METHOD AND APPARATUS FOR FORMING COATING LAYER WITH NANO MULTI-LAYER
    39.
    发明申请
    METHOD AND APPARATUS FOR FORMING COATING LAYER WITH NANO MULTI-LAYER 审中-公开
    用纳米多层形成涂层的方法和装置

    公开(公告)号:US20170009331A1

    公开(公告)日:2017-01-12

    申请号:US15174230

    申请日:2016-06-06

    Abstract: Disclosed is a method and apparatus for forming a coating layer using a physical vapor deposition apparatus equipped with a sputtering apparatus and an arc ion plating apparatus, comprising: a first coating step of forming a Mo coating layer on a base material using a the sputtering apparatus and a Mo target and Ar gas; a nitrating step of forming a nitride film forming condition using an arc ion plating apparatus and Ar gas and N2 gas; a second coating step of forming a nano composite coating layer of Cr—Mo—N using the Mo target and Ar gas of the sputtering apparatus and the Ar gas, N2 gas and a Cr source of the arc ion plating apparatus at the same time; and a multi-coating step of forming a multi-layer having alternating Cr—Mo—N nano composite coating layers and Mo coating layers by revolving the base material around a central pivot.

    Abstract translation: 公开了一种使用具有溅射装置和电弧离子镀装置的物理气相沉积装置形成涂层的方法和装置,包括:第一涂覆步骤,使用溅射装置在基材上形成Mo涂层 和Mo靶和Ar气; 使用电弧离子镀装置和Ar气体和N 2气体形成氮化物成膜条件的硝化步骤; 使用溅射装置的Mo靶和Ar气体以及电弧离子电镀装置的Ar气体,N 2气体和Cr源同时形成Cr-Mo-N的纳米复合涂层的第二涂覆步骤; 以及通过使基材围绕中心枢轴旋转而形成具有交替的Cr-Mo-N纳米复合涂层和Mo涂层的多层的多涂层步骤。

    FRICTION COEFFICIENT MEASURING METHOD OF SURFACE OF SPECIMEN
    40.
    发明申请
    FRICTION COEFFICIENT MEASURING METHOD OF SURFACE OF SPECIMEN 审中-公开
    样品表面摩擦系数测量方法

    公开(公告)号:US20160161396A1

    公开(公告)日:2016-06-09

    申请号:US14944276

    申请日:2015-11-18

    CPC classification number: G01N19/02 G01Q30/06 G01Q60/26

    Abstract: A method of measuring a friction coefficient of a surface of a specimen includes: obtaining surface information of the specimen by using an atomic force microscope (AFM); calculating data of a friction coefficient of the surface of the specimen by using the surface information of the specimen; and mapping the data of the friction coefficient of the specimen to an image. The method of measuring a friction coefficient of a surface of a specimen may prevent a probe part of an atomic force microscope from being worn out and secure high reliability of the friction coefficient value by correcting the atomic force microscope using a specimen to be actually measured and measuring a fiction coefficient at the same time.

    Abstract translation: 测定试样表面的摩擦系数的方法包括:使用原子力显微镜(AFM)获得试样的表面信息; 通过使用试样的表面信息计算试样表面的摩擦系数的数据; 并将样本的摩擦系数的数据映射到图像。 测定试样表面的摩擦系数的方法可以防止原子力显微镜的探头部分磨损,并且通过使用要实际测量的试样校正原子力显微镜来确保摩擦系数值的高可靠性, 同时测量小说系数。

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