-
公开(公告)号：US09330950B2
公开(公告)日：2016-05-03
申请号：US12723950
申请日：2010-03-15
申请人： Shinji Wakabayashi
发明人： Shinji Wakabayashi
IPC分类号： H01L21/677 , H01J37/32
CPC分类号： H01L21/67778 , H01J37/32743 , H01J37/32788 , H01L21/67745
摘要： A substrate processing apparatus includes a processing unit performing a predetermined processing on a substrate; a transfer chamber; and a substrate accommodation unit including a substrate accommodation chamber communicating with the transfer chamber via a transfer opening, a gate provided at the transfer opening to separate the substrate accommodation chamber from the transfer chamber, and a gas supply unit supplying a gas into the substrate accommodation chamber. The substrate accommodation chamber accommodates therein substrates that have been processed by the processing unit, and the gas supply unit provides a gas flow suppressing an atmosphere of the transfer chamber from being introduced into the substrate accommodation chamber, thereby preventing undesired reaction between moisture in the atmosphere of the transfer chamber and deposits adhered on the processed substrates accommodated in the substrate accommodation chamber.
摘要翻译： 基板处理装置包括对基板执行预定处理的处理单元; 传送室; 以及基板容纳单元，其包括经由传送开口与所述传送室连通的基板容纳室，设置在所述传送开口处以将所述基板容纳室与所述传送室分离的门;以及气体供应单元，其将气体供应到所述基板容纳部 房间。 基板容纳室容纳已由处理单元处理的基板，气体供给单元提供抑制转移室的气氛的气流而被引入到基板容纳室中，从而防止大气中的水分之间的不期望的反应 以及附着在容纳在基板容纳室中的被处理基板上的沉积物。
-
公开(公告)号：US08472778B2
公开(公告)日：2013-06-25
申请号：US12047041
申请日：2008-03-12
申请人： Masaru Kimura , Shinji Wakabayashi
发明人： Masaru Kimura , Shinji Wakabayashi
CPC分类号： H04N5/84 , G11B27/005 , G11B27/105 , G11B27/34 , H04N5/775 , H04N5/907 , H04N7/17318 , H04N21/42201 , H04N21/4325 , H04N21/4402 , H04N21/4722 , H04N21/812 , H04N21/8586
摘要： A video player and a video-playback control method which are capable of easily performing a selection operation on a display object in a moving image are disclosed. The video player predicts the occurrence of the selection operation of the display object, which is an area for which an action is defined in the moving image, by the start of a move operation of the cursor 51 or the proximity of a hand to a touch panel, and changes the playback state of the title to pause or slow playback. Description information defined for the display object may be automatically displayed. Also, the areas of the display objects may be visualized by displaying figures.
摘要翻译： 公开了一种能够容易地对运动图像中的显示对象进行选择操作的视频播放器和视频重放控制方法。 视频播放器通过光标51的移动操作的开始或者手的触摸到触摸来预测在运动图像中定义动作的显示对象的选择操作的发生 面板，并将标题的播放状态更改为暂停或慢速播放。 可以自动显示为显示对象定义的描述信息。 此外，可以通过显示图形来可视化显示对象的区域。
-
3.发明授权公开(公告)号：US08230728B2
公开(公告)日：2012-07-31
申请号：US12143901
申请日：2008-06-23
IPC分类号： G01M15/00
CPC分类号： G01N9/36 , G01N9/00 , G01N27/221 , G01N33/2852
摘要： An alcohol density sensor for detecting an alcohol density in mixture fuel composed of petroleum-fuel and alcohol is installed in a fuel tank of an automotive vehicle. The alcohol density sensor includes a pair of electrodes immersed in the mixture fuel and a conductor portion for connecting the electrodes to a control unit having a circuit board. The conductor portion is composed of a first conductor portion integrally formed with the electrode and a second conductor portion connected to the first conductor portion. The first conductor portion is led out of a casing containing the electrodes and liquid-tightly sealed at a first through-hole formed in the casing. The second conductor portion is led out of the fuel tank through a second through-hole formed in the fuel tank. Since the first through-hole is sufficiently sealed to prevent pressurized mixture fuel in the casing from leaking into an inner space of the fuel tank, sealing of the second through-hole can be simplified.
摘要翻译： 用于检测由石油 - 燃料和醇组成的混合燃料中的醇密度的酒精密度传感器安装在机动车辆的燃料箱中。 醇浓度传感器包括浸在混合燃料中的一对电极和用于将电极连接到具有电路板的控制单元的导体部分。 导体部分由与电极整体形成的第一导体部分和连接到第一导体部分的第二导体部分组成。 第一导体部分从包含电极的壳体引出并且在形成于壳体中的第一通孔处被液密密封。 第二导体部分通过形成在燃料箱中的第二通孔从燃料箱引出。 由于第一通孔被充分密封以防止壳体内的加压混合燃料泄漏到燃料箱的内部空间中，所以能够简化第二通孔的密封。
-
公开(公告)号：US08025475B2
公开(公告)日：2011-09-27
申请号：US11892677
申请日：2007-08-24
申请人： Shinji Wakabayashi
发明人： Shinji Wakabayashi
IPC分类号： G06F7/00
CPC分类号： H01L21/67748 , H01L21/681 , Y10S414/136
摘要： One sensor constituted of a light emission element and a light-receiving element is provided in a path through which a wafer is transferred. The sensor is positioned so that the wafer passes through an area between the light emission element and the light-receiving element. Coordinates of the center of the wafer are calculated based on encoder values obtained when the wafer starts passing through the sensor and when the wafer completes passing through the sensor, position data of wafer transfer arm corresponding to the encoder value, and the diameter of the wafer; and thereby the amount of positional deviation of the center of the wafer from a reference position is calculated.
摘要翻译： 在发送晶片的路径中设置由发光元件和受光元件构成的一个传感器。 传感器被定位成使得晶片通过发光元件和光接收元件之间的区域。 基于晶片开始通过传感器时获得的编码器值，并且当晶片完成通过传感器时，根据编码器值对应的晶片传送臂的位置数据和晶片的直径来计算晶片中心的坐标 ; 从而计算晶片的中心与基准位置的位置偏差量。
-
公开(公告)号：US08021513B2
公开(公告)日：2011-09-20
申请号：US11892430
申请日：2007-08-22
申请人： Shinji Wakabayashi
发明人： Shinji Wakabayashi
IPC分类号： H01L21/306
CPC分类号： H01L21/67017 , H01L21/67778 , H01L21/68
摘要： A substrate processing apparatus, adapted to provide a process, such as etching, to a substrate, includes a processing vessel, an ambient atmospheric carrying chamber, a carrying member for carrying the substrate, and a functional module located on a carrying route of the substrate. A first air stream is provided in the ambient atmospheric carrying chamber, and a second air stream is provided in the functional module so as to create a stream of air directed toward the ambient atmospheric carrying chamber from the functional module so as to prevent by-products of the process provided to the substrate from entering the functional module.
摘要翻译： 一种基板处理装置，其适于向基板提供诸如蚀刻的处理，包括处理容器，环境大气承载室，用于承载基板的承载构件和位于基板的承载路径上的功能模块 。 第一气流设置在环境大气输送室中，第二空气流设置在功能模块中，以产生从功能模块朝向环境大气承载室的空气流，以防止副产物 提供给衬底的过程进入功能模块。
-
公开(公告)号：US20080300782A1
公开(公告)日：2008-12-04
申请号：US12100198
申请日：2008-04-09
申请人： Shigeru Kohno , Shinji Wakabayashi
发明人： Shigeru Kohno , Shinji Wakabayashi
IPC分类号： G01C21/00
CPC分类号： G01C21/3688
摘要： When an operation mode (a latest cooperation mode) immediately before removal of a portable navigation device and an operation mode (a latest independence mode) immediately before remounting of the portable navigation device are the same, an MPU performs processing using processing data in the latest independence mode and takes over a route-guidance operation or a content-playback operation that was independently performed by the portable navigation device. On the other hand, when the latest cooperation mode and the latest independence mode are different from each other, the MPU performs processing using processing data in the latest cooperation mode and takes over a route-guidance operation or a content-playback operation that was performed by an in-vehicle apparatus and the portable navigation device in cooperation with each other.
摘要翻译： 在紧接移动便携式导航装置之前的操作模式（最新协同模式）和在重新安装便携式导航装置之前的操作模式（最新独立模式）相同时，MPU使用最新的处理数据进行处理 独立模式并且接管由便携式导航装置独立执行的路线引导操作或内容重放操作。 另一方面，当最新协作模式和最新独立模式彼此不同时，MPU使用最新协作模式中的处理数据执行处理，并且接管所执行的路由引导操作或内容重放操作 通过车载设备和便携式导航设备彼此协作。
-
7.发明申请公开(公告)号：US20080053957A1
公开(公告)日：2008-03-06
申请号：US11892661
申请日：2007-08-24
申请人： Shinji Wakabayashi
发明人： Shinji Wakabayashi
IPC分类号： H01L21/306
CPC分类号： H01L21/32137 , H01L21/6719 , H01L21/67201 , Y10S414/139
摘要： [Object]To provide a technique capable of avoiding or reducing the adverse influence on the equipment of an atmospheric carrying chamber when a substrate processed by the vacuum process is carried to the atmospheric carrying chamber. [Means for Solving the Problems]In the present invention, a posttreatment chamber for carrying out a posttreatment in an atmospheric atmosphere adjoins a load-lock chamber. Products produced on a substrate are removed by processing the substrate in the posttreatment chamber before the substrate is carried to an atmospheric carrying chamber. A carrying means installed in the said atmospheric carrying chamber caries the substrate to and from the said posttreatment chamber. The said posttreatment chamber and the atmospheric carrying chamber are separated from each other by a partition wall, and the partition wall is provided with an opening having the shape of a slit through which the said carrying means and the substrate can pass. The said carrying means carries the substrate into and out of the posttreatment chamber through the slit.
摘要翻译： 提供一种技术，当通过真空处理的基板被携带到大气承载室时，能够避免或减少对大气承载室的设备的不利影响。 解决问题的手段在本发明中，用于在大气气氛中进行后处理的后处理室与负载锁定室相邻。 在将衬底运送到大气承载室之前，通过在后处理室中处理衬底来除去在衬底上产生的产物。 安装在所述大气承载室中的承载装置使基板与所述后处理室相接触。 所述后处理室和大气承载室通过隔壁彼此分离，并且分隔壁设置有具有狭缝形状的开口，所述承载装置和基板可以通过该狭缝形成。 所述携带装置通过狭缝将衬底输送进入后处理室。
-
公开(公告)号：US07221157B2
公开(公告)日：2007-05-22
申请号：US11050672
申请日：2005-02-07
摘要： Two Hall element forming arrangements are formed on a semiconductor substrate. Each Hall element forming arrangement includes a Hall element that is formed in a principal surface of the semiconductor substrate. A base is formed separately from the semiconductor substrate. Then, the base is disposed at a rear surface of the semiconductor substrate and holds the semiconductor substrate and the Hall element forming arrangements. The base includes a holding surface, which holds the semiconductor substrate, and two slant surfaces, each of which is slanted relative to the holding surface. Each Hall element forming arrangement is held on a corresponding one of the at least one slant surface of the base.
摘要翻译： 在半导体衬底上形成两个霍尔元件形成装置。 每个霍尔元件形成装置包括形成在半导体衬底的主表面中的霍尔元件。 基底与半导体衬底分开形成。 然后，将基底设置在半导体衬底的后表面并保持半导体衬底和霍尔元件形成装置。 基座包括保持半导体基板的保持表面和两个相对于保持表面倾斜的倾斜表面。 每个霍尔元件形成布置被保持在基座的至少一个倾斜表面中相应的一个上。
-
9.发明授权Rotational speed sensor with unfixed and/or fixed edge speed calculation modes 失效具有不固定和/或固定边缘速度计算模式的转速传感器
公开(公告)号：US4908572A
公开(公告)日：1990-03-13
申请号：US220625
申请日：1988-07-18
CPC分类号： G01P3/489 , G01D5/2451 , G01P3/488
摘要： A cycle time of pulses converted from an electrical signal generated at a rotational sensor is counted. In determining a cycle of the pulses, either a rising edge or a falling edge of the pulse is selected. As the selection of the either edge affects accuracy of the rotational speed measurement, two modes are proposed. One is suitable for a lower speed range in which either of the rising and falling edges is selected for every pulse monitoring period considering the relative phase position of the pulse and the pulse monitoring period. The other is suitable for a higher speed range in which one fixed edge is utilized. Here the edge is selected depending on the winding direction of the electric wire of the pick-up coil of the rotational sensor and independent of the pulse monitoring period.
摘要翻译： 从在旋转传感器处产生的电信号转换的脉冲的周期时间被计数。 在确定脉冲的周期时，选择脉冲的上升沿或下降沿。 由于任一边的选择影响转速测量的精度，因此提出了两种模式。 一个适用于考虑到脉冲的相对相位位置和脉冲监视周期的每个脉冲监视周期中选择上升沿和下降沿的较低速度范围。 另一个适用于使用一个固定边缘的较高速度范围。 这里根据旋转传感器的拾取线圈的电线的卷绕方向选择边缘，而与脉冲监视周期无关。
-
公开(公告)号：US4834170A
公开(公告)日：1989-05-30
申请号：US111799
申请日：1987-10-22
IPC分类号： B60H1/00
CPC分类号： B60H1/00064
摘要： An automobile air conditioner includes a duct interconnecting a blower unit and a temperature control/air distributing unit having a pair of cooling and heating heat exchangers, the duct having a cross-sectional area gradually increasing toward the temperature control/air distributing unit. The air conditioner preferably has a hot/refrigeration compartment disposed in juxtaposition with the duct. In a preferred embodiment, the air conditioner includes a hot air control mode door for controlling a stream of hot air flowing from the heating heat exchanger toward an upper air outlet and a lower air outlet.
摘要翻译： 汽车空调包括将鼓风机单元与具有一对制冷加热热交换器的温度控制/空气分配单元相连接的管道，该管道的横截面积朝向温度控制/空气分配单元逐渐增加。 空调器优选地具有与管道并置设置的热/冷藏室。 在优选实施例中，空调包括一个热空气控制模式门，用于控制从加热热交换器朝向上部空气出口和下部空气出口流动的热空气流。
-
-
-
-
-
-
-
-
-
搜索结果
42 条记录 (耗时 0.02 秒)
