公开(公告)号：US20110192909A1

公开(公告)日：2011-08-11

申请号：US13018689

申请日：2011-02-01

申请人： Benjamin Y.H. Liu ,  Thuc M. Dinh ,  Yamin Ma

发明人： Benjamin Y.H. Liu ,  Thuc M. Dinh ,  Yamin Ma

IPC分类号： B05B17/04 ,  B01F3/04

CPC分类号： B05B17/04 ,  C23C16/4486

摘要： The present disclosure relates to an apparatus and a method for forming a droplet aerosol for vaporization and subsequent thin film deposition on a substrate. The apparatus includes a mechanism to control the rate of liquid flow through the apparatus, the mechanism including a piezoelectric actuator to adjust the rate of liquid flow and an atomizing mechanism drawing gas from a compressed gas source such that when the gas source conjoins with the liquid, the liquid is atomized to form droplets suspended in the gas thereby forming a droplet aerosol suitable for subsequent thin film deposition on a substrate. The method includes drawing a gas from a compressed gas source and drawing a liquid from a liquid source. The liquid and gas are conjoined in either a coaxial flow relationship or a radial flow relationship or an angular relationship between radial and coaxial flow wherein the gas engages the liquid to faun droplets suitable for vaporization and subsequent thin film deposition on a substrate.

摘要翻译： 本公开涉及一种用于形成用于蒸发并随后在基板上的薄膜沉积的液滴气溶胶的装置和方法。 该装置包括一个控制流过该装置的液体流速的机构，该机构包括用于调节液体流速的压电致动器和从压缩气体源引出气体的雾化机构，使得当气体源与液体结合时 ，液体被雾化以形成悬浮在气体中的液滴，从而形成适用于随后的薄膜沉积在基底上的液滴气溶胶。 该方法包括从压缩气体源抽取气体并从液体源抽取液体。 液体和气体以同轴流动关系或径向流动关系或径向和同轴流动之间的角度关系结合，其中气体将液体接合以适应蒸发和随后的薄膜沉积在基底上的液滴。

公开(公告)号：US20110091649A1

公开(公告)日：2011-04-21

申请号：US12872697

申请日：2010-08-31

申请人： Benjamin Y.H. Liu ,  Thuc M. Dinh ,  William D. Dick ,  Aaron M. Collins ,  Francisco J. Romay

发明人： Benjamin Y.H. Liu ,  Thuc M. Dinh ,  William D. Dick ,  Aaron M. Collins ,  Francisco J. Romay

IPC分类号： B05C9/08 ,  C23C16/455

CPC分类号： B05C11/00 ,  G01N15/065

摘要： The present disclosure describes a method and apparatus for detecting particles in a gas by saturating the gas with vapor and causing the gas to flow through a chamber with walls that are at a temperature different than the temperature of the entering gas creating a gas turbulence within the chamber resulting in the gas becoming super-saturated with vapor and causing said super-saturated vapor to condense on said particles and form droplets, which are then detected and counted by an optical light-scattering detector.

摘要翻译： 本公开内容描述了一种用于通过用气体使气体饱和来检测气体中的颗粒并使气体流过室的方法和装置，其中壁的温度不同于进入气体的温度，该温度在内部产生气体湍流 导致气体被蒸汽过饱和，并使所述超饱和蒸汽冷凝在所述颗粒上并形成液滴，然后通过光学散射检测器检测和计数。

公开(公告)号：US20100085569A1

公开(公告)日：2010-04-08

申请号：US12364833

申请日：2009-02-03

申请人： Benjamin Y.H. Liu ,  William D. Dick ,  Francisco J. Romay ,  Mark Battista

发明人： Benjamin Y.H. Liu ,  William D. Dick ,  Francisco J. Romay ,  Mark Battista

IPC分类号： G01N15/02 ,  G01N21/00 ,  G01N21/53

CPC分类号： G01N21/53 ,  G01N15/06 ,  G01N2015/0693 ,  G01N2021/4759 ,  G01N2021/513

摘要： The present disclosure has an apparatus for detecting fibers in a gas flowing along a passageway. A laser beam is provided at one end of the passageway and the beam is directed along a length of the passageway through which the gas flows. An electrode system, as disclosed, a quadrupole electrode system is mounted along the passageway to cause fibers carried in the gas to oscillate in a detection zone. A photo detector is positioned laterally of the passageway and detects light scattered by the oscillating fibers and projected through an opening in the passageway to provide an output signal that is a function of the light scattered by the fibers in the detection zone.

摘要翻译： 本公开内容具有用于检测沿着通道流动的气体中的纤维的装置。 在通道的一端处设置有激光束，并且沿着气体流过的通道的长度引导光束。 如所公开的那样，电极系统沿着通道安装，以使携带在气体中的纤维在检测区域中振荡。 光检测器位于通道的横向，并且检测由振荡纤维散射的光并通过通道中的开口突出，以提供作为由检测区域中的纤维散射的光的函数的输出信号。

公开(公告)号：US20090084315A1

公开(公告)日：2009-04-02

申请号：US12235114

申请日：2008-09-22

申请人： Benjamin Y.H. Liu ,  Yamin Ma ,  Thuc M. Dinh

发明人： Benjamin Y.H. Liu ,  Yamin Ma ,  Thuc M. Dinh

IPC分类号： C23C16/00 ,  B23P6/00

CPC分类号： C23C16/4402 ,  Y10T29/4973

摘要： This disclosure pertains to a method and apparatus to permit changing a filter on the input line to a vacuum deposition chamber without breaking or reducing the vacuum for the deposition chamber and other components in the deposition system. Isolation valves are provided at the inlet and outlet of the filter so the filter can be isolated from the source of vacuum and the deposition chamber for removal and replacement of the filter.

摘要翻译： 本公开涉及一种允许将输入管线上的过滤器改变为真空沉积室而不破坏或减少沉积室和沉积系统中的其它部件的真空的方法和装置。 在过滤器的入口和出口处提供隔离阀，因此过滤器可以与真空源和沉积室隔离，以移除和更换过滤器。

公开(公告)号：US20070120275A1

公开(公告)日：2007-05-31

申请号：US11605204

申请日：2006-11-28

申请人： Benjamin Liu

发明人： Benjamin Liu

IPC分类号： B01D47/00 ,  F22B23/00 ,  C23C16/00

CPC分类号： C23C16/4482 ,  C23C16/4481

摘要： An apparatus for vaporizing a liquid for subsequent thin film deposition on a substrate. The apparatus comprises a housing with an inlet and an outlet and a liquid reservoir. A mechanism controls the liquid level in the reservoir to a substantially constant level. A gas flow passageway extends along side a porous metal wall with interstitial spaces for containing liquid from the reservoir and with a package for a carrier gas to flow along side the porous metal wall, forming a gas/vapor mixture suitable for thin film deposition.

摘要翻译： 一种用于蒸发液体以用于随后的薄膜沉积在基底上的装置。 该装置包括具有入口和出口以及液体储存器的壳体。 机构将储存器中的液位控制到基本恒定的水平。 气体流动通道沿多孔金属壁一侧延伸，其间隙空间用于容纳来自储存器的液体，并具有用于载气的包装，以沿着多孔金属壁一侧流动，形成适合于薄膜沉积的气体/蒸汽混合物。

公开(公告)号：US20050147749A1

公开(公告)日：2005-07-07

申请号：US10769011

申请日：2004-01-30

申请人： Benjamin Liu ,  Yamin Ma

发明人： Benjamin Liu ,  Yamin Ma

IPC分类号： B01B1/00 ,  B05B7/00 ,  B05B12/14 ,  C23C16/448 ,  C23C16/00

CPC分类号： C23C16/4486 ,  B01B1/005

摘要： A vaporization system for thin film formation and for introducing vapors into a deposition chamber for depositing films onto a semi-conductor surface has a vaporization chamber that is selectively provided with at least two different, separate, precursor liquids carried in a gas stream that may be a single carrier gas, or a selected one of a plurality of carrier gasses. When the liquids being introduced are likely to be subject to thermal decomposition from contact with high temperature surfaces, an atomizer is used at the inlet of the vaporization chamber to provide an aerosol to the vaporization chamber from one or more individual sources of liquid combined with one or more individual carrier gasses for simultaneous or sequential introduction into the vaporization chamber. The vaporization chamber may be designed to insure complete vaporization by incorporating a recirculating gas flow through heated passageways before the vaporized gas/vapor mixture exits the vaporization chamber.

摘要翻译： 用于薄膜形成和用于将蒸气引入用于在半导体表面上沉积膜的沉积室的蒸发系统具有蒸发室，其被选择性地设置有携带在气流中的至少两种不同的，分离的前体液体，其可以是 单载体气体或多个载气中的选定的一种。 当引入的液体可能经受与高温表面接触的热分解时，在蒸发室的入口处使用雾化器以从一个或多个单独的液体源与一个或多个液体组合提供气溶胶到气化室 或更多的单个载体气体，用于同时或顺序地引入蒸发室。 蒸发室可以被设计成通过在蒸发的气体/蒸气混合物离开蒸发室之前通过加热通道并入循环气流来确保完全蒸发。

公开(公告)号：US20040250634A1

公开(公告)日：2004-12-16

申请号：US10823143

申请日：2004-04-13

申请人： MSP Corporation

发明人： Benjamin Y.H. Liu ,  Virgil A. Marple ,  Daryl L. Roberts

IPC分类号： G01N001/00

CPC分类号： G01N1/2208 ,  G01N15/0255 ,  G01N2001/2223 ,  G01N2015/0261 ,  G01N2015/0288 ,  Y10T436/25

摘要： A compact cascade impactor is formed to classify particles carried in a flow through the impactor. The impactor has collection chambers that are arranged to conserve space and yet provide a large flow passageway. The collection chamber may be tear drop shaped and being nested together. The impactor includes nozzles that are used across a desired range without.

摘要翻译： 形成一个紧凑的级联冲击器，以便将流过冲击器的流中携带的颗粒进行分类。 冲击器具有收纳室，其被设置成节省空间并且提供大的流动通道。 收集室可以是泪滴形状并且嵌套在一起。 冲击器包括在不需要的范围内使用的喷嘴。

公开(公告)号：US5940175A

公开(公告)日：1999-08-17

申请号：US742448

申请日：1996-11-01

申请人： James J. Sun

发明人： James J. Sun

IPC分类号： G01N21/95 ,  G01N21/00

CPC分类号： G01N21/9501

摘要： An inspection system for inspecting products that have a flat, reflective surface, such as a wafer or a flat panel display on which a thin film is to be deposited, includes an inspection chamber connected to a processing chamber with both of the chambers being under vacuum. The inspection equipment performs the inspection with the product in the inspection chamber without removing the product from the vacuum environment. In a preferred form of the invention, the inspection chamber includes a wall portion that will transmit light, and the inspection equipment is a laser source directed to the reflective surface of the product and a receiver for receiving reflected light to determine changes in the character of the surface caused by the deposited film or by imperfections, haze or particles.

摘要翻译： 用于检查具有平坦的反射表面的产品的检查系统，例如要沉积薄膜的晶片或平板显示器，包括连接到处理室的检查室，两个室都处于真空下 。 检查设备在检查室内对产品进行检查，而不从真空环境中清除产品。 在本发明的优选形式中，检查室包括将透射光的壁部分，并且检查设备是指向产品的反射表面的激光源和用于接收反射光的接收器，以确定 由沉积膜引起的表面或由缺陷，雾度或颗粒引起的表面。

公开(公告)号：US5160664A

公开(公告)日：1992-11-03

申请号：US708306

申请日：1991-05-31

申请人： Benjamin Y. H. Liu

发明人： Benjamin Y. H. Liu

IPC分类号： C09K3/30

CPC分类号： C09K3/30 ,  Y10S516/922

摘要： An aerosol generator used to produce, selectively and rapidly, an aerosol that has a specific particle size and is at a known specific concentration. The generator comprises a plurality of aerosol material atomizers that can be selectively used to obtain different atomized aerosol particles that results in different size when combined with the output of a particle seed atomizer. Particles can be selectively operated to provide, quickly and conveniently, a range of individual particle sizes. The seed atomizer output is mixed with the aerosol atomizer output and passed through a unique, compact heating section for heating the mixture in a manner to provide a high flow rate with low pressure drop. The fluid is passed through a condenser to condense known size particles in the fluid stream, which then can be used as desired, for example to test the efficiency of filters.

摘要翻译： 一种气溶胶发生器，用于选择性地和快速地产生具有特定粒度并具有已知特定浓度的气溶胶。 发生器包括多个气溶胶材料雾化器，其可以选择性地用于获得与粒子种子雾化器的输出结合时导致不同尺寸的不同的雾化气溶胶颗粒。 可以选择性地操作颗粒以快速方便地提供一系列单独的颗粒尺寸。 种子雾化器输出与气溶胶雾化器输出混合，并通过独特的紧凑的加热部分，以便以低压降提供高流速的方式加热混合物。 流体通过冷凝器以冷凝流体流中的已知尺寸的颗粒，然后可以根据需要使用，例如以测试过滤器的效率。

公开(公告)号：US10287679B2

公开(公告)日：2019-05-14

申请号：US15790906

申请日：2017-10-23

申请人： MSP Corporation

发明人： Thuc M. Dinh ,  Yamin Ma ,  Benjamin Y. H. Liu

IPC分类号： F01K5/00 ,  F16T1/00 ,  F22B1/28 ,  C23C16/448

摘要： An apparatus and method for generating a vapor with a compact vaporizer design and exposing the gas and liquid mixture for vaporization to a reduced maximum temperature. A gas and liquid droplet flow through a metal housing configured to heat the gas and liquid droplet mixture flow for vaporization includes directing the gas and liquid droplet mixture through an inlet of the metal housing and flowing the gas through a tortious flow path defined by a plurality of tubular flow passageways arranged around a central axis for vaporization. The flow path is directed through a heat exchanger including one more changes in direction of flow path before flowing into the further tortious flow path described above. Residual liquid droplets may be further vaporized by flowing through a second metal housing configured to heat the gas and liquid droplet mixture for vaporization and having a similar construction to the first metal housing and providing a second tortious flow path.