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公开(公告)号：US06673521B2
公开(公告)日：2004-01-06
申请号：US09735404
申请日：2000-12-12
IPC分类号： G03F726
摘要： A process of silylation of object surfaces using a mixture of a silylation agent in admixture with an inert liquified gas, such as carbon dioxide.
摘要翻译： 使用甲硅烷基化剂与惰性液化气体如二氧化碳混合的混合物对甲基化表面的方法。
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公开(公告)号：US06656666B2
公开(公告)日：2003-12-02
申请号：US09742401
申请日：2000-12-22
IPC分类号： G03F700
CPC分类号： G03F7/30 , H01L21/0274
摘要： The invention relates generally to photolithographic techniques, and particularly, but not by way of limitation, to a method for preventing the collapse of the image pattern during the stage of drying the image. The invention also relates to structures fabricated using the inventive method.
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公开(公告)号：US06875286B2
公开(公告)日：2005-04-05
申请号：US10320836
申请日：2002-12-16
申请人： John M. Cotte , Catherine Ivers , Kenneth J. McCullough , Wayne M. Moreau , Robert J. Purtell , John P. Simons , William A. Syverson , Charles J. Taft
发明人： John M. Cotte , Catherine Ivers , Kenneth J. McCullough , Wayne M. Moreau , Robert J. Purtell , John P. Simons , William A. Syverson , Charles J. Taft
IPC分类号： H01L21/304 , B08B7/00 , C25F1/00 , H01L21/30 , H01L21/302 , H01L21/306
CPC分类号： B08B7/0021 , H01L21/02063 , Y10S134/902
摘要： A method and apparatus are provided for removing solid and/or liquid residues from electronic components such as semiconductor wafers utilizing liquid or supercritical carbon dioxide which is solidified on the surface of the wafer and then vaporized and removed from the system. In a preferred embodiment the solidification and vaporizing steps are repeated (cycled) before removal of the CO2 from the vessel. The residues are carried away with the vaporized carbon dioxide.
摘要翻译： 提供了一种方法和装置，用于从诸如半导体晶片的电子部件中除去固体和/或液体残留物，其中所述液体或超临界二氧化碳在晶片的表面上固化，然后蒸发并从系统中除去。 在优选的实施方案中，在从容器中除去CO 2之前重复（循环）固化和蒸发步骤。 残余物被蒸发的二氧化碳带走。
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公开(公告)号：US06561220B2
公开(公告)日：2003-05-13
申请号：US09840611
申请日：2001-04-23
IPC分类号： F17D104
CPC分类号： H01L21/67017 , Y10T137/85994 , Y10T137/86035
摘要： A method and an apparatus, the apparatus including appropriate valves and conduits, for increasing throughput in pressurized fluid processing including storing in a storage chamber of the apparatus a quantity of fluid at a pressure higher than a pressure at which an operation is to take place, while a processing chamber is depressurized to allow reception of a new object; sealing the processing chamber; and allowing fluid stored in the storage chamber to pass to the processing chamber to re-pressurize the processing chamber before performing the operation. The fluid may be preheated in the storage chamber to further reduce processing times.
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公开(公告)号：US09245294B1
公开(公告)日：2016-01-26
申请号：US13619471
申请日：2012-09-14
申请人： Amy Bates , Sean M. Scott , Brent Allen Vincent , John P. Simons , Maren M. Costa , Douglas J. Gradt , Eva Manolis , Gianna Lise Puerini
发明人： Amy Bates , Sean M. Scott , Brent Allen Vincent , John P. Simons , Maren M. Costa , Douglas J. Gradt , Eva Manolis , Gianna Lise Puerini
CPC分类号： G06F17/30905 , G06F3/04842 , G06F17/30893 , G06F17/30896 , G06Q30/0601 , G06Q30/0603 , G06Q30/0641 , G06Q30/0643
摘要： Disclosed are various embodiments for providing separate views for items. A network page providing a summary view of at least a portion of a pool of items is encoded in a computing resource for rendering by a client computing device. A window superimposed over at least a portion of the summary view is rendered by the client computing device. The window provides a separate view for examination of one item from the pool of items, and the window facilitates a serial examination of the pool of items.
摘要翻译： 公开了用于为物品提供单独视图的各种实施例。 提供项目池的至少一部分的摘要视图的网页被编码在用于由客户端计算设备呈现的计算资源中。 叠加在摘要视图的至少一部分上的窗口由客户端计算设备呈现。 窗口提供单独的视图，用于从项目池中检查一个项目，并且窗口便于对项目池进行连续检查。
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公开(公告)号：US08311900B1
公开(公告)日：2012-11-13
申请号：US12608061
申请日：2009-10-29
申请人： Amy Bates , Sean M. Scott , Brent Allen Vincent , John P. Simons , Maren M. Costa , Douglas J. Gradt , Eva Manolis , Gianna Lise Puerini
发明人： Amy Bates , Sean M. Scott , Brent Allen Vincent , John P. Simons , Maren M. Costa , Douglas J. Gradt , Eva Manolis , Gianna Lise Puerini
IPC分类号： G06Q30/00
CPC分类号： G06F17/30905 , G06F3/04842 , G06F17/30893 , G06F17/30896 , G06Q30/0601 , G06Q30/0603 , G06Q30/0641 , G06Q30/0643
摘要： Disclosed are various embodiments for providing separate views for items. A network page providing a summary view of at least a portion of a pool of items is encoded in a computing resource for rendering by a client computing device. A window superimposed over at least a portion of the summary view is rendered by the client computing device. The window provides a separate view for examination of one item from the pool of items, and the window facilitates a serial examination of the pool of items.
摘要翻译： 公开了用于为物品提供单独视图的各种实施例。 提供项目池的至少一部分的摘要视图的网页被编码在用于由客户端计算设备呈现的计算资源中。 叠加在摘要视图的至少一部分上的窗口由客户端计算设备呈现。 窗口提供单独的视图，用于从项目池中检查一个项目，并且窗口便于对项目池进行连续检查。
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公开(公告)号：US5593812A
公开(公告)日：1997-01-14
申请号：US389864
申请日：1995-02-17
CPC分类号： G03F7/091 , G03F7/0045 , Y10S430/106 , Y10S430/108 , Y10S430/115 , Y10S430/116 , Y10S430/12 , Y10S430/121 , Y10S430/123 , Y10S430/124 , Y10S430/125
摘要： The sensitivity of a photoresist to actinic light is improved by the addition of certain dyes. The photoresist includes a polymer matrix, a photosensitive acid generator and at least one compound selected from the group consisting of dyes containing at least one heterosulphur atom such as 2,2.sup.1,5.sup.1,2"-terthiophene and its derivatives; thianthrene and its derivatives, and 4,6-diphenylthieno(3,4-d)-1,3-dioxol-2-one-5,5-dioxide; phenylsulfone and its derivatives; and 4,5-diphenyl-1,3-dioxol-2-one; 3,4-bis(acetoxymethyl)furan; chelidonic acid and its derivatives; and 5,7,12,14-pentacenetetrone. Resist images on a substrate are formed from the compositions.
摘要翻译： 通过添加某些染料可以改善光致抗蚀剂对光化光的敏感性。 光致抗蚀剂包括聚合物基质，光敏酸产生剂和至少一种选自包含至少一个杂硫原子的染料的化合物，例如2,2,1,51,2“ - 三噻吩及其衍生物; 噻吩及其衍生物和4,6-二苯基噻吩并（3,4-d）-1,3-二氧杂环戊烯-2-酮-5,5-二氧化物; 苯砜及其衍生物; 和4,5-二苯基-1,3-二氧杂环戊烯-2-酮; 3,4-二（乙酰氧基甲基）呋喃; 螯合酸及其衍生物; 和5,7,12,14-五硝基四酮。 由组合物形成基底上的抗蚀剂图像。
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