Confocal scanning microscope using two Nipkow disks
    35.
    发明授权
    Confocal scanning microscope using two Nipkow disks 有权
    共焦扫描显微镜使用两个Nipkow磁盘

    公开(公告)号:US07388712B2

    公开(公告)日:2008-06-17

    申请号:US11106569

    申请日:2005-04-15

    IPC分类号: G02B21/00 G02B26/10

    CPC分类号: G02B21/06 G02B21/0044

    摘要: A confocal scanning microscope using a Nipkow disk prevents deterioration of performance in an optical axis direction while maintaining a high measurement speed. The confocal scanning microscope includes a light source, an illuminating device to pass the light from the light source toward a certain direction, and two Nipkow disks each having slit-shaped apertures formed thereon such that the light incident from the illuminating device travels in a form of light which passed through a single aperture. In addition, the confocal scanning microscope includes a first optical system to form an image on a sample by the light passed through the Nipkow disks, and a second optical system to form a second image by the light reflected from the sample and passed through the Nipkow disks.

    摘要翻译: 使用Nipkow盘的共焦扫描显微镜可以防止光轴方向的性能劣化,同时保持高测量速度。 共焦扫描显微镜包括光源,将来自光源的光朝向某一方向通过的照明装置,以及形成有狭缝状孔的两个Nipkow盘,使得从照明装置入射的光以形式 的光通过单个孔径。 此外,共聚焦扫描显微镜包括:第一光学系统,用于通过通过Nipkow盘的光在样品上形成图像;以及第二光学系统,通过从样品反射的光形成第二图像,并通过Nipkow 磁盘。

    Traffic information providing apparatus and operating method using automatically scrolling display screen
    37.
    发明申请
    Traffic information providing apparatus and operating method using automatically scrolling display screen 审中-公开
    交通信息提供装置和操作方法使用自动滚动显示画面

    公开(公告)号:US20070153704A1

    公开(公告)日:2007-07-05

    申请号:US11606232

    申请日:2006-11-29

    IPC分类号: H04L12/26

    摘要: The present invention relates to a traffic information providing apparatus and an operating method. The method includes receiving real time traffic information, storing sectional traffic information, dividing screen information currently displayed on the display unit into unit areas, selecting the unit areas sequentially, detecting additional traffic information on the corresponding unit areas from the sectional traffic information stored in the step of storing according to information on the selection, and displaying the additional traffic information. Accordingly, the present invention aims to decrease the danger of traffic accidents and provides convenient selection of search location for real time traffic information to a user.

    摘要翻译: 交通信息提供装置及操作方法技术领域本发明涉及一种交通信息提供装置和操作方法。 该方法包括接收实时交通信息,存储分段交通信息,将显示单元上当前显示的屏幕信息划分为单元区域,依次选择单位区域,从存储在该单元区域中的分段交通信息中检测相应单位区域上的附加交通信息 根据关于选择的信息进行存储的步骤,以及显示附加的交通信息。 因此,本发明旨在减少交通事故的危险,并且为用户提供方便的实时交通信息搜索位置的选择。

    Dual bias frequency plasma reactor with feedback control of E.S.C. voltage using wafer voltage measurement at the bias supply output
    38.
    发明申请
    Dual bias frequency plasma reactor with feedback control of E.S.C. voltage using wafer voltage measurement at the bias supply output 有权
    具有E.S.C.反馈控制的双偏压等离子体反应器 电压使用晶圆电压测量在偏置电源输出

    公开(公告)号:US20060256499A1

    公开(公告)日:2006-11-16

    申请号:US11127036

    申请日:2005-05-10

    IPC分类号: H01T23/00

    摘要: A plasma reactor has a dual frequency plasma RF bias power supply furnishing RF bias power comprising first and second frequency components, f(1), f(2), respectively, and an RF power path having an input end coupled to the plasma RF bias power supply and an output end coupled to the wafer support pedestal, and sensor circuits providing measurement signals representing first and second frequency components of a measured voltage and first and second frequency components of a measured current near the input end of the RF power path. The reactor further includes a processor for providing first and second frequency components of a wafer voltage signal as, respectively, a first sum of the first frequency components of the measured voltage and measured current multiplied by first and second coefficients respectively, and a second sum of the second frequency components of the measured voltage and measured current multiplied by third and fourth coefficients, respectively. A processor produces a D.C. wafer voltage by combining D.C. components of the first and second frequency components of the wafer voltage with an intermodulation correction factor that is the product of the D.C. components of the first and second components of the wafer voltage raised to a selected power and multiplied by a selected coefficient.

    摘要翻译: 等离子体反应器具有双频等离子体RF偏压电源,其分别提供包括第一和第二频率分量f(1),f(2)的RF偏置功率,以及具有耦合到等离子体RF偏置的输入端的RF功率路径 电源和耦合到晶片支撑基座的输出端,以及传感器电路,其提供表示测量电压的第一和第二频率分量以及在RF功率路径的输入端附近的测量电流的第一和第二频率分量的测量信号。 反应器还包括处理器,用于分别提供晶片电压信号的第一和第二频率分量,分别为测量电压的第一频率分量和测量电流乘以第一和第二系数的第一和,以及第二和 测量电压和测量电流的第二频率分量分别乘以第三和第四系数。 处理器通过将晶片电压的第一和第二频率分量的DC分量与作为晶片电压的第一和第二分量的DC分量升高到所选功率的互调校正因子相结合来产生DC晶片电压 并乘以所选系数。

    Method and apparatus for etch passivating and etching a substrate
    39.
    发明授权
    Method and apparatus for etch passivating and etching a substrate 失效
    蚀刻钝化和蚀刻衬底的方法和设备

    公开(公告)号:US06489248B2

    公开(公告)日:2002-12-03

    申请号:US09938208

    申请日:2001-08-23

    IPC分类号: H01L2100

    CPC分类号: H01L21/67069

    摘要: A substrate having a patterned mask and exposed openings is provided in a process chamber having process electrodes. In a plasma ignition stage, a process gas is provided in the process chamber and is energized by maintaining the process electrodes at a plasma ignition bias power level. In an etch-passivating stage, an etch-passivating material is formed on at least portions of the substrate by maintaining the process electrodes at an etch-passivating bias power level. In an etching stage, the exposed openings on the substrate are etched by maintaining the process electrodes at an etching bias power level.

    摘要翻译: 具有图案化掩模和暴露开口的基板设置在具有工艺电极的处理室中。 在等离子体点火阶段,处理气体被提供在处理室中,并且通过将处理电极保持在等离子体点火偏压功率水平而被通电。 在蚀刻钝化阶段,通过将处理电极保持在蚀刻钝化偏压功率水平,在衬底的至少部分上形成蚀刻钝化材料。 在蚀刻阶段,通过将处理电极保持在蚀刻偏压功率水平来蚀刻衬底上的暴露的开口。

    Water treatment apparatus having meshed tubes provided with cilia and water treatment method using the same
    40.
    发明授权
    Water treatment apparatus having meshed tubes provided with cilia and water treatment method using the same 有权
    具有网眼管的水处理装置,其具有使用其的纤维和水处理方法

    公开(公告)号:US08475653B2

    公开(公告)日:2013-07-02

    申请号:US12834372

    申请日:2010-07-12

    IPC分类号: C02F3/06 C02F3/10

    CPC分类号: C02F3/101 Y02W10/15

    摘要: A water treatment apparatus includes a plurality of meshed tubes made of synthetic yarn and provided with cilia; a plurality of tube stack cages containing the meshed tubes; and an aeration diffuser positioned between the tube stack cages and configured to provide air so that to-be-treated influent water moves to the tube stack cages. The hollow interior of the filter media, i.e. meshed tubes, enables water to move in any direction, and the high porosity maximizes the area for filtering of suspended solids and attachment of microorganisms. The resulting efficiency of removal of suspended solids and soluble organic material is far greater than conventional methods. Arrangement of diffusers in the middle of the reaction tank and between the tube stack cages and aeration by them result in perfect mixing in the reaction tank. The load of suspended solids and soluble organic materials is evenly distributed over the entire filer media.

    摘要翻译: 水处理装置包括由合成纱线制成并具有纤维的多个网眼管; 包含所述网状管的多个管堆笼; 以及曝气扩散器,其位于所述管堆叠笼之间并且构造成提供空气,使得待处理的流入水移动到所述管堆笼笼。 过滤介质的中空内部,即网状管,使得水能够在任何方向移动,并且高孔隙率使用于过滤悬浮固体和附着微生物的面积最大化。 所得到的悬浮固体和可溶性有机材料的去除效率远远大于常规方法。 在反应槽中间和管堆笼之间以及它们通气之间的扩散器的布置导致反应罐中的完美混合。 悬浮固体和可溶性有机材料的负载均匀分布在整个过滤介质上。