公开(公告)号：US07970101B2

公开(公告)日：2011-06-28

申请号：US12544562

申请日：2009-08-20

Applicant: Noriaki Sakai ,  Toshiyuki Takahara ,  Yoshiki Matoba

Inventor： Noriaki Sakai ,  Toshiyuki Takahara ,  Yoshiki Matoba

IPC: G01N23/223 ,  G01N23/203

CPC classification number: G01N23/223 ,  G01N2223/076

Abstract: An X-ray tube which irradiates a primary X-ray to an irradiation point on a sample, an X-ray detector which detects a characteristic X-ray and a scattered X-ray emitted from the sample and outputs a signal including energy information on the characteristic X-ray and scattered X-ray, an analyzer which analyzes the signal, a sample stage on which the sample is placed, a moving mechanism which moves the sample on the sample stage, the X-ray tube, and the X-ray detector relative to each other, a height measuring mechanism which measures a maximum height of the sample, and a control unit which adjusts the distance between the sample and the X-ray tube and the distance between the sample and the X-ray detector by controlling the moving mechanism on the basis of the measured maximum height of the sample, are included.

Abstract translation: 将X射线照射到样品的照射点的X射线管，检测特征X射线的X射线检测器和从样本发射的散射X射线，并输出包含能量信息的信号 特征X射线和散射X射线，分析信号的分析器，放置样品的样品台，使样品台上的样品移动的移动机构，X射线管和X射线管， 相对于彼此的X射线检测器，测量样品的最大高度的高度测量机构，以及调整样品与X射线管之间的距离以及样品与X射线检测器之间的距离的控制单元， 包括根据测得的样品最大高度来控制移动机构。

公开(公告)号：US20080181365A1

公开(公告)日：2008-07-31

申请号：US11972352

申请日：2008-01-10

Applicant: Yoshiki Matoba

Inventor： Yoshiki Matoba

IPC: H01J5/18

CPC classification number: H05G1/04 ,  H01J35/08 ,  H01J35/18 ,  H01J2235/087 ,  H01J2235/18

Abstract: To be able to achieve further small-sized formation and light-weighted formation and to promote a sensitivity by further efficiently detecting a fluorescent X-ray or the like in an X-ray tube and an X-ray analyzing apparatus, there are provided a vacuum cabinet 2 inside of which is brought into a vacuum state and which includes a window portion 1 formed by an X-ray transmitting film through which an X-ray can be transmitted, an electron beam source 3 installed at inside of the vacuum cabinet 2 for emitting an electron beam e, a target T generating a primary X-ray X1 by being irradiated with the electron beam e and installed at inside of the vacuum cabinet 2 to be able to emit the primary X-ray X1 to an outside sample S by way of the window portion 1, and an X-ray detecting element 4 arranged at inside of the vacuum cabinet 2 to be able to detect a fluorescent X-ray and a scattered X-ray X2 emitted from the sample S and incident from the window portion 1 for outputting a signal including energy information of the fluorescent X-ray and the scattered X-ray X2.

Abstract translation: 为了能够进一步小型化和轻量化形成，并且通过进一步有效地检测X射线管和X射线分析装置中的荧光X射线等来提高灵敏度， 其内部的真空柜2处于真空状态，并且包括由可透射X射线的X射线透过膜形成的窗口部分1，安装在真空室2内部的电子束源3 用于发射电子束e，通过用电子束e照射并安装在真空容器2的内部并能够将主X射线X 1发射到外部的主要X射线X 1产生的靶T 通过窗口部分1的样品S和布置在真空室2内部的X射线检测元件4，以便能够检测从样品S发射的荧光X射线和散射X射线X 2，以及 来自窗口部分1的用于输出信号的入射 荧光X射线的能量信息和散射的X射线X 2。

公开(公告)号：US07289598B2

公开(公告)日：2007-10-30

申请号：US11264403

申请日：2005-11-01

Applicant: Yoshiki Matoba

Inventor： Yoshiki Matoba

IPC: G01N23/223 ,  H05G1/38

CPC classification number: G01N23/223 ,  G01N2223/076

Abstract: The change in the sample size and a change in background intensity due to the coexisting element are measured in real time to thereby automatically change a measurement time, the detection lower limit is kept constant, so that a fluorescent X-ray apparatus is provided that is capable of measuring every time in the same detection lower limit even in a case where there have existed a change in size of a sample, a change in sensitivity due to a difference in main ingredient, and a change of a magnitude in background due to an influence of a coexisting element.

Abstract translation: 实时测量样品尺寸的变化和由于共存元件引起的背景强度的变化，从而自动改变测量时间，检测下限保持恒定，从而提供荧光X射线装置，即 即使在存在样品尺寸变化的情况下，也能够在相同的检测下限中进行测定，由于主要成分的差异导致的灵敏度的变化以及由于 共存元素的影响。

公开(公告)号：US20070211852A1

公开(公告)日：2007-09-13

申请号：US11708789

申请日：2007-02-20

Applicant: Yoshiki Matoba

Inventor： Yoshiki Matoba

IPC: G01N23/223 ,  G01T1/36

CPC classification number: G01N23/223 ,  G01N2223/076 ,  G01N2223/30

Abstract: There is provided a fluorescent X-ray analysis apparatus in which a detection lower limit is improved, and it is possible to quantify a trace aimed element having been contained not only in a sample whose main component is a heavy element but also in a sample whose main component is a light element. The fluorescent X-ray analysis apparatus possesses a sample base supporting the sample, an X-ray source irradiating a primary X-ray with a predetermined irradiation position being made a center, and a detector disposed toward the irradiation position and detecting a fluorescent X-ray generated from the sample. The sample base has a detachable sample holding tool fixing the sample while being approached to the X-ray source and the detector, and a measurement is possible by selectively disposing the sample in any one of a 1st inspection position in which an irradiated face is coincided with the irradiation position, or a 2nd inspection position in which the sample is fixed to the sample holding tool, an irradiated face is approached to the X-ray source, and an inspected face is approached to the detector.

Abstract translation: 提供了一种荧光X射线分析装置，其中检测下限得到改善，并且可以对不仅在主要成分是重元素的样品中含有的痕量目标元素进行定量，而且还可以定量 主要组件是轻元素。 荧光X射线分析装置具有支撑样品的样品基底，以预定照射位置为中心照射初级X射线的X射线源和朝向照射位置设置的检测器， 从样品中产生的光线。 样品基底具有可拆卸的样品保持工具，其在接近X射线源和检测器的同时固定样品，并且可以通过选择性地将样品放置在照射的面一致的第一检查位置中的任一个中来进行测量 或者将样品固定在样品保持工具上的第二检查位置，将照射面接近X射线源，将检查面靠近检测器。

公开(公告)号：US20060093085A1

公开(公告)日：2006-05-04

申请号：US11264403

申请日：2005-11-01

Applicant: Yoshiki Matoba

Inventor： Yoshiki Matoba

IPC: G01N23/223 ,  G01T1/36

CPC classification number: G01N23/223 ,  G01N2223/076

Abstract: The change in the sample size and a change in background intensity due to the coexisting element are measured in real time to thereby automatically change a measurement time, the detection lower limit is kept constant, so that a fluorescent X-ray apparatus is provided that is capable of measuring every time in the same detection lower limit even in a case where there have existed a change in size of a sample, a change in sensitivity due to a difference in main ingredient, and a change of a magnitude in background due to an influence of a coexisting element.

Abstract translation: 实时测量样品尺寸的变化和由于共存元件引起的背景强度的变化，从而自动改变测量时间，检测下限保持恒定，从而提供荧光X射线装置，即 即使在存在样品尺寸变化的情况下，也能够在相同的检测下限中进行测定，由于主要成分的差异导致的灵敏度的变化以及由于 共存元素的影响。

公开(公告)号：US06496565B2

公开(公告)日：2002-12-17

申请号：US09827123

申请日：2001-04-05

Applicant: Yoshiki Matoba ,  Mitsuo Naito

Inventor： Yoshiki Matoba ,  Mitsuo Naito

IPC: G21K102

CPC classification number: G21K1/02

Abstract: An X-ray fluorescence analysis apparatus in which a collimator for defining a range of passage of X-rays, can be safely and simply attached and detached by providing a right-hand screw thread for attachment of the collimator to a housing, an X-ray generator, or an X-ray detector, and further providing a left-hand screw thread on a side of the collimator opposite to that of the right-hand screw thread. An attachment jig having a left-hand screw thread corresponding to the left-hand screw thread provided on the collimator is used to attach and detach the collimator.

Abstract translation: 一种X射线荧光分析装置，其中用于限定X射线通过范围的准直器可以通过提供用于将准直器附接到壳体的右手螺纹来安全且简单地附接和拆卸， 射线发生器或X射线检测器，并且进一步在准直器的与右旋螺纹相反的一侧上提供左螺纹。 使用具有与设置在准直仪上的左侧螺纹对应的左手螺纹的安装夹具来安装和拆卸准直仪。

公开(公告)号：US08891729B2

公开(公告)日：2014-11-18

申请号：US13564800

申请日：2012-08-02

Applicant: Yoshiki Matoba ,  Rintaro Nakatani ,  Tsuneo Sato

Inventor： Yoshiki Matoba ,  Rintaro Nakatani ,  Tsuneo Sato

IPC: G01N23/223 ,  G01N23/06

CPC classification number: G01N23/06 ,  G01N23/223 ,  G01N2223/076

Abstract: An X-ray analyzer includes a transmission X-ray inspecting portion having a first X-ray source and a transmission X-ray detector for detecting a transmission X-ray that passed through a sample from the first X-ray source, and a fluorescent X-ray inspecting portion having a second X-ray source and a fluorescent X-ray detector for detecting a fluorescent X-ray output from the sample when the sample is irradiated with an X-ray from the second X-ray source. A movement mechanism moves a sample stage that supports the sample. A foreign matter position calculating unit calculates a position of foreign matter in the sample, and a movement mechanism control unit controls the movement mechanism so that the position of the foreign matter calculated by the foreign matter position calculating unit coincides with an optical axis of the second X-ray source.

Abstract translation: X射线分析仪包括具有第一X射线源的透射X射线检查部和用于检测通过来自第一X射线源的样品的透射X射线的透射X射线检测器， X射线检查部分具有第二X射线源和荧光X射线检测器，用于当从第二X射线源照射X射线时检测从样品输出的荧光X射线。 移动机构移动支持样品的样品台。 异物位置计算单元计算样品中的异物的位置，移动机构控制单元控制移动机构，使得由异物位置计算单元计算的异物的位置与第二个 X射线源。

公开(公告)号：US20100316187A1

公开(公告)日：2010-12-16

申请号：US12802401

申请日：2010-06-07

Applicant: Yoshiki Matoba

Inventor： Yoshiki Matoba

IPC: G01N23/18

CPC classification number: G01N23/083

Abstract: In order to prevent misdetection and erroneous detection by clearly determining only a contrast caused by a foreign matter, there are provided an X-ray inspection method and an X-ray inspection device including: an X-ray tube (11) for irradiating a measurement sample with a characteristic X-ray having energy lower than an X-ray absorption edge of one element contained in the measurement sample and having energy higher than an X-ray absorption edge of a detection element; an X-ray detector (13) for receiving a transmission X-ray obtained when the X-ray passes through the sample; and an operation portion (15) for obtaining a contrast image from a transmission image of the transmission X-ray.

Abstract translation: 为了通过清楚地仅确定由异物引起的对比度来防止错误检测和错误检测，提供了一种X射线检查方法和X射线检查装置，其包括：用于照射测量的X射线管（11） 样品具有能量低于测量样品中包含的一种元素的X射线吸收边缘的能量的特征X射线，并且具有高于检测元件的X射线吸收边缘的能量; X射线检测器（13），用于接收当X射线通过样品时获得的透射X射线; 以及用于从透射X射线的透射图像获得对比度图像的操作部分（15）。

公开(公告)号：US20100002833A1

公开(公告)日：2010-01-07

申请号：US12494851

申请日：2009-06-30

Applicant: Yoshiki Matoba ,  Kanji Nagasawa

Inventor： Yoshiki Matoba ,  Kanji Nagasawa

IPC: G01N23/223 ,  G01N23/04 ,  G01N23/201

CPC classification number: G01N23/223 ,  G01N2223/076

Abstract: Provided is an X-ray analysis apparatus including: an X-ray tubular bulb for irradiating a sample with a radiation beam; an X-ray detector for detecting a characteristic X-ray and a scattered X-ray and outputting a signal containing energy information on the characteristic X-ray and the scattered X-ray; an analyzer for analyzing the signal; a sample stage capable of moving an irradiation point relatively with respect to the sample within a mapping area set in advance; and an X-ray mapping processing section for discriminating an X-ray intensity corresponding to a specific element, determining an intensity contrast in which a color or lightness is changed in accordance with the X-ray intensity, and for performing image display at a position corresponding to the irradiation point, in which the X-ray mapping processing section determines the intensity contrast of the X-ray intensity at the irradiation point by setting in advance the X-ray intensity discriminated as to a reference material in which a component element and a concentration thereof are known as a reference.

Abstract translation: 本发明提供一种X射线分析装置，其特征在于，包括：X射线管状灯泡，用于对辐射束照射样品; 用于检测特征X射线和散射X射线并输出包含关于特征X射线和散射X射线的能量信息的信号的X射线检测器; 用于分析信号的分析器; 能够在预先设定的映射区域内相对于样本移动照射点的样本台; 以及X射线映射处理部分，用于鉴别与特定元素相对应的X射线强度，确定根据X射线强度改变颜色或亮度的强度对比度，并且在位置处进行图像显示 对应于照射点，其中X射线测绘处理部分通过预先确定对于其中组分元素和/或组分的参考材料的X射线强度来确定在照射点处的X射线强度的强度对比度 其浓度被称为参考。

公开(公告)号：US07627088B2

公开(公告)日：2009-12-01

申请号：US12175743

申请日：2008-07-18

Applicant: Yoshiki Matoba ,  Yutaka Ikku

Inventor： Yoshiki Matoba ,  Yutaka Ikku

IPC: H01J5/18 ,  G01N23/223

CPC classification number: H01J35/08 ,  H01J35/12 ,  H01J35/18 ,  H01J2235/087 ,  H01J2235/1291

Abstract: A vacuumed enclosure has a window formed of an X-ray transmissive material. The vacuumed enclosure encloses an electron beam source for generating an electron beam and a target which, irradiated by the electron beam, generates a primary X-ray. The target is smaller in the outer dimension than the window and located on the center of the window such that it irradiates, through the window, the primary X-ray onto a sample located outside. The vacuumed enclosure further encloses an X-ray detector located such that it can detect a fluorescent X-ray and a scattered X-ray coming from the sample through the window. The X-ray detector generates a signal representative of energy information of the fluorescent X-ray and the scattered X-ray. The vacuumed enclosure further encloses a thermally and electrically conductive metal extending through the target across the widow.

Abstract translation: 抽真空的外壳具有由X射线透射材料形成的窗口。 抽真空的外壳包围用于产生电子束的电子束源和由电子束照射的目标产生主X射线。 目标在外部尺寸上比窗口更小并且位于窗口的中心，使得其通过窗口将初级X射线照射到位于外部的样品上。 抽真空的外壳还包围一个X射线检测器，其位置使得它能够通过窗口检测来自样品的荧光X射线和散射的X射线。 X射线检测器产生表示荧光X射线和散射X射线的能量信息的信号。 被抽真空的外壳进一步封闭一个导电导电的金属，穿过该寡母延伸穿过目标。