Micro-LED pick and place using metallic gallium

    公开(公告)号:US10304706B2

    公开(公告)日:2019-05-28

    申请号:US16002640

    申请日:2018-06-07

    摘要: An LED die containing a gallium semiconductor layer is placed on a target substrate using a pick-up tool (PUT) attached to the LED die using metallic gallium. As a result of a laser lift-of (LLO) process to separate the gallium semiconductor layer from a substrate layer on which the gallium semiconductor layer is formed, a layer of gallium metal is formed on a surface of the LED die. The gallium layer is melted to form liquid gallium. A head of the PUT is contacted with the liquid gallium, whereupon the LED die is cooled such that the liquid gallium solidifies, attaching the LED die to the PUT. The PUT picks up and places the LED die at a desired location on a target substrate. The LED die can be heated to melt the gallium layer, allowing the PUT to be detached.

    VACUUM PICK-UP HEAD FOR SEMICONDUCTOR CHIPS
    32.
    发明申请

    公开(公告)号:US20190139794A1

    公开(公告)日:2019-05-09

    申请号:US15807518

    申请日:2017-11-08

    摘要: To manufacture a device by picking and placing semiconductor devices from a carrier substrate to a target substrate using suction force, a subset of pick-up heads of an array of pick-up heads is selectively operated to attach a subset of the semiconductor devices to the subset of pick-up heads by a suction force. The subset of semiconductor devices attached with the pick-up heads are placed over or on a target substrate, and releasing onto the target substrate. The semiconductor devices may be detached from the pick-up heads by releasing or reversing the suction force. The suction force may be created by controllable membranes in the pick-up heads, such as piezoelectric benders.

    Pickup head with touch down sensor
    36.
    发明授权

    公开(公告)号:US11219151B1

    公开(公告)日:2022-01-04

    申请号:US16370771

    申请日:2019-03-29

    发明人: Pooya Saketi

    摘要: To manufacture a device by picking and placing semiconductor devices from a carrier substrate to a target substrate using touch down sensors, a pick-up head including touch down sensors and the semiconductor devices on the carrier substrate are moved relative to each other to contact the carrier substrate with the touch down sensors. Signals from each touch down sensor indicating a degree of deformation of each touch down sensor caused by the contact with the carrier substrate are used to determine an orientation of the pick-up head by processing the signals, and adjust the orientation of the pick-up head based on the determined orientation to attach the semiconductor devices onto the pick-up head. In some embodiments, the touch down sensors are piezoelectric benders.

    Atomic force microscopy tips for interconnection

    公开(公告)号:US10989735B2

    公开(公告)日:2021-04-27

    申请号:US16781490

    申请日:2020-02-04

    IPC分类号: G01Q60/38 G01Q60/36 G01Q60/30

    摘要: Embodiments relate to the design of an electronic device capable of preventing a lateral motion between a first body and a second body. The device comprises a first body comprising one or more atomic force microscopy (AFM) tips protruding from a first surface of the first body. The device further comprises a second body comprising one or more electrical contacts on a second surface of the second body. The second surface faces the first surface. The one or more electrical contacts pierced by the AFM tips of the first surface to prevent a lateral motion between the first body and the second body.