公开(公告)号：US20090127159A1

公开(公告)日：2009-05-21

申请号：US12234651

申请日：2008-09-20

申请人： Sheng-Hung WANG

发明人： Sheng-Hung WANG

IPC分类号： B65D85/00

CPC分类号： H01L21/67353 ,  H01L21/67359 ,  H01L21/67393

摘要： The present invention provides a storage apparatus for storing a semiconductor element or a reticle and having a filter therein. The storage apparatus includes a first cover and a second cover, which are assembled together to form an inner space therebetween for accommodating a reticle or a semiconductor element. The second cover of the storage apparatus is composed of a body and a plate. Further, the second cover includes at least one aperture for communicating the inner space and an outer of the storage apparatus. The plate has a corresponding portion positionally corresponding to the aperture of the body. The filter is sandwiched between the body and the plate and covered the aperture so that when the air passes through the aperture of the body, the filter can filter and rid the air of impurities.

摘要翻译： 本发明提供一种用于存储半导体元件或掩模版并在其中具有滤光器的存储装置。 存储装置包括第一盖和第二盖，它们组装在一起以在其间形成用于容纳标线片或半导体元件的内部空间。 存储装置的第二盖由主体和板组成。 此外，第二盖包括用于连通内部空间的至少一个孔和存储装置的外部。 该板具有与主体的孔相对应的对应部分。 过滤器被夹在主体和板之间并覆盖孔，使得当空气通过主体的孔时，过滤器可以过滤和除去杂质的空气。

公开(公告)号：US20090116937A1

公开(公告)日：2009-05-07

申请号：US12180570

申请日：2008-07-28

申请人： Sheng-Hung WANG

发明人： Sheng-Hung WANG

IPC分类号： H01L21/677

CPC分类号： H01L21/67353 ,  H01L21/67359 ,  H01L21/67383

摘要： The present invention provides a storage apparatus, ex. reticle pod, FOUP, FOSB or any kind of wafer pod, for storing a semiconductor element, ex. wafer, or a reticle and having a filter module therein. The storage apparatus is composed of a first cover and a second cover, which are assembled together to form an inner space therebetween for accommodating a reticle or a semiconductor element. The second cover of the storage apparatus comprises at least one aperture for communicating the inner space and an exterior of the storage apparatus and a filter module for covering the aperture.

摘要翻译： 本发明提供一种存储装置，例如 掩模版盒，FOUP，FOSB或用于存储半导体元件的任何种类的晶片盒，例如。 晶片或掩模版，并且其中具有过滤器模块。 存储装置由第一盖和第二盖组成，它们组装在一起以在其间形成用于容纳标线片或半导体元件的内部空间。 存储装置的第二盖包括用于连通存储装置的内部空间和外部的至少一个孔和用于覆盖孔的过滤器模块。

公开(公告)号：US07453549B2

公开(公告)日：2008-11-18

申请号：US11235198

申请日：2005-09-27

申请人： Motoko Suzuki ,  Yukiharu Okubo

发明人： Motoko Suzuki ,  Yukiharu Okubo

IPC分类号： H01L21/027

CPC分类号： H01L21/027 ,  G03F1/66 ,  G03F7/70741 ,  G03F9/7084 ,  H01L21/67353 ,  H01L21/67359

摘要： A position measurement device 29 measures the position of a position measurement mark 26 formed on the lower surface of a reticle 1, thereby measuring the position of the reticle 1. A position measurement device 30 measures the position of the position measurement mark 27 formed on the lower surface of a lower lid 2b, thereby measuring the position of the lower lid 2b. The relative displacement of the reticle 1 and lower lid 2b is known when the position of the reticle 1 and the position of the lower lid 2b are known. Therefore, when the lower lid 2b having the reticle 1 loaded thereon is carried with a carrying device and set in an exposure device, the stop position of the lower lid 2b is determined by taking this displacement into account. As a result, the reticle 1 can be correctly set in the exposure device.

摘要翻译： 位置测量装置29测量形成在标线片1的下表面上的位置测量标记26的位置，从而测量标线1的位置。 位置测量装置30测量形成在下盖2b的下表面上的位置测量标记27的位置，从而测量下盖2b的位置。 当标线片1的位置和下盖2b的位置已知时，标线片1和下盖2b的相对位移是已知的。 因此，当装载有掩模版1的下盖2b被携带携带装置并设置在曝光装置中时，通过考虑该位移来确定下盖2b的停止位置。 结果，可以将掩模版1正确地设置在曝光装置中。

公开(公告)号：US07325693B2

公开(公告)日：2008-02-05

申请号：US10988993

申请日：2004-11-15

申请人： John Burns ,  Matthew A. Fuller ,  Jeffery J. King ,  Martin L. Forbes ,  Mark V. Smith

发明人： John Burns ,  Matthew A. Fuller ,  Jeffery J. King ,  Martin L. Forbes ,  Mark V. Smith

IPC分类号： B65D85/30

CPC分类号： H01L21/67353 ,  H01L21/67373 ,  Y10T292/1049

摘要： A container for holding a single wafer includes a door with a latching mechanism having a cam with a pair of opposing wings extending laterally therefrom. The cam is selectively rotatably shiftable between a first favored position wherein the wings are completely within the door enclosure to enable the door to be engaged and disengaged from the door frame, and a second favored position wherein the wings extend laterally outward from the door enclosure so as to engage in the latch recesses in the door frame when the door is engaged in the door frame. The cam wings may include a ramped portion thereon for drawing the door into closer engagement in the door frame when the cam is rotated from the first favored position to the second favored position. Also, the latching mechanism may further include a spring disposed to provide a biasing force for urging the latching mechanism toward each of the first and second favored positions, and soft-stop dampening springs for decelerating the cam in a controlled fashion at the first and second favored positions and for absorbing vibrations resulting from the collision of the cam with a fixed stop on the door chassis.

摘要翻译： 用于保持单个晶片的容器包括具有闩锁机构的门，所述闩锁机构具有凸轮，所述凸轮具有从其横向延伸的一对相对的翼。 凸轮可选择性地可旋转地在第一有利位置之间移动，其中翼完全在门外壳内，以使门能够与门框接合和脱离，以及第二优选位置，其中翼从门外壳横向向外延伸， 当门接合在门框中时，接合门框中的闩锁凹部。 凸轮翼可以包括其上的斜坡部分，用于当凸轮从第一有利位置旋转到第二优选位置时，将门拉近门框中更紧密的接合。 此外，闩锁机构还可以包括设置成提供用于将闩锁机构朝向第一和第二受惠位置中的每一个推动的偏置力的弹簧，以及用于在第一和第二位置以受控的方式减速凸轮的软停止润滑弹簧 有利的位置和吸收由于凸轮与门底盘上的固定挡块碰撞而产生的振动。

公开(公告)号：US07325685B2

公开(公告)日：2008-02-05

申请号：US10721560

申请日：2003-11-25

申请人： Nicholas Frank Ciminello ,  David L. Schmoke ,  Edward Sherwood

发明人： Nicholas Frank Ciminello ,  David L. Schmoke ,  Edward Sherwood

IPC分类号： B65D85/30

CPC分类号： H01L21/67353 ,  G03F7/70741 ,  G03F7/70983 ,  H01L21/67359 ,  H01L21/67373

摘要： A reticle SMIF pod includes a dome having a plurality of latchkeys and a cassette having a plurality of primary engagement locations thereon into which the latchkeys are intended to engage when sealing the cassette to the dome. A plurality of secondary engagement locations are positioned in the cassette above the plurality of primary engagement locations to prevent the cassette from falling should the plurality of latchkeys fail to engage in the primary engagement locations.

摘要翻译： 标线片SMIF盒包括具有多个闩锁的圆顶和具有多个主接合位置的盒，当将盒密封到圆顶时，该锁键用于​​啮合。 多个辅助接合位置被定位在多个主接合位置上方的盒中，以防止当多个闩锁键不接合主接合位置时盒子掉落。

公开(公告)号：US07259835B2

公开(公告)日：2007-08-21

申请号：US11293083

申请日：2005-12-05

申请人： Chiaki Matsutori ,  Koichi Yanagihara

发明人： Chiaki Matsutori ,  Koichi Yanagihara

IPC分类号： G03B27/62 ,  G03B27/58

CPC分类号： H01L21/67353 ,  G03F1/42 ,  G03F1/66 ,  G03F7/70541 ,  G03F7/70741 ,  H01L21/67005 ,  H01L21/67359 ,  H01L21/67383 ,  H01L21/67386

摘要： A reticle-processing system includes a reticle-carrying container, a transfer rail for transferring the reticle-carrying container, a light exposure apparatus for printing a circuit pattern, and a reticle stocker for keeping a plurality of reticles. Orientation changer detects the orientation of the reticle-carrying container and changes it appropriately and is located in a path from the reticle stocker to a printing position in the light exposure apparatus. The orientation changer includes a rotary drive for rotating the reticle-carrying container, an orientation detector 83 for detecting the orientation of the reticle-carrying container, which is provided in the path from the reticle stocker to the printing position in the light exposure apparatus, and a controller for, when the orientation detected by the orientation detector is shifted by 180 degrees, controlling the rotary drive so as to correct the orientation.

摘要翻译： 标线处理系统包括标线承载容器，用于传送标本载体的传送轨道，用于印刷电路图案的曝光装置和用于保持多个掩模版的掩模版储存器。 方位变换器检测标本载体容器的方向，并适当地改变，并且位于从掩模板储料器到曝光装置中的打印位置的路径中。 取向变换装置具备旋转承载托盘的旋转驱动装置，用于检测从光栅储存器到曝光装置的打印位置的路径中设置的标线承载容器的取向的取向检测器83， 以及控制器，当由所述方向检测器检测到的方向偏移180度时，控制所述旋转驱动器以校正所述取向。

公开(公告)号：US20070012594A1

公开(公告)日：2007-01-18

申请号：US11182438

申请日：2005-07-15

申请人： Valoris Forsyth

发明人： Valoris Forsyth

IPC分类号： B65D85/00

CPC分类号： H01L21/67353 ,  H01L21/67369 ,  H01L21/67373 ,  H01L21/67386

摘要： The present disclosure pertains to a wafer box for transporting semiconductor wafers, typically in a coin stack configuration. The wafer box includes an outer box and at least one inner box. The semiconductor wafers are placed in the inner box or boxes, typically with appropriate separators and interleaves. The outer box includes a tray portion and a lid portion. The tray portion includes posts rising from its floor which are received by sleeves in the inner box. Shock absorbing rings are placed on the posts both above and below the inner box or boxes in order to provide protection against vertical shocks. Moreover, the outer box includes radially pivoting latching elements with padded bumper elements. These padded bumper elements are brought to an upright position to urge against the inner box or boxes in order to provide horizontal or lateral shock protection.

摘要翻译： 本公开涉及用于传输半导体晶片的晶片盒，通常以硬币堆叠配置。 晶片盒包括外箱和至少一个内盒。 将半导体晶片放置在内盒或盒中，通常具有合适的分离器和交错。 外箱包括托盘部分和盖部分。 托盘部分包括从其地板上升起的柱，其由内盒中的套筒接收。 冲击吸收环放置在内箱或箱的上方和下方的柱上，以提供防止垂直冲击的保护。 此外，外箱包括具有填充保险杠元件的径向枢转的闩锁元件。 这些填充的保险杠元件被带到直立位置以推动内箱或箱，以便提供水平或横向的冲击保护。

公开(公告)号：US20060087639A1

公开(公告)日：2006-04-27

申请号：US11299787

申请日：2005-12-13

申请人： Santiago Puerto ,  Erik Loopstra ,  Andrew Massar ,  Duane Kish ,  Abdullah Alikhan ,  Woodrow Olson ,  Jonathan Feroce

发明人： Santiago Puerto ,  Erik Loopstra ,  Andrew Massar ,  Duane Kish ,  Abdullah Alikhan ,  Woodrow Olson ,  Jonathan Feroce

IPC分类号： G03B27/62

CPC分类号： B82Y10/00 ,  B82Y40/00 ,  G03F1/24 ,  G03F1/62 ,  G03F1/64 ,  G03F1/66 ,  G03F7/70741 ,  G03F7/70983 ,  G03F9/7011 ,  H01L21/67353 ,  H01L21/67359 ,  Y10S414/135

摘要： A system and method are used to protect a mask from being contaminated by airborne particles. They include providing a reticle secured in a two-part cover. The two part cover includes a removable protection device used to protect the reticle from contaminants. The cover can be held inside a pod or box that can be used to transport the cover through a lithography system from an atmospheric section to a vacuum section. While in the vacuum section, the removable cover can be moved during an exposure process during which a pattern on the reticle can be formed on a wafer.

摘要翻译： 使用系统和方法来保护面罩免受空气传播的颗粒污染。 它们包括提供固定在两部分覆盖物中的掩模版。 两部分盖子包括一个可拆卸的保护装置，用于保护光罩免受污染。 盖可以保持在可以用于将盖通过光刻系统从大气部分输送到真空部分的盒或盒中。 在真空部分中，可移动的盖可以在曝光过程中移动，在曝光过程期间可以在晶片上形成掩模版上的图案。

公开(公告)号：US20060061979A1

公开(公告)日：2006-03-23

申请号：US11219332

申请日：2005-09-02

申请人： Martin Elliott ,  Michael Rice

发明人： Martin Elliott ,  Michael Rice

IPC分类号： G06F19/00 ,  H05K7/04

CPC分类号： H01L21/67353 ,  H01L21/67379

摘要： A first substrate carrier is provided that includes a body adapted to store one or more substrates; and either (1) a bottom surface having one or more coupling features that extend into a storage region of the body or (2) coupling features that extend alongside the body, so that the substrate carrier's overall height is not increased by the entire height of the coupling feature. Numerous other aspects are provided.

摘要翻译： 提供了第一衬底载体，其包括适于存储一个或多个衬底的主体; 和（1）具有一个或多个连接特征的底表面，其延伸到主体的存储区域中，或者（2）耦合沿着身体延伸的特征，使得基板载体的整体高度不会增加整个高度 耦合功能。 提供了许多其他方面。

公开(公告)号：US20040076496A1

公开(公告)日：2004-04-22

申请号：US10650312

申请日：2003-08-28

申请人： APPLIED MATERIALS, INC.

发明人： Martin R. Elliott ,  Michael Robert Rice ,  Robert B. Lowrance ,  Jeffrey C. Hudgens ,  Eric Andrew Englhardt ,  Loy Randall Stuart

IPC分类号： B65G001/00

CPC分类号： H01L21/67353 ,  H01L21/67373 ,  H01L21/67379 ,  H01L21/67386 ,  H01L21/67772 ,  Y10S414/139

摘要： A system for opening a substrate carrier includes a substrate carrier having an openable portion. The substrate carrier also has an opening mechanism coupled to the openable portion. A substrate transfer location has a support adapted to support a substrate carrier. The substrate transfer location also has an actuator mechanism. The actuator mechanism is positioned relative to the support so as to interact with the opening mechanism of the substrate carrier. The actuator mechanism of the substrate transfer location and the opening mechanism of the substrate carrier are adapted to interface with each other at the substrate transfer location so as to employ movement of the substrate carrier to achieve opening and closing of the substrate carrier.

摘要翻译： 用于打开衬底载体的系统包括具有可打开部分的衬底载体。 衬底托架还具有联接到可打开部分的打开机构。 衬底转移位置具有适于支撑衬底载体的支撑件。 基板转印位置也具有致动器机构。 致动器机构相对于支撑件定位，以便与衬底载体的开启机构相互作用。 衬底传送位置的致动器机构和衬底载体的打开机构适于在衬底传送位置处彼此接合，以便采用衬底载体的移动来实现衬底载体的打开和闭合。