Knife edge tracking system and method
    31.
    发明申请
    Knife edge tracking system and method 失效
    刀刃追踪系统及方法

    公开(公告)号:US20050110893A1

    公开(公告)日:2005-05-26

    申请号:US10719880

    申请日:2003-11-20

    CPC classification number: G01B11/028

    Abstract: A system and method for automatically and accurately determining the exact location of a knife-edge, such as an edge of an optical shutter, so that it can be controlled automatically. In one aspect the system comprises a mechanized shutter coupled to a shutter controller that can automatically control the shutter's location and movement. According to one implementation of the shutter controller the system takes a first image at a first shutter position. The shutter is then moved a predetermined about and a second image is taken. Then, the pixels of each image are added in the direction perpendicular to the movement of the shutter, so as to provide two one-dimension functions. A linear difference of the functions is then taken, so as to obtain a one-dimensional linear difference function. A peak in the linear difference function is then identified as the location of the shutter.

    Abstract translation: 一种用于自动和准确地确定诸如光学快门的边缘的刀刃的确切位置的系统和方法,使得其可以被自动控制。 在一个方面,系统包括耦合到快门控制器的机械式快门,其可以自动控制快门的位置和移动。 根据快门控制器的一个实施方式,系统在第一快门位置拍摄第一图像。 然后将快门移动预定的大约和第二个图像。 然后,每个图像的像素在与快门的运动垂直的方向上相加,以提供两个一维功能。 然后获取函数的线性差,以获得一维线性差分函数。 然后将线性差函数中的峰值识别为快门的位置。

    Apparatus and method for dynamic diagnostic testing of integrated circuits
    33.
    发明授权
    Apparatus and method for dynamic diagnostic testing of integrated circuits 失效
    集成电路动态诊断测试装置及方法

    公开(公告)号:US06859031B2

    公开(公告)日:2005-02-22

    申请号:US10229181

    申请日:2002-08-26

    CPC classification number: G01R31/318505 G01R31/311 G01R31/318511

    Abstract: Systems and methods consistent with principles of the present invention allow contactless measuring of various kinds of electrical activity within an integrated circuit. The invention can be used for high-bandwidth, at speed testing of various devices on a wafer during the various stages of device processing, or on packaged parts at the end of the manufacturing cycle. Power is applied to the test circuit using conventional mechanical probes or other means, such as CW laser light applied to a photoreceiver provided on the test circuit. The electrical test signal is introduced into the test circuit by stimulating the circuit using a contactless method, such as by directing the output of one or more modelocked lasers onto high-speed receivers on the circuit, or by using a high-speed pulsed diode laser. The electrical activity within the circuit in response to the test signal is sensed by a receiver element, such as a time-resolved photon counting detector, a static emission camera system, or by an active laser probing system. The collected information is used for a variety of purposes, including manufacturing process monitoring, new process qualification, and model verification.

    Abstract translation: 与本发明的原理一致的系统和方法允许在集成电路内的各种电活动的非接触式测量。 本发明可以用于在器件处理的各个阶段期间的晶片上的各种器件的高带宽,速度测试,或者在制造周期结束时的封装部件上。 使用传统的机械探针或其他手段(例如施加到设置在测试电路上的光接收器的CW激光)将功率施加到测试电路。 电测试信号通过使用非接触方法来刺激电路而被引入到测试电路中,例如通过将一个或多个锁模激光器的输出引导到电路上的高速接收器上,或者通过使用高速脉冲二极管激光器 。 响应于测试信号的电路内的电活动由诸如时间分辨光子计数检测器,静态发射照相机系统或主动激光探测系统的接收器元件感测。 收集的信息用于各种目的,包括制造过程监控,新工艺认证和型号验证。

    Time resolved emission spectral analysis system
    34.
    发明申请
    Time resolved emission spectral analysis system 审中-公开
    时间分辨发射光谱分析系统

    公开(公告)号:US20050002028A1

    公开(公告)日:2005-01-06

    申请号:US10613592

    申请日:2003-07-02

    CPC classification number: G01R31/311

    Abstract: A system for temporal and spectral resolved detection of photon emission from an integrated circuit is disclosed. A DUT is stimulated by a conventional ATE, so that its active devices emit light. The signal from the ATE is also sent to the system's computer as a synchronization signal. The light emitted from the switching devices is passed through a wavelength filter. Selected bands of wavelengths are then passed to respective detector(s) and the detector(s) response with respect to the time correlated ATE stimulus is studied.

    Abstract translation: 公开了一种用于从集成电路进行光子发射的时间和光谱解析检测的系统。 DUT由传统的ATE激励,使其有源器件发光。 来自ATE的信号也作为同步信号发送到系统的计算机。 从开关装置发出的光通过波长滤波器。 然后将所选波长的波段传递到相应的检测器,并且研究相对于时间相关的ATE刺激的检测器响应。

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