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    Fluid control device
    21.
    发明授权
    Fluid control device 失效
    流体控制装置

    公开(公告)号：US6135155A

    公开(公告)日：2000-10-24

    申请号：US655022

    申请日：1996-05-29

    申请人： Tadahiro Ohmi ,  Michio Yamaji ,  Hiroshi Morokoshi ,  Shigeru Itoi ,  Nobukazu Ikeda ,  Tetsuya Kojima

    发明人： Tadahiro Ohmi ,  Michio Yamaji ,  Hiroshi Morokoshi ,  Shigeru Itoi ,  Nobukazu Ikeda ,  Tetsuya Kojima

    IPC分类号： F16K27/00 ,  G05D7/01 ,  G05D16/04 ,  F16K11/10

    CPC分类号： F16K27/003 ,  G05D16/04 ,  G05D7/01 ,  Y10T137/87885

    摘要： A regulator for regulating a flow rate is provided with an upper connector having a downwardly opened channel in communication with the regulator. An on-off valve connected to the regulator is provided with a lower connector having an upwardly opened channel in communication with the on-off valve. The upper connector is lapped over the lower connector and removably joined thereto with a screw so as to cause the downwardly opened channel to communicate with the upwardly opened channel. Accordingly, the regulator can be removed singly, for example, when malfunctioning.

    摘要翻译： 用于调节流速的调节器设置有具有与调节器连通的向下打开的通道的上连接器。 连接到调节器的开关阀设置有具有与开关阀连通的向上开口的通道的下连接器。 上连接器在下连接器上被覆盖并且用螺钉可拆卸地连接到其上，以便使向下打开的通道与向上打开的通道连通。 因此，可以单独地去除调节器，例如当故障时。

    Fluid coupling
    22.
    发明授权
    Fluid coupling 失效
    流体联轴器

    公开(公告)号：US5904381A

    公开(公告)日：1999-05-18

    申请号：US949431

    申请日：1997-10-14

    申请人： Tadahiro Ohmi ,  Tsutomu Shinohara ,  Michio Yamaji ,  Nobukazu Ikeda ,  Keiji Hirao

    发明人： Tadahiro Ohmi ,  Tsutomu Shinohara ,  Michio Yamaji ,  Nobukazu Ikeda ,  Keiji Hirao

    IPC分类号： F16L23/032 ,  F16L23/16 ,  F16L23/18 ,  F16L25/00

    CPC分类号： F16L23/032 ,  F16L23/16 ,  F16L23/18 ,  Y10S285/917

    摘要： Each of two coupling members is formed in an abutting end lace thereof with a recessed portion for accommodating a gasket and a retainer therein, and the recessed portion has a retainer holding hollow cylindrical portion formed centrally on a bottom surface thereof and provided on an end face thereof with an annular projection for clamping the gasket. The gasket comprises a small portion and a large portion having a greater outside diameter than the small portion. The retainer is attached to the cylindrical portion of the coupling member with which the gasket small portion is in contact.

    摘要翻译： 两个联接构件中的每一个形成为具有邻接端部花边的凹部，用于在其中容纳垫圈和保持器，凹部具有保持器保持件，中空圆柱形部分在其底表面上形成在中心并设置在端面上 具有用于夹持垫圈的环形突起。 垫圈包括小部分和大部分具有比小部分更大的外径。 保持器附接到与垫圈小部分接触的联接构件的圆柱形部分。

    Pipe joint
    23.
    发明授权
    Pipe joint 失效
    管接头

    公开(公告)号：US5482332A

    公开(公告)日：1996-01-09

    申请号：US329963

    申请日：1994-10-27

    申请人： Tadahiro Ohmi ,  Tsutomu Shinohara ,  Michio Yamaji ,  Nobukazu Ikeda ,  Kenji Yamamoto

    发明人： Tadahiro Ohmi ,  Tsutomu Shinohara ,  Michio Yamaji ,  Nobukazu Ikeda ,  Kenji Yamamoto

    IPC分类号： F16L19/02 ,  F16L19/03 ,  F16L27/08 ,  F16L25/00

    CPC分类号： F16L27/0824 ,  F16L19/0212 ,  Y10S285/917

    摘要： A pair of tubular joint members each have a gasket holding annular protuberance on an abutting end face thereof. The protuberance has an inner peripheral surface continuous with the inner peripheral surface of the joint member, and a sealing face adapted to intimately contact an end face of of a gasket at a position radially outward from the inner peripheral surface thereof. The sealing face is most protuberant at a position radially outward from an inner edge thereof. When the most protuberant end of the sealing face comes into contact with the gasket end face, a clearance is formed between the portion of the sealing face radially inward from the protuberant end and the radially inward portion of the gasket end face. The clearance is eliminated by the deformation of the gasket when the pipe joint is tightened up.

    摘要翻译： 一对管状接头构件各自具有在其邻接端面上保持环形突起的垫圈。 突起具有与接合构件的内周面连续的内周面，以及密封面，其适于在其内周面的径向外侧的位置处与垫圈的端面紧密接触。 密封面在其内缘的径向外侧的位置处是最隆起的。 当密封面的最突起的端部与垫圈端面接触时，在密封面的从突出端部的径向向内部分和垫圈端面的径向向内部分之间形成间隙。 当管接头拧紧时，通过垫圈的变形消除间隙。

    Method and apparatus for detection of orifice clogging in pressure-type flow rate controllers
    24.
    发明授权
    Method and apparatus for detection of orifice clogging in pressure-type flow rate controllers 有权
    用于检测压力型流量控制器孔堵塞的方法和装置

    公开(公告)号：US06302130B1

    公开(公告)日：2001-10-16

    申请号：US09529985

    申请日：2000-07-18

    申请人： Tadahiro Ohmi ,  Seiichi Iida ,  Satoshi Kagatsume ,  Jun Hirose ,  Kouji Nishino ,  Nobukazu Ikeda ,  Michio Yamaji ,  Ryousuke Dohi ,  Kazuhiro Yoshikawa ,  Mutsunori Koyomogi ,  Tomio Uno ,  Eiji Ideta ,  Takashi Hirose

    发明人： Tadahiro Ohmi ,  Seiichi Iida ,  Satoshi Kagatsume ,  Jun Hirose ,  Kouji Nishino ,  Nobukazu Ikeda ,  Michio Yamaji ,  Ryousuke Dohi ,  Kazuhiro Yoshikawa ,  Mutsunori Koyomogi ,  Tomio Uno ,  Eiji Ideta ,  Takashi Hirose

    IPC分类号： F17D116

    CPC分类号： G05D7/0635 ,  Y10T137/0396 ,  Y10T137/7759 ,  Y10T137/7761 ,  Y10T137/8326

    摘要： A method and apparatus for detection of clogging of an orifice by measuring the upstream side pressure without breaking up the piping system in a flow rate control unit using an orifice, so as to extend the life of the flow rate control unit and enhance its safety. The apparatus of detecting clogging of an orifice in a pressure-type flow rate controller has a control valve (CV), an orifice (2), a pressure detector (14) for measuring the upstream pressure P1 therebetween, and a flow rate setting circuit (32) wherein, with the upstream pressure P1 maintained about two or more times higher than the downstream pressure P2, the downstream flow rate QC is calculated with the equation QC=KP1 (K=constant) and wherein the control valve (CV) is controlled by the difference signal QY between the calculated flow rate QC and the set flow rate QS. The apparatus comprises: a storage memory M memorizing standard pressure attenuation data Y(t) of the upstream pressure P1 measured with the flow rate switched from the high set flow rate QSH to the low set flow rate QSL with the orifice (2) not clogged, a pressure detector (14) for determination of the pressure attenuation data P(t) of the upstream pressure P1 with the flow rate switched from the high set flow rate QSH to the low set flow rate QSL with the orifice (2) in the actual conditions, a central processing unit CPU for checking the pressure attenuation data P(t) against standard pressure attenuation data Y(t), and an alarm circuit (46) that turns on a clogging alarm when the pressure attenuation data P(t) deviates from standard pressure attenuation data Y(t) to a specific degree or beyond that.

    摘要翻译： 一种用于通过测量上游侧压力而不破坏使用孔口的流量控制单元中的管道系统来检测孔口堵塞的方法和装置，以延长流量控制单元的寿命并提高其安全性。 检测压力型流量控制器中的孔口堵塞的装置具有控制阀（CV），用于测量其上游压力P1的孔口（2），压力检测器（14）和流量设定电路 （32）其中，在上游压力P1保持大于下游压力P2的两倍或更多倍的情况下，下游流量QC用等式QC = KP1（K =常数）计算，并且其中控制阀（CV）为 由计算流量QC和设定流量QS之间的差分信号QY控制。 该装置包括：存储存储器M，存储以从高设定流量QSH切换到低设定流量QSL的流量测量的上游压力P1的标准压力衰减数据Y（t），其中孔口（2）没有堵塞 ，用于确定上游压力P1的压力衰减数据P（t）的压力检测器（14），其中流量从高设定流量QSH切换到具有孔口（2）的低设定流量QSL 实际情况是用于根据标准压力衰减数据Y（t）检测压力衰减数据P（t）的中央处理单元CPU以及当压力衰减数据P（t）偏离时引起堵塞报警的报​​警电路（46） 从标准压力衰减数据Y（t）到特定程度或以上。

    Fluid control valve and fluid supply/exhaust system
    26.
    发明授权
    Fluid control valve and fluid supply/exhaust system 有权
    流体控制阀和流体供应/排气系统

    公开(公告)号：US06193212B1

    公开(公告)日：2001-02-27

    申请号：US09308922

    申请日：1999-07-23

    申请人： Tadahiro Ohmi ,  Migaku Takahashi ,  Michio Yamaji ,  Tsuyoshi Tanikawa ,  Nobukazu Ikeda ,  Ryosuke Dohi ,  Kouji Nishino ,  Naofumi Yasumoto ,  Hiroyuki Fukuda ,  Tomio Uno ,  Yasuyuki Yanai

    发明人： Tadahiro Ohmi ,  Migaku Takahashi ,  Michio Yamaji ,  Tsuyoshi Tanikawa ,  Nobukazu Ikeda ,  Ryosuke Dohi ,  Kouji Nishino ,  Naofumi Yasumoto ,  Hiroyuki Fukuda ,  Tomio Uno ,  Yasuyuki Yanai

    IPC分类号： F16K3102

    CPC分类号： F16K31/082 ,  F16K7/14 ,  F16K31/0655 ,  F16K31/0672 ,  Y10T137/8242

    摘要： A fluid control valve, which can control a fluid having a pressure in the order of 10 kg/cm2, has a response time in the order of several milliseconds can be made small in size, and a fluid supply/exhaust system that provides less gas counter flow in the event of a plurality of valves being used. A fluid control valve of the invention controls a fluid moving in a valve body by closing and opening a portion between a valve seat and a valve holder by use of a drive unit. The drive unit has a rod-shaped shaft for application of pressure through the valve seat and the valve holder, and a member “a” fixed around the rod-shaped shaft. The member “a” is made from a magnetic material, and has a space between it and the shaft. A coil provided in parallel to the shaft, moves the shaft via the member “a” up and down by electromagnetic induction, and makes use of a spring force to close and open a portion between the valve seat and the valve holder.

    摘要翻译： 可以控制具有10kg / cm 2量级的压力的流体的流体控制阀具有大约几毫秒数量级的响应时间，并且可以使得提供较少气体的流体供应/排出系统 在使用多个阀的情况下的逆流。 本发明的流体控制阀通过使用驱动单元闭合和打开阀座和阀座之间的部分来控制在阀体中移动的流体。 驱动单元具有用于通过阀座和阀保持器施加压力的杆状轴和围绕杆状轴固定的构件“a”。 构件“a”由磁性材料制成，并且在其与轴之间具有空间。 平行于轴设置的线圈通过电磁感应使组件“a”上下移动，并利用弹簧力来封闭和打开阀座与阀座之间的一部分。

    Fluid supply apparatus
    27.
    发明授权
    Fluid supply apparatus 有权
    流体供应装置

    公开(公告)号：US06178995B2

    公开(公告)日：2001-01-30

    申请号：US09355872

    申请日：1999-08-05

    申请人： Tadahiro Ohmi ,  Tetu Kagazume ,  Kazuhiko Sugiyama ,  Ryousuke Dohi ,  Yukio Minami ,  Kouji Nishino ,  Kouji Kawata ,  Nobukazu Ikeda ,  Michio Yamaji

    发明人： Tadahiro Ohmi ,  Tetu Kagazume ,  Kazuhiko Sugiyama ,  Ryousuke Dohi ,  Yukio Minami ,  Kouji Nishino ,  Kouji Kawata ,  Nobukazu Ikeda ,  Michio Yamaji

    IPC分类号： G05D706

    CPC分类号： G05D7/0635 ,  Y10T137/7759 ,  Y10T137/7761

    摘要： A fluid feeding apparatus includes parallel flow passages connected at their downstream side, each parallel passage including a pressure flow controller (C) for regulating the flow of fluid and a fluid changeover valve (D) for opening and closing the passage on the downstream side of the pressure flow controller. A fluid feeding control unit (B) controls the pressure flow controllers and changeover valves so that when a changeover valve is closed a control valve (1) upstream of the changeover valve is also closed to prevent a pressure buildup at the changeover valve. In addition to the control valve (1), each pressure flow controller includes an orifice (5) downstream from the control valve, a pressure detector (3) for sensing pressure (P1) in the passage at a point between the control valve and the orifice, and a calculation control unit (6) for producing a control signal Qy for controlling the drive (2) for the control valve. The calculation control unit first calculates a flow rate signal Qc=KP1, where K is a constant and P1 is the pressure sensed by the pressure detector. The calculation control unit then calculates Qy as the difference between a set point or flow rate specifying signal Qs and the calculated value Qc. Thus, the flow rate on the downstream side of the orifice is controlled by regulating the pressure P1 on the upstream side of the orifice via the control valve. The fluid feeding apparatus avoids transient overshooting at the start of fluid feeding and at fluid changeover time and is suitable for use in semiconductor manufacturing facilities and other gas supply systems where high precision is required.

    摘要翻译： 流体供给装置包括在其下游侧连接的平行流路，每个平行通道包括用于调节流体流动的压力流量控制器（C）和用于打开和关闭流体的下游侧的通道的流体切换阀（D） 压力流量控制器。 流体供给控制单元（B）控制压力流量控制器和切换阀，使得当切换阀关闭时，转换阀上游的控制阀（1）也被关闭以防止在转换阀处产生压力。 除了控制阀（1）之外，每个压力流量控制器包括在控制阀下游的孔口（5），压力检测器（3），用于感测通道中压力（P1）在控制阀和控制阀 孔，以及用于产生用于控制用于控制阀的驱动器（2）的控制信号Qy的计算控制单元（6）。 计算控制单元首先计算流量信号Qc = KP1，其中K是常数，P1是由压力检测器感测的压力。 计算控制单元然后计算Qy作为设定点或流量指定信号Qs与计算值Qc之间的差。 因此，通过控制阀调节孔口上游侧的压力P1来控制孔口下游侧的流量。 流体供给装置在流体供给开始时和流体切换时间期间避免瞬时过冲，并且适用于需要高精度的半导体制造设备和其它气体供应系统。

    Couplings for fluid controllers
    28.
    发明授权
    Couplings for fluid controllers 失效
    流体控制器联轴器

    公开(公告)号：US6039360A

    公开(公告)日：2000-03-21

    申请号：US73387

    申请日：1998-05-06

    申请人： Tadahiro Ohmi ,  Michio Yamaji ,  Tsutomu Shinohara ,  Shigeru Itoi ,  Keiji Hirao ,  Yuji Kawano ,  Shigeaki Tanaka ,  Kosuke Yokoyama ,  Hiroshi Morokoshi ,  Nobukazu Ikeda

    发明人： Tadahiro Ohmi ,  Michio Yamaji ,  Tsutomu Shinohara ,  Shigeru Itoi ,  Keiji Hirao ,  Yuji Kawano ,  Shigeaki Tanaka ,  Kosuke Yokoyama ,  Hiroshi Morokoshi ,  Nobukazu Ikeda

    IPC分类号： F16L15/00 ,  F16K27/00 ,  F16L39/00 ,  F16L41/02 ,  F17D1/02 ,  F16L3/26

    CPC分类号： F16K27/003 ,  F16L39/00

    摘要： A coupling comprises a holding member having a U-shaped cross section, and a channel member held by the holding member. The holding member has an upper wall formed with screw bores for use in attaching the holding member to a fluid controller. The channel member comprises a body having an inner channel and fitted in a space between the upper wall of the holding member and a lower wall thereof, a tubular upward projection communicating with the inner channel of the body and having an upper end inserted in a through bore in the upper wall of the holding member to communicate with a downward channel of the fluid controller, and a tubular lateral projection communicating with the inner channel of the body and extending laterally. The upper end of the channel member has an outward flange, and the through bore of the upper wall of the holding member has an inward flange for supporting the flange.

    摘要翻译： 联轴器包括具有U形横截面的保持构件和由保持构件保持的通道构件。 保持构件具有形成有用于将保持构件附接到流体控制器的螺钉孔的上壁。 通道构件包括具有内通道并配合在保持构件的上壁和其下壁之间的空间中的主体，与主体的内部通道连通的管状向上突出部，并且具有插入通孔 位于保持构件的上壁中，以与流体控制器的向下通道连通，以及与主体的内部通道连通并且横向延伸的管状横向突出部。 通道构件的上端具有向外的凸缘，并且保持构件的上壁的通孔具有用于支撑凸缘的向内凸缘。