公开(公告)号：US5319279A

公开(公告)日：1994-06-07

申请号：US850888

申请日：1992-03-13

Applicant: Hidetoshi Watanabe ,  Toshio Ohoshi

Inventor： Hidetoshi Watanabe ,  Toshio Ohoshi

IPC: H01J3/02 ,  H01J1/02 ,  H01J1/30

CPC classification number: H01J3/022 ,  H01J2201/319

Abstract: Disclosed herein is an array of field emission cathodes of the type, in which each element is made up of a substrate 1 (which serves as a first electrode 1), an insulating layer 2 in which is formed a cavity 6, a cathode 9 formed in the cavity 6 and on the first electrode 1, and a second electrode 3 formed on the insulating layer 2, and the second electrode is coated with a protective metal layer having good conductivity and corrosion resistance. The record electrode (the gate electrode) protected from oxidation permits stable electron emission. Also disclosed herein is an array of field emission cathodes in which each element is made up of a first electrode 11 to apply voltage to a plurality of cathodes 9, a resistance layer 12, an insulating layer 2, and a second electrode 3 which are formed on top of the other, a cavity 6 formed in the second electrode 3 and insulating layer 2, and a cathode 9 formed in the cavity 6 and on the resistance layer 12, with the first electrode 11 having a void under the cathode 9. This structure prevents short circuits between the cathode and the gate electrode, which contributes to high yields and long life.

Abstract translation: 这里公开了这种类型的场发射阴极的阵列，其中每个元件由基板1（其用作第一电极1），形成有空腔6的绝缘层2，形成的阴极9 在空腔6和第一电极1以及形成在绝缘层2上的第二电极3，并且第二电极涂覆有具有良好导电性和耐腐蚀性的保护金属层。 防止氧化的记录电极（栅电极）允许稳定的电子发射。 这里还公开了场致发射阴极的阵列，其中每个元件由第一电极11构成，以向形成的多个阴极9，电阻层12，绝缘层2和第二电极3施加电压 首先，形成在第二电极3和绝缘层2中的空腔6，以及形成在腔6中和电阻层12上的阴极9，第一电极11在阴极9下方具有空隙。 结构可以防止阴极和栅电极之间的短路，这有助于高产量和长寿命。

公开(公告)号：US5283500A

公开(公告)日：1994-02-01

申请号：US889735

申请日：1992-05-28

Applicant: Gregory P. Kochanski

Inventor： Gregory P. Kochanski

IPC: H01J3/02 ,  H01J29/94 ,  H01J31/12 ,  H01J7/44

CPC classification number: H01J3/022 ,  H01J31/127 ,  H01J2201/319

Abstract: The disclosed flat panel field emitter display (FPFED) comprises a first impedance that carries all of the current to all of the micropoint emitters of one or more (preferably one, typically fewer than about five, always fewer than all the pixels of a given row or column of the display) pixels. Provision of the first impedance can provide self-compensation to the involved pixel, making it possible to substantially reduce the required number of micropoint emitters/pixel and color. This in turn can lead to increased speed of the display, and/or to lower power consumption. The first impedance advantageously is a capacitor rather than a resistor, and embodiments that comprise a capacitive first impedance are disclosed. Other advantageous optional features are also disclosed. These include provision of gate impedances, of photoconductive elements, of an auxiliary gate electrode, or of gettering means.

Abstract translation: 所公开的平板场发射器显示器（FPFED）包括第一阻抗，其将所有电流传送到给定行的一个或多个（优选地，一个，通常少于约五个，总是少于所有像素）的所有微点发射器 或列）像素。 提供第一阻抗可以为所涉及的像素提供自我补偿，使得可以显着减少所需数量的微点发射器/像素和颜色。 这又可以导致显示器的速度提高和/或降低功耗。 第一阻抗有利地是电容器而不是电阻器，并且公开了包括电容性第一阻抗的实施例。 还公开了其它有利的可选特征。 这些包括提供栅极阻抗，光电导元件，辅助栅电极或吸气装置。

公开(公告)号：US5228878A

公开(公告)日：1993-07-20

申请号：US755938

申请日：1991-11-13

Applicant: Hiroshi Komatsu

Inventor： Hiroshi Komatsu

IPC: H01J1/304 ,  H01J3/02 ,  H01J9/02

CPC classification number: H01J3/022 ,  H01J1/3042 ,  H01J9/025 ,  H01J2201/30426 ,  H01J2201/319 ,  H01J2209/0226 ,  H01L2223/54473

Abstract: A field emission device and method for manufacturing which comprises using a diffusion mask to preserve an area of a silicon substrate for use as a cathode while all around the cathode the substrate is being diffused with oxygen to form an insulating layer. And further comprising depositing a molybdenum gate electrode layer on the insulating layer and etching the molybdenum gate electrode layer such that the diffusion mask falls off and the insulating layer is dissolved around the cathode through the hole formed in the gate electrode layer by the diffusion mask being removed. The gate electrode openings are therefore automatically and independently self-aligned with their respective cathodes.

Abstract translation: 一种场致发射器件及其制造方法，其包括使用扩散掩模来保留用于阴极的硅衬底的面积，同时所述衬底周围的所述衬底全部被氧扩散以形成绝缘层。 并且还包括在所述绝缘层上沉积钼栅极层并蚀刻所述钼栅极层，使得所述扩散掩模脱落，并且所述绝缘层通过所述扩散掩模通过形成在所述栅电极层中的所述孔溶解在所述阴极周围 删除。 因此，栅电极开口自动且独立地与它们各自的阴极自对准。

公开(公告)号：US4940916A

公开(公告)日：1990-07-10

申请号：US266681

申请日：1988-11-03

Applicant: Michel Borel ,  Jean-Francois Boronat ,  Robert Meyer ,  Philippe Rambaud

Inventor： Michel Borel ,  Jean-Francois Boronat ,  Robert Meyer ,  Philippe Rambaud

IPC: H01J29/04 ,  H01J1/304 ,  H01J31/12

CPC classification number: H01J1/3042 ,  H01J2201/319

Abstract: Electron source with micropoint emissive cathodes and display means by cathodoluminescence excited by field emission and using said source. Each cathode (5) comprises an electrically conductive layer (22) and micropoints (12) and, according to the invention, a continuous resistive layer (24) is provided between the conductive layer and the micropoints. The display means comprises a cathodoluminescent anode (16) facing the source.

Abstract translation: 具有微点发射阴极的电子源和通过场发射激发的阴极发光和使用所述源的显示装置。 每个阴极（5）包括导电层（22）和微点（12），并且根据本发明，在导电层和微点之间提供连续电阻层（24）。 显示装置包括面向源的阴极发光阳极（16）。

公开(公告)号：US4663559A

公开(公告)日：1987-05-05

申请号：US798587

申请日：1985-11-15

Applicant: Alton O. Christensen

Inventor： Alton O. Christensen

IPC: H01J1/304 ,  H01J1/16 ,  H01J19/10

CPC classification number: H01J3/021 ,  H01J1/3042 ,  H01J2201/30403 ,  H01J2201/319

Abstract: A device is disclosed which produces high current, low noise, low lateral energy, stochastic electron emission from a multiplicity of insulative particles subjected to a field. The insulative particles are in and of a surface thickness comprised of a random mixture of insulative and conductive particles in ohmic contact. Emission is achieved at applied potentials of about 5 volts which produce a field sufficient to emit electron currents of nanoamperes to milliamperes. Single devices or arrays of devices may be batch fabricated. Each device has an imtegral, implicity self-aligned electron optic system comprising means for modulating, focusing and deflecting the formed current beam, and means shielding the device from ambient magnetic fields.

Abstract translation: 公开了一种从多个经过场的绝缘粒子产生高电流，低噪声，低横向能量，随机电子发射的装置。 绝缘颗粒处于由欧姆接触的绝缘和导电颗粒的无规混合物组成的表面厚度内。 在约5伏的施加电位下实现发射，其产生足以发射纳米电流至毫安的电场。 单个器件或器件阵列可以批量制造。 每个器件具有一个整体的，包含自对准的电子光学系统，其包括用于调制，聚焦和偏转形成的电流束的装置，以及将该装置与环境磁场屏蔽的装置。