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    MEASUREMENT SYSTEM FOR CORRECTING OVERLAY MEASUREMENT ERROR
    31.
    发明申请
    MEASUREMENT SYSTEM FOR CORRECTING OVERLAY MEASUREMENT ERROR 有权
    用于校正重叠测量误差的测量系统

    公开(公告)号：US20110125440A1

    公开(公告)日：2011-05-26

    申请号：US13021463

    申请日：2011-02-04

    申请人： Moon-Sang Lee ,  Bong-Jin Yum ,  Hong-Seok Kim ,  Kwan-Woo Kim ,  Seung-Hyun Kim ,  Chan-Hoon Park

    发明人： Moon-Sang Lee ,  Bong-Jin Yum ,  Hong-Seok Kim ,  Kwan-Woo Kim ,  Seung-Hyun Kim ,  Chan-Hoon Park

    IPC分类号： G06F17/18 ,  G06F11/00

    CPC分类号： G03F7/70633 ,  G03F7/705 ,  G03F7/70508

    摘要： A measurement system and a measurement method, which can obtain a measurement value close to a true value considering an overlay measurement error according to a higher order regression analysis model. The measurement system and the measurement method provide a technique for determining optimal positions of shots to be measured using an optimal experimental design. When the regression analysis model and the number of shots to be measured are determined in advance, a method is used for determining an optimal number of shots to be measured according to the regression analysis model and process dispersion using a confidence interval estimating method. A dynamic sampling method is used for dynamically changing the number and positions of shots to be measured according to a change in process features by combining the above two methods. And, when erroneous data is detected, or when measured data is missing, a robust regression analysis method and a technique for filtering the erroneous data and the missing data are used.

    摘要翻译： 考虑到根据高阶回归分析模型的覆盖测量误差，测量系统和测量方法可以获得接近真实值的测量值。 测量系统和测量方法提供了一种用于使用最佳实验设计确定要测量的拍摄的最佳位置的技术。 当回归分析模型和要测量的拍摄数量预先确定时，使用一种方法根据回归分析模型和使用置信区间估计方法的处理色散来确定要测量的最佳拍摄张数。 动态采样方法用于通过组合上述两种方法，根据过程特征的变化动态地改变要测量的拍摄张数和位置。 并且，当检测到错误数据时，或者当测量数据丢失时，使用鲁棒的回归分析方法和用于过滤错误数据和丢失数据的技术。

    Method for forming metal wiring of semiconductor device and a semiconductor device manufactured by the same
    34.
    发明授权
    Method for forming metal wiring of semiconductor device and a semiconductor device manufactured by the same 失效
    用于形成半导体器件的金属布线的方法及其制造的半导体器件

    公开(公告)号：US07820544B2

    公开(公告)日：2010-10-26

    申请号：US11764315

    申请日：2007-06-18

    申请人： Seung Hyun Kim

    发明人： Seung Hyun Kim

    IPC分类号： H01L21/4763 ,  H01L21/44

    CPC分类号： H01L21/76847 ,  H01L21/76838 ,  H01L23/5283 ,  H01L23/53238 ,  H01L2924/0002 ,  H01L2924/00

    摘要： A method for forming a metal wiring of a semiconductor device, includes forming a first metal layer on a wafer, partially etching a portion of the first metal layer where a metal wiring is to be formed, sequentially forming a first copper barrier layer, a copper seed layer, and a copper layer on the first metal layer, annealing the copper layer, polishing the resulting structure until the first metal layer is exposed, patterning the first metal layer and the first copper barrier layer to form a portion of a metal wiring, forming a second copper barrier layer, forming a second metal layer, and patterning the second metal layer and the second copper barrier layer to form the metal wiring.

    摘要翻译： 一种用于形成半导体器件的金属布线的方法，包括在晶片上形成第一金属层，部分地蚀刻要形成金属布线的第一金属层的一部分，顺序地形成第一铜阻挡层，铜 籽晶层和铜层，退火铜层，研磨所得结构直到第一金属层露出为止，构图第一金属层和第一铜阻挡层以形成金属布线的一部分， 形成第二铜阻挡层，形成第二金属层，以及图案化第二金属层和第二铜阻挡层以形成金属布线。

    Apparatus and Method for Providing Personal Information Sharing Service Using Signed Callback Url Message
    38.
    发明申请
    Apparatus and Method for Providing Personal Information Sharing Service Using Signed Callback Url Message 审中-公开
    使用签名的回叫网址消息提供个人信息共享服务的装置和方法

    公开(公告)号：US20080301444A1

    公开(公告)日：2008-12-04

    申请号：US12096415

    申请日：2006-12-07

    申请人： Seung Hyun Kim ,  Dae Seon Choi ,  Jong Hyouk Noh ,  Sang Rae Cho ,  Yeong Sub Cho ,  Seung Hun Jin

    发明人： Seung Hyun Kim ,  Dae Seon Choi ,  Jong Hyouk Noh ,  Sang Rae Cho ,  Yeong Sub Cho ,  Seung Hun Jin

    IPC分类号： H04L9/32

    CPC分类号： H04L63/08 ,  H04L63/126

    摘要： An apparatus and method for providing a service that securely and easily shares personal information using a signed callback uniform resource locator (URL) message in a mobile terminal environment are provided. The mobile terminal providing a personal information sharing service using a signed URL message includes; a personal information sharing service module which receives a message that includes a first callback URL and a personal information sharing request and is signed using a private key of a server, and creates a second callback URL by adding a user response result in response to the personal information sharing request to the first callback URL; and an authentication module which verifies a signature of the message using a public key of the server, and signs the second callback URL using a user private key.

    摘要翻译： 提供了一种用于在移动终端环境中提供使用签名回叫统一资源定位符（URL）消息安全地并且容易地共享个人信息的服务的装置和方法。 使用签名的URL消息提供个人信息共享服务的移动终端包括： 个人信息共享服务模块，其接收包括第一回叫URL和个人信息共享请求的消息，并使用服务器的私钥进行签名，并且通过响应于所述个人来添加用户响应结果来创建第二回调URL 信息共享请求到第一个回调URL; 以及验证模块，其使用所述服务器的公钥来验证所述消息的签名，并且使用用户私钥对所述第二回调URL进行签名。

    Method and System for Transmitting and Receiving User's Personal Information Using Agent
    39.
    发明申请
    Method and System for Transmitting and Receiving User's Personal Information Using Agent 有权
    使用代理发送和接收用户个人信息的方法和系统

    公开(公告)号：US20080294896A1

    公开(公告)日：2008-11-27

    申请号：US12097179

    申请日：2006-12-06

    申请人： Jong-Hyouk Noh ,  Seung-Hyun Kim ,  Dae Seon Choi ,  Sang Rae Cho ,  Yeong Sub Cho ,  Seung Hun Jin

    发明人： Jong-Hyouk Noh ,  Seung-Hyun Kim ,  Dae Seon Choi ,  Sang Rae Cho ,  Yeong Sub Cho ,  Seung Hun Jin

    IPC分类号： H04L9/06

    CPC分类号： G06F21/51 ,  G06F21/6245

    摘要： A method and system for transmitting and receiving user's personal information using an agent are provided. An information management server managing user's personal information provides an agent including user's personal information in response to a user's personal information request message from a client. A client receives the agent and requests user's personal information from the agent. Then, the agent determines whether the client is authorized and provides the user's personal information to the client when it is determined that the client is authorized. Accordingly, the user's personal information is safely managed and transmitted.

    摘要翻译： 提供了一种使用代理发送和接收用户个人信息的方法和系统。 管理用户个人信息的信息管理服务器响应于来自客户端的用户的个人信息请求消息提供包括用户个人信息的代理。 客户端接收代理并从代理请求用户的个人信息。 然后，当确定客户端被授权时，代理确定客户端是否被授权并且向客户端提供用户的个人信息。 因此，用户的个人信息被安全地管理和发送。

    MEASUREMENT SYSTEM FOR CORRECTING OVERLAY MEASUREMENT ERROR
    40.
    发明申请
    MEASUREMENT SYSTEM FOR CORRECTING OVERLAY MEASUREMENT ERROR 有权
    用于校正重叠测量误差的测量系统

    公开(公告)号：US20080228435A1

    公开(公告)日：2008-09-18

    申请号：US12039479

    申请日：2008-02-28

    申请人： Moon-Sang LEE ,  Bong-Jin YUM ,  Hong-Seok KIM ,  Kwan-Woo KIM ,  Seung-Hyun KIM ,  Chan-Hoon PARK

    发明人： Moon-Sang LEE ,  Bong-Jin YUM ,  Hong-Seok KIM ,  Kwan-Woo KIM ,  Seung-Hyun KIM ,  Chan-Hoon PARK

    IPC分类号： G06F11/00

    CPC分类号： G03F7/70633 ,  G03F7/705 ,  G03F7/70508

    摘要： A measurement system and a measurement method, which can obtain a measurement value close to a true value considering an overlay measurement error according to a higher order regression analysis model. The measurement system and the measurement method provide a technique for determining optimal positions of shots to be measured using an optimal experimental design. When the regression analysis model and the number of shots to be measured are determined in advance, a method is used for determining an optimal number of shots to be measured according to the regression analysis model and process dispersion using a confidence interval estimating method. A dynamic sampling method is used for dynamically changing the number and positions of shots to be measured according to a change in process features by combining the above two methods. And, when erroneous data is detected, or when measured data is missing, a robust regression analysis method and a technique for filtering the erroneous data and the missing data are used.

    摘要翻译： 考虑到根据高阶回归分析模型的覆盖测量误差，测量系统和测量方法可以获得接近真实值的测量值。 测量系统和测量方法提供了一种用于使用最佳实验设计确定要测量的拍摄的最佳位置的技术。 当回归分析模型和要测量的拍摄数量预先确定时，使用一种方法根据回归分析模型和使用置信区间估计方法的处理色散来确定要测量的最佳拍摄张数。 动态采样方法用于通过组合上述两种方法，根据过程特征的变化动态地改变要测量的拍摄张数和位置。 并且，当检测到错误数据时，或者当测量数据丢失时，使用鲁棒的回归分析方法和用于过滤错误数据和丢失数据的技术。