公开(公告)号：US20170131199A1

公开(公告)日：2017-05-11

申请号：US15318756

申请日：2015-06-17

Applicant: DANFOSS IXA A/S

Inventor： Allan Skouboe ,  Jesper Høyer ,  Carsten Moberg

IPC: G01N21/15 ,  G01N21/85 ,  G01N21/27

CPC classification number: G01N21/15 ,  G01N21/274 ,  G01N21/8507 ,  G01N2021/8578 ,  G01N2201/0233

Abstract: A probe for an IR or UV sensor comprising a light emitter and detector is described comprising a lens. The detector detects the spectrums of the emitted light after it has passed a gas to be measured. The sensor of the present invention is especially suitable for such as harsh or aggressive environments measuring the exhaust gasses, for example in ships, vehicles, chimneys etc., and comprises purge gas protections for delicate optical parts to prevent particles etc. from the exhaust gas depositing on the optics. The sensor further has a flow of sample gas from the gas to be measured being adapted to prevent the purge gas from inferring with the measurements.

公开(公告)号：US08310673B2

公开(公告)日：2012-11-13

申请号：US12450402

申请日：2008-03-24

Applicant: Masaru Hori ,  Hiroyuki Kano ,  Shoji Den

Inventor： Masaru Hori ,  Hiroyuki Kano ,  Shoji Den

IPC: G01J3/30

CPC classification number: H05H1/0025 ,  G01N21/15 ,  G01N21/3103 ,  G01N2021/158 ,  G01N2201/023 ,  G01N2201/0233 ,  G01N2201/061

Abstract: To provide a light source which realizes accurate determination of the particle density of a plasma atmosphere without disturbing the state of the plasma atmosphere.The light source of the invention includes a tubular casing 12; a cooling medium passage 30 for causing a cooling medium to flow therethrough, the passage being provided along the inner wall of the casing; a lens 50 provided at a tip end of the casing; a first electrode 44 and a second electrode 45 which are provided in the casing and before the lens so as to be vertical to the axis of the casing and parallel to each other; and an insulating spacer 46 provided between the first electrode and the second electrode. The light source further includes a hole 47 axially penetrating the center portions of the first electrode, the insulating spacer, and the second electrode; and an electric discharge gas passage for introducing an electric discharge gas, along the inner wall of the cooling medium passage, to the back surface of the lens so that the electric discharge gas is reflected by thepslens and flows through the hole.

Abstract translation: 提供一种实现等离子体气氛的粒子密度的精确测定而不干扰等离子体气氛的状态的光源。 本发明的光源包括管状壳体12; 用于使冷却介质流过其中的冷却介质通道30，所述通道沿着所述壳体的内壁设置; 设置在所述壳体的前端的透镜50; 第一电极44和第二电极45，其设置在壳体内并且在透镜之前垂直于壳体的轴线并且彼此平行; 以及设置在第一电极和第二电极之间的绝缘间隔件46。 光源还包括轴向穿过第一电极，绝缘间隔物和第二电极的中心部分的孔47; 以及放电气体通道，用于沿着冷却介质通道的内壁将放电气体引导到透镜的背面，使得放电气体被透镜反射并流过孔。

公开(公告)号：US07755764B2

公开(公告)日：2010-07-13

申请号：US12019592

申请日：2008-01-24

Applicant: Hidong Kwak ,  Shankar Krishnan

Inventor： Hidong Kwak ,  Shankar Krishnan

IPC: G01N21/55

CPC classification number: G01B11/0625 ,  G01B11/0633 ,  G01B11/0641 ,  G01J3/02 ,  G01J3/0224 ,  G01J3/0294 ,  G01J3/447 ,  G01N21/211 ,  G01N21/33 ,  G01N2021/213 ,  G01N2201/0233

Abstract: An optical method and system for measuring characteristics of a sample using a broadband metrology tool in a purge gas flow environment are disclosed. In the method a beam path for the metrology tool is purged with purge gas at a first flow rate. A surface of the sample is illuminated by a beam of source radiation having at least one wavelength component in a vacuum ultraviolet (VUV) range and/or at least one wavelength component in an ultraviolet-visible (UV-Vis) range. A flow rate of a purge gas is adjusted between the first flow rate for metrology measurements made when the source radiation is in the VUV spectral region and a second flow rate for metrology measurements made when the source radiation is in the UV-Vis spectral region. The system includes a light source, illumination optics, collection optics, detector, a purge gas source and a controller. The purge gas source is configured to supply a flow of purge gas to a beam path in the light source and/or illumination optics and/or sample and/or collection optics and/or detector. The controller is configured to control a flow rate of the purged gas flow in response to an output signal from the detector.

Abstract translation: 公开了一种用于在吹扫气体流动环境中使用宽带测量工具测量样品的特性的光学方法和系统。 在该方法中，用第一流量的吹扫气体吹扫计量工具的光束路径。 通过在紫外 - 可见（UV-Vis）范围内具有真空紫外（VUV）范围和/或至少一个波长分量的至少一个波长分量的源辐射束照射样品的表面。 当源辐射处于VUV光谱区域时进行的度量测量的第一流量和当源辐射处于UV-Vis光谱区域时进行度量测量的第二流量时，净化气体的流量被调节。 该系统包括光源，照明光学器件，收集光学器件，检测器，吹扫气体源和控制器。 吹扫气体源被配置为向光源和/或照明光学器件和/或样品和/或收集光学元件和/或检测器中的光束路径提供净化气体流。 控制器被配置为响应于来自检测器的输出信号来控制净化气体流量的流量。

公开(公告)号：US07610815B2

公开(公告)日：2009-11-03

申请号：US11410686

申请日：2006-04-24

Applicant: Paul D. Hayford ,  David W. Long

Inventor： Paul D. Hayford ,  David W. Long

IPC: G01L1/24

CPC classification number: G01N21/01 ,  G01N3/02 ,  G01N2201/0233 ,  G01N2203/0017 ,  G01N2203/0025 ,  G01N2203/0238 ,  G01N2203/0242 ,  G01N2203/0647

Abstract: A method of monitoring the surface of a sample under test is provided and the method comprises the steps of: illuminating the surface with light (20) polarised in a first direction; viewing light reflected from the surface through a polarising filter (27) arranged at 90° to the first direction, wherein the surface of the sample under test is provided with a marked area where diffuse reflection of the incident polarised light will occur in order to improve the contrast between the marked area and the surface of the sample under text.

Abstract translation: 提供了一种监测待测样品表面的方法，该方法包括以下步骤：用在第一方向上极化的光（20）照射该表面; 从通过与第一方向成90°的偏振滤光器（27）从表面反射的光，其中被测试样品的表面设置有突出的区域，其中将出现入射偏振光的漫反射以便改善 文字标记区域与样品表面之间的对比度。

公开(公告)号：US5343296A

公开(公告)日：1994-08-30

申请号：US13565

申请日：1993-02-04

Applicant: Ake A. Hellstrom

Inventor： Ake A. Hellstrom

IPC: G01N21/89 ,  G01N21/17 ,  G01N21/86

CPC classification number: G01N21/8901 ,  G01N2021/1738 ,  G01N2201/0233 ,  G01N2201/0636 ,  G01N2201/101

Abstract: An apparatus for optically scanning and measuring the physical parameters of a sheet material by means which are fully enclosed within an air purged cross-machine box-beam structure to protect the radiation source, the radiation detector and the optics from the harsh machine environment. The apparatus may involve a single beam enclosing a combined source/detector module for reflection measurement or dual beams on opposite sides of the sheet for transmission measurement with one enclosing a source module and the other enclosing a detector module. Standardization means are also provided either in the module itself or as an extension of the beam. Means are also disclosed for sealing the opening in the beams through which the radiation passes.

Abstract translation: 一种用于通过完全封闭在空气净化的跨机箱梁结构内的装置来光学扫描和测量片材的物理参数的装置，以保护辐射源，辐射检测器和光学元件免受恶劣的机器环境的影响。 该装置可以包括单个光束，其包围用于反射测量的组合源/检测器模块或用于传输测量的相对侧上的双光束，其中一个封装源模块，另一个包围检测器模块。 标准化装置也可以在模块本身中或作为梁的延伸部分提供。 还公开了用于密封辐射通过的光束中的开口的装置。

公开(公告)号：US5091649A

公开(公告)日：1992-02-25

申请号：US549562

申请日：1990-07-06

Applicant: Borje T. Rantala

Inventor： Borje T. Rantala

IPC: G01N21/35

CPC classification number: G01N21/3504 ,  G01N2201/0233

Abstract: The invention relates to a gas detector for measuring one or more hydrocarbons or some other gas having its infrared absorption spectrum partially or entirely overlapping with water and, in addition, carbon dioxide and/or nitrogen oxide. The gas detector comprises a radiation source (1), a measuring chamber (3), a reference chamber (4), the electromagnetic radiation coming from the radiation source passing through said chambers, and a radiation detector (5). A beam passing from radiation source (1) both to measuring chamber (3) and to reference chamber (4) and from these chambers further to detector (5) travels in a space (14) which is provided with both a carbon-dioxide removing material (11) and a water-removing material (12). The invention relates also to a method for absorbing the carbon dioxide contained in said gas detector space (14) or in a part of this space into a carbon-dioxide removing material (11) and for absorbing the water into a water-removing material (12).

Abstract translation: 本发明涉及一种气体检测器，用于测量一种或多种碳氢化合物或一些其他具有部分或完全与水重叠的红外吸收光谱的其它气体，另外还包括二氧化碳和/或氮氧化物。 气体检测器包括辐射源（1），测量室（3），参考室（4），来自穿过所述室的辐射源的电磁辐射和辐射探测器（5）。 从辐射源（1）到测量室（3）和参考室（4）以及从这些室进一步传送到检测器（5）的光束在空间（14）中行进，空间（14）中设有二氧化碳去除 材料（11）和除水材料（12）。 本发明还涉及将包含在所述气体检测器空间（14）中或在该空间的一部分中的二氧化碳吸收到二氧化碳去除材料（11）中并将水吸收到除水材料（ 12）。