摘要:
A beam projecting apparatus which includes a light source emitting a laser beam; and a beam projecting device which includes a beam projecting portion from which the laser beam is projected outwardly so that the laser beam has a beam waist position at a predetermined position apart from the beam projecting apparatus. The beam projecting apparatus further includes a beam waist position adjusting optical system which is disposed along a light path from the light source to the beam projecting portion, at least one lens element of the beam waist position adjusting optical system being movable along an optical axis thereof; a temperature detecting device for detecting a temperature in the beam projecting apparatus; and a controller for controlling a movement of the at least one lens element in association with the temperature detected by the temperature detecting device so that a deviation of the beam waist position from the predetermined position due to a temperature change is minimized.
摘要:
An encoder having improved output abnormality detection. First and second input signals differing in phase from one another are compared by respective first and second comparators with a first reference level at an amplitude center of each of the first and second signals, and the outputs of the first and second comparators are applied to respective inputs of an EXCLUSIVE-OR gate. Third and fourth comparators compare a composite signal of the first and second signals with respective third and fourth reference levels located on opposite sides of the first reference level, and the output of the third and fourth comparators are applied to respective inputs of a first AND gate. A second AND gate, at the output of which the circuit output is provided, receives as inputs the output of the first AND gate and the output of the EXCLUSIVE-OR gate.
摘要:
An opthalmological instrument including a blinking detecting device for positively detecting when an eye is blinking to thereby eliminate errors in optical measurements due to variations in the signal light produced by the blinking. An optical system receives light beams reflected from a portion of an eye under examination to form an image of the front portion of the eye in an image plane. An image pickup element is disposed at the image plane and produces an output video signal in response thereto. A detecting circuit which receives the video signal determines whether or not the image pickup element exceeds a predetermined threshold value. If the threshold value is not exceeded, an indication is produced that blinking has occurred.
摘要:
A beam projecting apparatus includes a light source that emits a laser beam and a colliminating lens that renders the emitted laser beam a substantially parallel beam. A beam projecting device includes a beam projecting portion from which the laser beam is projected outwardly so that the laser beam has a beam waist located at a predetermined position spaced from the beam projecting apparatus. The beam projecting apparatus further includes a system that detects a curvature of wavefront of the substantially parallel beam at the predetermined position.
摘要:
In a facsimile system received data is initially stored in an internal storage device, and subsequently is stored in an external storage device (hard disk drive or floppy disk drive) by a transfer process. The facsimile system stores the received data from a transmitting party in the internal storage device and determines a state of availability of the external storage device. When the external storage deice is available, the received data is transferred to the external storage device, and if not available, transfer is delayed until it becomes available.
摘要:
When image information is received, a main controller investigates the blank memory capacity of a floppy disk, after which the main controller executes processing for storing the received image information in an image-information semiconductor memory while confirming that sufficient blank memory remains in the image-information memory. If, during execution of the processing for storing the image information, the blank memory area of the image-information memory runs out so that no further image information can be stored there, or the quantity of image information to be stored in the image-information memory becomes greater than the blank memory capacity of the floppy disk, an error warning is issued, the processing for storing the image information is suspended and processing for interrupting communication is executed.
摘要:
An improved angle measuring device in which rotational irregularity in the form of two cycles or more per rotational cycle of the motor driving device is compensated for completely. A period of time T.sub.1 required for a cutout formed in the periphery of a rotor rotating at a constant speed to make one revolution starting from a stationary reference point, and a period of time T.sub.2 required for the cutout to move between the reference point and an angle measuring point are obtained to evaluate 360.degree..times.(T.sub.2 /T.sub.1) to obtain the angle under measurement. The cutout has an angular width of approximately 90.degree., although angular widths in a range of 5.degree. to 355.degree. can be used as the situation demands.
摘要:
A projection aligner scans a plurality of light beams over a mask in a main scanning direction to transfer an image of a mask pattern on an object by the light beams passed through the mask. The projection aligner has a plurality of optical systems for projecting light beams passed through the mask onto the object. Each of the optical system includes a lens unit, a reflector provided to one side of the lens unit and a deflector provided to the other side of the lens unit. The light beam passed through the mask is deflected by the deflector, passes through the lens unit, reflected back by the reflector, passes through the lens unit again, and deflected by the deflector toward the object. The size of the image formed by the light beam is varied by moving the reflector in the main scanning direction and moving the deflector in a direction perpendicular to the object. The location of the image on the object in the auxiliary direction is adjusted by further moving the reflector in the auxiliary direction.
摘要:
The projection aligner for transferring an image of a mask pattern of a mask onto an object to be exposed comprises a projection optical system that forms the image of the mask pattern onto the object, an expansion ratio determiner that measures lengths of the object in first and second directions and determines first and second expansion ratios, which are expansion ratios of the object in the first and second directions, respectively, based on those lengths, and a magnification controller that adjusts the magnification of the projection optical system to a value between the first and second expansion ratios.
摘要:
The projection aligner transfers the image of the pattern formed on the mask to the object by scanning a light beam across the mask and the object. The projection aligner includes a driving mechanism for synchronously moving the mask and the object and thereby scanning the light beam across the mask and the object in a predetermined beam scanning direction. The light beam scanning the mask passes through the mask and is projected onto the object by a projection optical system of which magnification is adjusted by a magnification adjusting mechanism. The magnification adjusting mechanism and the driving mechanism are controlled by a controller such that the difference between the magnification of said projection optical system and a velocity ratio of the mask and the object moved by the driving mechanism becomes below a predetermined maximum value which is determined based on a line width of the pattern formed on the mask.