公开(公告)号：US08486196B2

公开(公告)日：2013-07-16

申请号：US12601314

申请日：2008-05-15

申请人： Masayuki Toda ,  Masaki Kusuhara ,  Masaru Umeda ,  Mitsuru Fukagawa

发明人： Masayuki Toda ,  Masaki Kusuhara ,  Masaru Umeda ,  Mitsuru Fukagawa

IPC分类号： C23C16/00 ,  F01M11/03 ,  B01D21/24 ,  B01D24/38 ,  B01D29/88 ,  B01D33/70

CPC分类号： C23C16/407 ,  C23C16/4486

摘要： Because an evaporating apparatus for use in an MOCVD film deposition system has a structure in which a plurality of gas passages brings in a gas from the upper direction, the apparatus has a difficulty to position a jet nozzle, and the apparatus is incapable of accurately controlling the pressure and flow rate of a carrier gas mixed with a raw material solution to be issued into an evaporating unit, and it is thus difficult to highly accurately control the composition of MOCVD films. A plurality of gas passages is arranged on a flat, disk-shaped plate. With this configuration, the accurate positioning of the jet nozzle can be made easier, and the composition of MOCVD films can be controlled highly accurately.

摘要翻译： 由于用于MOCVD膜沉积系统的蒸发装置具有多个气体通道从上方引入气体的结构，所以该装置难以定位喷嘴，并且该装置不能精确地控制 与要发放到蒸发单元中的原料溶液混合的载气的压力和流速，因此难以高精度地控制MOCVD膜的组成。 多个气体通道设置在平坦的盘形板上。 利用这种结构，可以使喷嘴的精确定位变得更容易，并且可以高精度地控制MOCVD膜的组成。

公开(公告)号：US20100173073A1

公开(公告)日：2010-07-08

申请号：US12601314

申请日：2008-05-15

申请人： Masayuki Toda ,  Masaki Kusuhara ,  Masaru Umeda ,  Mitsuru Fukagawa

发明人： Masayuki Toda ,  Masaki Kusuhara ,  Masaru Umeda ,  Mitsuru Fukagawa

IPC分类号： C23C16/455 ,  C23C16/00

CPC分类号： C23C16/407 ,  C23C16/4486

摘要： Because an evaporating apparatus for use in an MOCVD film deposition system has a structure in which a plurality of gas passages brings in a gas from the upper direction, the apparatus has a difficulty to position a jet nozzle, and the apparatus is incapable of accurately controlling the pressure and flow rate of a carrier gas mixed with a raw material solution to be issued into an evaporating unit, and it is thus difficult to highly accurately control the composition of MOCVD films. A plurality of gas passages is arranged on a flat, disk-shaped plate. With this configuration, the accurate positioning of the jet nozzle can be made easier, and the composition of MOCVD films can be controlled highly accurately.

摘要翻译： 由于用于MOCVD膜沉积系统的蒸发装置具有多个气体通道从上方引入气体的结构，所以该装置难以定位喷嘴，并且该装置不能精确地控制 与要发放到蒸发单元中的原料溶液混合的载气的压力和流速，因此难以高精度地控制MOCVD膜的组成。 多个气体通道设置在平坦的盘形板上。 利用这种结构，可以使喷嘴的精确定位变得更容易，并且可以高精度地控制MOCVD膜的组成。

公开(公告)号：US20050189620A1

公开(公告)日：2005-09-01

申请号：US10789795

申请日：2004-02-25

申请人： Takashi Sugino ,  Masaki Kusuhara ,  Masaru Umeda

发明人： Takashi Sugino ,  Masaki Kusuhara ,  Masaru Umeda

IPC分类号： H01L21/28 ,  H01L21/283 ,  H01L21/314 ,  H01L21/331 ,  H01L21/335 ,  H01L21/768 ,  H01L23/522 ,  H01L29/12 ,  H01L29/20

CPC分类号： H01L21/02175 ,  H01L21/02274 ,  H01L21/314 ,  H01L29/2003 ,  H01L29/66318 ,  H01L29/66462

摘要： A high performance semiconductor device that can realize surface protection and surface inactivation and is fabricated using a film formation method and technique that enable improvement of high frequency characteristics, and an electronic device for a communication system including the semiconductor device, are provided. The semiconductor device is characterized in that a film having boron, carbon, and nitrogen as main components and to which sulfur is added serves as a surface protection film, and at least part of a surface is covered.

摘要翻译： 提供一种能够实现表面保护和表面失活的高性能半导体器件，并且使用能够提高高频特性的成膜方法和技术以及包括该半导体器件的通信系统的电子设备来制造。 半导体器件的特征在于，以硼，碳和氮为主要成分并加入硫的膜用作表面保护膜，并且覆盖表面的至少一部分。

公开(公告)号：US06540840B1

公开(公告)日：2003-04-01

申请号：US09488764

申请日：2000-01-21

申请人： Masayuki Toda ,  Masaki Kusuhara ,  Mikio Doi ,  Masaru Umeda ,  Mitsuru Fukagawa ,  Yoichi Kanno ,  Osamu Uchisawa ,  Kohei Yamamoto ,  Toshikatu Meguro

发明人： Masayuki Toda ,  Masaki Kusuhara ,  Mikio Doi ,  Masaru Umeda ,  Mitsuru Fukagawa ,  Yoichi Kanno ,  Osamu Uchisawa ,  Kohei Yamamoto ,  Toshikatu Meguro

IPC分类号： C23C1600

CPC分类号： C23C16/4486 ,  C23C16/409

摘要： Disclosed is a vaporizer constituted of a dispersing section 8 and a vaporizing section 22. The dispersing section 8 comprises a gas introduction port 4 for introducing a carrier gas 3 under pressure into a gas passage, means for feeding raw material solutions 5a and 5b to the gas passage, and a gas outlet 7 for delivering the carrier gas containing the raw material solutions to the vaporizing section 22. The vaporizing section 22 comprises a vaporizing tube 20 having one end connected to a reaction tube of the MOCVD system and having the other end connected to the gas outlet 7 of the dispersing section 8, and heating means for heating the vaporizing tube 20. The vaporizing section 22 serves to heat and vaporize the raw material solution containing carrier gas 3 delivered from the dispersing section 8. The dispersing section 8 includes a dispersing section body 1 having a cylindrical hollow portion, and a rod 10 having an outer diameter smaller than the inner diameter of the cylindrical hollow portion. The rod 10 has a spiral groove 60 formed in the external periphery closer to the vaporizing section 22, the rod 10 being inserted into the cylindrical hollow portion.

公开(公告)号：US20140050852A1

公开(公告)日：2014-02-20

申请号：US14001910

申请日：2012-02-27

申请人： Masaru Umeda ,  Masayuki Toda

发明人： Masaru Umeda ,  Masayuki Toda

IPC分类号： C23C16/448

CPC分类号： C23C16/4481

摘要： To obtain a vaporizer in which thin film-forming raw material solutions are stably and reliably carried by a carrier gas while being reliably separated within the dispersion unit body and the plurality of thin film-forming raw material solutions are stably vaporized in the subsequent vaporization unit, a center rod used in the vaporizer, and a method for vaporizing raw materials entrained by a carrier gas. A carrier gas introduction bore is formed in the center axis direction of the dispersion unit body. A center rod is inserted in the carrier gas introduction bore. The interspace between the inner wall of the bore and the outer wall of the rod forms a gas passage. Multiple thin film-forming material supply units are situated midway of the gas passage of the dispersion unit body, supplying thin film-forming materials. The center rod has sealing members in the longitudinal direction of the center rod.

摘要翻译： 为了得到蒸发器，其中薄膜形成原料溶液在分散单元体内被可靠地分离的同时由载气稳定可靠地携带，并且多个薄膜形成原料溶液在随后的蒸发单元中稳定蒸发 ，用于蒸发器的中心杆，以及用于气化由载气夹带的原料的方法。 在分散体主体的中心轴方向上形成载气导入孔。 中心杆插入载气导入孔中。 孔的内壁和杆的外壁之间的间隙形成气体通道。 多个薄膜形成材料供应单元位于分散单元主体的气体通道的中间，供应薄膜形成材料。 中心杆在中心杆的纵向具有密封构件。

公开(公告)号：US07744698B2

公开(公告)日：2010-06-29

申请号：US10310578

申请日：2002-12-05

申请人： Masayuki Toda ,  Masaki Kusuhara ,  Mikio Doi ,  Masaru Umeda ,  Mitsuru Fukagawa ,  Yoichi Kanno ,  Osamu Uchisawa ,  Kohei Yamamoto ,  Toshikatu Meguro

发明人： Masayuki Toda ,  Masaki Kusuhara ,  Mikio Doi ,  Masaru Umeda ,  Mitsuru Fukagawa ,  Yoichi Kanno ,  Osamu Uchisawa ,  Kohei Yamamoto ,  Toshikatu Meguro

IPC分类号： C23C16/00

CPC分类号： C23C16/4486 ,  C23C16/409

摘要： Disclosed is a vaporizer constituted of a dispersing section 8 and a vaporizing section 22. The dispersing section 8 comprises a gas introduction port 4 for introducing a carrier gas 3 under pressure into a gas passage, means for feeding raw material solutions 5a and 5b to the gas passage, and a gas outlet 7 for delivering the carrier gas containing the raw material solutions to the vaporizing section 22. The vaporizing section 22 comprises a vaporizing tube 20 having one end connected to a reaction tube of the MOCVD system and having the other end connected to the gas outlet 7 of the dispersing section 8, and heating means for heating the vaporizing tube 20. The vaporizing section 22 serves to heat and vaporize the raw material solution containing carrier gas 3 delivered from the dispersing section 8. The dispersing section 8 includes a dispersing section body 1 having a cylindrical hollow portion, and a rod 10 having an outer diameter smaller than the inner diameter of the cylindrical hollow portion. The rod 10 has a spiral groove 60 formed in the external periphery closer to the vaporizing section 22, the rod i0 being inserted into the cylindrical hollow portion.

摘要翻译： 公开了由分散部8和蒸发部22构成的蒸发器。分散部8包括用于将载气3在压力下导入气体通道的气体导入口4，将原料溶液5a，5b供给到 气体通道和用于将含有原料溶液的载气输送到汽化部分22的气体出口7.蒸发部分22包括蒸发管20，其一端连接到MOCVD系统的反应管，并具有另一端 连接到分散部8的气体出口7，以及用于加热蒸发管20的加热装置。蒸发部22用于加热和蒸发从分散部8输送的含有载气3的原料溶液。分散部8 包括具有圆柱形中空部分的分散部分主体1和具有小于圆柱形内径的外径的杆10 l中空部分。 杆10具有形成在更靠近蒸发部22的外周中的螺旋槽60，杆i0插入到圆筒形中空部中。

公开(公告)号：US07673856B2

公开(公告)日：2010-03-09

申请号：US11496407

申请日：2006-08-01

申请人： Masayuki Toda ,  Masaki Kusuhara ,  Masaru Umeda ,  Mitsuru Fukagawa

发明人： Masayuki Toda ,  Masaki Kusuhara ,  Masaru Umeda ,  Mitsuru Fukagawa

IPC分类号： B01F3/04

CPC分类号： H01L27/11502 ,  B01B1/005 ,  B01D3/346 ,  B01F3/04021 ,  B01F5/0646 ,  B01F5/0653 ,  B01F5/0656 ,  B01F5/0671 ,  B01F5/0676 ,  C23C16/40 ,  C23C16/409 ,  C23C16/4486 ,  H01L21/31691 ,  H01L27/11507 ,  H01L28/55 ,  Y10S261/65

摘要： A vaporizer has gas passage formed inside of main body of a dispersion part, a gas inlet opening to introduce pressurized carrier gas into gas passage, a part to supply raw materials solution to carrier gas passing gas passage, a gas outlet to send carrier gas including dispersed raw material solution to vaporization part, a dispersion part to flow through gas passage having a part to cool, a vaporization pipe connected with a reaction part and gas outlet of dispersion part of the device, and a heater to heat vaporization pipe is provided, a vaporization part to heat and vaporizes the carrier gas where raw materials solution is dispersed is provided, and a radiation prevention portion having small hole for the outside of gas outlet is provided.

摘要翻译： 蒸发器在分散部分的主体内部形成气体通道，气体入口用于将加压的载气引入气体通道，将原料溶液供应到载气通过气体通道的部分，气体出口以输送载气，包括 将原料溶液分散到蒸发部分，分散部分流过具有部分冷却的气体通道，提供与装置的分散部分的反应部分和气体出口连接的蒸发管和加热器以加热蒸发管， 设置用于使分散有原料溶液的载气加热蒸发的蒸发部，具有用于气体出口外部的小孔的防辐射部。

公开(公告)号：US06315501B1

公开(公告)日：2001-11-13

申请号：US09403380

申请日：1999-12-27

申请人： Michio Yagai ,  Masayuki Toda ,  Masaru Umeda

发明人： Michio Yagai ,  Masayuki Toda ,  Masaru Umeda

IPC分类号： B65G5100

CPC分类号： H01L21/67784

摘要： An air stream transfer apparatus capable of preventing particles in a transfer passage from adhering to an object to be processed and removing the particles. The apparatus includes that of a transfer face and a transfer passage partition both constituting a transfer passage, which are made of an electroconductive material and each have a thin insulating layer on the surface. A planer dust collecting electrode is opposed to an object to be processed and mechanism is provided for bringing the dust collecting electrode and the face to be cleared of dust close to each other while jetting air. A mechanism is provided for applying voltages between the transfer face and the dust collecting electrode and between the transfer passage partition and the dust collecting electrode and between the transfer passage partition and the dust collecting electrode. Another apparatus is characterized in that a transfer face and a transfer passage partition both constituting a transfer passage are made of an electroconductive material and each has a thin insulating layer on the surface. A mechanism for transferring a pre-charged semiconductive plate-shaped body along the transfer passage is provided, and the semiconductive plate-shaped body used as a dust collecting electrode.

摘要翻译： 一种气流传送装置，其能够防止传送通道中的颗粒粘附到待处理物体并除去颗粒。 该装置包括由导电材料制成并且每个在表面上具有薄绝缘层的构成传送通道的传送面和传送通道隔板。 平板式集尘电极与待处理物体相对，并且设置有用于使灰尘收集电极和面部被灰尘彼此靠近而排出的机构，同时喷射空气。 提供了一种用于在转印面和集尘电极之间以及传送通道隔板与集尘电极之间以及传送通道隔板与集尘电极之间施加电压的机构。 另一种装置的特征在于，构成传送通道的传送面和传送通道隔板由导电材料制成，并且在表面上各具有薄的绝缘层。 提供了一种用于沿着传送通道传送预充电的半导体板状体的机构，并且用作集尘电极的半导体板状体。

公开(公告)号：US08897627B2

公开(公告)日：2014-11-25

申请号：US13147668

申请日：2010-01-27

申请人： Masayuki Toda ,  Masaru Umeda

发明人： Masayuki Toda ,  Masaru Umeda

IPC分类号： A01G13/06 ,  A61M16/00 ,  C23C16/448 ,  B01B1/00

CPC分类号： B01B1/005 ,  C23C16/4481

摘要： Provided is a vaporizer that can efficiently cool a carrier gas, improve the effect of preventing a material from being clogged near the outlet port of a gas passage, contribute to prolonging the timing of maintenance and improving operating efficiency, and exert more uniform dispersing effect. A vaporizer includes: a center rod inserted into a carrier gas introduction hole formed in a disperser to form the gas passage in cooperation with the inner wall of the carrier gas introduction hole; a cooling part disposed on the outer circumferential side of the carrier gas introduction hole in the disperser to cool the inside of the gas passage; a cooling member insertion hole formed across almost the entire length of the center rod along the axial direction of the center rod; and a cooling member disposed in the inside of the cooling member insertion hole to cool the center rod.

摘要翻译： 本发明提供一种能够有效地冷却载气的蒸发器，提高防止材料在气体通路的出口附近堵塞的效果，有助于延长维护时间，提高作业效率，发挥更均匀的分散效果。 蒸发器包括：插入到分散器中形成的载气导入孔中的中心杆，与载气引入孔的内壁配合形成气体通道; 冷却部，其设置在所述分散器中的所述载气导入孔的外周侧，以冷却所述气体通道的内部; 沿所述中心杆的轴向方向跨过所述中心杆的整个长度形成的冷却构件插入孔; 以及设置在冷却部件插入孔的内部以冷却中心杆的冷却部件。

公开(公告)号：US20080031696A1

公开(公告)日：2008-02-07

申请号：US11630437

申请日：2005-06-22

申请人： Masayuki Toda ,  Masaru Umeda

发明人： Masayuki Toda ,  Masaru Umeda

IPC分类号： B65G51/03

CPC分类号： B65G51/03 ,  B65G47/24 ,  H01L21/67784

摘要： A levitation transportation device capable of adjustment when an object being transported is displaced from the center of a transportation path, A levitation transportation device having a transportation path forming a transportation router for an object to be transported, a plurality of jetting nozzles for transporting the object in a levitated manner along the transportation path, one or more detection sections for detecting the direction of the transportation of the object being transported in the transportation path and a control section for independently controlling the plurality of jetting nozzles based on a detection result by the detection sections.

摘要翻译： 一种悬挂运输装置，其能够在被输送物体从输送路径的中心位移时进行调节; A，具有形成用于被输送物体的输送路径的输送路径的悬浮输送装置，多个用于输送物体的喷射喷嘴 沿着输送路径以悬浮方式，一个或多个检测部分，用于检测运输路径中运输物体的运输方向;以及控制部分，用于根据检测结果检测多个喷嘴 部分。