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公开(公告)号：US20060055287A1
公开(公告)日：2006-03-16
申请号：US11196596
申请日：2005-08-04
IPC分类号： H01L41/04
CPC分类号： H01H57/00 , H01G5/18 , H01G5/38 , H01H2057/006 , H01L41/094 , H01L41/0946 , H01L41/0953 , Y10S977/837
摘要： A piezoelectric actuator includes a first beam including a first bottom electrode, a first piezoelectric film on the first bottom electrode, and a first top electrode on the first piezoelectric film, a fixed end assigned at an end of the first beam and fixed on a substrate, a connecting end assigned at another end of the first beam and suspended over a free space; and a second beam including a second piezoelectric film connected to the first piezoelectric film at the connecting end, a second bottom electrode under the second piezoelectric film, and a second top electrode on the second piezoelectric film, a working end assigned at an end of the second beam opposite to another end to which the connecting end is assigned and suspended over the free space; wherein a distance between centers of the fixed end and the working end is shorter than a distance from the working end to the connecting end.
摘要翻译： 压电致动器包括第一梁，该第一梁包括第一底电极，第一底电极上的第一压电膜和第一压电膜上的第一顶电极，分配在第一梁的端部并固定在基板上的固定端 ，分配在第一梁的另一端并悬挂在自由空间上的连接端; 以及第二光束，包括在连接端连接到第一压电膜的第二压电膜，第二压电膜下的第二底电极和第二压电膜上的第二顶电极，分配在第二压电膜的端部的工作端 第二梁相对于连接端被分配并悬挂在自由空间上的另一端; 其中固定端和工作端的中心之间的距离短于从工作端到连接端的距离。
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公开(公告)号：US20080254756A1
公开(公告)日：2008-10-16
申请号：US11568365
申请日：2006-09-25
CPC分类号： H04L27/2272 , H03C3/0966 , H03D3/242 , H04B1/38 , H04L27/2273 , H04L2027/0016 , H04L2027/0022 , H04L2027/0055 , H04W56/00 , H04W88/02 , Y02D70/1222 , Y02D70/40
摘要： A receiver has a first voltage control oscillator configured to generate a first oscillation signal, a second voltage control oscillator configured to generate a second oscillation signal having a first phase, a first phase comparator configured to detect a phase difference between the first and second oscillation signals, a demodulator configured to perform demodulation processing of the received signal and to generate timing information of a second phase included in the first oscillation signal, a second phase comparator configured to detect the phase difference between the first and second oscillation signals, and a first control voltage generator configured to generate a first control voltage for controlling a phase and a frequency of the second voltage control oscillator based on the phase difference detected by the second phase comparator.
摘要翻译： 一种接收器具有：第一电压控制振荡器，被配置为产生第一振荡信号;第二压控振荡器，被配置为产生具有第一相位的第二振荡信号;第一相位比较器，被配置为检测第一和第二振荡信号之间的相位差; 解调器，被配置为执行所述接收信号的解调处理并生成包括在所述第一振荡信号中的第二相位的定时信息;第二相位比较器，被配置为检测所述第一和第二振荡信号之间的相位差;以及第一控制 电压发生器被配置为基于由第二相位比较器检测的相位差产生用于控制第二压控振荡器的相位和频率的第一控制电压。
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公开(公告)号：US08038890B2
公开(公告)日：2011-10-18
申请号：US12038568
申请日：2008-02-27
IPC分类号： G01D15/00 , G11B5/127 , H01L21/00 , H01L21/302 , H01L21/461
CPC分类号： H01H57/00 , B81B3/0021 , H01G5/16 , H01G5/18 , H01H59/0009 , H01H2057/006 , H01L41/0933 , H01L41/094
摘要： A piezoelectric-driven MEMS device can be fabricated reliably and consistently. The piezoelectric-driven MEMS device includes: a movable flat beam having a piezoelectric film disposed above a substrate with a recessed portion such that the piezoelectric film is bridged over the recessed portion, piezoelectric drive mechanisms disposed at both ends of the piezoelectric film and configured to drive the piezoelectric film, and a first electrode disposed at the center of the substrate-side of the piezoelectric film, and a second electrode disposed on a flat part of the recessed portion of the substrate and facing the first electrode of the movable flat beam.
摘要翻译： 可以可靠且一致地制造压电驱动的MEMS器件。 压电驱动MEMS器件包括：可移动平板光束，其具有设置在具有凹部的基板上方的压电膜，使得压电膜桥接在凹部上，压电驱动机构设置在压电膜的两端并被配置为 驱动所述压电膜，以及设置在所述压电膜的基板侧的中心的第一电极，以及设置在所述基板的所述凹部的平坦部分上并且面对所述可动平坦梁的所述第一电极的第二电极。
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24.发明授权Micro-mechanical device, micro-switch, variable capacitor high frequency circuit and optical switch 失效微机械装置，微动开关，可变电容高频电路和光开关公开(公告)号：US07567018B2
公开(公告)日：2009-07-28
申请号：US11400407
申请日：2006-04-10
IPC分类号： H01L41/08
CPC分类号： B81B3/0021 , B81B2201/014 , B81B2201/045 , G02B26/0858 , H01G5/18 , H01G5/40 , H01H2057/006
摘要： A micro-mechanical device includes a first piezoelectric actuator including a piezoelectric film, and lower and upper electrodes interleaving the piezoelectric film, and extending from a first fixing part on a substrate to a first operating end, and a second piezoelectric actuator connected to the first piezoelectric actuator via a connecting part at the first operating end of the first piezoelectric actuator, and extending from the connecting part to a second operating end, the second piezoelectric actuator being shorter than the first piezoelectric actuator.
摘要翻译： 微机械装置包括：第一压电致动器，其包括压电膜，下电极和上电极交错压电膜，并从衬底上的第一固定部分延伸到第一操作端;以及第二压电致动器， 压电致动器经由第一压电致动器的第一操作端处的连接部分并且从连接部分延伸到第二操作端，第二压电致动器比第一压电致动器短。
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公开(公告)号：US20050242687A1
公开(公告)日：2005-11-03
申请号：US11115107
申请日：2005-04-27
IPC分类号： B81B3/00 , H01G5/18 , H01G7/06 , H01H57/00 , H01H59/00 , H01L41/08 , H01L41/09 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/29 , H02N1/00 , H03H9/24
CPC分类号： H01H57/00 , B81B3/0021 , H01G5/16 , H01G5/18 , H01H59/0009 , H01H2057/006 , H01L41/0933 , H01L41/094
摘要： A piezoelectric-driven MEMS device can be fabricated reliably and consistently. The piezoelectric-driven MEMS device includes: a movable flat beam having a piezoelectric film disposed above a substrate with a recessed portion such that the piezoelectric film is bridged over the recessed portion, piezoelectric drive mechanisms disposed at both ends of the piezoelectric film and configured to drive the piezoelectric film, and a first electrode disposed at the center of the substrate-side of the piezoelectric film, and a second electrode disposed on a flat part of the recessed portion of the substrate and facing the first electrode of the movable flat beam.
摘要翻译： 可以可靠且一致地制造压电驱动的MEMS器件。 压电驱动MEMS器件包括：可移动平板光束，其具有设置在具有凹部的基板上方的压电膜，使得压电膜桥接在凹部上，压电驱动机构设置在压电膜的两端并被配置为 驱动所述压电膜，以及设置在所述压电膜的基板侧的中心的第一电极，以及设置在所述基板的所述凹部的平坦部分上并且面对所述可动平坦梁的所述第一电极的第二电极。
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公开(公告)号：US07796710B2
公开(公告)日：2010-09-14
申请号：US11268615
申请日：2005-11-08
IPC分类号： H04L27/22
CPC分类号： H04L27/2276
摘要： A digital demodulator includes a resonator having a resonance frequency same as a carrier frequency to store a charge corresponding to a digital signal modulated by phase shift keying, a capacitor to store the charge of the resonator, an amplifier including an input node and an output node between which the capacitor is connected to convert a stored charge of the capacitor into a voltage signal, and a controller configured to accumulate in the resonator the charge induced by the frequency signal modulated by phase shift keying in a first control mode and configured to transfer the charge of the resonator to the capacitor in a second control mode, to output the voltage signal corresponding to the stored charge of the capacitor from the output node of the amplifier.
摘要翻译： 数字解调器包括具有与载波频率相同的谐振频率的谐振器，以存储与通过相移键控调制的数字信号相对应的电荷，存储谐振器的电荷的电容器，包括输入节点和输出节点的放大器 其间连接有电容器以将存储的电容器的电荷转换成电压信号，以及控制器，被配置为在第一控制模式中在谐振器中累积由相移键控调制的频率信号引起的电荷， 在第二控制模式下将谐振器充电到电容器，以从放大器的输出节点输出与电容器的存储电荷相对应的电压信号。
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公开(公告)号：US07459827B2
公开(公告)日：2008-12-02
申请号：US11115107
申请日：2005-04-27
IPC分类号： H01L41/08
CPC分类号： H01H57/00 , B81B3/0021 , H01G5/16 , H01G5/18 , H01H59/0009 , H01H2057/006 , H01L41/0933 , H01L41/094
摘要： A piezoelectric-driven MEMS device can be fabricated reliably and consistently. The piezoelectric-driven MEMS device includes: a movable flat beam having a piezoelectric film disposed above a substrate with a recessed portion such that the piezoelectric film is bridged over the recessed portion, piezoelectric drive mechanisms disposed at both ends of the piezoelectric film and configured to drive the piezoelectric film, and a first electrode disposed at the center of the substrate-side of the piezoelectric film, and a second electrode disposed on a flat part of the recessed portion of the substrate and facing the first electrode of the movable flat beam.
摘要翻译： 可以可靠且一致地制造压电驱动的MEMS器件。 压电驱动MEMS器件包括：可移动平板光束，其具有设置在具有凹部的基板上方的压电膜，使得压电膜桥接在凹部上，压电驱动机构设置在压电膜的两端并被配置为 驱动所述压电膜，以及设置在所述压电膜的基板侧的中心的第一电极，以及设置在所述基板的所述凹部的平坦部分上并且面对所述可动平坦梁的所述第一电极的第二电极。
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公开(公告)号：US20080164237A1
公开(公告)日：2008-07-10
申请号：US12038568
申请日：2008-02-27
IPC分类号： H01L41/22
CPC分类号： H01H57/00 , B81B3/0021 , H01G5/16 , H01G5/18 , H01H59/0009 , H01H2057/006 , H01L41/0933 , H01L41/094
摘要： A piezoelectric-driven MEMS device can be fabricated reliably and consistently. The piezoelectric-driven MEMS device includes: a movable flat beam having a piezoelectric film disposed above a substrate with a recessed portion such that the piezoelectric film is bridged over the recessed portion, piezoelectric drive mechanisms disposed at both ends of the piezoelectric film and configured to drive the piezoelectric film, and a first electrode disposed at the center of the substrate-side of the piezoelectric film, and a second electrode disposed on a flat part of the recessed portion of the substrate and facing the first electrode of the movable flat beam.
摘要翻译： 可以可靠且一致地制造压电驱动的MEMS器件。 压电驱动MEMS器件包括：可移动平板光束，其具有设置在具有凹部的基板上方的压电膜，使得压电膜桥接在凹部上，压电驱动机构设置在压电膜的两端并被配置为 驱动所述压电膜，以及设置在所述压电膜的基板侧的中心的第一电极，以及设置在所述基板的所述凹部的平坦部分上并且面对所述可动平坦梁的所述第一电极的第二电极。
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公开(公告)号：US20060103561A1
公开(公告)日：2006-05-18
申请号：US11268615
申请日：2005-11-08
IPC分类号： H03M3/00
CPC分类号： H04L27/2276
摘要： A digital demodulator includes a resonator having a resonance frequency same as a carrier frequency to store a charge corresponding to a digital signal modulated by phase shift keying, a capacitor to store the charge of the resonator, an amplifier including an input node and an output node between which the capacitor is connected to convert a stored charge of the capacitor into a voltage signal, and a controller configured to accumulate in the resonator the charge induced by the frequency signal modulated by phase shift keying in a first control mode and configured to transfer the charge of the resonator to the capacitor in a second control mode, to output the voltage signal corresponding to the stored charge of the capacitor from the output node of the amplifier.
摘要翻译： 数字解调器包括具有与载波频率相同的谐振频率的谐振器，以存储与通过相移键控调制的数字信号相对应的电荷，存储谐振器的电荷的电容器，包括输入节点和输出节点的放大器 其间连接有电容器以将存储的电容器的电荷转换成电压信号，以及控制器，被配置为在第一控制模式中在谐振器中累积由相移键控调制的频率信号引起的电荷， 在第二控制模式下将谐振器充电到电容器，以从放大器的输出节点输出与电容器的存储电荷相对应的电压信号。
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30.发明授权Piezoelectric thin film resonator and frequency variable resonator using the resonator 失效使用谐振器的压电薄膜谐振器和频率可变谐振器公开(公告)号：US06747529B2
公开(公告)日：2004-06-08
申请号：US10235785
申请日：2002-09-06
申请人： Kazuhide Abe , Naoko Yanase , Takaaki Yasumoto , Ryoichi Ohara , Tatsuo Shimizu , Takashi Kawakubo
发明人： Kazuhide Abe , Naoko Yanase , Takaaki Yasumoto , Ryoichi Ohara , Tatsuo Shimizu , Takashi Kawakubo
IPC分类号： H03H915
摘要： A piezoelectric thin film resonator which comprises a first electrode, a second electrode, and a piezoelectric film which is interposed between the first electrode and the second electrode, and formed of an epitaxial ferroelectric thin film containing barium titanate, a spontaneous polarization of the epitaxial ferroelectric thin film being uniaxially orientated in a direction normal to a film surface.
摘要翻译： 一种压电薄膜谐振器，其包括插入在第一电极和第二电极之间的第一电极，第二电极和压电膜，并且由包含钛酸钡的外延强电介质薄膜形成，外延强电介质的自发极化 薄膜在垂直于膜表面的方向上单轴取向。
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