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公开(公告)号：US20240288116A1
公开(公告)日：2024-08-29
申请号：US18025772
申请日：2021-08-24
Applicant: Sinfonia Technology Co., Ltd.
Inventor： Manabu Ogura
IPC: F16N7/32 , F16N19/00 , G01M13/025
CPC classification number: F16N7/32 , F16N19/00 , G01M13/025 , F16N2210/14 , F16N2280/02
Abstract: A lubricating oil supply device includes: a supplier provided with a temporary storage for storing a lubricating oil temporarily, and configured to supply the lubricating oil stored in the temporary storage to a bearing together with compressed air; a lubricating oil supply path having one end portion connected to the temporary storage and the other end portion connected to a lubricating oil storage for storing the lubricating oil; a deliverer provided in the lubricating oil supply path, and configured to deliver the lubricating oil stored in the lubricating oil storage via the lubricating oil supply path to fill the temporary storage with the lubricating oil; an air supply path having one end portion connected to the supplier and the other end portion connected to a compressed air supplier for supplying the compressed air; and a pressure accumulator provided in the air supply path and configured to accumulate the compressed air.
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32.发明授权公开(公告)号：US11662373B2
公开(公告)日：2023-05-30
申请号：US17214410
申请日：2021-03-26
Applicant: Sinfonia Technology Co., Ltd.
Inventor： Izumi Ito , Tomoya Mizutani
CPC classification number: G01R31/2637 , G01R31/005
Abstract: A method of diagnosing a load port includes identifying a plurality of entities for a plurality of substrate storage containers by a plurality of load ports capable of transferring a substrate into and out of the plurality of substrate storage containers; detecting directly or indirectly a plurality of states of the plurality of substrate storage containers by a plurality of sensors provided at the plurality of load ports; associating the plurality of load ports, the plurality of entities and a plurality of sensor values, with each other; accumulating, in a database, data associated in the act of associating the plurality of load ports, the plurality of entities, and the plurality of sensor values; and analyzing the data in the database and determining a state of each of the plurality of load ports.
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公开(公告)号：US20230086690A1
公开(公告)日：2023-03-23
申请号：US17940555
申请日：2022-09-08
Applicant: Sinfonia Technology Co., Ltd.
Inventor： Daichi Horii , Haruki Takeuchi
IPC: G01N1/14
Abstract: A cell collection method of collecting cells includes a culture medium movement process, a detachment liquid supply process, and a mixing process, wherein in the culture medium movement process, a used culture medium in a culture container is moved to a collection container, wherein in the detachment liquid supply process after the culture medium movement process, a detachment liquid for detaching the cells from an inner surface of the culture container is supplied to the culture container, and wherein in the mixing process after the detachment liquid supply process, the detachment liquid and the used culture medium are mixed with each other.
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公开(公告)号：US20230074727A1
公开(公告)日：2023-03-09
申请号：US17798110
申请日：2021-02-25
Applicant: SINFONIA TECHNOLOGY CO., LTD.
Inventor： Yoji MASUI
Abstract: In a resonance suppression control device that controls suppression of vibrations in a resonance frequency in each vibration mode of a control target having a plurality of vibration modes, a configuration that is simple, and can suppress vibrations in a resonance frequency in the plurality of vibration modes is provided. A control device is a resonance suppression control device that controls suppression of vibrations in a resonance frequency in each vibration mode of a control target having a plurality of vibration modes. The control device includes a plurality of feedback loops that provide negative feedback of output of the control target corresponding to the plurality of vibration modes to an input side. The plurality of feedback loops respectively include band-pass filters that extract one or more vibration modes from the plurality of vibration modes, phase compensators, and amplitude adjusters. The band-pass filters and the phase compensators function as differentiators.
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公开(公告)号：US20230073234A1
公开(公告)日：2023-03-09
申请号：US17902148
申请日：2022-09-02
Applicant: Sinfonia Technology Co., Ltd.
Inventor： Toshihiro Kawai , Gengoro Ogura
IPC: H01L21/67 , H01L21/673 , H01L21/687 , H01L21/677
Abstract: An EFEM is provided with a circulation path including a substrate transfer space formed inside a housing and a return path configured to return gas flowing from one side to the other side of the substrate transfer space, the EFEM including: a partition wall configured to separate the substrate transfer space and the return path; a capture part provided in the return path having a higher pressure than the substrate transfer space in a state in which the gas circulates through the circulation path, and configured to capture particles contained in the gas flowing through the return path; and a connecting pipe configured to guide the gas flowing inside a predetermined device arranged in the substrate transfer space to the return path, wherein the connecting pipe is connected to the return path on an upstream side of the capture part in a gas flow direction.
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Patent Agency Ranking
公开(公告)号：US11322378B2
公开(公告)日：2022-05-03
申请号：US16980528
申请日：2019-03-13
Applicant: Sinfonia Technology Co., Ltd.
Inventor： Toshihiro Kawai , Gengoro Ogura
IPC: H01L21/673 , H01L21/677
Abstract: In an inert-gas circulating type EFEM, generation of any constraints on installation of incidental equipment, a maintenance door, or the like is inhibited, and the need for changing the placement position, etc. of a feedback path according to the specifications, etc. of a substrate processing device connected thereto is eliminated. An EFEM 1 is provided with: a transfer chamber 41 in which a wafer W is conveyed; a unit installation chamber 42 in which a FFU 44 for feeding nitrogen to the transfer chamber 41 is installed; and a return path 43 for feeding the nitrogen having flown through the transfer chamber 41, back to the unit installation chamber 42. A substrate processing apparatus 6 is connected to the rear-side end of the transfer chamber 41. The return path 43 is disposed at the front-side end of the transfer chamber 41.
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公开(公告)号：US20220123663A1
公开(公告)日：2022-04-21
申请号：US17496015
申请日：2021-10-07
Applicant: SINFONIA TECHNOLOGY CO., LTD.
Inventor： Masashi Kutsuna
Abstract: A smoothing circuit 2 for an inverter includes a parallel flat plate 21, a plurality of capacitors 22 arranged in a matrix and mounted on the parallel flat plate 21, and a thermal conductive sheet 23 interposed between the parallel flat plate 21 and a housing 4 in an area overlapping a mounting area 21c of the plurality of capacitors 22 when viewed along a normal direction of the parallel flat plate 21. The plurality of capacitors 22 are arranged in such a manner that adjacent terminals 221 of adjacent capacitors 22 have a same polarity in a row direction and a column direction.
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公开(公告)号：US10985678B2
公开(公告)日：2021-04-20
申请号：US16607529
申请日：2017-10-30
Applicant: SINFONIA TECHNOLOGY CO., LTD.
Inventor： Kazunari Kanazawa , Takeshi Tomizaki , Nobumasa Usiro , Makoto Maruyama , Yuji Ogawa
Abstract: A motor control apparatus includes: a motor drive control section that controls driving of a motor using a predetermined phase; a rotation position detecting section that, at every 180 degrees of an electrical angle of the motor, outputs two kinds of detection signals according to the rotation position of the rotor of the motor; a stopped position estimating section that estimates the stopped position at the start of rotation of the rotor using an elapsed time from when rotation the rotor starts until the kind of the detection signal outputted from the rotation position detecting section switches; a rotational speed estimating section that estimates the rotational speed of the rotor using the elapsed time and the stopped position; and an estimated phase calculating section that calculates an estimated phase as the aforementioned predetermined phase using the rotational speed.
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公开(公告)号：US10930537B2
公开(公告)日：2021-02-23
申请号：US16774758
申请日：2020-01-28
Applicant: SINFONIA TECHNOLOGY CO., LTD.
Inventor： Toshihiro Kawai , Yasushi Taniyama , Munekazu Komiya , Takashi Shigeta
IPC: H01L21/677 , H01L21/67 , H01L21/673
Abstract: Provided are a door opening/closing system which prevents the entry of atmospheric air into a front-opening unified pod (FOUP) and an equipment front end module (EFEM) when the FOUP and the EFEM are placed in communication with each other, and a load port equipped with the door opening/closing system. The door opening/closing system is provided with: a base which constitutes a part of a wall isolating a conveyance space from an external space, an opening portion provided in the base; a door which is capable of opening and closing the opening portion; a first seal member which seals a gap between the base and a container; a second seal member which seals a gap between the base and the door, a sealed space which is constituted by the base, the first seal member, the second seal member, a lid member, and the door when the container is in a state of contact with the opening portion with the first seal member therebetween, a first gas injection unit which injects gas into the sealed space; and a second gas discharge unit 88 which evacuates the sealed space.
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公开(公告)号：US20210028031A1
公开(公告)日：2021-01-28
申请号：US16980727
申请日：2019-03-13
Applicant: Sinfonia Technology Co., Ltd.
Inventor： Toshihiro Kawai , Gengoro Ogura
Abstract: There is provided an EFEM, including: at least one load port; a housing closed by connecting the at least one load port to an opening provided on a side wall of the housing and configured to define, in the housing, a transfer chamber for transferring a substrate; a substrate transfer device disposed in the transfer chamber and configured to transfer the substrate; an inert gas supply unit configured to supply an inert gas to the transfer chamber; and a gas discharge unit configured to discharge a gas in the transfer chamber, wherein the at least one load port includes: an opening/closing mechanism capable of opening and closing a lid of a mounted FOUP; and an accommodation chamber kept in communication with the transfer chamber and configured to accommodate a part of the opening/closing mechanism.
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