Laser patterning process
    32.
    发明授权
    Laser patterning process 有权
    激光图案化工艺

    公开(公告)号:US08946593B2

    公开(公告)日:2015-02-03

    申请号:US12688327

    申请日:2010-01-15

    摘要: In a laser irradiation device, a patterning method and a method of fabricating an Organic Light Emitting Display (OLED) using the same. The laser irradiation device includes a light source, a mask, a projection lens, and a Fresnel lens formed at a predetermined portion of the mask to change an optical path. When an organic layer pattern is formed using the laser irradiation device, laser radiation is irradiated onto a region of an organic layer, which is to be cut, and the laser radiation is appropriately irradiated onto a region of the organic layer, which is to be separated from a donor substrate. The laser radiation irradiated onto an edge of the organic layer pattern has a laser energy density greater than that of the laser radiation irradiated onto other portions of the organic layer pattern. As a result, it is possible to form a uniform organic layer pattern and reduce damage of the organic layer.

    摘要翻译: 在激光照射装置,图案化方法和使用其的有机发光显示器(OLED)的制造方法中, 激光照射装置包括形成在掩模的预定部分处的光源,掩模,投影透镜和菲涅耳透镜,以改变光路。 当使用激光照射装置形成有机层图案时,将激光照射到要切割的有机层的区域上,并将激光辐射适当地照射到有机层的区域 与供体底物分离。 照射到有机层图案的边缘上的激光辐射的激光能量密度大于照射到有机层图案的其它部分上的激光辐射的激光能量密度。 结果,可以形成均匀的有机层图案并减少有机层的损伤。

    Mask for LITI and LITI method using the same
    33.
    发明授权
    Mask for LITI and LITI method using the same 有权
    LITI和LITI方法使用相同的掩码

    公开(公告)号:US07776493B2

    公开(公告)日:2010-08-17

    申请号:US11509574

    申请日:2006-08-25

    IPC分类号: G03F1/00

    摘要: A mask for LITI and a LITI method using the same wherein the mask includes patterns arranged in a direction perpendicular to a beam scanning direction and are arranged so that increasingly longer patterns are located towards the edge of the mask than in or near the center.

    摘要翻译: 用于LITI的掩模和使用其的LITI方法,其中掩模包括沿垂直于光束扫描方向布置的图案,并且布置成使得越来越长的图案朝向掩模的边缘位于中心或靠近中心的位置。

    LASER IRRADIATION DEVICE, PATTERNING METHOD AND METHOD OF FABRICATING ORGANIC LIGHT EMITTING DISPLAY (OLED) USING THE PATTERNING METHOD
    34.
    发明申请
    LASER IRRADIATION DEVICE, PATTERNING METHOD AND METHOD OF FABRICATING ORGANIC LIGHT EMITTING DISPLAY (OLED) USING THE PATTERNING METHOD 有权
    激光辐射装置,使用方式方法制造有机发光显示器(OLED)的方法和方法

    公开(公告)号:US20100117093A1

    公开(公告)日:2010-05-13

    申请号:US12688327

    申请日:2010-01-15

    摘要: In a laser irradiation device, a patterning method and a method of fabricating an Organic Light Emitting Display (OLED) using the same. The laser irradiation device includes a light source, a mask, a projection lens, and a Fresnel lens formed at a predetermined portion of the mask to change an optical path. When an organic layer pattern is formed using the laser irradiation device, laser radiation is irradiated onto a region of an organic layer, which is to be cut, and the laser radiation is appropriately irradiated onto a region of the organic layer, which is to be separated from a donor substrate. The laser radiation irradiated onto an edge of the organic layer pattern has a laser energy density greater than that of the laser radiation irradiated onto other portions of the organic layer pattern. As a result, it is possible to form a uniform organic layer pattern and reduce damage of the organic layer.

    摘要翻译: 在激光照射装置,图案化方法和使用其的有机发光显示器(OLED)的制造方法中, 激光照射装置包括形成在掩模的预定部分处的光源,掩模,投影透镜和菲涅耳透镜,以改变光路。 当使用激光照射装置形成有机层图案时,将激光照射到要切割的有机层的区域上,并将激光辐射适当地照射到有机层的区域 与供体底物分离。 照射到有机层图案的边缘上的激光辐射的激光能量密度大于照射到有机层图案的其它部分上的激光辐射的激光能量密度。 结果,可以形成均匀的有机层图案并减少有机层的损伤。

    Laser irradiation apparatus and method of fabricating organic light emitting display using the same
    35.
    发明授权
    Laser irradiation apparatus and method of fabricating organic light emitting display using the same 有权
    激光照射装置及使用其制造有机发光显示器的方法

    公开(公告)号:US07525563B2

    公开(公告)日:2009-04-28

    申请号:US11020659

    申请日:2004-12-27

    IPC分类号: B41J2/47

    摘要: A laser irradiation apparatus and method of fabricating an organic light emitting display using the same are provided. The laser irradiation apparatus includes: a laser generator; a mask having means for changing a propagation path of a laser beam; and a projection lens. The method of fabricating an organic light emitting display includes: irradiating a laser beam on an edge of an irradiated region of a donor substrate using the laser irradiation apparatus with high intensity to form an organic layer pattern on a substrate. The laser beam having low intensity can perform a transfer process to improve laser beam efficiency. In addition, it is possible to reduce damage on the organic layer, and improve quality of the transferred organic layer pattern.

    摘要翻译: 提供一种激光照射装置及使用其的有机发光显示器的制造方法。 激光照射装置包括:激光发生器; 具有用于改变激光束的传播路径的装置的掩模; 和投影透镜。 制造有机发光显示器的方法包括:使用激光照射装置以高强度照射激光束在施主衬底的照射区域的边缘上,以在衬底上形成有机层图案。 具有低强度的激光束可以进行转印处理以提高激光束效率。 另外,可以减少有机层的损伤,提高转印有机层图案的质量。

    Mask for LITI and LITI method using the same
    36.
    发明申请
    Mask for LITI and LITI method using the same 有权
    LITI和LITI方法使用相同的掩码

    公开(公告)号:US20070048436A1

    公开(公告)日:2007-03-01

    申请号:US11509574

    申请日:2006-08-25

    IPC分类号: B05D5/12 G03F7/00

    摘要: A mask for LITI and a LITI method using the same wherein the mask includes patterns arranged in a direction perpendicular to a beam scanning direction and are arranged so that increasingly longer patterns are located towards the edge of the mask than in or near the center.

    摘要翻译: 用于LITI的掩模和使用其的LITI方法,其中掩模包括沿垂直于光束扫描方向布置的图案,并且布置成使得越来越长的图案朝向掩模的边缘位于中心或靠近中心的位置。

    Laser irradiation device, patterning method and method of fabricating organic light emitting display (OLED) using the patterning method
    37.
    发明申请
    Laser irradiation device, patterning method and method of fabricating organic light emitting display (OLED) using the patterning method 有权
    激光照射装置,图案化方法和使用图案化方法制造有机发光显示器(OLED)的方法

    公开(公告)号:US20060205101A1

    公开(公告)日:2006-09-14

    申请号:US11286411

    申请日:2005-11-25

    IPC分类号: H01L21/00 H01L21/336

    摘要: In a laser irradiation device, a patterning method and a method of fabricating an Organic Light Emitting Display (OLED) using the same. The laser irradiation device includes a light source, a mask, a projection lens, and a Fresnel lens formed at a predetermined portion of the mask to change an optical path. When an organic layer pattern is formed using the laser irradiation device, laser radiation is irradiated onto a region of an organic layer, which is to be cut, and the laser radiation is appropriately irradiated onto a region of the organic layer, which is to be separated from a donor substrate. The laser radiation irradiated onto an edge of the organic layer pattern has a laser energy density greater than that of the laser radiation irradiated onto other portions of the organic layer pattern. As a result, it is possible to form a uniform organic layer pattern and reduce damage of the organic layer.

    摘要翻译: 在激光照射装置,图案化方法和使用其的有机发光显示器(OLED)的制造方法中, 激光照射装置包括形成在掩模的预定部分处的光源,掩模,投影透镜和菲涅耳透镜,以改变光路。 当使用激光照射装置形成有机层图案时,将激光照射到要切割的有机层的区域上,并将激光辐射适当地照射到有机层的区域 与供体底物分离。 照射到有机层图案的边缘上的激光辐射的激光能量密度大于照射到有机层图案的其它部分上的激光辐射的激光能量密度。 结果,可以形成均匀的有机层图案并减少有机层的损伤。

    Laser irradiation apparatus and method of fabricating organic light emitting display using the same
    39.
    发明授权
    Laser irradiation apparatus and method of fabricating organic light emitting display using the same 有权
    激光照射装置及使用其制造有机发光显示器的方法

    公开(公告)号:US07999835B2

    公开(公告)日:2011-08-16

    申请号:US12406640

    申请日:2009-03-18

    IPC分类号: B41J2/47

    摘要: A laser irradiation apparatus and method of fabricating an organic light emitting display using the same are provided. The laser irradiation apparatus includes: a laser generator; a mask having means for changing a propagation path of a laser beam; and a projection lens. The method of fabricating an organic light emitting display includes: irradiating a laser beam on an edge of an irradiated region of a donor substrate using the laser irradiation apparatus with high intensity to form an organic layer pattern on a substrate. The laser beam having low intensity can perform a transfer process to improve laser beam efficiency. In addition, it is possible to reduce damage on the organic layer, and improve quality of the transferred organic layer pattern.

    摘要翻译: 提供一种激光照射装置及使用其的有机发光显示器的制造方法。 激光照射装置包括:激光发生器; 具有用于改变激光束的传播路径的装置的掩模; 和投影透镜。 制造有机发光显示器的方法包括:使用激光照射装置以高强度照射激光束在施主衬底的照射区域的边缘上,以在衬底上形成有机层图案。 具有低强度的激光束可以进行转印处理以提高激光束效率。 此外,可以减少有机层的损伤,提高转印的有机层图案的质量。