公开(公告)号：US08241703B2

公开(公告)日：2012-08-14

申请号：US12381225

申请日：2009-03-09

申请人： Hironori Hatono ,  Masahiro Mizukane ,  Osamu Okamoto

发明人： Hironori Hatono ,  Masahiro Mizukane ,  Osamu Okamoto

IPC分类号： B05D1/12

CPC分类号： B05B7/144 ,  B01J2/16 ,  B02C19/0043 ,  B02C19/065 ,  B02C19/066 ,  B05B7/1404 ,  B05B7/1445 ,  B05B12/085 ,  B05D1/12 ,  B28B19/00 ,  C23C24/04 ,  Y10T428/25 ,  Y10T428/2982

摘要： A composite structure formation method based on an aerosol deposition method by which an aerosol with brittle material fine particles dispersed in a gas is sprayed toward a substrate to form a structure made of the brittle material fine particles, the composite structure formation method includes: storing a plurality of controlled particles in a storage mechanism, the controlled particle being an assembly packed with a plurality of particles including the brittle material fine particles; supplying the controlled particles from the storage mechanism to an aerosolation mechanism; disaggregating the supplied controlled particles in the aerosolation mechanism to form an aerosol; and spraying the aerosol toward the substrate to form a composite structure having the structure and the substrate.

摘要翻译： 一种基于气溶胶沉积方法的复合结构形成方法，其中将分散在气体中的脆性材料微粒的气溶胶喷射到基板上以形成由脆性材料微粒构成的结构，所述复合结构形成方法包括： 多个受控颗粒在储存机构中，受控颗粒是装有多个包含脆性材料微粒的颗粒的组件; 将控制的颗粒从储存机构供应到气溶胶机构; 在气溶胶机构中分解供应的受控颗粒以形成气溶胶; 并将气溶胶喷射到基板上以形成具有该结构和基底的复合结构。

公开(公告)号：US20090311422A1

公开(公告)日：2009-12-17

申请号：US12454854

申请日：2009-05-22

申请人： Tomokazu Ito ,  Hironori Hatono

发明人： Tomokazu Ito ,  Hironori Hatono

IPC分类号： B05D1/12 ,  B32B5/16 ,  B05C11/10 ,  B05C11/00

CPC分类号： B05D1/12 ,  B05B1/26 ,  B05B7/144 ,  B05B7/1445 ,  B05B7/1472 ,  B05B7/1486 ,  B05B12/082 ,  B05B13/0221 ,  B05B13/0405 ,  C23C24/04 ,  Y10T428/2991

摘要： A particle cluster for an aerosol deposition method, the particle cluster includes: an assembly packed with a plurality of fine particles including brittle material fine particles, the particle clusters having a spatula angle of 46.2° or less.

摘要翻译： 一种用于气溶胶沉积方法的颗粒簇，所述颗粒簇包括：填充有多个包含脆性材料细颗粒的细颗粒的组件，所述颗粒簇的刮刀角度为46.2°或更小。

公开(公告)号：US20060178010A1

公开(公告)日：2006-08-10

申请号：US11294762

申请日：2006-03-23

申请人： Junichi Iwasawa ,  Hironori Hatono ,  Naoya Terada ,  Yuji Aso ,  Masakatsu Kiyohara

发明人： Junichi Iwasawa ,  Hironori Hatono ,  Naoya Terada ,  Yuji Aso ,  Masakatsu Kiyohara

IPC分类号： C04B35/48 ,  H01L21/302

CPC分类号： C04B35/505 ,  B82Y30/00 ,  C04B35/6455 ,  C04B2235/781 ,  C04B2235/785 ,  C04B2235/87 ,  C04B2235/9669 ,  C23C24/04

摘要： In order to control and reduce generation of disjoined grains from a plasma-resistant member, the present invention provides a plasma-resistant member having no pores and boundary layers. In a layer structure made of yttria polycrystal and formed on a surface of a member for a semiconductor manufacturing apparatus on a side exposed to plasma, the ratio of pores to the surface of the layer structure is less than 0.1 area %. With this, corrosion from pores never progresses even in a plasma atmosphere. It is also possible to control and reduce disjoined grains due to such corrosion.

摘要翻译： 为了控制和减少等离子体阻挡构件中的分离晶粒的产生，本发明提供了一种没有孔和边界层的耐等离子体构件。 在由氧化钇多晶形成并且在暴露于等离子体的一侧的半导体制造装置的构件的表面上形成的层结构中，孔与层结构的表面的比例小于0.1面积％。 因此，即使在等离子体气氛中，孔隙也不会发生腐蚀。 由于这种腐蚀，也可以控制和减少脱离的颗粒。

公开(公告)号：US20060159946A1

公开(公告)日：2006-07-20

申请号：US11285771

申请日：2005-11-21

申请人： Junichi Iwasawa ,  Hironori Hatono ,  Naoya Terada ,  Yuji Aso ,  Masakatsu Kiyohara

发明人： Junichi Iwasawa ,  Hironori Hatono ,  Naoya Terada ,  Yuji Aso ,  Masakatsu Kiyohara

IPC分类号： B05D1/12 ,  H01L29/12 ,  B32B15/00

CPC分类号： C04B35/505 ,  B82Y30/00 ,  C04B35/6455 ,  C04B2235/781 ,  C23C24/04 ,  H01J37/32477 ,  Y10T428/12528 ,  Y10T428/12674

摘要： In order to control and reduce generation of disjoined grains from a plasma-resistant member, the present invention provides a plasma-resistant member having no pores and boundary layers. In a layer structure made of yttria polycrystal and formed on a surface of a member for a semiconductor manufacturing apparatus on a side exposed to plasma, substantially no hyaline boundary layer exists in the yttria polycrystal. With this, corrosion from a boundary layer never progresses even in a plasma atmosphere. It is also possible to control and reduce disjoined grains due to such corrosion.

摘要翻译： 为了控制和减少等离子体阻挡构件中的分离晶粒的产生，本发明提供了一种没有孔和边界层的耐等离子体构件。 在由氧化钇多晶形成的层结构中，在暴露于等离子体的一侧的半导体制造装置的构件的表面上形成，在氧化钇多晶中基本上不存在透明的边界层。 因此，即使在等离子体气氛中，边界层的腐蚀也不会进行。 由于这种腐蚀，也可以控制和减少脱离的颗粒。

公开(公告)号：US20060102074A1

公开(公告)日：2006-05-18

申请号：US11311738

申请日：2005-12-19

申请人： Hironori Hatono ,  Masakatsu Kiyohara ,  Katsuhiko Mori ,  Tatsuro Yokoyama ,  Atsushi Yoshida ,  Tomokazu Ito ,  Jun Akedo

发明人： Hironori Hatono ,  Masakatsu Kiyohara ,  Katsuhiko Mori ,  Tatsuro Yokoyama ,  Atsushi Yoshida ,  Tomokazu Ito ,  Jun Akedo

IPC分类号： B05C11/00 ,  B05C5/00 ,  B05B7/00

CPC分类号： C23C30/00 ,  C23C24/04 ,  Y10T428/249967 ,  Y10T428/25 ,  Y10T428/26 ,  Y10T428/265

摘要： An apparatus for manufacturing a composite structure body is provided which forms structure body having the constitution in which the crystals of more than one type of brittle material are dispersed and having novel properties without involving a heating/sintering process. The apparatus includes an aerosol generator configured to generate an aerosol. The aerosol is generated through dispersing fine particles of more than one type of brittle material, or dispersing composite fine particles, in a gas. The apparatus also includes a nozzle configured to spray the aerosol, a classifier configured to classify the brittle material fine particles in the aerosol, and a disintegrating machine for disintegrating agglomerations of the brittle material fine particles in the aerosol. The composite structure body is manufactured in reduced pressure conditions by bombarding a substrate with the aerosol at a high velocity, whereby at least one of crystals and microstructures of said brittle materials are dispersed.

公开(公告)号：US09404186B2

公开(公告)日：2016-08-02

申请号：US13544059

申请日：2012-07-09

申请人： Hironori Hatono ,  Masahiro Mizukane ,  Osamu Okamoto

发明人： Hironori Hatono ,  Masahiro Mizukane ,  Osamu Okamoto

IPC分类号： B32B5/16 ,  C23C24/04 ,  B05D1/12 ,  B05B7/14

CPC分类号： B05B7/144 ,  B01J2/16 ,  B02C19/0043 ,  B02C19/065 ,  B02C19/066 ,  B05B7/1404 ,  B05B7/1445 ,  B05B12/085 ,  B05D1/12 ,  B28B19/00 ,  C23C24/04 ,  Y10T428/25 ,  Y10T428/2982

摘要： A plurality of pre-formed controlled particles for use in an aerosol deposition method by which an aerosol with brittle material fine particles dispersed in a gas is sprayed toward a substrate to form a structure made of the brittle material fine particles. Each of the controlled particles includes an assembly packed with a plurality of fine particles which are not chemically bonded together, which include the brittle material fine particles, and have a mean primary particle diameter of 0.1 μm or more and 5 μm or less. The controlled particles have a mean circle-equivalent diameter of 20 μm or more.

摘要翻译： 用于气溶胶沉积方法中的多个预成形控制颗粒，其中将分散在气体中的脆性材料细颗粒的气溶胶喷射到基板上以形成由脆性材料细颗粒制成的结构。 每个受控颗粒包括一个装有多个未化学结合的细颗粒的组件，其中包括脆性材料微粒，平均一次粒径为0.1μm以上且5μm以下。 受控粒子的平均圆当量直径为20μm以上。

公开(公告)号：US07632353B2

公开(公告)日：2009-12-15

申请号：US11311738

申请日：2005-12-19

申请人： Hironori Hatono ,  Masakatsu Kiyohara ,  Katsuhiko Mori ,  Tatsuro Yokoyama ,  Atsushi Yoshida ,  Tomokazu Ito ,  Jun Akedo

发明人： Hironori Hatono ,  Masakatsu Kiyohara ,  Katsuhiko Mori ,  Tatsuro Yokoyama ,  Atsushi Yoshida ,  Tomokazu Ito ,  Jun Akedo

IPC分类号： B05B7/14

CPC分类号： C23C30/00 ,  C23C24/04 ,  Y10T428/249967 ,  Y10T428/25 ,  Y10T428/26 ,  Y10T428/265

摘要： An apparatus for manufacturing a composite structure body is provided which forms structure body having the constitution in which the crystals of more than one type of brittle material are dispersed and having novel properties without involving a heating/sintering process. The apparatus includes an aerosol generator configured to generate an aerosol. The aerosol is generated through dispersing fine particles of more than one type of brittle material, or dispersing composite fine particles, in a gas. The apparatus also includes a nozzle configured to spray the aerosol, a classifier configured to classify the brittle material fine particles in the aerosol, and a disintegrating machine for disintegrating agglomerations of the brittle material fine particles in the aerosol. The composite structure body is manufactured in reduced pressure conditions by bombarding a substrate with the aerosol at a high velocity, whereby at least one of crystals and microstructures of said brittle materials are dispersed.

摘要翻译： 提供了一种复合结构体的制造装置，其形成具有分散了多于一种类型的脆性材料的晶体并且具有新特性而不涉及加热/烧结工艺的结构的结构体。 该装置包括配置成产生气溶胶的气溶胶发生器。 通过将多种类型的脆性材料的细颗粒分散在气体中，或将复合细颗粒分散在气体中而产生气溶胶。 该装置还包括喷雾器，其被配置为喷射气溶胶，分级器，其被配置为将脆性材料细颗粒分类在气溶胶中;以及分解机，用于分解气溶胶中脆性材料微粒的附聚物。 复合结构体通过用气溶胶以高速轰击基材而在减压条件下制造，由此所述脆性材料的晶体和微结构中的至少一种分散。

公开(公告)号：US20080276865A1

公开(公告)日：2008-11-13

申请号：US11998459

申请日：2007-11-29

申请人： Ryoichi Nishimizu ,  Hironori Hatono ,  Akihiko Matsumura

发明人： Ryoichi Nishimizu ,  Hironori Hatono ,  Akihiko Matsumura

IPC分类号： B05C13/00 ,  B05D5/12

CPC分类号： H01L21/6831

摘要： An electrostatic chuck includes: a mounting surface on which a workpiece is to be mounted, the mounting surface including a polycrystalline structure formed by aerosol deposition, the polycrystalline structure having a protrusion on its surface. At least the protrusion contains yttria (Y2O3).

摘要翻译： 静电卡盘包括：安装工件的安装面，安装面包括由气溶胶沉积形成的多晶结构，多晶结构在其表面上具有突起。 至少该突起含有氧化钇（Y 2 O 3 O 3）。

公开(公告)号：US20080241556A1

公开(公告)日：2008-10-02

申请号：US11981089

申请日：2007-10-31

申请人： Jun Akedo ,  Tomokadsu Ito ,  Tatsuro Yokoyama ,  Katsuhiko Mori ,  Hironori Hatono ,  Masakatsu Kiyohara ,  Yuji Aso

发明人： Jun Akedo ,  Tomokadsu Ito ,  Tatsuro Yokoyama ,  Katsuhiko Mori ,  Hironori Hatono ,  Masakatsu Kiyohara ,  Yuji Aso

IPC分类号： B32B15/04 ,  B05D3/14 ,  C23C16/00 ,  B06B1/00 ,  C23C16/06 ,  B05D3/12

CPC分类号： C03C17/06 ,  B22F9/04 ,  B22F2009/045 ,  C03C17/22 ,  C03C17/23 ,  C03C2217/214 ,  C03C2217/268 ,  C03C2217/282 ,  C03C2218/17 ,  C23C24/04 ,  Y10T428/25 ,  Y10T428/2839 ,  Y10T428/31678

摘要： A composite structure forming method comprises the steps of first pre-treating brittle material fine particles to impart an internal strain to the brittle material fine particles, secondly causing the brittle material fine particles in which the internal strain has been created to collide with a substrate surface at high speed or applying a mechanical impact force to the brittle material fine particles containing the internal strain therein provided on the substrate surface, to deform or fracture the brittle material fine particles, re-joining the fine particles through active new surfaces generated by the deformation or fracture, forming an anchor section made of polycrystalline brittle material of which part bites into the substrate surface at a boundary section between the new surfaces and the substrate, and further forming a structure made of polycrystalline brittle material on the anchor section.

摘要翻译： 复合结构形成方法包括以下步骤：首先对脆性材料细颗粒进行预处理以对脆性材料细颗粒产生内部应变，其次使产生内部应变的脆性材料细颗粒与基板表面碰撞 高速地施加机械冲击力，或者在基材表面上含有内部应变的脆性材料微粒施加机械冲击力，使脆性材料微粒变形或断裂，通过变形产生的活性新表面重新接合微粒 或断裂，形成由多晶脆性材料制成的锚固部分，其中部分在新表面和基材之间的边界部分处于基材表面，并且在锚定部分上进一步形成由多晶脆性材料制成的结构。

公开(公告)号：US20080096007A1

公开(公告)日：2008-04-24

申请号：US11981064

申请日：2007-10-31

申请人： Hironori Hatono ,  Masakatsu Kiyohara ,  Katsuhiko Mori ,  Tatsuro Yokoyama ,  Atsushi Yoshida ,  Tomokazu Ito ,  Jun Akedo

发明人： Hironori Hatono ,  Masakatsu Kiyohara ,  Katsuhiko Mori ,  Tatsuro Yokoyama ,  Atsushi Yoshida ,  Tomokazu Ito ,  Jun Akedo

IPC分类号： B32B5/16

CPC分类号： C23C30/00 ,  C23C24/04 ,  Y10T428/249967 ,  Y10T428/25 ,  Y10T428/26 ,  Y10T428/265

摘要： A composite structure body obtained through a plurality of processes including forming composite fine particles by way of a process in which a surface of the fine particles of a brittle material is coated with another brittle material; then by bombarding the composite fine particles against a surface of a substrate at high velocities, an anchor portion biting the substrate surface is formed; the composite fine particles are simultaneously distorted and fractured by impact of the bombardment; mutual rejoining of the composite fine particles is made through intermediary of a newly generated active surface formed by the distortion or fracture; and thereby forming a structure body in which crystals and/or microstructures of the brittle materials are dispersed above the anchor portion; and a pre-processing which includes imparting internal distortion to the brittle material fine particles.

摘要翻译： 通过多个方法获得的复合结构体，包括通过脆性材料的细颗粒的表面被另一种脆性材料涂覆的方法形成复合微粒; 然后通过以高速度将复合细颗粒轰击基板的表面，形成咬合基板表面的锚固部分; 复合细颗粒通过轰击的冲击同时变形和断裂; 复合微粒的相互重合是通过由变形或断裂形成的新产生的活性表面中介而形成的; 从而形成脆性材料的结晶和/或微结构分散在锚定部分上方的结构体; 以及包括对脆性材料微粒赋予内部变形的预处理。