Reticle manipulating device
    33.
    发明授权
    Reticle manipulating device 有权
    光罩操纵装置

    公开(公告)号:US07699573B2

    公开(公告)日:2010-04-20

    申请号:US10628980

    申请日:2003-07-29

    IPC分类号: H01L21/677

    摘要: A reticle manipulating device with an at least substantially closed housing for maintaining clean-room conditions inside the housing, an input/output station for introducing and discharging reticles in and out of the housing, and at least one functional unit arranged in the housing for impressing a predetermined function on the reticles. The device has a manipulating device also arranged inside the housing, for manipulating the reticles in the housing.

    摘要翻译: 一种掩模版操纵装置,具有至少基本上封闭的壳体,用于在壳体内保持清洁室条件;输入/输出站,用于将掩模版引入和放出壳体;以及布置在壳体中的至少一个功能单元,用于压印 在掩模版上具有预定的功能。 该装置具有也布置在壳体内部的操纵装置,用于操纵壳体中的光罩。

    Carrier gas system and coupling substrate carrier to a loadport
    34.
    发明授权
    Carrier gas system and coupling substrate carrier to a loadport 有权
    载气系统和耦合衬底载体到负载端口

    公开(公告)号:US08297319B2

    公开(公告)日:2012-10-30

    申请号:US11855484

    申请日:2007-09-14

    IPC分类号: B65B31/00

    CPC分类号: H01L21/67393 H01L21/67772

    摘要: A method for pressurizing a substrate carrier including pressurizing a chamber that is of unitary construction with the carrier and/or a substrate cassette within the carrier and maintaining a pressure within the carrier by releasing gas from the chamber into the carrier.

    摘要翻译: 一种用于对衬底载体加压的方法,包括将载体和/或衬底盒加载在载体内并且通过将气体从腔室释放到载体中来保持载体内的压力而使整体结构加压。

    CARRIER GAS SYSTEM AND COUPLING SUBSTRATE CARRIER TO A LOADPORT
    35.
    发明申请
    CARRIER GAS SYSTEM AND COUPLING SUBSTRATE CARRIER TO A LOADPORT 有权
    载体气体系统和耦合基板载体到负载

    公开(公告)号:US20080107506A1

    公开(公告)日:2008-05-08

    申请号:US11855484

    申请日:2007-09-14

    IPC分类号: H01L21/673

    CPC分类号: H01L21/67393 H01L21/67772

    摘要: A method for pressurizing a substrate carrier including pressurizing a chamber that is of unitary construction with the carrier and/or a substrate cassette within the carrier and maintaining a pressure within the carrier by releasing gas from the chamber into the carrier.

    摘要翻译: 一种用于对衬底载体加压的方法,包括将载体和/或衬底盒加载在载体内并且通过将气体从腔室释放到载体中来保持载体内的压力而使整体结构加压。

    Inertial wafer centering end effector and transport apparatus
    36.
    发明授权
    Inertial wafer centering end effector and transport apparatus 有权
    惯性晶片定心端部执行器和输送装置

    公开(公告)号:US09437469B2

    公开(公告)日:2016-09-06

    申请号:US11741416

    申请日:2007-04-27

    IPC分类号: H01L21/68 H01L21/687

    CPC分类号: H01L21/68707

    摘要: A substrate transport apparatus for a processing tool. The apparatus has a drive section, a movable arm, and an end effector. The arm is operably connected to the drive section. The end effector is connected to the movable arm for holding and transporting the substrate in the processing tool. The apparatus has a substrate inertial capture edge grip connected to the end effector and arranged so that the grip effects capture and centering of the substrate onto the end effector from substrate inertia.

    摘要翻译: 一种用于加工工具的基片输送装置。 该装置具有驱动部分,可动臂和端部执行器。 臂可操作地连接到驱动部分。 端部执行器连接到可移动臂,用于在处理工具中保持和传送基板。 该装置具有连接到端部执行器的基板惯性捕获边缘抓握器并且布置成使得抓地效应从基板惯性捕获并定位到端部执行器上。

    SIDE OPENING UNIFIED POD
    37.
    发明申请
    SIDE OPENING UNIFIED POD 有权
    侧开式统一POD

    公开(公告)号:US20090129897A1

    公开(公告)日:2009-05-21

    申请号:US12123391

    申请日:2008-05-19

    IPC分类号: H01L21/677 H01L21/68

    摘要: A substrate processing system including a processing section arranged to hold a processing atmosphere therein, a carrier having a shell forming an internal volume for holding at least one substrate for transport to the processing section, the shell being configured to allow the internal volume to be pumped down to a predetermined vacuum pressure that is different than an exterior atmosphere outside the substrate processing system, and a load port communicably connected to the processing section to isolate the processing atmosphere from the exterior atmosphere, the load port being configured to couple with the carrier to pump down the internal volume of the carrier and to communicably connect the carrier to the processing section, for loading the substrate into the processing section through the load port.

    摘要翻译: 一种基板处理系统,包括:处理部,其被配置为保持其中的处理气氛;载体,其具有形成内部容积的外壳,用于保持至少一个基板用于输送到所述处理部分,所述壳体被配置为允许内部体积被泵送 下降到与衬底处理系统外部的外部空气不同的预定真空压力,以及负载端口,可通信地连接到处理部分,以将处理气氛与外部大气隔离,负载端口被配置为与载体耦合, 泵送载体的内部体积并将载体可通信地连接到处理部分,以通过负载端口将基板装载到处理部分中。

    Reticle manipulation device
    38.
    发明授权
    Reticle manipulation device 有权
    光罩操纵装置

    公开(公告)号:US08425172B2

    公开(公告)日:2013-04-23

    申请号:US12761499

    申请日:2010-04-16

    IPC分类号: H01L21/677

    摘要: A reticle manipulating device comprising a housing capable of having a controlled environment wherein at least one processing module is connected to the housing and capable of processing a reticle. A transport apparatus is connected to the housing for transporting the reticle between the at least one module to another portion of the housing. At least one module is removably connectable to the housing and at least one module has an interface adapted for removably coupling the module to the housing. One module being selectable for connection to the housing from a number of different interchangeable module each having a different predetermined characteristic and being capable of connection to the housing.

    摘要翻译: 一种掩模版操纵装置,其包括能够具有受控环境的壳体,其中至少一个处理模块连接到所述壳体并且能够加工掩模版。 传送装置连接到壳体,用于将光罩在至少一个模块之间传送到壳体的另一部分。 至少一个模块可拆卸地连接到壳体,并且至少一个模块具有适于将模块可移除地耦合到壳体的接口。 一个模块可选择用于从多个不同的可互换模块连接到壳体,每个模块具有不同的预定特性并且能够连接到壳体。

    RETICLE MANIPULATION DEVICE
    39.
    发明申请
    RETICLE MANIPULATION DEVICE 有权
    软件操作设备

    公开(公告)号:US20100292826A1

    公开(公告)日:2010-11-18

    申请号:US12761499

    申请日:2010-04-16

    IPC分类号: G06F19/00

    摘要: A reticle manipulating device comprising a housing capable of having a controlled environment wherein at least one processing module is connected to the housing and capable of processing a reticle. A transport apparatus is, connected to the housing for transporting the reticle between the at least one module to another portion of the housing. At least one module is removably connectable to the housing and at least one module has an interface adapted for removably coupling the module to the housing. One module being selectable for connection to the housing from a number of different interchangeable module each having a different predetermined characteristic and being capable of connection to the housing.

    摘要翻译: 一种掩模版操纵装置,其包括能够具有受控环境的壳体,其中至少一个处理模块连接到所述壳体并且能够加工掩模版。 传送装置连接到壳体,用于将至少一个模块之间的光罩传送到壳体的另一部分。 至少一个模块可拆卸地连接到壳体,并且至少一个模块具有适于将模块可移除地耦合到壳体的接口。 一个模块可选择用于从多个不同的可互换模块连接到壳体,每个模块具有不同的预定特性并且能够连接到壳体。

    INERTIAL WAFER CENTERING END EFFECTOR AND TRANSPORT APPARATUS
    40.
    发明申请
    INERTIAL WAFER CENTERING END EFFECTOR AND TRANSPORT APPARATUS 有权
    惯性中心最终效应器和运输装置

    公开(公告)号:US20080267747A1

    公开(公告)日:2008-10-30

    申请号:US11741416

    申请日:2007-04-27

    IPC分类号: B65H29/00 H01L21/683

    CPC分类号: H01L21/68707

    摘要: A substrate transport apparatus for a processing tool. The apparatus has a drive section, a movable arm, and an end effector. The arm is operably connected to the drive section. The end effector is connected to the movable arm for holding and transporting the substrate in the processing tool. The apparatus has a substrate inertial capture edge grip connected to the end effector and arranged so that the grip effects capture and centering of the substrate onto the end effector from substrate inertia.

    摘要翻译: 一种用于加工工具的基片输送装置。 该装置具有驱动部分,可动臂和端部执行器。 臂可操作地连接到驱动部分。 端部执行器连接到可移动臂,用于在处理工具中保持和传送基板。 该装置具有连接到端部执行器的基板惯性捕获边缘抓握器并且布置成使得抓地效应从基板惯性捕获并定位到端部执行器上。