊的大小关系,基于图案调整装置中的样本的方向,以及 能量束在第一和第二方向上的模糊的大小关系,以及通过将样本暴露于能量束并且使用形状校正来补偿第一和第二方向上的能量束的模糊所需的图案,将图案投影到样本上 方向。

    Process of vitrifying radioactive liquid waste with suppressed formation
of gaseous ruthenium
    22.
    发明授权
    Process of vitrifying radioactive liquid waste with suppressed formation of gaseous ruthenium 失效
    抑制气态钌形成的玻璃化放射性废液的方法

    公开(公告)号:US4943395A

    公开(公告)日:1990-07-24

    申请号:US327773

    申请日:1989-03-23

    CPC分类号: G21F9/305 G21F9/12

    摘要: An improved process of vitrifying a radioactive liquid waste by absorbing a radioactive liquid waste into a glass frit cartridge made of molded glass fibers and heat-melting the cartridge to vitrify the liquid waste. The invention is characterized by absorbing a radioactive liquid waste containing ruthenium into the glass frit cartridge together with a reducing agent. By the process of the invention, the formation of gaseous ruthenium is effectively suppressed during the heat-melting.

    摘要翻译: 通过将放射性废液吸收到由模制玻璃纤维制成的玻璃料盒中并将该料筒加热熔化以使液体废物玻璃化,从而使放射性废液玻璃化的改进方法。 本发明的特征在于将含有钌的放射性废液与还原剂一起吸收到玻璃料盒中。 通过本发明的方法,在热熔期间有效地抑制了气态钌的形成。

    WIRE HARNESS CONTINUITY INSPECTION DEVICE, WIRE HARNESS CONTINUITY INSPECTION PROGRAM, AND WIRE HARNESS CONTINUITY INSPECTION METHOD
    25.
    发明申请
    WIRE HARNESS CONTINUITY INSPECTION DEVICE, WIRE HARNESS CONTINUITY INSPECTION PROGRAM, AND WIRE HARNESS CONTINUITY INSPECTION METHOD 有权
    线束连续检测装置,线束连续检测程序和线束连续检测方法

    公开(公告)号:US20120262185A1

    公开(公告)日:2012-10-18

    申请号:US13513653

    申请日:2010-12-03

    IPC分类号: G01R31/04

    CPC分类号: G01R31/021 G06F2217/36

    摘要: A wire harness continuity inspection method according to the invention includes: a referring step of referring to auxiliary device-based wiring information to specify a first terminal of a first electrical component and a second terminal of a second electrical component connected by a circuit line, which are described in the auxiliary device-based wiring information; a first specifying step of referring to region-based connector/wiring information to specify a first electrical wire of which one end is connected to the first terminal of the first electrical component, described in the region-based connector/wiring information; and a first determining step of determining whether the terminal connected to the other end of the first electrical wire is identical to the second terminal of the second electrical component.

    摘要翻译: 根据本发明的线束连续性检查方法包括:参考辅助设备布线信息以指定由电路线连接的第一电气部件的第一端子和第二电气部件的第二端子的参考步骤, 在基于辅助设备的布线信息中描述; 第一指定步骤,参考基于区域的连接器/布线信息,以指定其一端连接到第一电气部件的第一端子的第一电线,在基于区域的连接器/布线信息中描述; 以及第一确定步骤,确定连接到第一电线的另一端的端子是否与第二电气部件的第二端子相同。

    Photomask, photomask superimposition correcting method, and manufacturing method of semiconductor device
    26.
    发明授权
    Photomask, photomask superimposition correcting method, and manufacturing method of semiconductor device 有权
    光掩模,光掩模叠加校正方法和半导体器件的制造方法

    公开(公告)号:US07906258B2

    公开(公告)日:2011-03-15

    申请号:US12047516

    申请日:2008-03-13

    IPC分类号: G03F1/00 G03C5/00 H01L21/00

    摘要: In a photomask in which a device pattern, an alignment mark and a superimposition inspection mark are formed on a light transmitting base, each of the alignment mark and the superimposition inspection mark includes a main mark portion, and first and second auxiliary pattern portions. The main mark portion is constituted of one of a space pattern and a line pattern, the pattern having a linear width to be resolved on a photosensitive film formed on a semiconductor wafer, and each of the first and second auxiliary pattern portions includes an auxiliary pattern constituted of one of a repeated pattern of a space pattern and a repeated pattern of a line pattern, the repeated pattern having a linear width not to be resolved on the photosensitive film. The pitch of the repeated pattern is equal to the minimum pitch of the device pattern.

    摘要翻译: 在其中在透光基底上形成器件图案,对准标记和叠加检查标记的光掩模中,每个对准标记和叠加检查标记都包括主标记部分和第一和第二辅助图案部分。 主标记部分由空间图案和线条图案之一构成,该图形具有在半导体晶片上形成的感光膜上被分辨的线宽,并且第一和第二辅助图案部分中的每一个包括辅助图案 由空间图案的重复图案和线图案的重复图案之一构成,重复图案具有在感光膜上不被分辨的线宽。 重复图案的间距等于设备图案的最小间距。

    Optical disc signal processing apparatus and optical disc reproduction apparatus
    27.
    发明申请
    Optical disc signal processing apparatus and optical disc reproduction apparatus 审中-公开
    光盘信号处理装置和光盘再现装置

    公开(公告)号:US20060285456A1

    公开(公告)日:2006-12-21

    申请号:US11452953

    申请日:2006-06-15

    IPC分类号: G11B19/00

    CPC分类号: G11B19/28

    摘要: An optical disc signal processing apparatus is provided which comprises a rotation control section for measuring and outputting the number of edges within a predetermined time for a binary signal obtained from an RF signal reproduced from an optical disc on which information is recorded, a detecting section for detecting a missing portion of the RF signal, and a parameter control section for, when a missing portion of the RF signal is not detected, calculating and outputting a rotation control parameter for controlling a rotation of the optical disc based on the number of edges obtained by the rotation control section, and when a missing portion of the RF signal is detected, controlling the rotation control parameter so that an influence of the missing portion of the RF signal is suppressed.

    摘要翻译: 提供了一种光盘信号处理装置,其包括:旋转控制部分,用于测量并输出在从记录有信息的光盘再现的RF信号获得的二进制信号的预定时间内的边缘数;检测部分, 检测RF信号的缺失部分,以及参考控制部分,用于当没有检测到RF信号的缺失部分时,基于获得的边缘数量来计算和输出用于控制光盘旋转的旋转控制参数 通过旋转控制部分,并且当检测到RF信号的缺失部分时,控制旋转控制参数,从而抑制RF信号的缺失部分的影响。

    Controller for power converter
    28.
    发明申请
    Controller for power converter 失效
    电源转换器控制器

    公开(公告)号:US20060164874A1

    公开(公告)日:2006-07-27

    申请号:US10432240

    申请日:2002-01-24

    IPC分类号: H02M1/12 H02M7/217

    摘要: The invention relates to a control unit of an electric power conversion apparatus that can decrease the high-order harmonic content generated by resonance of the inductance component of the primary wiring connecting an AC-power supply 20 and the electric power conversion apparatus and a capacitor connected as a filter even if distortion occurs in an input current waveform.

    摘要翻译: 本发明涉及一种电力转换装置的控制单元,其能够降低由连接交流电源20和电力转换装置的主配线的电感成分和连接的电容器的共振产生的高次谐波含量 作为滤波器,即使在输入电流波形中发生失真。

    Freeze valve having multiple heating-cooling means
    29.
    发明授权
    Freeze valve having multiple heating-cooling means 失效
    具有多个加热冷却装置的冷冻阀

    公开(公告)号:US4460398A

    公开(公告)日:1984-07-17

    申请号:US494494

    申请日:1983-05-17

    申请人: Noriaki Sasaki

    发明人: Noriaki Sasaki

    摘要: A freeze valve for a molten glass discharging nozzle is disposed at the bottom of a glass melting furnace. The freeze valve has at least two sets of temperature control units provided around the nozzle and arranged in series in the longitudinal direction of the nozzle, and an ejector for ejecting a high-pressure gas disposed at the lower end of the nozzle and adapted to eject the high-pressure gas toward the axis of the nozzle. Each of the temperature control units includes heating and cooling means so as to heat and cool independently both the upper and lower portions of the nozzle.

    摘要翻译: 用于熔融玻璃排放喷嘴的冷冻阀设置在玻璃熔炉的底部。 冷冻阀具有至少两组温度控制单元,设置在喷嘴周围并沿喷嘴的纵向方向串联布置,喷射器用于喷射设置在喷嘴下端的高压气体,并适于喷射 高压气体朝向喷嘴的轴线。 每个温度控制单元包括加热和冷却装置,以便独立地对喷嘴的上部和下部进行加热和冷却。