Method and apparatus for reducing aspect ratio dependent etching in time division multiplexed etch processes
    31.
    发明授权
    Method and apparatus for reducing aspect ratio dependent etching in time division multiplexed etch processes 有权
    用于在时分多路复用蚀刻工艺中减少高宽比依赖蚀刻的方法和装置

    公开(公告)号:US07959819B2

    公开(公告)日:2011-06-14

    申请号:US11159415

    申请日:2005-06-23

    IPC分类号: G01L21/30 G01R31/00

    摘要: The present invention provides a method and an apparatus for reducing aspect ratio dependent etching that is observed when plasma etching deep trenches in a semiconductor substrate through an alternating deposition/etch process. A plurality of different sized features on the substrate are monitored in real time during the alternating deposition/etch process. Then, based on the information received from the monitor, at least one process parameter is adjusted in the alternating deposition/etch process to achieve equivalent etch depths of at least two different sized features on the substrate.

    摘要翻译: 本发明提供了一种用于减小当通过交替沉积/蚀刻工艺等离子体蚀刻半导体衬底中的深沟槽时观察到的纵横比相关蚀刻的方法和装置。 在交替的沉积/蚀刻工艺期间实时地监测衬底上的多个不同尺寸的特征。 然后,基于从监视器接收的信息,在交替沉积/蚀刻工艺中调整至少一个工艺参数,以实现衬底上至少两个不同尺寸特征的等效蚀刻深度。

    COUNTERBALANCE MECHANISM FOR FOLD OUT RAMP
    32.
    发明申请
    COUNTERBALANCE MECHANISM FOR FOLD OUT RAMP 有权
    折旧机会的平衡机制

    公开(公告)号:US20110088177A1

    公开(公告)日:2011-04-21

    申请号:US12754467

    申请日:2010-04-05

    IPC分类号: A61G3/06 E01D1/00

    摘要: A ramp assembly includes a ramp portion configured for reciprocating motion between a stowed position, a deployed position, and a neutral position. The ramp assembly further includes a counterbalance that provides a force to bias the ramp portion toward the stowed position when the ramp portion is between the deployed position and the neutral position, and toward the deployed position when the ramp portion is between the stowed position and the neutral position. A shaft rotates in a first direction when the ramp portion moves toward the stowed position, and in a second direction opposite the first direction when the ramp portion moves toward the deployed position. A crank is fixedly coupled to the shaft. A rod is rotatably coupled at a first end to the crank about a first axis and at a second end to a cylinder. The cylinder is coupled for rotational movement about a second axis.

    摘要翻译: 斜坡组件包括构造成用于在收起位置,展开位置和中立位置之间的往复运动的斜坡部分。 斜坡组件还包括平衡件,当斜坡部分处于展开位置和中立位置之间时,该平衡器提供将偏斜斜坡部分朝向收起位置的力,并且当斜坡部分位于收起位置与收起位置之间时, 中立位置 当斜坡部朝向收起位置移动时,当斜坡部朝向展开位置移动时,轴沿第一方向旋转,并且在与第一方向相反的第二方向上旋转。 曲柄固定地联接到轴上。 杆在第一端处以第一轴线可旋转地联接到曲柄,并且在第二端处可旋转地联接到气缸。 圆筒被联接以围绕第二轴线旋转运动。

    COUNTERBALANCE ASSEMBLY FOR A FOLD OUT RAMP
    33.
    发明申请
    COUNTERBALANCE ASSEMBLY FOR A FOLD OUT RAMP 审中-公开
    折旧组合折旧

    公开(公告)号:US20110023246A1

    公开(公告)日:2011-02-03

    申请号:US12695943

    申请日:2010-01-28

    IPC分类号: E01D1/00

    摘要: A counterbalanced ramp assembly includes a ramp portion coupled for reciprocating motion between a stowed position, a deployed position, and a neutral position. First and second elements are operatively coupled to the ramp portion. When the ramp portion moves from the neutral position toward the deployed position, the first element moves a first end of a spring toward a second end of the spring as the second end of the spring maintains a fixed position. When the ramp portion moves from the neutral position toward the stowed position, the second element moves the second end of the spring toward the first end of the spring as the first end of the spring maintains a fixed position.

    摘要翻译: 平衡斜坡组件包括连接在收起位置,展开位置和中立位置之间的往复运动的斜坡部分。 第一和第二元件可操作地联接到斜坡部分。 当斜坡部分从中立位置朝向展开位置移动时,当弹簧的第二端保持固定位置时,第一元件将弹簧的第一端移动到弹簧的第二端。 当斜坡部分从中立位置朝向收起位置移动时,当弹簧的第一端保持固定位置时,第二元件使弹簧的第二端朝向弹簧的第一端移动。

    Temperature control method for photolithographic substrate
    34.
    发明授权
    Temperature control method for photolithographic substrate 有权
    光刻基板的温度控制方法

    公开(公告)号:US07867403B2

    公开(公告)日:2011-01-11

    申请号:US11756074

    申请日:2007-05-31

    IPC分类号: B44C1/22 C25F3/00

    摘要: The present invention provides a method for processing a photolithographic substrate, comprising the placement of the photolithographic substrate on a support member in a chamber wherein the photolithographic substrate has an initial temperature of about zero degrees Celsius to about fifty degrees Celsius. A heat transfer fluid is introduced into the chamber to cool the photolithographic substrate to a target temperature of less than about zero degrees Celsius to less than about minus forty degrees Celsius. The cooled photolithographic substrate is subjected to a plasma process before the temperature of the cooled photolithographic substrate reaches the initial temperature.

    摘要翻译: 本发明提供一种用于处理光刻基片的方法,包括将光刻基片放置在腔室中的支撑构件上,其中光刻基片具有约零摄氏度至约五十摄氏度的初始温度。 将传热流体引入室中以将光刻基板冷却至小于约零摄氏度至小于零下四十度的目标温度。 在冷却的光刻基板的温度达到初始温度之前,对冷却的光刻基板进行等离子体处理。

    SYSTEM AND METHOD FOR A CATHETER IMPEDANCE SEEKING DEVICE
    36.
    发明申请
    SYSTEM AND METHOD FOR A CATHETER IMPEDANCE SEEKING DEVICE 失效
    用于电缆阻抗寻找装置的系统和方法

    公开(公告)号:US20100130854A1

    公开(公告)日:2010-05-27

    申请号:US12323231

    申请日:2008-11-25

    IPC分类号: A61B5/055

    摘要: A tissue-contact seeking method and apparatus is described that enhances catheter position detection and control systems in making and maintaining continuous tissue contact in a highly dynamic frame, such as under the rigors of cardiac motion. Tissue-seeking logical routines use a tissue contact sensing system to advance a catheter to relatively continuous tissue contact, or detect obstacles, in cooperation with the catheter position detection and control systems. Additional logical routines are capable of optimizing the contact direction of the catheter tip by controlling the rotation angle and chamber position of the introducer.

    摘要翻译: 描述了组织接触寻求方法和装置,其增强了导管位置检测和控制系统,以在高度动态的框架(例如心脏运动的严格性)下制造和维持连续组织接触。 组织寻求逻辑例程使用组织接触感测系统将导管推进到与导管位置检测和控制系统协作的相对连续的组织接触或检测障碍物。 附加的逻辑程序能够通过控制导引器的旋转角度和腔室位置来优化导管尖端的接触方向。

    USER PHOTO HANDLING AND CONTROL
    38.
    发明申请
    USER PHOTO HANDLING AND CONTROL 有权
    用户照片处理和控制

    公开(公告)号:US20090313254A1

    公开(公告)日:2009-12-17

    申请号:US12141058

    申请日:2008-06-17

    IPC分类号: G06F7/00 G06F17/30

    摘要: Architecture for centralized photo storage for user profiles with consent and cardkey system integration. A picture picker can connect to a cardkey/security badge photo system to allow users to choose from badge photos. Consent is also captured by the picker to allow user photos to be used in other applications. Other applications can interact with the photo storage using standard web services and APIs for the user profile and user profile change log services. Centralized storage and insured accessibility enable applications to consume from the photo storage. The photo storage can also function as a virtual directory with distributed storage as utilized for geographical deployments. Extensions of the photo storage can include an add-in for a personal information manager application and a management agent for web-based collaboration and document management to copy photos from/to other directory structures.

    摘要翻译: 用于通过同意和卡钥匙系统集成的用户配置文件的集中照片存储架构。 图片选择器可以连接到卡片/安全徽章照片系统,以允许用户从徽章照片中进行选择。 选择器也捕获同意,以允许用户在其他应用程序中使用照片。 其他应用程序可以使用用于用户配置文件和用户配置文件更改日志服务的标准Web服务和API与照片存储进行交互。 集中存储和保险可访问性使应用程序能够从照片存储中消费。 照片存储还可以用作具有用于地理部署的分布式存储的虚拟目录。 照片存储的扩展可以包括用于个人信息管理器应用的加载项和用于基于web的协作和文档管理的管理代理,以从/向其他目录结构复制照片。

    Global network neighborhood: Scheme for providing information about available networks in a geographical location
    39.
    发明申请
    Global network neighborhood: Scheme for providing information about available networks in a geographical location 审中-公开
    全球网络邻域:在地理位置提供可用网络信息的方案

    公开(公告)号:US20090310567A1

    公开(公告)日:2009-12-17

    申请号:US12583520

    申请日:2009-08-21

    IPC分类号: H04W36/00 H04W40/00

    CPC分类号: H04W48/18 H04W4/029 H04W48/14

    摘要: A method and apparatus supporting a discovery technique of multiple available networks is disclosed. A global network neighborhood data depository contains attributes of multiple networks that are available in a geographic region. The attributes aid in network discovery and selection of an optimum network for communication for devices capable of communicating via multiple networks.

    摘要翻译: 公开了一种支持多个可用网络的发现技术的方法和装置。 全球网络邻域数据存储库包含在地理区域中可用的多个网络的属性。 这些属性有助于网络发现和选择能够通过多个网络进行通信的设备进行通信的最佳网络。

    Method for producing flavored particulate solid dispersions
    40.
    发明申请
    Method for producing flavored particulate solid dispersions 审中-公开
    生产调味颗粒固体分散体的方法

    公开(公告)号:US20090301504A1

    公开(公告)日:2009-12-10

    申请号:US12290575

    申请日:2008-10-31

    IPC分类号: A24B15/00

    摘要: A method for producing flavoring materials consisting of a flavor and a simple matrix material that are GRAS or approved for use in food, and that will be stable under extremely adverse conditions, greater than 50% moisture, high pH, high temperature stability (60° C.), yet be released in the oral cavity; without the use of organic solvents, and with the use of inexpensive materials and unsophisticated equipment.

    摘要翻译: 一种生产调味料的方法,由风味和简单的基质材料组成,GRAS或批准用于食品,并且在非常不利条件下稳定,大于50%的水分,高pH,高温稳定性(60°) C.),但在口腔释放; 不使用有机溶剂,并且使用廉价的材料和不成熟的设备。