摘要:
Provided is a method of fabricating an organic light emitting display. The method includes forming an organic layer pattern on a substrate by irradiating a predetermined region of a donor substrate with a laser beam using a laser irradiation apparatus, the laser irradiation apparatus having a spatial light modulator (SLM). The spatial light modulator is used to form the organic layer pattern using the LITI method. Accordingly, it is possible to adjust various types of incident light to homogeneous and to have a desired profile. Therefore, there is provided a method of fabricating an organic light emitting display which is capable of forming an organic layer pattern without using a mask.
摘要:
A method of fabricating a donor substrate for a laser induced thermal imaging (LITI) process. A base substrate is prepared. A light-to-heat conversion layer is formed on the base substrate. A buffer layer is formed on the light-to-heat conversion layer. The surface roughness of the buffer layer is increased by treating the surface of the buffer layer. A transfer layer is formed on the surface-treated buffer layer. By using the donor substrate, a patterning process can be performed better during the fabrication of the OLED.
摘要:
A donor substrate for a laser induced thermal imaging method and an organic electroluminescent display device fabricated using the same are provided. The donor substrate may be constructed with base film; a light-to-heat conversion layer formed on the base film; a buffer layer formed on the entire surface of the light-to-heat conversion layer; a metal layer formed on the buffer layer; and a transfer layer formed of an organic material and formed on the metal layer, thereby enhancing the characteristics of a transfer pattern by transferring a small molecular material using the laser induced thermal imaging method.
摘要:
A laser induced thermal imaging apparatus, and a laser induced thermal imaging method and a method of fabricating an organic light emitting display using the apparatus are provided. The laser induced thermal imaging apparatus includes a chuck for fixing an acceptor substrate. A lamination unit for laminating a donor film on the acceptor substrate is located on the chuck. The lamination unit includes a body having a cavity, a gas injection port for injecting a compression gas into the cavity and a gas discharge port for discharging the gas injected into the cavity onto the substrate. A laser irradiator for irradiating a laser beam on the laminated donor film through the lamination unit is located on the lamination unit.
摘要:
A method of fabricating an organic light emitting display is provided. The method includes repeatedly scanning a laser beam over a predetermined region of a donor substrate with multi-lines in one step using a galvanometer to form an organic layer pattern. The method of the present invention is capable of reducing process time required to form the organic layer pattern and lowering manufacturing cost by repeating multi-line scanning in one step through the laser beam using the galvanometer, when the organic layer pattern is formed using an LITI method.
摘要:
A laser induced thermal imaging apparatus, and a laser induced thermal imaging method and a method of fabricating an organic light emitting display using the apparatus are provided. The laser induced thermal imaging apparatus includes a chuck for fixing an acceptor substrate. A lamination unit for laminating a donor film on the acceptor substrate is located on the chuck. The lamination unit includes a body having a cavity, a gas injection port for injecting a compression gas into the cavity and a gas discharge port for discharging the gas injected into the cavity onto the substrate. A laser irradiator for irradiating a laser beam on the laminated donor film through the lamination unit is located on the lamination unit.
摘要:
A donor substrate for a laser induced thermal imaging method and an organic light emitting display manufactured using the same are provided. A laser induced thermal imaging apparatus includes a stage grounded by a grounding means, and a method of fabricating an organic light emitting display is capable of controlling static electricity which may be built up while an organic layer is formed using the apparatus.
摘要:
A laser irradiation device includes a laser generator for patterning and a laser generator for preheating. A laser induced thermal imaging (LITI) method, includes preparing an acceptor substrate, laminating a donor substrate on the acceptor substrate, and irradiating a laser beam onto a predetermined region of the donor substrate and carrying out transfer using a laser irradiation device having a laser generator for patterning and a laser generator for preheating. Advantageously, a laser beam having high intensity generated by the laser generator for patterning is used to prevent the transfer layer from being degraded, and a laser beam generated by the laser generator for preheating is simultaneously used for preheating so that an edge open failure does not occur and the transfer can be readily carried out even in a portion having a step of the acceptor substrate.
摘要:
An Organic Light Emitting Display (OLED) and its fabrication method has a pixel defining layer provided on a first electrode which is formed with a gas vent groove to allow gas to vent when the pixel defining layer is being formed, so that gas is not left in a pixel but vented when a donor film is laminated by a Laser-Induced Thermal Imaging (LITI) method, thereby decreasing edge open failures.
摘要:
Provided are a laser irradiation apparatus and method of fabricating an organic light emitting display using the same. The laser irradiation apparatus includes a mask positioned below the laser generator, and the mask is patterned such that lengths of an upper portion and a lower portion of a mask pattern are patterned longer than a length of a middle portion of the mask pattern with respect to the scanning direction. The method of fabricating an organic light emitting display includes scanning a laser beam on a predetermined region of the donor substrate using the laser irradiation apparatus to form an organic layer pattern on the substrate. When the organic layer pattern is formed using a laser induced thermal imaging (LITI) method, the transfer may be carried out using a laser beam having low energy, laser beam efficiency may be enhanced, the organic layer may be less damaged, and the quality of the organic layer pattern to be transferred may also be enhanced.