Sublimation getter pump with cathode trigger means
    21.
    发明授权
    Sublimation getter pump with cathode trigger means 失效
    带CATHODE触发装置的底座泵

    公开(公告)号:US3694691A

    公开(公告)日:1972-09-26

    申请号:US3694691D

    申请日:1970-11-23

    Applicant: GEN ELECTRIC

    Inventor: LAFFERTY JAMES M

    CPC classification number: H01J41/20 H01J7/186

    Abstract: Sublimation getter pump includes, in one embodiment, a cathode electrode made of an active gas gettering material, an anode electrode closely juxtaposed to the cathode electrode and defining therewith an electric discharge gap, and a trigger electrode assembly in close juxtaposition to the cathode electrode. Upon the application of a suitable pulse to the trigger electrode assembly, an electric discharge is established between the cathode and anode electrodes, causing the evolution of active gas gettering material from the cathode electrode. Active gas gettering material is deposited in a clean film upon a closely adjacent surface where it reacts with and removes from the atmosphere active gases, causing the reduction of pressure within the pumped volume.

    Abstract translation: 升华吸气泵在一个实施方案中包括由活性气体吸气材料制成的阴极电极,与阴极电极并排并与其间限定放电间隙的阳极电极以及与阴极电极并置的扳机电极组件。 当向触发电极组件施加合适的脉冲时,在阴极和阳极电极之间建立放电,导致从阴极电极释放活性气体吸气材料。 活性气体吸气材料沉积在一个干净的薄膜上,与一个紧密相邻的表面进行沉积,在这个表面上与空气中的活性气体反应并从气体中除去活化气体,导致泵送体积内的压力降低。

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