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公开(公告)号:US06781927B1
公开(公告)日:2004-08-24
申请号:US09436943
申请日:1999-11-09
IPC分类号: G11B1100
CPC分类号: G02B6/126 , G02B6/105 , G02B6/4246 , G02B26/0833 , G02B26/0841 , G02B26/0866 , G11B7/0037 , G11B7/08564 , G11B7/08576 , G11B7/0901 , G11B7/122 , G11B7/127 , G11B7/135 , G11B7/1362 , G11B7/1365 , G11B7/1372 , G11B7/1384 , G11B7/14 , G11B7/22 , G11B11/10515 , G11B11/10532 , G11B11/10534 , G11B11/10541 , G11B11/10543 , G11B11/10554 , G11B11/10563 , G11B11/10569 , G11B11/1058 , G11B11/10595 , H02N1/008 , H04B10/2572
摘要: An optical data storage and retrieval system uses a flying head. The flying head is supported on a moving media having information stored in a plurality of stored data locations thereon. Information is stored in each of the plurality of media locations as physical structures capable of modulating the polarization state of incident light into one of two output polarization states. The flying head includes an optical processing assembly which directs an incident light beam having a source polarization state onto the moving media, accessing successive data locations. A reflected light beam having the source polarization state of the incident light beam modulated by a respective polarization modifying data location into one of the output polarization states is received by the flying head. The optical processing assembly optically transforms the modulated output polarization state of the reflected light beam into two return light beams having differentially modulated intensity related to the output polarization state of the reflected light beam. The two intensity modulated return light beams are optically coupled to a distal differential detector which outputs digital data representing the stored data information for the subject data location. A preferred embodiment includes optical fibers for coupling the incident and return light beams between the detector and the flying head. The optical assembly of a preferred embodiment includes an optical plate having pre-shaped and dimensioned recesses for automatically locating and aligning multiple optical components comprising the assembly. The flying head may also include a servo-controlled micro machined mirror for directing the incident and reflected light beams to and from the media.
摘要翻译: 光学数据存储和检索系统使用飞头。 飞行头被支撑在具有存储在其上的多个存储的数据位置中的信息的移动介质上。 信息被存储在多个媒体位置的每一个中,作为能够将入射光的偏振状态调制成两个输出偏振状态之一的物理结构。 飞头包括光学处理组件,其将具有源极化状态的入射光束引导到移动介质上,访问连续的数据位置。 具有由相应的偏振修正数据位置调制为入射偏振状态之一的入射光束的源极化状态的反射光束被飞头接收。 光学处理组件将被反射光束的调制输出偏振状态光学变换成具有与反射光束的输出偏振态相关的差分调制光强度的两个返回光束。 两个强度调制的返回光束光学耦合到远端差分检测器,远端差分检测器输出表示被摄体数据位置的存储的数据信息的数字数据。 优选实施例包括用于将入射和返回光束耦合在检测器和飞头之间的光纤。 优选实施例的光学组件包括具有预形状和尺寸的凹槽的光学板,用于自动定位和对准包括组件的多个光学部件。 飞头还可以包括用于将入射和反射的光束引导到介质和从介质引导的伺服控制的微加工镜。
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公开(公告)号:US06763161B2
公开(公告)日:2004-07-13
申请号:US09972259
申请日:2001-10-05
申请人: John F. Heanue , John H. Jerman
发明人: John F. Heanue , John H. Jerman
IPC分类号: G02B626
CPC分类号: G02B6/126 , G02B6/105 , G02B6/3512 , G02B6/3556 , G02B6/3558 , G02B6/357 , G02B6/4246 , G02B26/0833 , G02B26/0841 , G02B26/085 , G02B26/0866 , G11B7/0037 , G11B7/08564 , G11B7/08576 , G11B7/0901 , G11B7/122 , G11B7/127 , G11B7/1362 , G11B7/1365 , G11B7/1372 , G11B7/1384 , G11B7/14 , G11B7/22 , G11B11/10515 , G11B11/10532 , G11B11/10534 , G11B11/10541 , G11B11/10543 , G11B11/10554 , G11B11/10563 , G11B11/10569 , G11B11/1058 , G11B11/10595 , H02N1/008
摘要: An optical microswitch comprising a support body and first and second output fibers carried by the body. A rotary electrostatic microactuator is carried by the body and extends in a plane. A micromirror is disposed out of the plane. The microactuator has a mirror holder coupled to the micromirror and at least one comb drive assembly coupled to the mirror holder for driving the micromirror about an axis of rotation extending perpendicular to the plane between a first position for reflecting a laser beam to the first output fiber and a second position for reflecting the laser beam to the second output fiber.
摘要翻译: 一种光学微动开关,包括支撑体和由身体承载的第一和第二输出光纤。 旋转静电微致动器由本体承载并在平面内延伸。 微镜布置在平面外。 微致动器具有耦合到微反射镜的镜保持器和耦合到镜保持器的至少一个梳驱动组件,用于围绕垂直于平面延伸的旋转轴在第一位置之间驱动微反射镜,用于将激光束反射到第一输出光纤 以及用于将激光束反射到第二输出光纤的第二位置。
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公开(公告)号:US06392775B1
公开(公告)日:2002-05-21
申请号:US09491427
申请日:2000-01-26
申请人: Joseph D Drake , John H. Jerman
发明人: Joseph D Drake , John H. Jerman
IPC分类号: G02B2608
CPC分类号: G02B5/0858 , G02B6/3518 , G02B6/4216 , G02B26/0833 , G02B26/0841 , G11B7/08564 , G11B7/122 , G11B7/1362 , G11B7/1365 , G11B7/1384 , G11B11/10543 , H02N1/008
摘要: The present invention includes a structure, apparatus, and method by which the reflectivity of a micro-machined reflector can be improved. The present invention increases the mirror's reflectivity at 650 nm, increases its reflectivity at 410 nm, and improves its long-term reliability. The reflectivity at other wavelengths may also be improved. Also, the present invention minimizes mirror plate distortion while providing a suitable fabrication approach.
摘要翻译: 本发明包括可以提高微加工反射器的反射率的结构,装置和方法。 本发明增加了反射镜在650nm的反射率,增加了其在410nm处的反射率,并提高了其长期可靠性。 其他波长的反射率也可以提高。 此外,本发明在提供合适的制造方法的同时最小化镜板失真。
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公开(公告)号:US06333584B1
公开(公告)日:2001-12-25
申请号:US09755743
申请日:2001-01-05
申请人: John H. Jerman , John D. Grade
发明人: John H. Jerman , John D. Grade
IPC分类号: H02N100
CPC分类号: H02N1/008
摘要: A tiltable electrostatic microactuator comprising a substantially planar substrate and a rotatable member overlying the substrate for rotation about an axis of rotation extending perpendicular to the planar substrate. A plurality of comb drive assemblies are provided and each has a first comb drive member mounted on the substrate and a second comb drive member coupled to the rotatable member. Each of the first and second comb drive members is provided with comb drive fingers. First and second spaced-apart springs are included in the microactuator and each has a first end portion coupled to the substrate and a second end portion coupled to at least one of the second comb drive members for suspending the second comb drive members and the rotatable member over the substrate. The second comb drive members are movable in a direction of travel about the axis of rotation between a first position in which the comb drive fingers of the first and second comb drive members are not substantially fully interdigitated and a second position in which the comb drive fingers of the first and second comb drive members are substantially fully interdigitated. A controller is electrically coupled to the second comb drive members and the substrate for tilting the rotatable member relative to the substrate about a pivot axis extending parallel to the planar substrate. A method for using the microactuator is provided.
摘要翻译: 一种可倾斜静电微致动器,包括基本上平面的基板和可旋转构件,该可旋转构件覆盖在基板上,用于围绕垂直于平面基板延伸的旋转轴线旋转。 提供了多个梳状驱动组件,并且每个都具有安装在基底上的第一梳状驱动构件和联接到可旋转构件的第二梳状驱动构件。 第一和第二梳状驱动构件中的每一个设置有梳齿驱动指。 第一和第二间隔开的弹簧包括在微致动器中,并且每个具有联接到基板的第一端部分和联接到第二梳状驱动构件中的至少一个的第二端部,用于悬挂第二梳状驱动构件和可旋转构件 在基板上。 第二梳状驱动构件可以在第一位置和第二梳状驱动构件的梳状驱动构件基本上完全相互交错的第一位置和第二位置之间沿着旋转轴线行进的方向移动,在第二位置,梳状驱动指 的第一和第二梳状驱动构件基本上完全相互交错。 控制器电耦合到第二梳状驱动构件和基底,用于围绕平行于平面基底延伸的枢转轴线相对于基底倾斜可旋转构件。 提供了使用微致动器的方法。
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公开(公告)号:US06301403B1
公开(公告)日:2001-10-09
申请号:US09464373
申请日:1999-12-15
申请人: John F. Heanue , John H. Jerman
发明人: John F. Heanue , John H. Jerman
IPC分类号: G02B626
CPC分类号: G02B6/126 , G02B6/105 , G02B6/3512 , G02B6/3556 , G02B6/3558 , G02B6/357 , G02B6/4246 , G02B26/0833 , G02B26/0841 , G02B26/085 , G02B26/0866 , G11B7/0037 , G11B7/08564 , G11B7/08576 , G11B7/0901 , G11B7/122 , G11B7/127 , G11B7/1362 , G11B7/1365 , G11B7/1372 , G11B7/1384 , G11B7/14 , G11B7/22 , G11B11/10515 , G11B11/10532 , G11B11/10534 , G11B11/10541 , G11B11/10543 , G11B11/10554 , G11B11/10563 , G11B11/10569 , G11B11/1058 , G11B11/10595 , H02N1/008
摘要: An optical microswitch comprising a support body and first and second output fibers carried by the body. A rotary electrostatic microactuator is carried by the body and extends in plane. A micromirror is disposed out of the plane. The microactuator has a mirror holder coupled to the micromirror and at least one comb drive assembly coupled to the mirror holder for driving the micromirror about an axis of rotation extending perpendicular to the plane between a first position for reflecting a laser beam to the first output fiber and a second position for reflecting the laser beam to the second output fiber.
摘要翻译: 一种光学微动开关,包括支撑体和由身体承载的第一和第二输出光纤。 旋转静电微致动器由本体承载并在平面内延伸。 微镜布置在平面外。 微致动器具有耦合到微反射镜的镜保持器和耦合到镜保持器的至少一个梳驱动组件,用于围绕垂直于该平面延伸的旋转轴在第一位置之间驱动微反射镜,用于将激光束反射到第一输出光纤 以及用于将激光束反射到第二输出光纤的第二位置。
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公开(公告)号:US6128122A
公开(公告)日:2000-10-03
申请号:US398259
申请日:1999-09-17
申请人: Joseph D. Drake , John H. Jerman , John D. Grade
发明人: Joseph D. Drake , John H. Jerman , John D. Grade
CPC分类号: G02B26/0833 , G02B26/0816 , G02B26/0841 , G02B26/085 , G02B7/1821 , G11B11/1058 , G11B7/08564 , G11B7/122 , G11B7/1362 , G11B7/1372 , G11B7/1384 , H02N1/006 , H02N1/008 , G02B6/3518 , G02B6/357 , G02B6/3584 , G11B11/10532 , G11B11/10543 , G11B11/10563 , G11B7/08576
摘要: A mirror assembly of micron dimensions for use in deflecting beam of light. The mirror assembly includes a planar base and a planar mirror spaced apart from the planar base and disposed generally parallel to the planar base. The planar mirror has first and second end portions and a longitudinal axis extending between the first and second end portions. First and second torsional members extend along the longitudinal axis and are connected to the respective first and second end portions for permitting the mirror to rock between first and second positions about the longitudinal axis relative to the planar base. The first and second torsional members are secured to the planar base. At least a portion of the mirror is made from a conductive material. First and second spaced-apart electrodes are carried by the planar base for driving the mirror between the first and second positions. A tether member extends transversely of the longitudinal axis and is secured to the first torsional member and to the planar base. The tether member regulates the rocking of the mirror.
摘要翻译: 用于偏转光束的微米尺寸的镜子组件。 镜组件包括平面底座和与平面基座间隔开并平行于平面基座设置的平面镜。 平面镜具有第一和第二端部以及在第一和第二端部之间延伸的纵向轴线。 第一和第二扭转构件沿着纵向轴线延伸并且连接到相应的第一和第二端部,以允许反射镜相对于平面基部围绕纵向轴线在第一和第二位置之间摇摆。 第一和第二扭转构件固定到平面基座。 反射镜的至少一部分由导电材料制成。 第一和第二间隔开的电极由平面基座承载,用于在第一和第二位置之间驱动反射镜。 系绳构件横向于纵向轴线延伸并且固定到第一扭转构件和平面基座。 系绳构件调节镜子的摇摆。
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公开(公告)号:US06075673A
公开(公告)日:2000-06-13
申请号:US112174
申请日:1998-07-08
CPC分类号: H04B10/2572 , G02B26/0833 , G02B26/0841 , G02B26/0866 , G02B6/126 , G02B6/4246 , G11B11/10532 , G11B11/10534 , G11B11/10541 , G11B11/10543 , G11B11/1058 , G11B11/10595 , G11B7/08564 , G11B7/122 , G11B7/127 , G11B7/135 , G11B7/1362 , G11B7/1365 , G11B7/1372 , G11B7/1384 , G11B7/22 , H02N1/008 , G02B6/105 , G11B11/10515 , G11B11/10554 , G11B11/10563 , G11B11/10569 , G11B7/0037 , G11B7/08576 , G11B7/0901 , G11B7/14
摘要: A composite slider, for use in an optical or magneto-optical head that includes an optical assembly, comprises a mounting block that supports optical components, and a body that provides an air bearing surface and that further supports optical components. The slider body and mounting block include channel patterns that define an optical path. The slider mounting block includes an adhesive release channel disposed transversely relative to the optical path. The slider body includes a vertical channel and a lateral channel within which the optical components are disposed.
摘要翻译: 用于包括光学组件的光学或光磁头的复合滑块包括支撑光学部件的安装块和提供空气轴承表面并进一步支撑光学部件的主体。 滑块体和安装块包括限定光路的通道图案。 滑块安装块包括相对于光路横向设置的粘合剂释放通道。 滑块主体包括垂直通道和设置有光学部件的横向通道。
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公开(公告)号:US5640995A
公开(公告)日:1997-06-24
申请号:US404301
申请日:1995-03-14
申请人: Warren J. Packard , John H. Jerman
发明人: Warren J. Packard , John H. Jerman
CPC分类号: F16K99/0001 , A61M1/14 , F15C5/00 , F16K99/0005 , F16K99/0044 , A61M2205/12 , F16K2099/0074 , F16K2099/0084 , F16K2099/0086 , F16K2099/009 , F16K99/0034 , Y10T137/87249 , Y10T137/87885
摘要: A miniature electrofluidic module is disclosed, for receiving one or more fluids and for receiving an electrical connection. In accordance with one aspect of the invention, the module includes a substantially flat fluidic manifold layer for fluid distribution, a substantially flat electrical layer including an electrical circuit, and a substantially flat device layer including micromachined devices. The devices may include electrically actuated valves for modulating the flow of fluids. In another aspect of the invention, an electrofluidic module is combined with an electrofluidic circuit board. In a further aspect, an electrofluidic system such as a dialysate handling system is disclosed, including a fluidic fixture and an electrofluidic assembly incorporating electrofluidic devices. In a still further aspect of the invention, a method is disclosed for interfacing micromachined devices to electrical and fluidic interfaces on a fixture, including packaging the devices into a module and providing electrical and fluidic interfaces between the module and the fixture.
摘要翻译: 公开了一种用于接收一种或多种流体并用于接收电连接的微型电流流体模块。 根据本发明的一个方面,该模块包括用于流体分配的基本平坦的流体歧管层,包括电路的基本上平坦的电层,以及包括微加工装置的基本平坦的器件层。 这些装置可以包括用于调节流体流动的电致动阀。 在本发明的另一方面,电流流体模块与电流体电路板组合。 在另一方面,公开了一种电流体系统,例如透析液处理系统,其包括流体固定装置和结合电流流体装置的电流流体组件。 在本发明的另一方面,公开了一种用于将微加工设备与固定装置上的电气和流体界面接合的方法,包括将装置包装到模块中并在模块和固定装置之间提供电和流体界面。
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29.
公开(公告)号:US5209118A
公开(公告)日:1993-05-11
申请号:US753194
申请日:1991-08-30
申请人: John H. Jerman
发明人: John H. Jerman
IPC分类号: G01L9/00
CPC分类号: G01L9/0042 , G01L9/0073
摘要: A semiconductor transducer or actuator is disclosed. The transducer and actuator each include a deflecting member with corrugations producing increased vertical travel which is a linear function of applied force. An accurate and easily controlled method that is insensitive to front-to-back alignment is also disclosed for forming uniform corrugations of precise thickness; independent of the thickness of the deflecting member. The cross-sectional shape of the corrugations is not limited by the etching technique, so that any configuration thereof is enabled.
摘要翻译: 公开了半导体换能器或致动器。 传感器和致动器各自包括具有波纹的偏转构件,其产生增加的垂直行程,其是施加力的线性函数。 还公开了对前后对准不敏感的精确且容易控制的方法,用于形成精确厚度的均匀波纹; 独立于偏转构件的厚度。 波纹的横截面形状不受蚀刻技术的限制,因此能够进行其任何构造。
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公开(公告)号:US4471647A
公开(公告)日:1984-09-18
申请号:US360414
申请日:1982-03-22
申请人: John H. Jerman , Stephen C. Terry
发明人: John H. Jerman , Stephen C. Terry
CPC分类号: G01N30/66 , G01N30/6095 , G01N30/88
摘要: There is described a gas chromatographic assembly formed on a semiconductor wafer by etching techniques. There is also described an improved thermal detector for use therewith.
摘要翻译: 描述了通过蚀刻技术在半导体晶片上形成的气相色谱组件。 还描述了一种与之一起使用的改进的热检测器。
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