公开(公告)号：US08353600B1

公开(公告)日：2013-01-15

申请号：US12822180

申请日：2010-06-23

Applicant: Yee-Chung Fu

Inventor： Yee-Chung Fu

IPC: G02B5/08

CPC classification number: G02B6/3518 ,  B81B3/0021 ,  B81B2201/033 ,  B81B2201/045 ,  G02B6/357 ,  G02B26/0833 ,  G02B26/101

Abstract: A micro-electro-mechanical system (MEMS) actuator assembly includes a mirror and four actuators. Each actuator includes a lever pivotable about a fulcrum axis. The inner end of each lever is coupled to one side of the mirror. Force is applied to one outer end of the levers to move one side of the mirror, which positions the mirror in one of four positions. Force is applied to two outer ends of the levers to move two sides of the mirror, which positions the mirror in one of four additional positions.

Abstract translation: 微机电系统（MEMS）致动器组件包括反射镜和四个致动器。 每个致动器包括可围绕支点轴线枢转的杆。 每个杠杆的内端连接到镜子的一侧。 将力施加到杆的一个外端以移动镜的一侧，其将镜定位在四个位置之一中。 将力施加到杠杆的两个外端以移动镜的两侧，其将镜定位在四个附加位置之一中。

公开(公告)号：US08334159B1

公开(公告)日：2012-12-18

申请号：US12414616

申请日：2009-03-30

Applicant: Yee-Chung Fu

Inventor： Yee-Chung Fu

IPC: H01L21/00 ,  H01L29/84 ,  G01P15/08 ,  H04R23/00 ,  G01L9/00

CPC classification number: G01L9/0047 ,  G01L9/005 ,  G01L9/0073

Abstract: A micro-electro-mechanical system (MEMS) pressure sensor includes a silicon spacer defining an opening, a silicon membrane layer mounted above the spacer, a silicon sensor layer mounted above the silicon membrane layer, and a capacitance sensing circuit. The silicon membrane layer forms a diaphragm opposite of the spacer opening, and a stationary perimeter around the diaphragm and opposite the spacer. The silicon sensor layer includes an electrode located above the diaphragm of the silicon membrane layer. The capacitance sensing circuit is coupled to the electrode and the silicon membrane layer. The electrode and the silicon membrane layer move in response to a pressure applied to the diaphragm. The movement of the silicon membrane layer causes it to deform, thereby changing the capacitance between the electrode and the silicon membrane layer by an amount proportional to the change in the pressure.

Abstract translation: 微电子机械系统（MEMS）压力传感器包括限定开口的硅间隔物，安装在间隔物上方的硅膜层，安装在硅膜层上方的硅传感器层和电容感测电路。 硅膜层形成与间隔开口相对的隔膜，以及围绕隔膜并与间隔件相对的固定周界。 硅传感器层包括位于硅膜层隔膜上方的电极。 电容感测电路耦合到电极和硅膜层。 电极和硅膜层响应于施加到隔膜的压力而移动。 硅膜层的运动导致其变形，从而将电极和硅膜层之间的电容改变成与压力变化成比例的量。

公开(公告)号：US07616371B2

公开(公告)日：2009-11-10

申请号：US11626257

申请日：2007-01-23

Applicant: Yee-Chung Fu

Inventor： Yee-Chung Fu

IPC: G02B26/00

CPC classification number: G02B26/0841

Abstract: A mirror device includes a mirror, an anchor, and a spring coupling the mirror to the anchor. The anchor and/or mirror can define one or more rows of holes adjacent to the coupling location of the spring. The natural frequency of the device can be adjusted by removing material between the perimeter of the mirror/anchor and the outermost holes, and between adjacent holes in the same row. Another mirror device includes a mirror, anchors, and springs coupling the mirror to the anchors. The natural frequency of the device can be adjusted by decoupling one or more springs coupling the mirror to the anchors. The mirror of both devices can includes one or more sacrificial portions. The natural frequencies of the both devices can also be adjusted by trimming the sacrificial portions.

Abstract translation: 反射镜装置包括镜子，锚固器和将镜子连接到锚固件的弹簧。 锚和/或反射镜可以限定与弹簧的联接位置相邻的一排或多排孔。 可以通过去除反射镜/锚的周边和最外面的孔之间以及相邻的相邻孔之间的材料来调节装置的固有频率。 另一个反射镜装置包括将反射镜，锚固器和将反射镜联接到锚固件的弹簧。 可以通过将耦合反射镜的一个或多个弹簧分离到锚固件来调节装置的固有频率。 两个装置的镜子可以包括一个或多个牺牲部分。 也可以通过修整牺牲部分来调节两个装置的固有频率。

公开(公告)号：US07576955B1

公开(公告)日：2009-08-18

申请号：US11295418

申请日：2005-12-06

Applicant: Jian Yang ,  Chen-Chi Lin ,  Yee-Chung Fu

Inventor： Jian Yang ,  Chen-Chi Lin ,  Yee-Chung Fu

IPC: G11B5/55 ,  G11B21/08

CPC classification number: G11B5/4833

Abstract: An actuator for a disk drive is disclosed. The actuator includes a plurality of arms including an upper outer arm, a lower outer arm, and at least one inner arm. The outer arms each include a region of reduced width and also include a region of increased thickness, both such regions being located closer to a proximal supported end of the outer arm than to its distal end. Each region of increased thickness has a minimum thickness that is more than the thickness of the inner arm at an equal distance from the axis. Each region of reduced width has a minimum width that is less than the minimum width of the inner arm at an equal distance from the axis.

Abstract translation: 公开了一种用于磁盘驱动器的致动器。 致动器包括多个臂，包括上外臂，下外臂和至少一个内臂。 外臂各自包括宽度减小的区域并且还包括增加厚度的区域，两个这样的区域位于比其远端更靠近外臂的近侧支撑的端部。 增加厚度的每个区域具有比距离轴线等距离的内臂的厚度的最小厚度。 减小宽度的每个区域具有小于距离轴线等距离的内臂的最小宽度的最小宽度。

公开(公告)号：US07334475B1

公开(公告)日：2008-02-26

申请号：US11367104

申请日：2006-03-03

Applicant: Yee-Chung Fu

Inventor： Yee-Chung Fu

IPC: G01P15/08 ,  G01P15/00

CPC classification number: G02B26/0841 ,  B81B3/0021 ,  B81B2201/033 ,  H02N1/008

Abstract: A micro-electro-mechanical system (MEMS) device includes an oscillating body and a beam connected to the oscillating body. The beam has a proximal end connected to the oscillating body, a distal end spaced from the oscillating body, and rotational comb teeth extending from the beam. Springs couple the beam to stationary pads to allow the oscillating body to rotate about a rotational axis. The springs are arranged along the rotation axis so at least one spring is located between another spring and the oscillating body. Stationary comb teeth extend from a stationary pad to be interdigitated with the rotational comb teeth extending from the beam. A voltage difference is applied between the stationary and rotational comb teeth to rotate the oscillating body about the rotation axis. A bottom layer includes mounting pads for supporting the stationary pads. An electrode is formed on a surface of the bottom layer. A voltage or ground is applied to the electrode to assert a physical influence on the rotation of the oscillating body.

Abstract translation: 微电子机械系统（MEMS）装置包括振荡体和连接到振动体的梁。 梁具有连接到振动体的近端，与振动体间隔开的远端以及从梁延伸的旋转梳齿。 弹簧将梁连接到固定垫，以允许振动体围绕旋转轴线旋转。 弹簧沿着旋转轴线布置，使得至少一个弹簧位于另一个弹簧和振动体之间。 固定梳齿从固定垫延伸，与从梁延伸的旋转梳齿相互交错。 在静止齿轮和旋转梳齿之间施加电压差以围绕旋转轴旋转振荡体。 底层包括用于支撑固定垫的安装垫。 在底层的表面上形成电极。 对电极施加电压或接地以对振荡体的旋转产生物理影响。

公开(公告)号：US20070117051A1

公开(公告)日：2007-05-24

申请号：US11626257

申请日：2007-01-23

Applicant: Yee-Chung Fu

Inventor： Yee-Chung Fu

IPC: G03C5/00

CPC classification number: G02B26/0841

Abstract: A mirror device includes a mirror, an anchor, and a spring coupling the mirror to the anchor. The anchor and/or mirror can define one or more rows of holes adjacent to the coupling location of the spring. The natural frequency of the device can be adjusted by removing material between the perimeter of the mirror/anchor and the outermost holes, and between adjacent holes in the same row. Another mirror device includes a mirror, anchors, and springs coupling the mirror to the anchors. The natural frequency of the device can be adjusted by decoupling one or more springs coupling the mirror to the anchors. The mirror of both devices can includes one or more sacrificial portions. The natural frequencies of the both devices can also be adjusted by trimming the sacrificial portions.

Abstract translation: 反射镜装置包括镜子，锚固器和将镜子连接到锚固件的弹簧。 锚和/或反射镜可以限定与弹簧的联接位置相邻的一排或多排孔。 可以通过去除反射镜/锚的周边和最外面的孔之间以及相邻的相邻孔之间的材料来调节装置的固有频率。 另一个反射镜装置包括将反射镜，锚固器和将反射镜联接到锚固件的弹簧。 可以通过将耦合反射镜的一个或多个弹簧分离到锚固件来调节装置的固有频率。 两个装置的镜子可以包括一个或多个牺牲部分。 也可以通过修整牺牲部分来调节两个装置的固有频率。

公开(公告)号：US07217587B2

公开(公告)日：2007-05-15

申请号：US11185271

申请日：2005-07-19

Applicant: Yee-Chung Fu

Inventor： Yee-Chung Fu

IPC: H01L21/00

CPC classification number: G02B26/0841

Abstract: A micro-electro-mechanical system (MEMS) device includes a mirror having a top surface with trenches, a beam connected to the mirror, rotational comb teeth connected to the beam, and one or more springs connecting the beam to a bonding pad. The mirror can have a bottom surface for reflecting light. Stationary comb teeth can be interdigitated with the rotational comb teeth either in-plane or out-of-plane. Steady or oscillating voltage difference between the rotational and the stationary comb teeth can be used to oscillate or tune the mirror. The comb teeth can have a tapered shape.

Abstract translation: 微电子机械系统（MEMS）装置包括具有沟槽的顶表面的反射镜，连接到反射镜的光束，连接到光束的旋转梳齿，以及将光束连接到接合焊盘的一个或多个弹簧。 镜子可以具有用于反射光的底面。 固定梳齿可以与旋转梳齿在平面内或平面外相互交错。 旋转和固定梳齿之间的稳定或振荡电压差可用于振荡或调谐镜子。 梳齿可以具有锥形形状。

公开(公告)号：US07187100B2

公开(公告)日：2007-03-06

申请号：US10828946

申请日：2004-04-20

Applicant: Yee-Chung Fu

Inventor： Yee-Chung Fu

IPC: G02B26/10 ,  G02B26/08 ,  H02N1/00

CPC classification number: H02N1/008 ,  B81B3/0045 ,  B81B2201/033 ,  B81B2201/047 ,  B81B2203/0109 ,  B81B2203/058 ,  G02B26/0841 ,  Y10S359/904

Abstract: A micro-electro-mechanical system (MEMS) mirror device includes an mirror, bonding pads, springs, and beams connected to the mirror. The mirror has a width greater than 1000 and less than 1200 microns, a length greater than 4000 and less than 5500 microns, and a thickness greater than 240 microns. Each beam includes a plurality of rotational comb teeth and is connected by multiple springs to the bonding pads.

Abstract translation: 微机电系统（MEMS）镜装置包括连接到反射镜的反射镜，接合垫，弹簧和梁。 反射镜的宽度大于1000且小于1200微米，长度大于4000且小于5500微米，厚度大于240微米。 每个梁包括多个旋转梳齿，并通过多个弹簧连接到接合垫。

公开(公告)号：US08741692B1

公开(公告)日：2014-06-03

申请号：US13233979

申请日：2011-09-15

Applicant: Yee-Chung Fu

Inventor： Yee-Chung Fu

IPC: H01L21/00

CPC classification number: B81C1/00301 ,  B81B2201/0271 ,  B81B2201/042 ,  B81B2203/0136 ,  B81B2207/096 ,  B81C2203/0118

Abstract: A method for forming semiconductor devices with wafer-level packaging (WLP) includes providing a silicon-on-insulator (SOI) substrate, forming a mask on a silicon layer of the SOI substrate, etching the silicon layer through openings in the mask to form elements initially bonded to but later released from an insulator layer of the SOI substrate, bonding a support substrate to the silicon layer, depositing metal over through holes in the support substrate to contact the silicon layer, and singulating the semiconductor devices from the bonded SOI substrate and the support substrate. The support substrate defines depressions opposite the elements so the elements are not bonded to the support substrate. Each semiconductor device includes a hermetically sealed package having a portion of the SOI substrate and a portion of the support substrate.

Abstract translation: 用于形成具有晶片级封装（WLP）的半导体器件的方法包括提供绝缘体上硅（SOI）衬底，在SOI衬底的硅层上形成掩模，通过掩模中的开口蚀刻硅层以形成 元件最初被结合到SOI衬底的绝缘体层上，然后从SOI衬底的绝缘体层释放，将支撑衬底粘合到硅层上，在支撑衬底中的通孔上沉积金属以接触硅层，以及从结合的SOI衬底分离半导体器件 和支撑基板。 支撑衬底限定与元件相对的凹陷，因此元件不与支撑衬底结合。 每个半导体器件包括具有SOI衬底的一部分和支撑衬底的一部分的气密密封封装。

公开(公告)号：US08383256B1

公开(公告)日：2013-02-26

申请号：US12613774

申请日：2009-11-06

Applicant: Yee-Chung Fu

Inventor： Yee-Chung Fu

IPC: H01M2/12

CPC classification number: H01M2/1241 ,  F16K99/0001 ,  H01M2/345 ,  H01M2200/20

Abstract: A battery has a battery case with a hole, and a micro-electro-mechanical system (MEMS) safety valve mounted to the battery case over the hole. The MEMS safety valve includes a silicon diaphragm and a silicon electrode layer with a movable electrode mounted above the diaphragm, a stationary electrode around the movable electrode, and one or more links electrically connecting the movable and the stationary electrodes. The stationary electrode, the links, and the movable electrode form part of an electrical path between one or more battery cells and a battery terminal. The links break to open the electrical path when the pressure in the battery case pushes the diaphragm and the links past a first limit. The diaphragm breaks to release fluid from the battery case when the pressure pushes the diaphragm past a second limit. The first limit may be smaller, larger, or the same as the second limit.

Abstract translation: 电池具有带孔的电池壳体，以及安装在电池壳体上的微机电系统（MEMS）安全阀。 MEMS安全阀包括硅隔膜和安装在隔膜上方的可移动电极的硅电极层，围绕可动电极的固定电极以及电连接可动电极和固定电极的一个或多个连接件。 固定电极，连杆和可动电极构成一个或多个电池单元与电池端子之间的电气路径的一部分。 当电池盒中的压力推动隔膜并且连接件超过第一限制时，连杆断开以打开电路径。 当压力推动隔膜超过第二极限时，隔膜破裂以从电池盒释放流体。 第一个限制可能更小，更大或与第二个限制相同。