Oxygen plasma post-deposition treatment of magnetic recording media
    31.
    发明授权
    Oxygen plasma post-deposition treatment of magnetic recording media 有权
    磁记录介质的氧等离子体后沉积处理

    公开(公告)号:US07354618B2

    公开(公告)日:2008-04-08

    申请号:US10704593

    申请日:2003-11-12

    CPC classification number: G11B5/84 B29C59/14 B29L2007/007 B29L2017/008

    Abstract: A method of manufacturing magnetic recording media, comprising sequential steps of: (a) providing an apparatus for manufacturing the media; (b) supplying the apparatus with at least one substrate for the media; (c) forming a magnetic recording layer on the at least one substrate in a first portion of the apparatus, the magnetic recording layer including a surface; (d) treating the surface of the magnetic recording layer with an ionized oxygen-containing plasma in a second portion of the apparatus to form a plasma oxidized surface layer; and (e) forming a protective overcoat layer on the plasma oxidized surface layer of the magnetic recording layer in a third portion of the apparatus.

    Abstract translation: 一种制造磁记录介质的方法,包括以下步骤:(a)提供用于制造介质的装置; (b)向所述设备供应用于所述介质的至少一个基板; (c)在所述装置的第一部分中的所述至少一个基板上形成磁记录层,所述磁记录层包括表面; (d)在设备的第二部分中用离子化的含氧等离子体处理磁记录层的表面以形成等离子体氧化表面层; 和(e)在设备的第三部分中在磁记录层的等离子体氧化表面层上形成保护性外涂层。

    Thin-film magnetic recording media with dual intermediate layer structure for increased coercivity
    32.
    发明授权
    Thin-film magnetic recording media with dual intermediate layer structure for increased coercivity 失效
    具有双中间层结构的薄膜磁记录介质,用于增强矫顽力

    公开(公告)号:US06982071B2

    公开(公告)日:2006-01-03

    申请号:US10756466

    申请日:2004-01-14

    CPC classification number: G11B5/72 Y10T428/265 Y10T428/30

    Abstract: Ion beam-deposited, nitrogen-doped C:H films having substantially lower resistivities than undoped ion beam-deposited C:H films and suitable for use as hard, abrasion-resistant overcoat layers for magnetic recording media, such as hard disks, are formed by supplying a mixture of hydrocarbon and nitrogen gases to an ion beam generator. Nitrogen atom content of the films is controlled to within from about 5 to about 25 at. % by appropriate selection of the ratio of hydrocarbon gas flow to nitrogen gas flow. The resultant IBD i-C:HN films exhibit a reduced tendency for charge build-up thereon during hard disk operation by virtue of their lower resistivity vis-à-vis conventional a-C:H materials.

    Abstract translation: 离子束沉积的氮掺杂的C:H膜具有比未掺杂的离子束沉积的C:H膜具有显着更低的电阻率,并且适合用作硬记录介质(例如硬盘)的硬的,耐磨损的外涂层 通过向离子束发生器提供烃和氮气的混合物。 将膜的氮原子含量控制在约5至约25at。 通过适当选择碳氢化合物气体流量与氮气流量的比例来确定。 所得到的IBD i-C:HN膜在硬盘操作期间由于其相对于常规a-C:H材料的较低电阻率而在其上积累电荷降低的倾向。

    Dual-layer carbon-based protective overcoats for recording media by filtered cathodic ARC deposition
    33.
    发明申请
    Dual-layer carbon-based protective overcoats for recording media by filtered cathodic ARC deposition 有权
    用于通过过滤阴极ARC沉积记录介质的双层碳基保护涂层

    公开(公告)号:US20050181238A1

    公开(公告)日:2005-08-18

    申请号:US10776191

    申请日:2004-02-12

    Abstract: A recording medium, comprising: (a) a substrate having at least one surface; (b) a stacked plurality of thin film layers on the at least one surface and including at least one magnetic or magneto-optical (MO) recording layer; and (c) a protective overcoat layer on an outer surface of an outermost layer of the layer stack, comprising: (i) a first sub-layer layer (c1) of undoped tetrahedral amorphous carbon (ta-C) formed by filtered cathodic arc deposition (FCAD) on the outer surface of the outermost layer of the stacked plurality of thin film layers and having a high mass density of carbon (C) atoms greater than about 2.5 gms/cm3; and (ii) a second sub-layer (c2) of nitrogen-doped tetrahedral amorphous carbon (ta-C:N) formed by FCAD on the undoped ta-C layer and having a high mass density of carbon (C) atoms greater than about 2.0 gms/cm3.

    Abstract translation: 一种记录介质,包括:(a)具有至少一个表面的基底; (b)在所述至少一个表面上堆叠的多个薄膜层,并且包括至少一个磁光或磁光(MO)记录层; (c)在层叠体的最外层的外表面上的保护性外涂层,包括:(i)未掺杂的四面体无定形碳(ta)的第一子层层(c 1) -C)通过过滤的阴极电弧沉积(FCAD)形成在层叠的多个薄膜层的最外层的外表面上,并且具有大于约2.5gms / cm 2的碳(C)原子的高质量密度, 3 ; 和(ii)由FCAD在未掺杂的Ta-C层上形成并且具有高质量密度的由氮化物掺杂的四面体无定形碳(ta-C:N)的第二子层(c 2 N 2) 的碳(C)原子大于约2.0gms / cm 3。

    Nitrogen-doped hydrogenated carbon films by ion beam deposition
    35.
    发明授权
    Nitrogen-doped hydrogenated carbon films by ion beam deposition 失效
    通过离子束沉积的氮掺杂氢化碳膜

    公开(公告)号:US06689425B1

    公开(公告)日:2004-02-10

    申请号:US09982937

    申请日:2001-10-22

    CPC classification number: G11B5/72 Y10T428/265 Y10T428/30

    Abstract: Ion beam-deposited, nitrogen-doped C:H films having substantially lower resistivities than undoped ion beam-deposited C:H films and suitable for use as hard, abrasion-resistant overcoat layers for magnetic recording media, such as hard disks, are formed by supplying a mixture of hydrocarbon and nitrogen gases to an ion beam generator. Nitrogen atom content of the films is controlled to within from about 5 to about 25 at. % by appropriate selection of the ratio of hydrocarbon gas flow to nitrogen gas flow. The resultant IBD i-C:HN films exhibit a reduced tendency for charge build-up thereon during hard disk operation by virtue of their lower resistivity vis-à-vis conventional a-C:H materials.

    Abstract translation: 离子束沉积的氮掺杂的C:H膜具有比未掺杂的离子束沉积的C:H膜具有显着更低的电阻率,并且适合用作硬记录介质(例如硬盘)的硬的,耐磨损的外涂层 通过向离子束发生器提供烃和氮气的混合物。 将膜的氮原子含量控制在约5至约25at。 通过适当选择碳氢化合物气体流量与氮气流量的比例来确定。 所得到的IBD i-C:HN膜在硬盘操作期间由于其相对于常规a-C:H材料的较低电阻率而在其上积累电荷降低的倾向。

    Method for manufacturing magnetic media with textured CSS landing zone formed by ion implantation, and media obtained thereby
    38.
    发明授权
    Method for manufacturing magnetic media with textured CSS landing zone formed by ion implantation, and media obtained thereby 失效
    用于制造通过离子注入形成的具有纹理的CSS着陆区的磁性介质的方法,以及由此获得的介质

    公开(公告)号:US06656614B1

    公开(公告)日:2003-12-02

    申请号:US09986085

    申请日:2001-11-07

    CPC classification number: G11B5/82 G11B5/8404 Y10S428/90

    Abstract: A method of texturing the surface of a CSS/landing zone of a substrate for a magnetic recording medium, comprising steps of: (a) providing a disk-shaped substrate having a surface; (b) providing a patterned mask in overlying relation to the substrate surface, (c) selectively implanting ions in portions of the surface of the CSS/landing zone exposed by the patterned mask openings, whereby the height of the selectively ion-implanted portions is increased or decreased relative to the height of non-ion-implanted portions of the CSS/landing zone to form bumps or depressions, thereby providing the surface of the CSS/landing zone with a texture for reducing stiction and friction when the medium is used with a low flying height read/write transducer. Embodiments of the invention include hard disk magnetic recording media with textured CSS/landing zones produced by the inventive ion implation methodology.

    Abstract translation: 一种纹理化用于磁记录介质的衬底的CSS /着陆区的表面的方法,包括以下步骤:(a)提供具有表面的盘形衬底;(b)提供图案化掩模, 衬底表面,(c)在由图案化掩模开口暴露的CSS /着陆区的表面的部分中选择性地注入离子,由此,选择性离子注入部分的高度相对于非离子注入部分的高度增加或减小, CSS /着陆区的植入部分形成凸起或凹陷,从而为介质与低飞行高度读/写换能器一起使用时提供CSS /着陆区的表面,以减少静摩擦和摩擦。 本发明包括通过本发明的离子注入方法产生的具有纹理CSS /着陆区的硬盘磁记录介质。

    Nitrogen -implanted, high carbon density overcoats for recording media
    39.
    发明授权
    Nitrogen -implanted, high carbon density overcoats for recording media 有权
    用于记录介质的氮移植,高碳密度外涂层

    公开(公告)号:US06613422B1

    公开(公告)日:2003-09-02

    申请号:US09994780

    申请日:2001-11-28

    Abstract: A method of forming a layer of a novel hard, abrasion and corrosion resistant, nitrogen-doped, high carbon density, amorphous carbon or hydrogenated carbon (C:H) protective overcoat material on a surface of a recording medium comprises steps of: (a) providing a substrate including a stacked plurality of thin film layers thereon constituting the medium; (b) forming, by a process comprising generation and deposition of C ions having energies of at least about 90 eV, a layer of an amorphous carbon or hydrogenated carbon (C:H) material on the at least one surface of the substrate, the C:H layer having a high carbon density of at least about 2.0 gm/cm3; and (c) implanting nitrogen (N) ions in a surface portion of the high carbon density amorphous carbon or C:H layer to form an N-doped amorphous carbon or C:H surface layer having a carbon density substantially equal to said high C density of the C:H layer formed in step (b). Embodiments of the invention include thin-film magnetic and magneto-optical recording media including a layer of the novel material as a protective overcoat.

    Abstract translation: 在记录介质的表面上形成新颖的耐硬,耐磨,耐腐蚀,氮掺杂,高碳密度,无定形碳或氢化碳(C:H)保护性覆盖材料层的方法包括以下步骤:(a )提供包括构成介质的层叠的多个薄膜层的衬底;(b)通过包括产生和沉积具有至少约90eV的能量的C离子的方法形成无定形碳或氢化碳的层 (C:H)材料,所述基材的至少一个表面上的C:H层具有至少约2.0gm / cm 3的高碳密度; 和(c)在高碳密度无定形碳或C:H层的表面部分中注入氮(N)离子以形成具有基本上等于所述高C的碳密度的N掺杂无定形碳或C:H表面层 在步骤(b)中形成的C:H层的密度。本发明的实施例包括包括作为保护性外涂层的新型材料层的薄膜磁性和磁光记录介质。

    Biased ion beam deposition of high density carbon
    40.
    发明授权
    Biased ion beam deposition of high density carbon 有权
    高密度碳的偏置离子束沉积

    公开(公告)号:US06526909B1

    公开(公告)日:2003-03-04

    申请号:US09532621

    申请日:2000-03-22

    CPC classification number: H01J37/3178

    Abstract: A device for increasing the incident energy of an ion for coating a disc in an ion beam deposition process. The ion beam deposition process is performed in a chamber with the disc to be coated disposed therein. An ion source, having a voltage level, is introduced into the chamber for generating an ion beam for depositing ions on the disc. A bias contact is coupled to the disc and a power supply is coupled to the bias contact. The power supply applies a voltage level to the bias contact that is less than the voltage level of the ion source thereby creating a negative bias voltage between the disc and the ion source. This negative bias voltage causes the incident energy of the ion to increase. As a result, the optimal incident energy can be achieved using a lower original energy.

    Abstract translation: 一种用于在离子束沉积工艺中增加用于涂覆盘的离子的入射能的装置。 离子束沉积工艺在其中要涂覆的盘的腔室中进行。 具有电压电平的离子源被引入室中,用于产生用于在盘上沉积离子的离子束。 偏置触点耦合到盘,并且电源耦合到偏置触点。 电源对偏置触点施加小于离子源的电压电平的电压,从而在盘和离子源之间产生负偏置电压。 这种负偏压导致离子的入射能增加。 因此,可以使用更低的原始能量来实现最佳的入射能量。

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