公开(公告)号：US20060021961A1

公开(公告)日：2006-02-02

申请号：US11187346

申请日：2005-07-21

Applicant: Joerg Muchow ,  Torsten Ohms ,  Volkmar Senz ,  Guenther-Nino-Carlo Ullrich ,  Ronald Gampp

Inventor： Joerg Muchow ,  Torsten Ohms ,  Volkmar Senz ,  Guenther-Nino-Carlo Ullrich ,  Ronald Gampp

IPC: C23F1/00 ,  B44C1/22

CPC classification number: B81B3/0072 ,  B81B2203/0127

Abstract: A method and a micromechanical component which counteract manufacturing-process-related mechanical stresses in the membrane are provided. The membrane is formed on a substrate in a layer system and spans a cavity in the substrate. The layer system includes at least one base layer formed on the substrate for circuit elements. At least one structured masking layer is also formed on the base layer for defining the circuit elements. The masking layer is structured in the area of the membrane in such a way that mechanical stresses acting in the area of the membrane under vacuum are at least partially compensated, the intrinsic stress of the masking layer being taken into account in the layout of the structuring.

Abstract translation: 提供了一种抵抗膜中与制造过程相关的机械应力的方法和微机械部件。 膜在层系统中的基底上形成并跨越衬底中的空腔。 层系统包括在用于电路元件的基板上形成的至少一个基底层。 至少一个结构化掩模层也形成在基底层上以限定电路元件。 屏蔽层被构造在膜的区域中，使得在真空下作用在膜的区域中的机械应力被至少部分地补偿，掩蔽层的固有应力在结构化的布局中被考虑 。

公开(公告)号：US20110120208A1

公开(公告)日：2011-05-26

申请号：US12927345

申请日：2010-11-12

Applicant: Torsten Ohms ,  Axel Franke

Inventor： Torsten Ohms ,  Axel Franke

IPC: G01P21/00 ,  G01P15/125

CPC classification number: G01P15/125 ,  G01P15/18 ,  G01P21/00 ,  G01P2015/082

Abstract: A method for adjusting an acceleration sensor which includes a substrate and a seismic mass, the acceleration sensor having first and further first electrodes attached to the substrate on a first side, counter-electrodes of the seismic mass being situated between the first and further first electrodes, the acceleration sensor having further second electrodes on a second side and further fourth electrodes on a fourth side opposite the second side, an essentially equal first excitation voltage being applied to the first and further first electrodes in a first step for exciting a first deflection of the seismic mass along a first direction, the first deflection being compensated in a second step by applying a first compensation voltage to the further second and further fourth electrodes.

Abstract translation: 一种用于调整加速度传感器的方法，所述加速度传感器包括基板和地震块，所述加速度传感器具有在第一侧上附接到所述基板的第一和另外的第一电极，所述地震质量块的对电极位于所述第一和第二电极之间 加速度传感器在第二侧具有另外的第二电极，在与第二侧相反的第四侧具有另外的第四电极，在第一步骤中将基本上相等的第一激励电压施加到第一和第二电极，用于激发第一偏转 所述地震质量沿着第一方向，所述第一偏转在第二步骤中通过向所述另外的第二和第四电极施加第一补偿电压来补偿。

公开(公告)号：US20050229711A1

公开(公告)日：2005-10-20

申请号：US11107510

申请日：2005-04-15

Applicant: Torsten Ohms ,  Oliver Stoll

Inventor： Torsten Ohms ,  Oliver Stoll

IPC: G01L9/00 ,  B81B3/00 ,  B81B7/00 ,  G01L9/12 ,  H01G7/00 ,  H01L29/84

CPC classification number: G01L9/0073

Abstract: A capacitive pressure sensor made up of two silicon on insulator (SOI) wafers lying opposite of each other and joined to each other in a vacuum-tight manner, a recess being formed between the two wafers. The first wafer exclusively supports the evaluation circuits required for measuring the applied pressure and a capacitive electrode, and the second wafer has a recess formed by surface micromechanics processes, in which the counter electrode to the capacitive electrode of the first wafer is situated. The second wafer at the same time forms a cover for the first wafer.

Abstract translation: 由两个彼此相对并且以真空密封的方式彼此接合的绝缘体上硅（SOI）晶片构成的电容式压力传感器，在两个晶片之间形成凹部。 第一晶片专门支持测量所施加的压力所需的评估电路和电容电极，并且第二晶片具有通过表面微机械工艺形成的凹部，其中与第一晶片的电容电极对置电极。 第二晶片同时形成第一晶片的盖。

公开(公告)号：US08381570B2

公开(公告)日：2013-02-26

申请号：US12927345

申请日：2010-11-12

Applicant: Torsten Ohms ,  Axel Franke

Inventor： Torsten Ohms ,  Axel Franke

IPC: G01P21/00 ,  G01P15/18

CPC classification number: G01P15/125 ,  G01P15/18 ,  G01P21/00 ,  G01P2015/082

Abstract: A method for adjusting an acceleration sensor which includes a substrate and a seismic mass, the acceleration sensor having first and further first electrodes attached to the substrate on a first side, counter-electrodes of the seismic mass being situated between the first and further first electrodes, the acceleration sensor having further second electrodes on a second side and further fourth electrodes on a fourth side opposite the second side, an essentially equal first excitation voltage being applied to the first and further first electrodes in a first step for exciting a first deflection of the seismic mass along a first direction, the first deflection being compensated in a second step by applying a first compensation voltage to the further second and further fourth electrodes.

Abstract translation: 一种用于调整加速度传感器的方法，所述加速度传感器包括基板和地震块，所述加速度传感器具有在第一侧上附接到所述基板的第一和另外的第一电极，所述地震质量块的对电极位于所述第一和第二电极之间 加速度传感器在第二侧具有另外的第二电极，在与第二侧相反的第四侧具有另外的第四电极，在第一步骤中将基本上相等的第一激励电压施加到第一和第二电极，用于激发第一偏转 所述地震质量沿着第一方向，所述第一偏转在第二步骤中通过向所述另外的第二和第四电极施加第一补偿电压来补偿。

公开(公告)号：US20110079079A1

公开(公告)日：2011-04-07

申请号：US12897367

申请日：2010-10-04

Applicant: Johannes CLASSEN ,  Torsten Ohms ,  Daniel Cgristoph Meisel ,  Joerg Hauer

Inventor： Johannes CLASSEN ,  Torsten Ohms ,  Daniel Cgristoph Meisel ,  Joerg Hauer

IPC: G01P3/44

CPC classification number: G01C19/5755 ,  G01C19/574

Abstract: A yaw rate sensor having a substrate which has a main plane of extension, and a Coriolis element is proposed. The Coriolis element is excitable to a vibration along a third direction which is perpendicular to the main plane of extension. A Coriolis deflection of the Coriolis element along a first direction which is parallel to the main plane of extension may be detected using a detection arrangement. The detection arrangement includes a Coriolis electrode which is connected to the Coriolis element, and a corresponding counterelectrode. Both the Coriolis electrode and the counterelectrode may be excited to a vibration along the third direction.

Abstract translation: 提出了具有具有主平面延伸的基板和科里奥利元件的偏航率传感器。 科里奥利元件可以沿垂直于主延伸平面的第三方向振动。 可以使用检测装置检测Coriolis元件沿着与主延伸平面平行的第一方向的科里奥利偏转。 检测装置包括连接到科里奥利元件的科里奥利电极和相应的反电极。 科里奥利电极和对电极都可以沿着第三个方向激发振动。

公开(公告)号：US07667282B2

公开(公告)日：2010-02-23

申请号：US11187346

申请日：2005-07-21

Applicant: Joerg Muchow ,  Torsten Ohms ,  Volkmar Senz ,  Guenther-Nino-Carlo Ullrich ,  Ronald Gampp

Inventor： Joerg Muchow ,  Torsten Ohms ,  Volkmar Senz ,  Guenther-Nino-Carlo Ullrich ,  Ronald Gampp

IPC: H01L29/78

CPC classification number: B81B3/0072 ,  B81B2203/0127

Abstract: A method and a micromechanical component which counteract manufacturing-process-related mechanical stresses in the membrane are provided. The membrane is formed on a substrate in a layer system and spans a cavity in the substrate. The layer system includes at least one base layer formed on the substrate for circuit elements. At least one structured masking layer is also formed on the base layer for defining the circuit elements. The masking layer is structured in the area of the membrane in such a way that mechanical stresses acting in the area of the membrane under vacuum are at least partially compensated, the intrinsic stress of the masking layer being taken into account in the layout of the structuring.

Abstract translation: 提供了一种抵抗膜中与制造过程相关的机械应力的方法和微机械部件。 膜在层系统中的基底上形成并跨越衬底中的空腔。 层系统包括在用于电路元件的基板上形成的至少一个基底层。 至少一个结构化掩模层也形成在基底层上以限定电路元件。 屏蔽层被构造在膜的区域中，使得在真空下作用在膜的区域中的机械应力被至少部分地补偿，掩蔽层的固有应力在结构化的布局中被考虑 。

公开(公告)号：US20120247206A1

公开(公告)日：2012-10-04

申请号：US13365740

申请日：2012-02-03

Applicant: Torsten Ohms ,  Burkhard Kuhlmann ,  Robert Sattler

Inventor： Torsten Ohms ,  Burkhard Kuhlmann ,  Robert Sattler

IPC: G01C19/00

CPC classification number: G01C19/5747

Abstract: A yaw-rate sensor and a method for operating a yaw-rate sensor having a first Coriolis element and a second Coriolis element are proposed, the yaw-rate sensor having a substrate having a main plane of extension, the yaw-rate sensor having a first drive element for driving the first Coriolis element in parallel to a second axis, the yaw-rate sensor having a second drive element for driving the second Coriolis element in parallel to the second axis, the yaw-rate sensor having detection means for detecting deflections of the first Coriolis element and of the second Coriolis element in parallel to a first axis due to a Coriolis force, the second axis being situated perpendicularly to the first axis, the first and second axis being situated in parallel to the main plane of extension, the first and second drive elements being mechanically coupled to each other via a drive coupling element.

Abstract translation: 提出了一种摆动速率传感器和用于操作具有第一科里奥利元件和第二科里奥利元件的偏航率传感器的方法，所述偏航速率传感器具有具有主平面延伸的基板，偏航速率传感器具有 用于与第二轴平行地驱动第一科里奥利元件的第一驱动元件，所述偏航速率传感器具有用于平行于所述第二轴驱动所述第二科里奥利元件的第二驱动元件，所述偏航率传感器具有用于检测偏转的检测装置 的第一科里奥利元件和由于科里奥利力而与第一轴平行的第二科里奥利元件，第二轴线垂直于第一轴线定位，第一和第二轴线平行于主平面延伸， 所述第一和第二驱动元件经由驱动联接元件彼此机械耦合。