公开(公告)号：US06387158B2

公开(公告)日：2002-05-14

申请号：US09848208

申请日：2001-05-04

申请人： Nobukazu Ikeda ,  Akihiro Morimoto ,  Yukio Minami ,  Teruo Honiden ,  Kouji Kawada ,  Katunori Komehana ,  Touru Hirai ,  Michio Yamaji

发明人： Nobukazu Ikeda ,  Akihiro Morimoto ,  Yukio Minami ,  Teruo Honiden ,  Kouji Kawada ,  Katunori Komehana ,  Touru Hirai ,  Michio Yamaji

IPC分类号： F17D314

CPC分类号： B01D53/26 ,  F17D3/14

摘要： A method of removing moisture efficiently in the gas supply system by evacuation at normal temperature without using the baking method. The method involves flowing a gas to remove moisture in the gas supply system with the flow pressure of the gas to remove moisture set at not lower than a minimum pressure at which the gas flow becomes viscous and not higher than a water saturated vapor pressure at a flow temperature of the gas to remove moisture. The gas to remove moisture achieves a viscous flow when a mean free path of gas molecules is smaller than a diameter of piping of the gas supply system. If the gas for removing moisture is evacuated at normal temperature under such conditions, the adsorbed moisture on an inside surface of the piping and in the valves and filters can be removed effectively.

摘要翻译： 一种通过在常温抽真空而不使用烘烤方法在气体供给系统中有效除去水分的方法。 该方法包括使气体流动以除去气体的流量的气体中的水分，以除去在不低于气体流变粘度的最低压力并且不高于水的饱和蒸气压的水分 气体的流动温度去除水分。 当气体分子的平均自由程小于气体供应系统的管道直径时，去除水分的气体达到粘性流动。 如果用于除去水分的气体在这样的条件下在常温下抽真空，则能够有效地除去管道内表面和阀门和过滤器中的吸附水分。

公开(公告)号：US07815872B2

公开(公告)日：2010-10-19

申请号：US11570667

申请日：2005-07-04

申请人： Toshirou Nariai ,  Kouji Kawada ,  Keiji Hirao ,  Yukio Minami ,  Akihiro Morimoto ,  Nobukazu Ikeda

发明人： Toshirou Nariai ,  Kouji Kawada ,  Keiji Hirao ,  Yukio Minami ,  Akihiro Morimoto ,  Nobukazu Ikeda

IPC分类号： B01J8/02 ,  C01B5/00

CPC分类号： B01J12/007 ,  B01J2219/00078 ,  B01J2219/00087 ,  B01J2219/00096 ,  B01J2219/00135 ,  C01B5/00 ,  F28D2021/0029 ,  F28F3/02 ,  H01L21/67017

摘要： A reactor for generating moisture, with which hydrogen and oxygen fed into the reactor contact with a platinum coating catalyst layer to activate reactivity so that hydrogen and oxygen react under conditions of non-combustion, wherein the reactor includes a cooler comprising a heat dissipation body substrate in which a heater insertion hole is made in the center to fix to the outer surface of the reactor structural component on the outlet side and a cooler on the outlet side made up of a plural number of heat dissipation bodies installed vertically in parallel on the part excluding the area where the afore-mentioned heater insertion hole of the heat dissipation body substrate exists, and a part of the heater to heat the reactor is inserted in the heater insertion hole so as to fix to the outer surface of the reactor structural component on the outlet side.

摘要翻译： 一种用于产生水分的反应器，通过该反应器将进入反应器的氢气和氧气与铂涂层催化剂层接触以激活反应性，使氢气和氧气在非燃烧条件下反应，其中反应器包括一个包含散热体基体 其中在中心处制造加热器插入孔以固定到出口侧的反应堆结构部件的外表面和出口侧的冷却器，该多个散热体垂直并排安装在部件上 不包括存在散热体基板的上述加热器插入孔的区域，并且将加热器的加热器的一部分插入加热器插入孔中，以便将反应器结构部件的外表面固定在 出口侧。

公开(公告)号：US20080241022A1

公开(公告)日：2008-10-02

申请号：US11570667

申请日：2005-07-04

申请人： Toshirou Nariai ,  Kouji Kawada ,  Keiji Hirao ,  Yukio Minami ,  Akihiro Morimoto ,  Nobukazu Ikeda

发明人： Toshirou Nariai ,  Kouji Kawada ,  Keiji Hirao ,  Yukio Minami ,  Akihiro Morimoto ,  Nobukazu Ikeda

IPC分类号： B01J12/00

CPC分类号： B01J12/007 ,  B01J2219/00078 ,  B01J2219/00087 ,  B01J2219/00096 ,  B01J2219/00135 ,  C01B5/00 ,  F28D2021/0029 ,  F28F3/02 ,  H01L21/67017

摘要： A reactor for generating moisture, with which hydrogen and oxygen fed into the reactor contact with a platinum coating catalyst layer to activate reactivity so that hydrogen and oxygen react under conditions of non-combustion, wherein the reactor includes a cooler comprising a heat dissipation body substrate in which a heater insertion hole is made in the center to fix to the outer surface of the reactor structural component on the outlet side and a cooler on the outlet side made up of a plural number of heat dissipation bodies installed vertically in parallel on the part excluding the area where the afore-mentioned heater insertion hole of the heat dissipation body substrate exists, and a part of the heater to heat the reactor is inserted in the heater insertion hole so as to fix to the outer surface of the reactor structural component on the outlet side.

摘要翻译： 一种用于产生水分的反应器，通过该反应器将进入反应器的氢气和氧气与铂涂层催化剂层接触以激活反应性，使氢气和氧气在非燃烧条件下反应，其中反应器包括一个包含散热体基体 其中在中心处制造加热器插入孔以固定到出口侧的反应堆结构部件的外表面和出口侧的冷却器，该多个散热体垂直并排安装在部件上 不包括存在散热体基板的上述加热器插入孔的区域，并且将加热器的加热器的一部分插入加热器插入孔中，以便将反应器结构部件的外表面固定在 出口侧。

公开(公告)号：US20070231225A1

公开(公告)日：2007-10-04

申请号：US11760330

申请日：2007-06-08

申请人： Tadahiro Ohmi ,  Nobukazu Ikeda ,  Yukio Minami ,  Kouji Kawada ,  Katunori Komehana ,  Teruo Honiden ,  Touru Hirai ,  Akihiro Morimoto ,  Toshirou Nariai ,  Keiji Hirao ,  Masaharu Taguchi ,  Osamu Nakamura

发明人： Tadahiro Ohmi ,  Nobukazu Ikeda ,  Yukio Minami ,  Kouji Kawada ,  Katunori Komehana ,  Teruo Honiden ,  Touru Hirai ,  Akihiro Morimoto ,  Toshirou Nariai ,  Keiji Hirao ,  Masaharu Taguchi ,  Osamu Nakamura

IPC分类号： B01J23/40

CPC分类号： B01J3/006 ,  B01J7/00 ,  B01J12/007 ,  C01B5/00

摘要： A safe, reduced pressure apparatus for generating water vapor from hydrogen and oxygen and feeding high purity moisture to processes such as semiconductor production. The apparatus eliminates the possibility of the gas igniting by maintaining the internal pressure of the catalytic reactor for generating moisture at a high level while supplying moisture gas from the reactor under reduced pressure. A heat dissipation reactor improvement substantially increases moisture generation without being an enlargement in size by efficient cooling of the reactor alumite-treated fins.

摘要翻译： 一种用于从氢气和氧气产生水蒸汽并将高纯度水分提供给诸如半导体生产的过程的安全的减压装置。 该设备通过保持催化反应器的内部压力以消除气体点燃的可能性，以产生高水平的水分，同时在减压下从反应器中提供湿气。 散热反应器的改进通过有效冷却反应器耐氧化铝处理的翅片而大大地增加了水分产生而不会扩大尺寸。

公开(公告)号：US07258845B2

公开(公告)日：2007-08-21

申请号：US09773605

申请日：2001-02-02

申请人： Tadahiro Ohmi ,  Nobukazu Ikeda ,  Yukio Minami ,  Kouji Kawada ,  Katunori Komehana ,  Teruo Honiden ,  Touru Hirai ,  Akihiro Morimoto ,  Toshirou Nariai ,  Keiji Hirao ,  Masaharu Taguchi ,  Osamu Nakamura

发明人： Tadahiro Ohmi ,  Nobukazu Ikeda ,  Yukio Minami ,  Kouji Kawada ,  Katunori Komehana ,  Teruo Honiden ,  Touru Hirai ,  Akihiro Morimoto ,  Toshirou Nariai ,  Keiji Hirao ,  Masaharu Taguchi ,  Osamu Nakamura

IPC分类号： B01J8/02 ,  C01B5/00

CPC分类号： B01J3/006 ,  B01J7/00 ,  B01J12/007 ,  C01B5/00

摘要： A safe, reduced pressure apparatus for generating water vapor from hydrogen and oxygen and feeding high purity moisture to processes such as semiconductor production. The apparatus eliminates the possibility of the gas igniting by maintaining the internal pressure of the catalytic reactor for generating moisture at a high level while supplying moisture gas from the reactor under reduced pressure. A heat dissipation reactor improvement substantially increases moisture generation without being an enlargement in size by efficient cooling of the reactor alumite-treated fins.

摘要翻译： 一种用于从氢气和氧气产生水蒸汽并将高纯度水分提供给诸如半导体生产的过程的安全的减压装置。 该设备通过保持催化反应器的内部压力以消除气体点燃的可能性，以产生高水平的水分，同时在减压下从反应器中提供湿气。 散热反应器的改进通过有效冷却反应器耐氧化铝处理的翅片而大大地增加了水分产生而不会扩大尺寸。

公开(公告)号：US06408879B1

公开(公告)日：2002-06-25

申请号：US09127817

申请日：1998-08-03

申请人： Tadahiro Ohmi ,  Yukio Minami ,  Akihiro Morimoto ,  Nobukazu Ikeda ,  Keiji Hirao ,  Takashi Hirose ,  Michio Yamaji ,  Kazuhiro Yoshikawa

发明人： Tadahiro Ohmi ,  Yukio Minami ,  Akihiro Morimoto ,  Nobukazu Ikeda ,  Keiji Hirao ,  Takashi Hirose ,  Michio Yamaji ,  Kazuhiro Yoshikawa

IPC分类号： F16K1100

CPC分类号： F16K27/003 ,  Y10T137/87684

摘要： A fluid control device comprises a first passageway, and a second passageway communicating therewith and having a terminating end closed with a fluid control unit or instrument. The first passageway is adapted to pass a fluid therethrough with a different fluid remaining in the second passageway. The first passageway comprises an upstream portion and a downstream portion communicating with the upstream portion at an approximate right angle therewith. The second passageway extends from a terminating end of the upstream portion of the first passageway in alignment with the upstream portion.

公开(公告)号：US07553459B2

公开(公告)日：2009-06-30

申请号：US11460087

申请日：2006-07-26

申请人： Tadahiro Ohmi ,  Nobukazu Ikeda ,  Yukio Minami ,  Kouji Kawada ,  Katunori Komehana ,  Teruo Honiden ,  Touru Hirai ,  Akihiro Morimoto ,  Toshirou Nariai ,  Keiji Hirao ,  Masaharu Taguchi ,  Osamu Nakamura

发明人： Tadahiro Ohmi ,  Nobukazu Ikeda ,  Yukio Minami ,  Kouji Kawada ,  Katunori Komehana ,  Teruo Honiden ,  Touru Hirai ,  Akihiro Morimoto ,  Toshirou Nariai ,  Keiji Hirao ,  Masaharu Taguchi ,  Osamu Nakamura

IPC分类号： B01J10/00 ,  B01J8/00 ,  C01B5/00

CPC分类号： B01J3/006 ,  B01J7/00 ,  B01J12/007 ,  C01B5/00

摘要： A safe, reduced pressure apparatus for generating water vapor from hydrogen and oxygen and feeding high purity moisture to processes such as semiconductor production. The apparatus eliminates the possibility of the gas igniting by maintaining the internal pressure of the catalytic reactor for generating moisture at a high level while supplying moisture gas from the reactor under reduced pressure. A heat dissipation reactor improvement substantially increases moisture generation without being an enlargement in size by efficient cooling of the reactor alumite-treated fins.

公开(公告)号：US07008598B2

公开(公告)日：2006-03-07

申请号：US10884917

申请日：2004-07-07

申请人： Tadahiro Ohmi ,  Kouji Kawada ,  Nobukazu Ikeda ,  Akihiro Morimoto ,  Yukio Minami ,  Kenji Tubota ,  Teruo Honiden ,  Touru Hirai ,  Katunori Komehana ,  Keiji Hirao

发明人： Tadahiro Ohmi ,  Kouji Kawada ,  Nobukazu Ikeda ,  Akihiro Morimoto ,  Yukio Minami ,  Kenji Tubota ,  Teruo Honiden ,  Touru Hirai ,  Katunori Komehana ,  Keiji Hirao

IPC分类号： B01J8/02

CPC分类号： B01J12/007 ,  B01J2219/00058 ,  B01J2219/00087 ,  B01J2219/00096 ,  C01B5/00

摘要： A reactor for generating moisture wherein ignition of hydrogen gas, backfire to the gas supply source side, the peeling off of the platinum coat catalyst layer inside are prevented more completely to further increase the safety of the reactor for generating moisture and wherein the dead space in the interior space is reduced to further reduce the size of the reactor shell. The reactor comprises: a reactor shell A with an interior space formed with a reactor structural component on the inlet side and a reactor structural component on the outlet side opposed to and united with each other by welding, the reactor structural component 1 on the inlet side provided with a gas feed port 1a and the reactor structural component 2 on the outlet side provided with a moisture gas take-out port 2a; a reflector on the inlet side facing the gas feed port in the interior space of the reactor; a reflector on the outlet side facing the moisture gas take-out port in the interior space; and a platinum coat catalyst layer 8 formed on the inside wall of the reactor structural component on the outlet side, wherein hydrogen and oxygen fed into the interior space of the reactor through the gas feed port are brought into contact with the platinum coat 8b to activate the reactivity, thereby reacting hydrogen and oxygen into water in a non-combustion state.

摘要翻译： 一种用于产生水分的反应器，其中更加完全地防止了氢气的点燃，气体供应源侧的反应，内部的铂涂层催化剂层的剥离，从而进一步提高了产生水分的反应器的安全性， 减少内部空间以进一步减小反应器壳体的尺寸。 反应器包括：反应器壳体A，内部空间形成有入口侧的反应器结构部件，出口侧的反应器结构部件通过焊接彼此相对并且彼此结合，反应器结构部件1在入口侧 设置有气体供给口1a和在排气侧设置有湿气取出口2a的反应器结构部件2; 入口侧的反射器，其面对反应器内部空间中的气体供给口; 出口侧的反射器面向内部空间中的湿气取出口; 以及形成在出口侧的反应器结构部件的内壁上的铂涂层催化剂层8，其中通过气体供给口供给到反应器的内部空间中的氢和氧与铂涂层8b相接触， 激活反应性，从而使氢和氧在非燃烧状态下反应成水。

公开(公告)号：US06848470B2

公开(公告)日：2005-02-01

申请号：US10775104

申请日：2004-02-11

申请人： Tadahiro Ohmi ,  Satoshi Kagatsume ,  Kazuhiko Sugiyama ,  Yukio Minami ,  Kouji Nishino ,  Ryousuke Dohi ,  Katsunori Yonehana ,  Nobukazu Ikeda ,  Michio Yamaji ,  Jun Hirose ,  Kazuo Fukazawa ,  Hiroshi Koizumi ,  Hideki Nagaoka ,  Akihiro Morimoto ,  Tomio Uno ,  Eiji Ideta ,  Atsushi Matsumoto ,  Toyomi Uenoyama ,  Takashi Hirose

发明人： Tadahiro Ohmi ,  Satoshi Kagatsume ,  Kazuhiko Sugiyama ,  Yukio Minami ,  Kouji Nishino ,  Ryousuke Dohi ,  Katsunori Yonehana ,  Nobukazu Ikeda ,  Michio Yamaji ,  Jun Hirose ,  Kazuo Fukazawa ,  Hiroshi Koizumi ,  Hideki Nagaoka ,  Akihiro Morimoto ,  Tomio Uno ,  Eiji Ideta ,  Atsushi Matsumoto ,  Toyomi Uenoyama ,  Takashi Hirose

IPC分类号： G05D7/06

CPC分类号： G05D7/0658 ,  G05D7/0664 ,  Y10S438/935 ,  Y10T137/0396 ,  Y10T137/7759 ,  Y10T137/7761 ,  Y10T137/86389 ,  Y10T137/87877 ,  Y10T137/87917

摘要： A fluid supply apparatus with a plurality of flow lines branching out from one pressure regulator with the flow lines arranged in parallel and constructed so that opening or closing one flow passage will have no transient effect on the steady flow of the other flow passages. Each flow passage is provided with a time delay-type mass flow controller MFC so that when one closed fluid passage is opened, the mass flow controller on that flow passage reaches a set flow rate Qs in a specific delay time Δt from the starting point.The invention includes a method and an apparatus in which a plurality of gas types can be controlled in flow rate with high precision by one pressure-type flow control system.

摘要翻译： 一种流体供给装置，具有从一个压力调节器分支出的多个流动管线，流动线平行布置并构造成使得打开或关闭一个流动通道对其它流动通道的稳定流动将没有暂时的影响。 每个流路设置有时间延迟型质量流量控制器MFC，使得当一个封闭流体通道打开时，该流路上的质量流量控制器在起始点处以特定延迟时间Deltat达到设定流量Qs。 本发明包括通过一个压力式流量控制系统以高精度控制多种气体类型的方法和装置。

公开(公告)号：US06820632B2

公开(公告)日：2004-11-23

申请号：US10162552

申请日：2002-06-06

申请人： Tadahiro Ohmi ,  Satoshi Kagatsume ,  Kazuhiko Sugiyama ,  Yukio Minami ,  Kouji Nishino ,  Ryousuke Dohi ,  Katsunori Yonehana ,  Nobukazu Ikeda ,  Michio Yamaji ,  Jun Hirose ,  Kazuo Fukazawa ,  Hiroshi Koizumi ,  Hideki Nagaoka ,  Akihiro Morimoto ,  Tomio Uno ,  Eiji Ideta ,  Atsushi Matsumoto ,  Toyomi Uenoyama ,  Takashi Hirose

发明人： Tadahiro Ohmi ,  Satoshi Kagatsume ,  Kazuhiko Sugiyama ,  Yukio Minami ,  Kouji Nishino ,  Ryousuke Dohi ,  Katsunori Yonehana ,  Nobukazu Ikeda ,  Michio Yamaji ,  Jun Hirose ,  Kazuo Fukazawa ,  Hiroshi Koizumi ,  Hideki Nagaoka ,  Akihiro Morimoto ,  Tomio Uno ,  Eiji Ideta ,  Atsushi Matsumoto ,  Toyomi Uenoyama ,  Takashi Hirose

IPC分类号： G05D706

CPC分类号： G05D7/0658 ,  G05D7/0664 ,  Y10S438/935 ,  Y10T137/0396 ,  Y10T137/7759 ,  Y10T137/7761 ,  Y10T137/86389 ,  Y10T137/87877 ,  Y10T137/87917

摘要： A fluid supply apparatus with a plurality of flow lines branching out from one pressure regulator with the flow lines arranged in parallel and constructed so that opening or closing one flow passage will have no transient effect on the steady flow of the other flow passages. Each flow passage is provided with a time delay-type mass flow controller MFC so that when one closed fluid passage is opened, the mass flow controller on that flow passage reaches a set flow rate Qs in a specific delay time At from the starting point. The invention includes a method and an apparatus in which a plurality of gas types can be controlled in flow rate with high precision by one pressure-type flow control system.

摘要翻译： 一种流体供给装置，具有从一个压力调节器分支出的多个流动管线，流动线平行布置并构造成使得打开或关闭一个流动通道对其它流动通道的稳定流动将没有暂时的影响。 每个流路设置有时间延迟型质量流量控制器MFC，使得当一个封闭流体通道打开时，该流路上的质量流量控制器在起始点处达到特定延迟时间At的设定流量Qs。 本发明包括通过一个压力式流量控制系统以高精度控制多种气体类型的方法和装置。