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公开(公告)号:US08272825B2
公开(公告)日:2012-09-25
申请号:US12123365
申请日:2008-05-19
申请人: Christopher Hofmeister , Martin R. Elliot , Alexander Krupyshev , Joseph Hallisey , Joseph A. Kraus , William Fosnight , Craig J. Carbone , Jeffrey C. Blahnik , Ho Yin Owen Fong
发明人: Christopher Hofmeister , Martin R. Elliot , Alexander Krupyshev , Joseph Hallisey , Joseph A. Kraus , William Fosnight , Craig J. Carbone , Jeffrey C. Blahnik , Ho Yin Owen Fong
IPC分类号: B65G49/07
CPC分类号: H01L21/67098 , H01L21/67126 , H01L21/6719 , H01L21/67201
摘要: A substrate processing tool including a frame forming at least one isolatable chamber configured to hold a controlled atmosphere, at least two substrate supports located within each of the at least one isolatable chamber, each of the at least two substrate supports being stacked one above the other and configured to hold a respective substrate and a cooling unit communicably coupled to the at least two substrate supports such that the at least two substrate supports and cooling unit effect simultaneous conductive cooling of each of the respective substrates located on the at least two substrate supports.
摘要翻译: 一种基板处理工具,其包括形成至少一个可分隔室的框架,该隔离室被构造成保持受控气氛,至少两个基板支撑件,位于所述至少一个可隔离室的每一个内,所述至少两个基板支撑件中的每个基板支撑件彼此堆叠 并且被配置为保持相应的基板和可通信地联接到所述至少两个基板支撑件的冷却单元,使得所述至少两个基板支撑件和冷却单元对位于所述至少两个基板支撑件上的各个基板的每个基板进行同时导电冷却。
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公开(公告)号:US07762755B2
公开(公告)日:2010-07-27
申请号:US11485145
申请日:2006-07-11
申请人: Daniel A. Hall , Christopher Hofmeister , William Fosnight , Jeff G. Araujo , Steven Allen , Glenn Sindledecker
发明人: Daniel A. Hall , Christopher Hofmeister , William Fosnight , Jeff G. Araujo , Steven Allen , Glenn Sindledecker
IPC分类号: B65B69/00
CPC分类号: H01L21/67775
摘要: A substrate processing apparatus has a frame and a load port connected to the frame and adapted to mate a substrate transport container to the frame. The apparatus has transportable storage that is adapted to be removably connected to the frame and fit beneath the load port. The storage may be an enclosure housing electrical, mechanical, or electromechanical devices of the substrate processing apparatus.
摘要翻译: 基板处理装置具有连接到框架并适于将基板输送容器与框架配合的框架和负载端口。 该装置具有适于可拆卸地连接到框架并且装配在装载口下方的可移动存储器。 存储器可以是容纳基板处理装置的电,机械或机电装置的外壳。
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公开(公告)号:US07699573B2
公开(公告)日:2010-04-20
申请号:US10628980
申请日:2003-07-29
申请人: Jakob Blattner , Rudy Federici , William Fosnight , Clint Haris
发明人: Jakob Blattner , Rudy Federici , William Fosnight , Clint Haris
IPC分类号: H01L21/677
CPC分类号: G03F7/70925 , G03F7/70741 , H01L21/67359 , H01L21/67742 , H01L21/67769 , H01L21/68707 , Y10S414/139
摘要: A reticle manipulating device with an at least substantially closed housing for maintaining clean-room conditions inside the housing, an input/output station for introducing and discharging reticles in and out of the housing, and at least one functional unit arranged in the housing for impressing a predetermined function on the reticles. The device has a manipulating device also arranged inside the housing, for manipulating the reticles in the housing.
摘要翻译: 一种掩模版操纵装置,具有至少基本上封闭的壳体,用于在壳体内保持清洁室条件;输入/输出站,用于将掩模版引入和放出壳体;以及布置在壳体中的至少一个功能单元,用于压印 在掩模版上具有预定的功能。 该装置具有也布置在壳体内部的操纵装置,用于操纵壳体中的光罩。
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公开(公告)号:US08297319B2
公开(公告)日:2012-10-30
申请号:US11855484
申请日:2007-09-14
申请人: Daniel Babbs , William Fosnight
发明人: Daniel Babbs , William Fosnight
IPC分类号: B65B31/00
CPC分类号: H01L21/67393 , H01L21/67772
摘要: A method for pressurizing a substrate carrier including pressurizing a chamber that is of unitary construction with the carrier and/or a substrate cassette within the carrier and maintaining a pressure within the carrier by releasing gas from the chamber into the carrier.
摘要翻译: 一种用于对衬底载体加压的方法,包括将载体和/或衬底盒加载在载体内并且通过将气体从腔室释放到载体中来保持载体内的压力而使整体结构加压。
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公开(公告)号:US20080107506A1
公开(公告)日:2008-05-08
申请号:US11855484
申请日:2007-09-14
申请人: Daniel Babbs , William Fosnight
发明人: Daniel Babbs , William Fosnight
IPC分类号: H01L21/673
CPC分类号: H01L21/67393 , H01L21/67772
摘要: A method for pressurizing a substrate carrier including pressurizing a chamber that is of unitary construction with the carrier and/or a substrate cassette within the carrier and maintaining a pressure within the carrier by releasing gas from the chamber into the carrier.
摘要翻译: 一种用于对衬底载体加压的方法,包括将载体和/或衬底盒加载在载体内并且通过将气体从腔室释放到载体中来保持载体内的压力而使整体结构加压。
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公开(公告)号:US09437469B2
公开(公告)日:2016-09-06
申请号:US11741416
申请日:2007-04-27
IPC分类号: H01L21/68 , H01L21/687
CPC分类号: H01L21/68707
摘要: A substrate transport apparatus for a processing tool. The apparatus has a drive section, a movable arm, and an end effector. The arm is operably connected to the drive section. The end effector is connected to the movable arm for holding and transporting the substrate in the processing tool. The apparatus has a substrate inertial capture edge grip connected to the end effector and arranged so that the grip effects capture and centering of the substrate onto the end effector from substrate inertia.
摘要翻译: 一种用于加工工具的基片输送装置。 该装置具有驱动部分,可动臂和端部执行器。 臂可操作地连接到驱动部分。 端部执行器连接到可移动臂,用于在处理工具中保持和传送基板。 该装置具有连接到端部执行器的基板惯性捕获边缘抓握器并且布置成使得抓地效应从基板惯性捕获并定位到端部执行器上。
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公开(公告)号:US20090129897A1
公开(公告)日:2009-05-21
申请号:US12123391
申请日:2008-05-19
申请人: Daniel Babbs , William Fosnight , Robert C. May , William Weaver
发明人: Daniel Babbs , William Fosnight , Robert C. May , William Weaver
IPC分类号: H01L21/677 , H01L21/68
CPC分类号: H01L21/67766 , H01L21/67201 , H01L21/67207 , H01L21/67213 , H01L21/67225 , H01L21/67376 , H01L21/67379 , H01L21/67393 , H01L21/67742 , H01L21/67772 , H01L21/67775 , H01L21/67778 , Y10S414/14
摘要: A substrate processing system including a processing section arranged to hold a processing atmosphere therein, a carrier having a shell forming an internal volume for holding at least one substrate for transport to the processing section, the shell being configured to allow the internal volume to be pumped down to a predetermined vacuum pressure that is different than an exterior atmosphere outside the substrate processing system, and a load port communicably connected to the processing section to isolate the processing atmosphere from the exterior atmosphere, the load port being configured to couple with the carrier to pump down the internal volume of the carrier and to communicably connect the carrier to the processing section, for loading the substrate into the processing section through the load port.
摘要翻译: 一种基板处理系统,包括:处理部,其被配置为保持其中的处理气氛;载体,其具有形成内部容积的外壳,用于保持至少一个基板用于输送到所述处理部分,所述壳体被配置为允许内部体积被泵送 下降到与衬底处理系统外部的外部空气不同的预定真空压力,以及负载端口,可通信地连接到处理部分,以将处理气氛与外部大气隔离,负载端口被配置为与载体耦合, 泵送载体的内部体积并将载体可通信地连接到处理部分,以通过负载端口将基板装载到处理部分中。
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公开(公告)号:US08425172B2
公开(公告)日:2013-04-23
申请号:US12761499
申请日:2010-04-16
申请人: Jakob Blattner , Rudy Federici , William Fosnight , Clint Harris
发明人: Jakob Blattner , Rudy Federici , William Fosnight , Clint Harris
IPC分类号: H01L21/677
CPC分类号: G03F7/70925 , G03F7/70741 , H01L21/67359 , H01L21/67742 , H01L21/67769 , H01L21/68707 , Y10S414/139
摘要: A reticle manipulating device comprising a housing capable of having a controlled environment wherein at least one processing module is connected to the housing and capable of processing a reticle. A transport apparatus is connected to the housing for transporting the reticle between the at least one module to another portion of the housing. At least one module is removably connectable to the housing and at least one module has an interface adapted for removably coupling the module to the housing. One module being selectable for connection to the housing from a number of different interchangeable module each having a different predetermined characteristic and being capable of connection to the housing.
摘要翻译: 一种掩模版操纵装置,其包括能够具有受控环境的壳体,其中至少一个处理模块连接到所述壳体并且能够加工掩模版。 传送装置连接到壳体,用于将光罩在至少一个模块之间传送到壳体的另一部分。 至少一个模块可拆卸地连接到壳体,并且至少一个模块具有适于将模块可移除地耦合到壳体的接口。 一个模块可选择用于从多个不同的可互换模块连接到壳体,每个模块具有不同的预定特性并且能够连接到壳体。
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公开(公告)号:US20100292826A1
公开(公告)日:2010-11-18
申请号:US12761499
申请日:2010-04-16
申请人: Jakob Blattner , Rudy Federici , William Fosnight , Clint Haris
发明人: Jakob Blattner , Rudy Federici , William Fosnight , Clint Haris
IPC分类号: G06F19/00
CPC分类号: G03F7/70925 , G03F7/70741 , H01L21/67359 , H01L21/67742 , H01L21/67769 , H01L21/68707 , Y10S414/139
摘要: A reticle manipulating device comprising a housing capable of having a controlled environment wherein at least one processing module is connected to the housing and capable of processing a reticle. A transport apparatus is, connected to the housing for transporting the reticle between the at least one module to another portion of the housing. At least one module is removably connectable to the housing and at least one module has an interface adapted for removably coupling the module to the housing. One module being selectable for connection to the housing from a number of different interchangeable module each having a different predetermined characteristic and being capable of connection to the housing.
摘要翻译: 一种掩模版操纵装置,其包括能够具有受控环境的壳体,其中至少一个处理模块连接到所述壳体并且能够加工掩模版。 传送装置连接到壳体,用于将至少一个模块之间的光罩传送到壳体的另一部分。 至少一个模块可拆卸地连接到壳体,并且至少一个模块具有适于将模块可移除地耦合到壳体的接口。 一个模块可选择用于从多个不同的可互换模块连接到壳体,每个模块具有不同的预定特性并且能够连接到壳体。
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公开(公告)号:US20080267747A1
公开(公告)日:2008-10-30
申请号:US11741416
申请日:2007-04-27
IPC分类号: B65H29/00 , H01L21/683
CPC分类号: H01L21/68707
摘要: A substrate transport apparatus for a processing tool. The apparatus has a drive section, a movable arm, and an end effector. The arm is operably connected to the drive section. The end effector is connected to the movable arm for holding and transporting the substrate in the processing tool. The apparatus has a substrate inertial capture edge grip connected to the end effector and arranged so that the grip effects capture and centering of the substrate onto the end effector from substrate inertia.
摘要翻译: 一种用于加工工具的基片输送装置。 该装置具有驱动部分,可动臂和端部执行器。 臂可操作地连接到驱动部分。 端部执行器连接到可移动臂,用于在处理工具中保持和传送基板。 该装置具有连接到端部执行器的基板惯性捕获边缘抓握器并且布置成使得抓地效应从基板惯性捕获并定位到端部执行器上。
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