公开(公告)号：US07221157B2

公开(公告)日：2007-05-22

申请号：US11050672

申请日：2005-02-07

申请人： Shinji Wakabayashi ,  Satoshi Oohira ,  Takashi Kawashima

发明人： Shinji Wakabayashi ,  Satoshi Oohira ,  Takashi Kawashima

IPC分类号： G01R33/07 ,  H01L43/06 ,  G01B7/14 ,  G01B7/30

CPC分类号： G01R33/07 ,  G01D5/145 ,  H01L43/14

摘要： Two Hall element forming arrangements are formed on a semiconductor substrate. Each Hall element forming arrangement includes a Hall element that is formed in a principal surface of the semiconductor substrate. A base is formed separately from the semiconductor substrate. Then, the base is disposed at a rear surface of the semiconductor substrate and holds the semiconductor substrate and the Hall element forming arrangements. The base includes a holding surface, which holds the semiconductor substrate, and two slant surfaces, each of which is slanted relative to the holding surface. Each Hall element forming arrangement is held on a corresponding one of the at least one slant surface of the base.

摘要翻译： 在半导体衬底上形成两个霍尔元件形成装置。 每个霍尔元件形成装置包括形成在半导体衬底的主表面中的霍尔元件。 基底与半导体衬底分开形成。 然后，将基底设置在半导体衬底的后表面并保持半导体衬底和霍尔元件形成装置。 基座包括保持半导体基板的保持表面和两个相对于保持表面倾斜的倾斜表面。 每个霍尔元件形成布置被保持在基座的至少一个倾斜表面中相应的一个上。

公开(公告)号：US4908572A

公开(公告)日：1990-03-13

申请号：US220625

申请日：1988-07-18

申请人： Kazunori Sakai ,  Shinji Wakabayashi ,  Hiromi Maehata

发明人： Kazunori Sakai ,  Shinji Wakabayashi ,  Hiromi Maehata

IPC分类号： B60T8/171 ,  G01D5/245 ,  G01P3/488 ,  G01P3/489

CPC分类号： G01P3/489 ,  G01D5/2451 ,  G01P3/488

摘要： A cycle time of pulses converted from an electrical signal generated at a rotational sensor is counted. In determining a cycle of the pulses, either a rising edge or a falling edge of the pulse is selected. As the selection of the either edge affects accuracy of the rotational speed measurement, two modes are proposed. One is suitable for a lower speed range in which either of the rising and falling edges is selected for every pulse monitoring period considering the relative phase position of the pulse and the pulse monitoring period. The other is suitable for a higher speed range in which one fixed edge is utilized. Here the edge is selected depending on the winding direction of the electric wire of the pick-up coil of the rotational sensor and independent of the pulse monitoring period.

摘要翻译： 从在旋转传感器处产生的电信号转换的脉冲的周期时间被计数。 在确定脉冲的周期时，选择脉冲的上升沿或下降沿。 由于任一边的选择影响转速测量的精度，因此提出了两种模式。 一个适用于考虑到脉冲的相对相位位置和脉冲监视周期的每个脉冲监视周期中选择上升沿和下降沿的较低速度范围。 另一个适用于使用一个固定边缘的较高速度范围。 这里根据旋转传感器的拾取线圈的电线的卷绕方向选择边缘，而与脉冲监视周期无关。

公开(公告)号：US4834170A

公开(公告)日：1989-05-30

申请号：US111799

申请日：1987-10-22

申请人： Muneo Sakurada ,  Isamu Kurosawa ,  Shinji Wakabayashi

发明人： Muneo Sakurada ,  Isamu Kurosawa ,  Shinji Wakabayashi

IPC分类号： B60H1/00

CPC分类号： B60H1/00064

摘要： An automobile air conditioner includes a duct interconnecting a blower unit and a temperature control/air distributing unit having a pair of cooling and heating heat exchangers, the duct having a cross-sectional area gradually increasing toward the temperature control/air distributing unit. The air conditioner preferably has a hot/refrigeration compartment disposed in juxtaposition with the duct. In a preferred embodiment, the air conditioner includes a hot air control mode door for controlling a stream of hot air flowing from the heating heat exchanger toward an upper air outlet and a lower air outlet.

摘要翻译： 汽车空调包括将鼓风机单元与具有一对制冷加热热交换器的温度控制/空气分配单元相连接的管道，该管道的横截面积朝向温度控制/空气分配单元逐渐增加。 空调器优选地具有与管道并置设置的热/冷藏室。 在优选实施例中，空调包括一个热空气控制模式门，用于控制从加热热交换器朝向上部空气出口和下部空气出口流动的热空气流。

公开(公告)号：US09389607B2

公开(公告)日：2016-07-12

申请号：US14122987

申请日：2012-06-18

申请人： Shinji Wakabayashi

发明人： Shinji Wakabayashi

IPC分类号： G05B19/418

CPC分类号： G05B19/41865 ,  G05B2219/31429 ,  G05B2219/45031 ,  Y02P90/20

摘要： In a method for setting substrate-treatment time, substrate-treatment time is set by the following method. A predicted supply time of wafers of a following lot to a substrate processing apparatus is calculated based on a predicted plasma-treatment completion time of another substrate processing apparatus. A predicted plasma-treatment completion time of all of wafers of a present lot is calculated. A predicted idle time after the completion of the plasma treatment of all of the wafers of the present lot is calculated based on the predicted supply time of the following lot and the predicted plasma-treatment completion time of the present lot. If the predicted idle time is equal to or longer than the idle time required for dummy treatment, supplementary idle time is added between the plasma treatments of unprocessed wafers of the present lot.

摘要翻译： 在设置基板处理时间的方法中，通过以下方法设定基板处理时间。 基于另一基板处理装置的等离子体处理完成时间的预测，计算基板处理装置的后续批次的晶片的预测供给时间。 计算当前批次的所有晶片的预期等离子体处理完成时间。 基于本批次的所有晶片的等离子体处理完成后的预测空闲时间，根据后续批次的预测供给时间和本批料的预计等离子体处理完成时间进行计算。 如果预测的空闲时间等于或长于虚拟处理所需的空闲时间，则在本地批处理的未处理晶片的等离子体处理之间添加补充空闲时间。

公开(公告)号：US09269599B2

公开(公告)日：2016-02-23

申请号：US13982812

申请日：2012-02-07

申请人： Shinji Wakabayashi

发明人： Shinji Wakabayashi

IPC分类号： H01L21/677 ,  H01L21/67

CPC分类号： H01L21/677 ,  H01L21/67126 ,  H01L21/67184 ,  Y10S414/139

摘要： A substrate relay apparatus (200) includes a chassis (202) that is arranged to surround openings (144) formed at side walls of adjacent transfer apparatuses and has a dimension in the width direction between the side walls of the transfer apparatuses that is smaller than the substrate size, a gate valve (201) that is arranged inside the chassis (202) between the side walls of the adjacent transfer apparatuses and is configured to open and close with respect to the openings (144), and support pins (250) that are arranged on both sides of the gate valve (201) and are configured to support a wafer (W) that straddles the gate valve (201).

摘要翻译： 衬底中继装置（200）包括底盘（202），其被设置为围绕形成在相邻传送装置的侧壁处的开口（144），并且在传送装置的侧壁之间的宽度方向上的尺寸小于 基板尺寸设置在相邻的传送装置的侧壁之间布置在底架（202）的内侧并被构造成相对于开口（144）打开和关闭的闸阀（201）和支撑销（250） 其布置在闸阀（201）的两侧，并且被构造成支撑跨过闸阀（201）的晶片（W）。

公开(公告)号：US20130309047A1

公开(公告)日：2013-11-21

申请号：US13982812

申请日：2012-02-07

申请人： Shinji Wakabayashi

发明人： Shinji Wakabayashi

IPC分类号： H01L21/677

CPC分类号： H01L21/677 ,  H01L21/67126 ,  H01L21/67184 ,  Y10S414/139

摘要： A substrate relay apparatus (200) includes a chassis (202) that is arranged to surround openings (144) formed at side walls of adjacent transfer apparatuses and has a dimension in the width direction between the side walls of the transfer apparatuses that is smaller than the substrate size, a gate valve (201) that is arranged inside the chassis (202) between the side walls of the adjacent transfer apparatuses and is configured to open and close with respect to the openings (144), and support pins (250) that are arranged on both sides of the gate valve (201) and are configured to support a wafer (W) that straddles the gate valve (201).

摘要翻译： 衬底中继装置（200）包括底盘（202），其被设置为围绕形成在相邻传送装置的侧壁处的开口（144），并且在传送装置的侧壁之间的宽度方向上的尺寸小于 基板尺寸设置在相邻的传送装置的侧壁之间布置在底架（202）的内侧并被构造成相对于开口（144）打开和关闭的闸阀（201）和支撑销（250） 其布置在闸阀（201）的两侧，并且被构造成支撑跨过闸阀（201）的晶片（W）。

公开(公告)号：US20130302115A1

公开(公告)日：2013-11-14

申请号：US13980474

申请日：2012-01-18

申请人： Shinji Wakabayashi ,  Sensho Kobayashi

发明人： Shinji Wakabayashi ,  Sensho Kobayashi

IPC分类号： H01L21/677

CPC分类号： H01L21/67703 ,  H01L21/67196 ,  H01L21/67742

摘要： In this vacuum processing apparatus, four process modules and four load-rock modules are arranged in clusters around a two-stage conveyance vacuum chamber. In the apparatus, the entirety of the second stage of the vacuum conveyance chamber is a third vacuum conveyance area and the third vacuum conveyance area extends from the second stage to the first stage through an aperture to enter between first and second vacuum conveyance areas. A third vacuum conveyance robot has: left and right-side conveyance units, which can move straight in the depth direction in the second stage of the third vacuum conveyance area; and left and right-side conveyance units, which can move straight in the vertical direction, i.e. can move up and down, in the aperture of the vacuum conveyance area.

摘要翻译： 在该真空处理装置中，四个处理模块和四个负载 - 岩石模块围绕两级输送真空室排列成簇。 在该装置中，真空输送室的第二阶段的整体是第三真空输送区域，第三真空输送区域从第二阶段延伸到第一阶段通过孔径进入第一和第二真空输送区域之间。 第三真空输送机器人具有：在第三真空输送区域的第二阶段中能够在深度方向上直线移动的左右输送单元; 以及可以在真空输送区域的孔中在垂直方向上直线移动即可上下移动的左右侧输送单元。

公开(公告)号：US07307935B2

公开(公告)日：2007-12-11

申请号：US10930681

申请日：2004-08-31

申请人： Manabu Kusano ,  Masatoshi Ejiri ,  Shinji Wakabayashi

发明人： Manabu Kusano ,  Masatoshi Ejiri ,  Shinji Wakabayashi

IPC分类号： G11B27/36

CPC分类号： G11B27/105 ,  G11B19/04 ,  G11B19/12 ,  G11B20/10 ,  G11B27/034 ,  G11B2220/20 ,  G11B2220/2545

摘要： A recording and playback apparatus according to the present invention includes a duplicating section for duplicating music data from a music CD in a CD read-out section onto a hard disk and a preserving section which, if duplication by the duplicating section is interrupted, preserves TOC information identifying the music CD and duplicated-music-data information identifying duplicated music data such that the TOC information is associated with the duplicated-music-data information. The recording and playback apparatus further includes a playback section for playing back music data stored in the hard disk. When a music CD having a history of interrupted duplication is placed in the CD read-out section, the duplicating section resumes duplication onto the hard disk based on the TOC information and the duplicated-music-data information preserved in the preserving section.

摘要翻译： 根据本发明的记录和播放装置包括一个用于将CD读出部分中的音乐CD的音乐数据复制到硬盘上的复制​​部分和一个保存部分，如果复制部分的复制被中断，则保存TOC 识别音乐CD的信息和识别重复音乐数据的复制音乐数据信息，使得TOC信息与复制音乐数据信息相关联。 记录和重放装置还包括用于重放存储在硬盘中的音乐数据的重放部分。 当具有中断复制历史的音乐CD被放置在CD读出部分中时，复制部分基于保存在保存部分中的TOC信息和复制音乐数据信息将复制恢复到硬盘上。

公开(公告)号：US07113456B2

公开(公告)日：2006-09-26

申请号：US10390458

申请日：2003-03-17

申请人： Manabu Kusano ,  Shinji Wakabayashi ,  Masamichi Matsuoka

发明人： Manabu Kusano ,  Shinji Wakabayashi ,  Masamichi Matsuoka

IPC分类号： G11B21/08

CPC分类号： G11B27/3063 ,  G11B20/00007 ,  G11B20/10527 ,  G11B27/002 ,  G11B27/105 ,  G11B27/11 ,  G11B27/36 ,  G11B2020/00057 ,  G11B2020/1062 ,  G11B2220/20 ,  G11B2220/2545 ,  G11B2220/2583 ,  G11B2220/65

摘要： A method and apparatus for reading multisession discs in which both standard CD-DA format and compressed music formats, such as MP3, may be utilized on the same disc. High speed reading of data into shock proof memory, analysis of available memory and storage of analyzed record structures are used to provide playback of music in both formats and, if desired, in a random playback order.

摘要翻译： 一种用于读取多片盘的方法和装置，其中标准CD-DA格式和压缩音乐格式（例如MP3）可以在同一盘上使用。 将数据高速读取到防震存储器中，分析可用的存储器和分析的记录结构的存储被用于以两种格式以及如果需要以随机播放顺序提供音乐的回放。

公开(公告)号：US4892135A

公开(公告)日：1990-01-09

申请号：US290122

申请日：1988-12-27

申请人： Muneo Sakurada ,  Isamu Kurosawa ,  Shinji Wakabayashi

发明人： Muneo Sakurada ,  Isamu Kurosawa ,  Shinji Wakabayashi

IPC分类号： B60H1/00 ,  F25B29/00 ,  F25D17/08

CPC分类号： B60H1/00064

摘要： An automobile air conditioner includes a duct interconnecting a blower unit and a temperature control/air distributing unit having a pair of cooling and heating heat exchangers, the duct having a cross-sectional area gradually increasing toward the temperature control/air distributing unit. The air conditioner preferably has a hot/refrigeration compartment juxtaposed with the duct. In a preferred embodiment, the air conditioner includes a hot air control mode door for controlling a stream of hot air flowing from the heating heat exchanger toward an upper air outlet and a lower air outlet.