公开(公告)号：US08231986B2

公开(公告)日：2012-07-31

申请号：US11990760

申请日：2006-08-21

Applicant: Yoshio Harada ,  Takema Teratani

Inventor： Yoshio Harada ,  Takema Teratani

IPC: B32B19/00 ,  B32B9/00 ,  B05D1/04

CPC classification number: C23C4/02 ,  C23C4/11 ,  C23C4/18

Abstract: For the purpose of solving problems inherent to a white Al2O3 spray coating, i.e. drawbacks that the injury resistance, corrosion resistance, heat resistance, abrasion resistance and the like are poor and the light reflectance is high because the coating is porous and weak in the bonding force among particles, there are proposed a spray coating member having excellent injury resistance and the like in which a surface of a substrate is covered with a colored Al2O3 spray coating of a luminosity lower than grayish white, achromatic or chromatic color.

Abstract translation: 为了解决白色Al 2 O 3喷涂的固有问题，即耐腐蚀性，耐腐蚀性，耐热性，耐磨性等差的缺点，并且光反射率高，因为涂层是多孔的并且在粘结中是弱的 颗粒之间的力量，提出了具有优异的耐损伤性等的喷涂部件，其中基板的表面被发光度低于灰白色，无色或彩色的着色Al 2 O 3喷涂层覆盖。

公开(公告)号：US07648782B2

公开(公告)日：2010-01-19

申请号：US11688565

申请日：2007-03-20

Applicant: Yoshiyuki Kobayashi ,  Takahiro Murakami ,  Yoshio Harada ,  Junichi Takeuchi ,  Ryo Yamasaki ,  Keigo Kobayashi

Inventor： Yoshiyuki Kobayashi ,  Takahiro Murakami ,  Yoshio Harada ,  Junichi Takeuchi ,  Ryo Yamasaki ,  Keigo Kobayashi

IPC: H01L29/04 ,  H01L21/473 ,  H01L21/461 ,  H01L21/3105 ,  B01J3/08 ,  B01J19/08 ,  B05D3/06 ,  B05D1/06 ,  C08J7/18 ,  C23C4/10 ,  C01F17/00 ,  C04B35/505

CPC classification number: C23C4/02 ,  C23C4/18 ,  C23C28/042 ,  Y10T428/12

Abstract: Improving the resistance of members and parts disposed inside of vessels such as semiconductor processing devices for conducting plasma etching treatment in a strong corrosive environment. A ceramic coating member for a semiconductor processing apparatus comprises a porous layer made of an oxide of an element in Group IIIb of the Periodic Table coated directed or through an undercoat on the surface of the substrate of a metal or non-metal and a secondary recrystallized layer of the oxide formed on the porous layer through an irradiation treatment of a high energy such as electron beam and laser beam.

Abstract translation: 改善设置在容器内部的部件和部件的电阻，例如用于在强腐蚀性环境中进行等离子体蚀刻处理的半导体处理装置。 一种用于半导体处理装置的陶瓷涂层构件包括由元素周期表IIIb中元素的氧化物构成的多孔层，其被涂覆在金属或非金属基底的表面上或通过底涂层和二次重结晶 通过高能量的照射处理如电子束和激光束在多孔层上形成的氧化物层。

公开(公告)号：US20090208667A1

公开(公告)日：2009-08-20

申请号：US12293974

申请日：2007-03-16

Applicant: Yoshio Harada ,  Junichi Takeuchi ,  Ryo Yamasaki ,  Keigo Kobayashi

Inventor： Yoshio Harada ,  Junichi Takeuchi ,  Ryo Yamasaki ,  Keigo Kobayashi

IPC: B05D3/06

CPC classification number: C23C4/02 ,  C23C4/11 ,  C23C4/18 ,  C23C26/00 ,  C23C28/042

Abstract: Producing a ceramic coating member for a semiconductor processing apparatus with a purpose of improving the resistance of members and parts disposed inside of vessels such as semiconductor processing devices for conducting plasma etching treatment in a strong corrosive environment and as a means for solution, forming a porous layer by irradiating an oxide of an element in Group IIIa of the Periodic Table to be coated directly or through an undercoat on the surface of the substrate of a metal or non-metal and further forming a secondary recrystallized layer of the oxide on the porous layer through an irradiation treatment of a high energy such as electron beam and laser beam.

Abstract translation: 制造用于半导体处理装置的陶瓷涂层构件，其目的是提高容器内部的构件和部件的阻力，例如用于在强腐蚀性环境中进行等离子体蚀刻处理的半导体处理装置和作为溶液的手段，形成多孔 通过在金属或非金属的基板的表面上直接或通过底涂层照射周期表的IIIa族元素的氧化物，并进一步在多孔层上形成氧化物的二次再结晶层 通过电子束和激光束等高能量的照射处理。

公开(公告)号：US20080070051A1

公开(公告)日：2008-03-20

申请号：US11882462

申请日：2007-08-01

Applicant: Yoshio Harada ,  Junichi Takeuchi ,  Nobuyuki Nagayama ,  Kouji Mitsuhashi

Inventor： Yoshio Harada ,  Junichi Takeuchi ,  Nobuyuki Nagayama ,  Kouji Mitsuhashi

IPC: B32B15/04 ,  B05D1/36 ,  C09D1/00 ,  C23C4/10

CPC classification number: H01J37/32477 ,  B01J19/02 ,  B01J2219/0218 ,  B01J2219/0236 ,  B01J2219/024 ,  B01J2219/0263 ,  B01J2219/0286 ,  B01J2219/0894 ,  C09D1/00 ,  C23C4/00 ,  C23C4/02 ,  C23C4/11 ,  Y10T428/12458 ,  Y10T428/12479 ,  Y10T428/12549 ,  Y10T428/12618 ,  Y10T428/24999

Abstract: It is to propose an internal member for a plasma treating vessel having excellent resistances to chemical corrosion and plasma erosion under an environment containing a halogen gas and an advantageous method of producing the same, which is a member formed by covering a surface of a substrate with a multilayer composite layer consisting of a metal coating formed as an undercoat, Al2O3 film formed on the undercoat as a middle layer and Y2O3 sprayed coating formed on the middle layer as a top coat.

公开(公告)号：US20070218302A1

公开(公告)日：2007-09-20

申请号：US11688565

申请日：2007-03-20

Applicant: Yoshiyuki Kobayashi ,  Takahiro Murakami ,  Yoshio Harada ,  Junichi Takeuchi ,  Ryo Yamasaki ,  Keigo Kobayashi

Inventor： Yoshiyuki Kobayashi ,  Takahiro Murakami ,  Yoshio Harada ,  Junichi Takeuchi ,  Ryo Yamasaki ,  Keigo Kobayashi

IPC: B32B15/04

CPC classification number: C23C4/02 ,  C23C4/18 ,  C23C28/042 ,  Y10T428/12

Abstract: Improving the resistance of members and parts disposed inside of vessels such as semiconductor processing devices for conducting plasma etching treatment in a strong corrosive environment.A ceramic coating member for a semiconductor processing apparatus comprises a porous layer made of an oxide of an element in Group IIIa of the Periodic Table coated directly or through an undercoat on the surface of the substrate of a metal or non-metal and a secondary recrystallized layer of the oxide formed on the porous layer through an irradiation treatment of a high energy such as electron beam and laser beam.

Abstract translation: 改善设置在容器内部的部件和部件的电阻，例如用于在强腐蚀性环境中进行等离子体蚀刻处理的半导体处理装置。 用于半导体处理装置的陶瓷涂层构件包括由直接涂覆的元素周期表Ⅲa族元素的氧化物或金属或非金属基材表面上的底涂层和二次再结晶的多孔层 通过高能量的照射处理如电子束和激光束在多孔层上形成的氧化物层。

公开(公告)号：US6082444A

公开(公告)日：2000-07-04

申请号：US147154

申请日：1998-10-20

Applicant: Yoshio Harada ,  Tatsuyuki Kimura ,  Akio Shiratori ,  Morio Yokobori

Inventor： Yoshio Harada ,  Tatsuyuki Kimura ,  Akio Shiratori ,  Morio Yokobori

IPC: F23M5/08 ,  C23C4/18 ,  F22B37/10 ,  F28F13/18

CPC classification number: C23C28/321 ,  C23C28/3455 ,  C23C4/18 ,  F22B37/108

Abstract: In order to control the precipitation and formation of a deposition produced in an inner face portion of a heat transmitting tube for a boiler due to a boiler water and the formation of an oxide scale of a tube material due to overheated steam, there is provided a heat transmitting tube for a boiler provided with a porous sprayed coating. The porous sprayed coating is formed by using a metal.multidot.alloy having excellent high temperature oxidation resistance and corrosion resistance at high temperature as compared with a material of the heat transmitting tube onto an outer heat receiving surface for contacting a combustion gas, and optionally an oxide ceramic, and optionally an oxide cermet. Solid inorganic sintered fin particles are penetrated and filled in opening pores of the porous sprayed coating and form a heat shielding layer on the surface of the porous sprayed coating. The solid inorganic sintered fine particles are solidified at high melting point to produce a heat shielding function to thereby prevent excessive heat flow to the heat transmitting tube.

Abstract translation: PCT No.PCT / JP97 / 02898 Sec。 371日期：1998年10月20日 102（e）日期1998年10月20日PCT 1997年8月20日PCT公布。 第WO98 / 37253号公报 日期1998年8月27日为了控制由锅炉水引起的锅炉传热管的内表面部分产生的析出和形成，以及由于过热蒸汽形成管材的氧化皮 提供了一种设置有多孔喷涂层的锅炉用传热管。 多孔喷涂涂层是通过使用具有优异的高温抗氧化性和耐高温腐蚀性的金属合金，与传热管的材料相比，用于接触燃烧气体的外部受热表面和任选的氧化物陶瓷， 和任选的氧化物金属陶瓷。 固体无机烧结翅片颗粒穿透并填充在多孔喷涂涂层的开孔中，并在多孔喷涂涂层的表面上形成隔热层。 固体无机烧结微粒在高熔点下固化，产生热屏蔽功能，从而防止热传递管过热。

公开(公告)号：US5909354A

公开(公告)日：1999-06-01

申请号：US694453

申请日：1996-08-12

Applicant: Yoshio Harada ,  Junichi Takeuchi

Inventor： Yoshio Harada ,  Junichi Takeuchi

IPC: B23Q3/15 ,  C01G23/04 ,  C23C4/10 ,  H01L21/203 ,  H01L21/205 ,  H01L21/302 ,  H01L21/3065 ,  H01L21/683 ,  H02N13/00

CPC classification number: B23Q3/15 ,  H01L21/6833 ,  Y10T279/23

Abstract: An electrostatic chuck member includes a metal substrate, an undercoat of a metallic spray-coated layer and a topcoat of Al.sub.2 O.sub.3 TiO.sub.2 based spray-coated layer containing a Ti.sub.n O.sub.2n-1, where n=1-9, compound. The electrostatic chuck member has a large volume resistivity, a small scattering, and the quality is stable. A method for making the electrostatic chuck member includes subjecting a metal substrate to a blast treatment, spray-coating a metallic undercoat on a surface of the metal substrate, and spray-coating Al.sub.2 O.sub.3 TiO.sub.2 on to the metallic undercoat to form a Al.sub.2 O.sub.3 -TiO.sub.2 based layer in which at least a portion of the TiO.sub.2 is changed into Ti.sub.n O.sub.2, where n=1-9.

Abstract translation: 静电吸盘构件包括金属基底，金属喷涂层的底涂层和含有n = 1-9的化合物的TinO2n-1的Al2O3TiO2基喷涂层的顶涂层。 静电吸盘构件体积电阻率大，散射小，质量稳定。 制造静电卡盘的方法包括对金属基板进行喷砂处理，在金属基板的表面上喷涂金属底涂层，并将Al 2 O 3 TiO 2喷涂到金属底涂层上以形成Al 2 O 3 -TiO 2基 其中至少一部分TiO 2变成TinO 2，其中n = 1-9。

公开(公告)号：US5789077A

公开(公告)日：1998-08-04

申请号：US494695

申请日：1995-06-26

Applicant: Syuhei Nakahama ,  Hisamichi Nagahara ,  Masamichi Kawasaki ,  Yoshio Harada ,  Junichi Takeuchi

Inventor： Syuhei Nakahama ,  Hisamichi Nagahara ,  Masamichi Kawasaki ,  Yoshio Harada ,  Junichi Takeuchi

IPC: C23C4/18 ,  C23C10/02 ,  C23C4/10

CPC classification number: C23C4/18 ,  C23C10/02 ,  Y10T428/265 ,  Y10T428/31678

Abstract: Thermally sprayed coatings made from carbides of metals having greater carbon affinity than Cr in the presence of free carbon, or thermally sprayed coatings made from carbides of metals having smaller carbon affinity than Cr are heat treated in a chromium halide containing atmosphere which also contains hydrogen gas, whereby activated metallic Cr is precipitated in a fine particulate form, which is allowed to act on the thermally sprayed coatings, whereupon a Cr.sub.23 C.sub.6 -form carbide is created not only on the coating surface but also in its interior, particularly within pores, to form a modified layer, thereby compositing the thermally sprayed coatings.

Abstract translation: 在游离碳存在下，比碳含量更高的金属碳化物制成的热喷涂层，或者碳化碳比碳化合物碳化物碳化物热喷涂的涂层在含有氢氧化铬的气氛中进行热处理 ，由此活化的金属Cr以细颗粒形式沉淀，其被允许作用在热喷涂的涂层上，于是Cr23C6型碳化物不仅在涂层表面上而且在其内部，特别是在孔内形成，形成 改性层，从而合成热喷涂层。

公开(公告)号：US5316859A

公开(公告)日：1994-05-31

申请号：US124657

申请日：1993-09-09

Applicant: Yoshio Harada ,  Kazumi Tani

Inventor： Yoshio Harada ,  Kazumi Tani

IPC: C23C2/00 ,  B21B27/02 ,  B05D1/10

CPC classification number: C23C2/003 ,  Y10T29/49544 ,  Y10T428/1284 ,  Y10T428/26 ,  Y10T428/31678

Abstract: A roll used for continuous galvanization is provided at its surface with a spray-coated layer made from a cermet spraying material consisting essentially of WC-Co. The spray-coated layer consists of WC, at least one specified intermetallic compound and at least one of amorphous W-C-Co compound and free C, but contains no free W and free Co.

Abstract translation: 用于连续镀锌的辊在其表面上提供了由基本上由WC-Co组成的金属陶瓷喷涂材料制成的喷涂层。 喷涂层由WC，至少一种特定的金属间化合物和无定形W-C-Co化合物和游离C中的至少一种组成，但不含有游离的W和游离Co

公开(公告)号：US5082741A

公开(公告)日：1992-01-21

申请号：US653032

申请日：1991-02-08

Applicant: Hatsuo Taira ,  Masakazu Ikeda ,  Yoshio Harada ,  Hiroshi Hagiwara

Inventor： Hatsuo Taira ,  Masakazu Ikeda ,  Yoshio Harada ,  Hiroshi Hagiwara

IPC: C04B35/22 ,  C23C4/10

CPC classification number: C04B35/22 ,  C23C4/11 ,  Y10T428/131 ,  Y10T428/1317 ,  Y10T428/31678

Abstract: The present invention relates to a novel thermal spray material in any one of the forms of a particle mixture material, a granule material, and an electric fused material of 2CaO.SiO.sub.2 and CaO.ZrO.sub.2. As 2CaO.SiO.sub.2, .gamma.-2CaO.SiO.sub.2 is used. The ratio of .gamma.-2CaO.SiO.sub.2 to CaO.ZrO.sub.2 is specified by weight %. This invention relates also to a thermal sprayed member formed by thermal spraying this thermal spray material on a thermal resistant substrate.

Abstract translation: 本发明涉及一种以2CaO.SiO 2和CaO.ZrO 2的颗粒混合物，颗粒材料和电熔材料形式的任一种形式的新型热喷涂材料。 作为2CaO·SiO 2，使用γ-2CaO·SiO 2。 γ-2CaO·SiO 2与CaO·ZrO 2的比例以重量％表示。 本发明还涉及通过将该热喷涂材料热喷涂在耐热基材上形成的热喷涂部件。