公开(公告)号：US20140120657A1

公开(公告)日：2014-05-01

申请号：US13664240

申请日：2012-10-30

Applicant: APPLE INC.

Inventor： Ming-Chin Hung ,  Kyung Wook Kim ,  Chun-Yao Huang ,  Young Bae Park ,  Shih Chang Chang ,  John Z. Zhong

IPC: H01L21/36

CPC classification number: H01L29/7869 ,  H01L29/66969 ,  H01L29/78606

Abstract: A method is provided for fabricating a back channel etching (BCE) oxide thin film transistor (TFT) for a liquid crystal display. The method includes forming a first metal layer having a first portion and a second portion over a substrate, depositing a gate insulator over the first metal layer, and disposing a semiconductor layer over the gate insulator. The method also includes depositing a half-tone photoresist to cover a first portion of the semiconductor layer and the first portion of the first metal layer. The half-tone photoresist has a first portion and a second portion thicker than the first portion. The first portion has a via hole above the second portion of the first metal layer. The second portion of the half-tone photoresist covers the first portion of the first metal layer. The method further includes etching a portion of the gate insulator through the via hole such that the second portion of the first metal layer is exposed, removing the first portion of the half-tone photoresist while remaining the second portion of the half-tone photoresist, and etching to remove a second portion of the semiconductor layer that is not covered by the half-tone photoresist.

Abstract translation: 提供了一种用于制造用于液晶显示器的背沟道蚀刻（BCE）氧化物薄膜晶体管（TFT）的方法。 该方法包括在衬底上形成具有第一部分和第二部分的第一金属层，在第一金属层上沉积栅极绝缘体，以及在栅极绝缘体上方设置半导体层。 该方法还包括沉积半色调光致抗蚀剂以覆盖半导体层的第一部分和第一金属层的第一部分。 半色调光致抗蚀剂具有比第一部分厚的第一部分和第二部分。 第一部分在第一金属层的第二部分上方具有通孔。 半色调光刻胶的第二部分覆盖第一金属层的第一部分。 该方法还包括通过通孔蚀刻栅极绝缘体的一部分，使第一金属层的第二部分露出，除去半色调光致抗蚀剂的第一部分，同时保留半色调光致抗蚀剂的第二部分， 并且蚀刻以除去未被半色调光致抗蚀剂覆盖的半导体层的第二部分。

公开(公告)号：US20130335658A1

公开(公告)日：2013-12-19

申请号：US13629524

申请日：2012-09-27

Applicant: APPLE INC.

Inventor： Chun-Yao Huang ,  Kyung Wook Kim ,  Shih Chang Chang ,  Szu-Hsien Lee ,  Young Bae Park

IPC: G02F1/136

CPC classification number: G09G3/3648 ,  G02F1/136227 ,  G02F1/136286 ,  G09G2300/0426

Abstract: An electronic display for providing a visual or video output for an electronic device. The electronic device includes a transistor layer configured to activate a first pixel row and a second pixel row. For each pixel in the first pixel row and the second pixel row, the transistor layer includes a switch transistor, a pixel electrode, and a common electrode. The electronic device further includes a pixel controller for selectively activating each pixel. The pixel controller includes a first gate line, a first drive line, and a second drive line. During operation, the first gate line provides a charge to the pixel electrode for a first pixel in the first pixel row and for a second pixel in the second pixel row, and the first drive line activates the switch transistor for the first pixel, and the second drive line activates the switch transistor for the second pixel.

Abstract translation: 一种用于为电子设备提供视觉或视频输出的电子显示器。 电子设备包括被配置为激活第一像素行和第二像素行的晶体管层。 对于第一像素行和第二像素行中的每个像素，晶体管层包括开关晶体管，像素电极和公共电极。 电子设备还包括用于选择性地激活每个像素的像素控制器。 像素控制器包括第一栅极线，第一驱动线和第二驱动线。 在操作期间，第一栅极线为第一像素行中的第一像素和第二像素行中的第二像素向像素电极提供电荷，并且第一驱动线激活用于第一像素的开关晶体管， 第二驱动线激活用于第二像素的开关晶体管。

公开(公告)号：US11587954B2

公开(公告)日：2023-02-21

申请号：US17502909

申请日：2021-10-15

Applicant: Apple Inc.

Inventor： Vasudha Gupta ,  Jae Won Choi ,  Shih Chang Chang ,  Tsung-Ting Tsai ,  Young Bae Park

IPC: H01L27/12 ,  G02F1/1362 ,  G02F1/1368 ,  H01L27/32 ,  G02F1/1345 ,  H01L29/786

Abstract: An electronic device may include a display having an array of display pixels on a substrate. The display pixels may be organic light-emitting diode display pixels or display pixels in a liquid crystal display. In an organic light-emitting diode display, hybrid thin-film transistor structures may be formed that include semiconducting oxide thin-film transistors, silicon thin-film transistors, and capacitor structures. The capacitor structures may overlap the semiconducting oxide thin-film transistors. Organic light-emitting diode display pixels may have combinations of oxide and silicon transistors. In a liquid crystal display, display driver circuitry may include silicon thin-film transistor circuitry and display pixels may be based on oxide thin-film transistors. A single layer or two different layers of gate metal may be used in forming silicon transistor gates and oxide transistor gates. A silicon transistor may have a gate that overlaps a floating gate structure.

公开(公告)号：US10707237B2

公开(公告)日：2020-07-07

申请号：US16125973

申请日：2018-09-10

Applicant: Apple Inc.

Inventor： Vasudha Gupta ,  Jae Won Choi ,  Shih Chang Chang ,  Tsung-Ting Tsai ,  Young Bae Park

IPC: H01L27/12 ,  G02F1/1362 ,  G02F1/1368 ,  H01L27/32 ,  G02F1/1345 ,  H01L29/786

Abstract: An electronic device may include a display having an array of display pixels on a substrate. The display pixels may be organic light-emitting diode display pixels or display pixels in a liquid crystal display. In an organic light-emitting diode display, hybrid thin-film transistor structures may be formed that include semiconducting oxide thin-film transistors, silicon thin-film transistors, and capacitor structures. The capacitor structures may overlap the semiconducting oxide thin-film transistors. Organic light-emitting diode display pixels may have combinations of oxide and silicon transistors. In a liquid crystal display, display driver circuitry may include silicon thin-film transistor circuitry and display pixels may be based on oxide thin-film transistors. A single layer or two different layers of gate metal may be used in forming silicon transistor gates and oxide transistor gates. A silicon transistor may have a gate that overlaps a floating gate structure.

公开(公告)号：US09734756B2

公开(公告)日：2017-08-15

申请号：US14315783

申请日：2014-06-26

Applicant: Apple Inc.

Inventor： Vasudha Gupta ,  Tsung-Ting Tsai ,  Jae Won Choi ,  Sang Y. Youn ,  Young Bae Park

IPC: G09G3/32 ,  G09G3/3233 ,  G09G3/3266

CPC classification number: G09G3/3233 ,  G09G3/3266 ,  G09G2300/0819 ,  G09G2300/0842 ,  G09G2300/0861 ,  G09G2310/0286

Abstract: An electronic device may be provided with an organic light-emitting diode display. The display may include row driver circuitry that provides an emission control signal at an output terminal to display pixels. The emission control signals may enable or disable light emission by the pixels. The row driver circuitry may include a bootstrapping capacitor that stores charge for boosting a gate signal at an intermediate node for a pull-up transistor above a power supply voltage. The row driver circuitry may include a pull-down transistor coupled to the intermediate node. The source terminal of the pull-down transistor may be coupled to the output terminal or an additional pull-down transistor may be stacked with the pull-down transistor to reduce leakage current. Charge pump circuitry may be coupled to the intermediate node to ensure that the intermediate node is maintained at a voltage above the power supply voltage.

公开(公告)号：US09685557B2

公开(公告)日：2017-06-20

申请号：US13801261

申请日：2013-03-13

Applicant: APPLE INC.

Inventor： Cheng-Ho Yu ,  Young Bae Park ,  Shih Chang Chang ,  Ting-Kuo Chang ,  Shang-Chih Lin

IPC: H01L29/786 ,  H01L29/66 ,  H01L27/12

CPC classification number: H01L29/78651 ,  H01L27/1288 ,  H01L29/6675 ,  H01L29/78621 ,  H01L29/78645

Abstract: A method is provided for fabricating thin-film transistors (TFTs) for an LCD having an array of pixels. The method includes depositing a first photoresist layer over a portion of a TFT stack. The TFT stack includes a conductive gate layer, and a semiconductor layer. The method also includes doping the exposed semiconductor layer with a first doping dose. The method further includes etching a portion of the conductive gate layer to expose a portion of the semiconductor layer, and doping the exposed portion of the semiconductor layer with a second doping dose. The method also includes removing the first photoresist layer, and depositing a second photoresist layer over a first portion of the doped semiconductor layer in an active area of the pixels to expose a second portion of the doped semiconductor layer in an area surrounding the active area. The method further includes doping the second portion of the doped semiconductor layer with a third doping dose, the first dose being higher than the second dose and the third dose.

公开(公告)号：US09647048B2

公开(公告)日：2017-05-09

申请号：US14315202

申请日：2014-06-25

Applicant: Apple Inc.

Inventor： Shih Chang Chang ,  Vasudha Gupta ,  Young Bae Park

IPC: H01L27/32 ,  G09G3/32 ,  G09G3/3233

CPC classification number: H01L27/3265 ,  G09G3/3233 ,  G09G2300/0426 ,  G09G2300/0819 ,  G09G2300/0852 ,  G09G2300/0861 ,  G09G2320/043 ,  H01L27/3262

Abstract: A display may have an array of organic light-emitting diode display pixels. Each display pixel may have a light-emitting diode that emits light under control of a thin-film drive transistor. Each display pixel may have thin-film transistors and capacitor structures that form a circuit for compensating the drive transistor for threshold voltage variations. The capacitor structures may be formed from interleaved stacked conductive plates. The conductive plates may be formed from layers of material that are used in forming the drive transistor and other thin-film transistors such as a semiconductor layer, a first metal layer, a second metal layer, a third metal layer, and interposed dielectric layers.

公开(公告)号：US20170092711A1

公开(公告)日：2017-03-30

申请号：US15176836

申请日：2016-06-08

Applicant: Apple Inc.

Inventor： Tsung-Ting Tsai ,  Chin-Wei Lin ,  Jae Won Choi ,  Young Bae Park

IPC: H01L27/32

CPC classification number: H01L27/3276 ,  H01L27/124

Abstract: A display may have an array of pixels formed from thin-film transistor circuitry. The thin-film transistor circuitry may include thin-film layers of dielectric, semiconductor, and metal on a dielectric substrate. Test structures may be formed around the periphery of the substrate to facilitate testing of the thin-film circuitry during manufacturing. The test structures may include test pads that are coupled to the thin-film circuitry by test lines extending from the thin-film circuitry. Following testing, the outermost portions of the display and the test pads on these display portions may be removed by cutting the substrate along a substrate cut line. The test lines may be formed from parallel lines that are shorted together, semiconductor layers, multiple layers of conductive material, and other structures that resist corrosion along the cut line.

公开(公告)号：US09601557B2

公开(公告)日：2017-03-21

申请号：US13837311

申请日：2013-03-15

Applicant: Apple Inc.

Inventor： Byung Duk Yang ,  John Z. Zhong ,  Shih Chang Chang ,  Vasudha Gupta ,  Young Bae Park

IPC: H01L27/32 ,  H01L27/12

CPC classification number: H01L27/3276 ,  H01L27/1218 ,  H01L27/124 ,  H01L27/1244 ,  H01L27/1248 ,  H01L2251/5338

Abstract: A flexible display having an array of pixels or sub-pixels is provided. The display includes a flexible substrate and an array of thin film transistors (TFTs) corresponding to the array of pixels or sub-pixels on the substrate. The display also includes a first plurality of metal lines coupled to gate electrodes of the TFTs and a second plurality of metal lines coupled to source electrodes and drain electrodes of the TFTs. At least one of the first plurality of metal lines and the second plurality of metal lines comprises a non-stretchable portion in the TFT areas and a stretchable portion outside the TFT areas.

公开(公告)号：US20160226013A1

公开(公告)日：2016-08-04

申请号：US14608897

申请日：2015-01-29

Applicant: Apple Inc.

Inventor： Rui Liu ,  Cheng Chen ,  Jae Won Choi ,  Kwang Ohk Cheon ,  Meng-Huan Ho ,  Young Bae Park

IPC: H01L51/52 ,  H01L51/56 ,  H01L27/32

CPC classification number: H01L51/5209 ,  H01L27/3218 ,  H01L27/3258

Abstract: A display may have thin-film transistor circuitry on a substrate with a substrate surface. An array of organic light-emitting diodes may be formed on the thin-film transistor circuitry. The organic light-emitting diodes may have anodes, cathodes, and emissive material located between the anodes and cathodes. The anodes may be oriented so that they are not parallel to the substrate surface. The anodes may have curved shapes or may have tilted shapes. Tilted anodes may have multiple segments. Anodes may be tilted by amounts that vary as a function of lateral distance across a display.

Abstract translation: 显示器可以在具有衬底表面的衬底上具有薄膜晶体管电路。 可以在薄膜晶体管电路上形成有机发光二极管阵列。 有机发光二极管可以具有位于阳极和阴极之间的阳极，阴极和发光材料。 阳极可以被定向成使得它们不平行于衬底表面。 阳极可以具有弯曲形状或者可以具有倾斜形状。 倾斜阳极可能有多个部分。 阳极可能会随着显示器横向距离的变化而变化。