Method of fabricating organic light emitting display
    1.
    发明授权
    Method of fabricating organic light emitting display 有权
    制造有机发光显示器的方法

    公开(公告)号:US08617329B2

    公开(公告)日:2013-12-31

    申请号:US11020660

    申请日:2004-12-27

    IPC分类号: B32B37/00 B41J2/447

    摘要: Provided is a method of fabricating an organic light emitting display. The method includes forming an organic layer pattern on a substrate by irradiating a predetermined region of a donor substrate with a laser beam using a laser irradiation apparatus, the laser irradiation apparatus having a spatial light modulator (SLM). The spatial light modulator is used to form the organic layer pattern using the LITI method. Accordingly, it is possible to adjust various types of incident light to homogeneous and to have a desired profile. Therefore, there is provided a method of fabricating an organic light emitting display which is capable of forming an organic layer pattern without using a mask.

    摘要翻译: 提供一种制造有机发光显示器的方法。 该方法包括通过使用激光照射装置用激光束照射供体基板的预定区域来在基板上形成有机层图案,该激光照射装置具有空间光调制器(SLM)。 空间光调制器用于使用LITI法形成有机层图案。 因此,可以将各种类型的入射光调整为均匀并具有所需的轮廓。 因此,提供了一种能够在不使用掩模的情况下形成有机层图案的有机发光显示器的制造方法。

    Method of fabricating organic light emitting display
    2.
    发明授权
    Method of fabricating organic light emitting display 失效
    制造有机发光显示器的方法

    公开(公告)号:US07598115B2

    公开(公告)日:2009-10-06

    申请号:US11214059

    申请日:2005-08-30

    IPC分类号: H01L51/40

    摘要: A method of fabricating a donor substrate for a laser induced thermal imaging (LITI) process. A base substrate is prepared. A light-to-heat conversion layer is formed on the base substrate. A buffer layer is formed on the light-to-heat conversion layer. The surface roughness of the buffer layer is increased by treating the surface of the buffer layer. A transfer layer is formed on the surface-treated buffer layer. By using the donor substrate, a patterning process can be performed better during the fabrication of the OLED.

    摘要翻译: 一种制造用于激光诱导热成像(LITI)工艺的供体衬底的方法。 制备基底。 在基底基板上形成光热转换层。 在光热转换层上形成缓冲层。 通过处理缓冲层的表面来增加缓冲层的表面粗糙度。 在表面处理的缓冲层上形成转印层。 通过使用施主衬底,可以在OLED的制造期间更好地执行图案化工艺。

    Laser induced thermal imaging apparatus, laser induced thermal imaging method using the apparatus, and method of fabricating organic light emitting display using the apparatus
    4.
    发明授权
    Laser induced thermal imaging apparatus, laser induced thermal imaging method using the apparatus, and method of fabricating organic light emitting display using the apparatus 失效
    激光感应热成像装置,使用该装置的激光感应热成像方法以及使用该装置制造有机发光显示器的方法

    公开(公告)号:US07315319B2

    公开(公告)日:2008-01-01

    申请号:US11020668

    申请日:2004-12-27

    IPC分类号: B41J2/435

    CPC分类号: H01L51/0013

    摘要: A laser induced thermal imaging apparatus, and a laser induced thermal imaging method and a method of fabricating an organic light emitting display using the apparatus are provided. The laser induced thermal imaging apparatus includes a chuck for fixing an acceptor substrate. A lamination unit for laminating a donor film on the acceptor substrate is located on the chuck. The lamination unit includes a body having a cavity, a gas injection port for injecting a compression gas into the cavity and a gas discharge port for discharging the gas injected into the cavity onto the substrate. A laser irradiator for irradiating a laser beam on the laminated donor film through the lamination unit is located on the lamination unit.

    摘要翻译: 提供激光感应热成像装置,激光感应热成像方法和使用该装置制造有机发光显示器的方法。 激光诱导热成像装置包括用于固定受主衬底的卡盘。 用于在受主基板上层叠供体膜的层叠单元位于卡盘上。 层叠单元包括具有空腔的本体,用于将压缩气体注入到空腔中的气体注入口和用于将注入到空腔中的气体排放到基板上的气体排出口。 用于通过层叠单元将激光束照射在层叠的供体膜上的激光照射器位于层压单元上。

    Method of fabricating organic light emitting display
    5.
    发明授权
    Method of fabricating organic light emitting display 有权
    制造有机发光显示器的方法

    公开(公告)号:US07303850B2

    公开(公告)日:2007-12-04

    申请号:US11020669

    申请日:2004-12-27

    IPC分类号: H01J9/227

    CPC分类号: H01L51/0013

    摘要: A method of fabricating an organic light emitting display is provided. The method includes repeatedly scanning a laser beam over a predetermined region of a donor substrate with multi-lines in one step using a galvanometer to form an organic layer pattern. The method of the present invention is capable of reducing process time required to form the organic layer pattern and lowering manufacturing cost by repeating multi-line scanning in one step through the laser beam using the galvanometer, when the organic layer pattern is formed using an LITI method.

    摘要翻译: 提供一种制造有机发光显示器的方法。 该方法包括使用电流计在一个步骤中多次扫描在施主衬底的预定区域上的激光束,以形成有机层图案。 本发明的方法能够通过使用电流计通过激光束在一个步骤中重复多行扫描来减少形成有机层图案所需的处理时间,而当使用LITI形成有机层图案时 方法。

    Laser induced thermal imaging apparatus, laser induced thermal imaging method using the apparatus, and method of fabricating organic light emitting display using the apparatus
    6.
    发明申请
    Laser induced thermal imaging apparatus, laser induced thermal imaging method using the apparatus, and method of fabricating organic light emitting display using the apparatus 失效
    激光感应热成像装置,使用该装置的激光感应热成像方法以及使用该装置制造有机发光显示器的方法

    公开(公告)号:US20060132589A1

    公开(公告)日:2006-06-22

    申请号:US11020668

    申请日:2004-12-27

    IPC分类号: B41J2/47

    CPC分类号: H01L51/0013

    摘要: A laser induced thermal imaging apparatus, and a laser induced thermal imaging method and a method of fabricating an organic light emitting display using the apparatus are provided. The laser induced thermal imaging apparatus includes a chuck for fixing an acceptor substrate. A lamination unit for laminating a donor film on the acceptor substrate is located on the chuck. The lamination unit includes a body having a cavity, a gas injection port for injecting a compression gas into the cavity and a gas discharge port for discharging the gas injected into the cavity onto the substrate. A laser irradiator for irradiating a laser beam on the laminated donor film through the lamination unit is located on the lamination unit.

    摘要翻译: 提供激光感应热成像装置,激光感应热成像方法和使用该装置制造有机发光显示器的方法。 激光诱导热成像装置包括用于固定受主衬底的卡盘。 用于在受主基板上层叠供体膜的层叠单元位于卡盘上。 层叠单元包括具有空腔的本体,用于将压缩气体注入到空腔中的气体注入口和用于将注入到空腔中的气体排出到基板上的气体排出口。 用于通过层叠单元将激光束照射在层叠的供体膜上的激光照射器位于层压单元上。

    Laser irradiation device and laser induced thermal imaging method

    公开(公告)号:US09272364B2

    公开(公告)日:2016-03-01

    申请号:US11358314

    申请日:2006-02-22

    摘要: A laser irradiation device includes a laser generator for patterning and a laser generator for preheating. A laser induced thermal imaging (LITI) method, includes preparing an acceptor substrate, laminating a donor substrate on the acceptor substrate, and irradiating a laser beam onto a predetermined region of the donor substrate and carrying out transfer using a laser irradiation device having a laser generator for patterning and a laser generator for preheating. Advantageously, a laser beam having high intensity generated by the laser generator for patterning is used to prevent the transfer layer from being degraded, and a laser beam generated by the laser generator for preheating is simultaneously used for preheating so that an edge open failure does not occur and the transfer can be readily carried out even in a portion having a step of the acceptor substrate.

    Laser irradiation apparatus and method of fabricating organic light emitting display using the same
    10.
    发明授权
    Laser irradiation apparatus and method of fabricating organic light emitting display using the same 有权
    激光照射装置及使用其制造有机发光显示器的方法

    公开(公告)号:US07542063B2

    公开(公告)日:2009-06-02

    申请号:US11020670

    申请日:2004-12-27

    IPC分类号: B41J2/47

    摘要: Provided are a laser irradiation apparatus and method of fabricating an organic light emitting display using the same. The laser irradiation apparatus includes a mask positioned below the laser generator, and the mask is patterned such that lengths of an upper portion and a lower portion of a mask pattern are patterned longer than a length of a middle portion of the mask pattern with respect to the scanning direction. The method of fabricating an organic light emitting display includes scanning a laser beam on a predetermined region of the donor substrate using the laser irradiation apparatus to form an organic layer pattern on the substrate. When the organic layer pattern is formed using a laser induced thermal imaging (LITI) method, the transfer may be carried out using a laser beam having low energy, laser beam efficiency may be enhanced, the organic layer may be less damaged, and the quality of the organic layer pattern to be transferred may also be enhanced.

    摘要翻译: 提供一种激光照射装置和使用其的有机发光显示器的制造方法。 激光照射装置包括位于激光发生器下方的掩模,并且掩模被图案化,使得掩模图案的上部和下部的长度被图案化为比掩模图案的中间部分的长度相对于 扫描方向。 制造有机发光显示器的方法包括使用激光照射装置在施主衬底的预定区域上扫描激光束,以在衬底上形成有机层图案。 当使用激光诱导热成像(LITI)方法形成有机层图案时,可以使用具有低能量的激光束进行转印,可以提高激光束效率,有机层可能损坏较小,并且质量 的有机层图案也可以被增强。