公开(公告)号：US07973918B2

公开(公告)日：2011-07-05

申请号：US12552108

申请日：2009-09-01

申请人： Hideo Tsuchiya ,  Takayuki Abe

发明人： Hideo Tsuchiya ,  Takayuki Abe

IPC分类号： G01N21/00

CPC分类号： G01N21/956 ,  G01N2021/95676

摘要： A pattern inspection apparatus includes a pulsed light source configured to emit pulsed light; a stage configured to mount thereon an inspection target object with a pattern formed thereon; a time delay integration (TDI) sensor configured to detect, a plurality of times with a time delay, each pixel value of an optical image of the inspection target object, wherein the optical image is acquired by emitting the pulsed light onto the inspection target object, and to integrate a detected each pixel value for each pixel of the optical image; a light quantity sensor configured to detect a light quantity of the pulsed light after emitting the pulsed light onto the inspection target object; a light quantity measurement circuit configured to input the light quantity detected by the light quantity sensor, and to measure a light quantity of each pulse while being synchronized with a period of the pulsed light; a correction unit configured to input the light quantity of each pulse and an integrated pixel value output from the TDI sensor, and to correct the integrated pixel value output from the TDI sensor, for each pixel of the optical image, using a total light quantity of the light quantity of corresponding each pulse; and an inspection unit configured to inspect whether there is a defect of the pattern, using the integrated pixel value corrected.

摘要翻译： 图案检查装置包括被配置为发射脉冲光的脉冲光源; 被配置为在其上安装有形成在其上的图案的检查对象物体的台; 时间延迟积分（TDI）传感器，其被配置为以时间延迟多次检测所述检查对象物体的光学图像的每个像素值，其中通过将所述脉冲光发射到所述检查对象物体上而获取所述光学图像 并且对于所述光学图像的每个像素集成检测到的每个像素值; 光量传感器，被配置为在将所述脉冲光发射到所述检查对象物体上之后检测所述脉冲光的光量; 光量测量电路，被配置为输入由光量传感器检测的光量，并且与脉冲光的周期同步地测量每个脉冲的光量; 校正单元，被配置为输入每个脉冲的光量和从TDI传感器输出的积分像素值，并且对于光学图像的每个像素，校正从TDI传感器输出的积分像素值，使用总光量 相应的每个脉冲的光量; 以及检查单元，被配置为使用校正的积分像素值来检查是否存在图案的缺陷。

公开(公告)号：US07847549B2

公开(公告)日：2010-12-07

申请号：US12159177

申请日：2006-12-26

申请人： Tetsuhiko Takahashi ,  Takayuki Abe ,  Hisako Nagao

发明人： Tetsuhiko Takahashi ,  Takayuki Abe ,  Hisako Nagao

IPC分类号： G01V3/00

CPC分类号： G01R33/56375 ,  A61B5/0555 ,  A61B5/7257 ,  G01R33/56383 ,  G01R33/5676

摘要： A magnetic resonance imaging apparatus comprises object placing means for placing an object in an imaging space, translating means for translating the object in a given direction by translating the object placing means in the given direction continuously or step-wise, magnetic field generating means for exciting the desired region of the object by generating a static magnetic field, a gradient magnetic field in the imaging space, and a high-frequency magnetic field in the imaging space, signal detecting means for detecting a magnetic resonance signal from the object, and control unit for controlling the translating means, magnetic field generating means and the signal detecting means, and translating the object continuously or stepwise to a predetermined position at a predetermined speed so as to capture a magnetic resonance image of the object.The magnetic resonance imaging apparatus further comprises translation error detecting means for detecting an error of the position or the set value of the speed, and correcting means for correcting the error detected by the positional error detecting means.

摘要翻译： 磁共振成像装置包括用于将物体放置在成像空间中的物体放置装置，用于通过沿着给定方向连续或逐步平移物体放置装置在给定方向上平移物体的平移装置，用于激发 通过产生静态磁场，成像空间中的梯度磁场和成像空间中的高频磁场来产生物体的期望区域，用于检测来自物体的磁共振信号的信号检测装置，以及控制单元 用于控制平移装置，磁场产生装置和信号检测装置，并以预定速度将物体连续或逐步地转移到预定位置，以便捕获物体的磁共振图像。 磁共振成像装置还包括用于检测位置误差或速度设定值的平移误差检测装置，以及用于校正由位置误差检测装置检测到的误差的校正装置。

公开(公告)号：US20100244823A1

公开(公告)日：2010-09-30

申请号：US12295160

申请日：2007-03-12

申请人： Takayuki Abe ,  Tetsuhiko Takahashi

发明人： Takayuki Abe ,  Tetsuhiko Takahashi

IPC分类号： G01R33/48

CPC分类号： G01R33/56375 ,  A61B5/055 ,  G01R33/243 ,  G01R33/543 ,  G01R33/56383 ,  G01R33/56563 ,  G01R33/58

摘要： A magnetic resonance imaging apparatus comprising static magnetic field generating means for generating a static magnetic field in an imaging space, measuring means for generating a high-frequency magnetic field and a gradient magnetic field in the imaging space and measuring a nuclear magnetic resonance signal generated from an object to be examined placed in the imaging space, signal processing means for reconstructing a magnetic resonance image according to the nuclear magnetic resonance signal, control means for controlling the measuring means and the signal processing means, and display means for displaying the reconstructed magnetic resonance image obtained by the signal processing means.The magnetic resonance imaging apparatus further comprises storing means for storing a first set of information representing an inhomogeneous distribution of the static magnetic field generated depending on the characteristic of the static magnetic field generating means and a second set of information representing an inhomogeneous distribution of the static magnetic field generated depending on the tissue of the object, setting means for setting a field of view for imaging in a desired region of the object, selecting means for selecting information corresponding to the set field of view for imaging out of the second set of information as a third set of information, and correcting magnetic field generating means for generating a correcting magnetic field according to the third set of information and the first set of the information.

摘要翻译： 一种磁共振成像设备，包括用于在成像空间中产生静态磁场的静态磁场产生装置，用于在所述成像空间中产生高频磁场和梯度磁场的测量装置，并且测量由 将要检查的物体放置在成像空间中，用于根据核磁共振信号重建磁共振图像的信号处理装置，用于控制测量装置和信号处理装置的控制装置，以及显示重建磁共振 由信号处理装置获得的图像。 磁共振成像装置还包括存储装置，用于存储表示根据静磁场产生装置的特性产生的静态磁场的不均匀分布的第一组信息，以及第二组信息，其表示静态磁场的不均匀分布 根据物体的组织产生的磁场，用于在对象的期望区域中设置用于成像的视野的设置装置，用于从第二组信息中选择与用于成像的设定视野相对应的信息的选择装置 作为第三组信息，以及校正磁场产生装置，用于根据第三组信息和第一组信息产生校正磁场。

公开(公告)号：US07768263B2

公开(公告)日：2010-08-03

申请号：US12331005

申请日：2008-12-09

申请人： Hisako Nagao ,  Takayuki Abe ,  Tetsuhiko Takahashi ,  Masahiro Takizawa

发明人： Hisako Nagao ,  Takayuki Abe ,  Tetsuhiko Takahashi ,  Masahiro Takizawa

IPC分类号： G01V3/00

CPC分类号： A61B5/055 ,  G01R33/56375

摘要： A magnetic resonance imaging apparatus comprises static magnetic field generating means for generating a static magnetic field in an imaging space, a gradient magnetic field generating means for generating a gradient magnetic field in the imaging space, high-frequency magnetic field generating means for generating a high-frequency magnetic field so as to induce nuclear magnetic resonance in a subject placed in the imaging space, signal receiving means for detecting a nuclear magnetic resonance signal from the subject, signal processing means for reconstructing an image by using the detected nuclear magnetic resonance signal, display means for displaying the image, a table for placing the subject thereon to dispose the subject in the imaging means, and table moving means for moving the table on which the subject is placed.While moving the portions to be imaged of the subject continuously or stepwise in the imaging space and disposing the subject, a whole-body image of a large region of the subject is created.The magnetic resonance imaging apparatus further comprises means for detecting information on the displacement of the subject from a desired position and setting means for setting movement information on the table according to the displacement information.The table moving means moves the table according to the movement information set by the setting means to capture the whole-body image.

摘要翻译： 磁共振成像装置包括用于在成像空间中产生静磁场的静磁场产生装置，用于在成像空间中产生梯度磁场的梯度磁场产生装置，用于产生高电平的高频磁场产生装置 频率磁场，以便在放置在成像空间中的对象中引起核磁共振，用于检测来自对象的核磁共振信号的信号接收装置，用于通过使用检测到的核磁共振信号重建图像的信号处理装置， 用于显示图像的显示装置，用于将被摄体放置在其上以将被摄体置于成像装置中的台子以及用于移动放置被摄体的台的台移动装置。 在成像空间中连续或逐步移动被摄体的成像部分并配置被摄体的同时，创建被检体的大区域的全身图像。 磁共振成像装置还包括用于检测来自所需位置的被摄体的位移的信息的装置和用于根据位移信息设置在桌子上的移动信息的设定装置。 桌子移动装置根据由设置装置设置的移动信息移动桌子以捕获全身图像。

公开(公告)号：US07759659B2

公开(公告)日：2010-07-20

申请号：US12193146

申请日：2008-08-18

申请人： Takayuki Abe ,  Tetsuo Yamaguchi ,  Fumio Hide

发明人： Takayuki Abe ,  Tetsuo Yamaguchi ,  Fumio Hide

IPC分类号： G21K1/00 ,  G21K5/10

CPC分类号： B82Y40/00 ,  B82Y10/00 ,  H01J37/3026 ,  H01J37/3174 ,  H01J2237/30472

摘要： A writing method includes emitting a first charged particle beam formed to be a first shape by passing through a first shaping aperture and a second shaping aperture, onto a target workpiece; and emitting a second charged particle beam formed to be a second shape by passing through the first shaping aperture and the second shaping aperture, wherein the second charged particle beam is superimposed onto a same position exposed by the first charged particle beam and is formed by using an opposite sides of respective first and second shaping apertures to those used for the first shape.

摘要翻译： 写入方法包括通过将第一成形孔和第二成形孔通过到目标工件上来发射形成为第一形状的第一带电粒子束; 并且通过穿过所述第一成形孔和所述第二成形孔而发射形成为第二形状的第二带电粒子束，其中所述第二带电粒子束叠加在由所述第一带电粒子束暴露的相同位置上，并且通过使用 相应的第一和第二成形孔的相对侧与用于第一形状的那些相对。

公开(公告)号：US20100156418A1

公开(公告)日：2010-06-24

申请号：US12663939

申请日：2008-06-25

申请人： Takayuki Abe ,  Hiroyuki Takeuchi ,  Tetsuhiko Takahashi

发明人： Takayuki Abe ,  Hiroyuki Takeuchi ,  Tetsuhiko Takahashi

IPC分类号： G01R33/48

CPC分类号： A61B5/055 ,  G01R33/4828 ,  G01R33/4835 ,  G01R33/5607

摘要： In order to stably obtain an even fat-suppressed image without reduction of an imaging efficiency and without being affected by unevenness of irradiation magnetic field of an RF pulse, when an imaging sequence having a first sequence part for suppressing a signal from a desired component of an examinee by applying a CHESS pulse and a second sequence part for measuring an echo signal from the examinee is repeated, the flip angle of the CHESS pulse is changed at plural times. In the case of multi-slice imaging, the flip angle of the CHESS pulse is changed in at lest two slice imaging.

摘要翻译： 为了稳定地获得均匀的脂肪抑制图像而不降低成像效率并且不受RF脉冲的照射磁场的不均匀性的影响，当具有用于抑制来自所需成分的信号的第一序列部分的成像序列 重复通过应用CHESS脉冲的受检者和用于测量来自受检者的回波信号的第二序列部分，CHESS脉冲的翻转角多次改变。 在多切片成像的情况下，CHESS脉冲的翻转角仅在两个切片成像中进行改变。

公开(公告)号：US07722423B2

公开(公告)日：2010-05-25

申请号：US11762879

申请日：2007-06-14

申请人： Takayuki Abe ,  Yoshiyasu Honma ,  Tomohiro Okumura ,  Kaisuke Okada ,  Kazuto Fukuda

发明人： Takayuki Abe ,  Yoshiyasu Honma ,  Tomohiro Okumura ,  Kaisuke Okada ,  Kazuto Fukuda

IPC分类号： H01J9/00

CPC分类号： H01J11/12 ,  H01J9/242 ,  H01J11/36 ,  H01J2211/361 ,  Y10T428/1059

摘要： A plasma display panel (PDP) and a method of manufacturing the same suppresses variation in the height of the intersecting barrier walls with a simple method and that prevents cross talk from occurring between the discharge cells. A concave part is formed at a position contacting an intersecting part of a first barrier wall before baking and a second barrier wall before baking orthogonal to the first barrier wall before baking. When such concave part is formed, the values of the surface area per volume of the intersecting part and the surface area per volume of the first barrier wall before baking and the second barrier wall before baking between the intersecting part and the intersecting part adjacent to the intersecting part become substantially equal. As a result, the height of the intersecting part does not become high after baking, a barrier wall of aligned height is obtained, and cross talk does not occur between the discharge cells.

摘要翻译： 等离子体显示面板（PDP）及其制造方法以简单的方法抑制交叉阻挡壁的高度变化，并且防止在放电单元之间发生串扰。 在烘烤之前，在与第一阻挡壁正交的烘烤前的第一阻挡壁的交叉部与第二阻挡壁接触的位置形成凹部， 当形成这样的凹部时，交叉部分的每个体积的表面积和烘烤前的第一阻挡壁的体积的表面积和烘烤前的交叉部分和邻近的交叉部分的交叉部分之间的值 相交部分变得基本相等。 结果，烘烤后交叉部分的高度不变高，获得排列高度的阻挡壁，并且在放电单元之间不发生串扰。

公开(公告)号：US07662522B2

公开(公告)日：2010-02-16

申请号：US12035212

申请日：2008-02-21

申请人： Takayuki Abe

发明人： Takayuki Abe

IPC分类号： G03F9/00 ,  G03C5/00

CPC分类号： G03F7/70441 ,  G03F1/36 ,  G03F7/2061 ,  G03F7/70433

摘要： A method for manufacturing a semiconductor device includes calculating a correction amount for correcting a dimension error generated in a pattern, by using an area and a total length of sides of a perimeter of the pattern included in each grid region of a plurality of mesh-like grid regions made by virtually dividing a pattern creation region of an exposure mask, exposing the pattern whose dimension has been corrected by the correction amount onto a substrate on which a resist film is coated, developing the resist film after the exposing, and processing the substrate by using a resist pattern after the developing.

摘要翻译： 一种制造半导体器件的方法包括：通过使用包含在多个网状的每个网格区域中的图案的周边的面积和总长度来计算校正在图案中产生的尺寸误差的校正量 通过实际上划分曝光掩模的图案创建区域而制成的栅格区域，将其尺寸已经校正的图案通过校正量曝光到其上涂覆抗蚀剂膜的基板上，在曝光之后使抗蚀剂膜显影，并且处理基板 通过在显影后使用抗蚀剂图案。

公开(公告)号：US20100013478A1

公开(公告)日：2010-01-21

申请号：US12439104

申请日：2007-09-28

申请人： Takayuki Abe ,  Hiroyuki Takeuchi ,  Tetsuhiko Takahashi

发明人： Takayuki Abe ,  Hiroyuki Takeuchi ,  Tetsuhiko Takahashi

IPC分类号： G01R33/48

CPC分类号： G01R33/4828 ,  G01R33/5607

摘要： A magnetic resonance imaging device includes magnetic field generating means and control means for controlling receiving means according to a predetermined pulse sequence, the predetermined pulse sequence including an unnecessary material suppressing sequence unit for canceling a signal from an unnecessary material which is not a measurement target and a main imaging sequence unit for measuring a nuclear magnetic resonance signal used to create an image of an examinee. The unnecessary material suppressing sequence unit generates at least two or more high frequency magnetic field pulses so that the longitudinal magnetization of the unnecessary material is made spatially uniform in the imaging space under application of a first high frequency magnetic field pulse in the main imaging sequence unit. The magnetic resonance imaging device further includes adjusting means for adjusting the flip angles of the two or more high frequency magnetic field pulses, and the control means applies the two or more high frequency magnetic field pulses at the flip angles adjusted by the adjusting means.

摘要翻译： 磁共振成像装置包括磁场产生装置和用于根据预定脉冲序列控制接收装置的控制装置，所述预定脉冲序列包括用于从不是测量目标的不必要材料消除信号的不必要材料抑制序列单元，以及 用于测量用于创建受检者的图像的核磁共振信号的主要成像序列单元。 不需要的材料抑制序列单元产生至少两个或更多个高频磁场脉冲，使得在主成像序列单元中施加第一高频磁场脉冲时，不需要的材料的纵向磁化在成像空间中在空间上均匀 。 磁共振成像装置还包括用于调节两个或多个高频磁场脉冲的翻转角的调节装置，并且控制装置以由调节装置调节的翻转角施加两个或更多个高频磁场脉冲。

公开(公告)号：US20090057576A1

公开(公告)日：2009-03-05

申请号：US12193146

申请日：2008-08-18

申请人： Takayuki Abe ,  Tetsuo Yamaguchi ,  Fumio Hide

发明人： Takayuki Abe ,  Tetsuo Yamaguchi ,  Fumio Hide

IPC分类号： G21K5/10

CPC分类号： B82Y40/00 ,  B82Y10/00 ,  H01J37/3026 ,  H01J37/3174 ,  H01J2237/30472

摘要： A writing method includes emitting a first charged particle beam formed to be a first shape by passing through a first shaping aperture and a second shaping aperture, onto a target workpiece; and emitting a second charged particle beam formed to be a second shape by passing through the first shaping aperture and the second shaping aperture, wherein the second charged particle beam is superimposed onto a same position exposed by the first charged particle beam and is formed by using an opposite sides of respective first and second shaping apertures to those used for the first shape.

摘要翻译： 写入方法包括通过将第一成形孔和第二成形孔通过到目标工件上来发射形成为第一形状的第一带电粒子束; 并且通过穿过所述第一成形孔和所述第二成形孔而发射形成为第二形状的第二带电粒子束，其中所述第二带电粒子束叠加在由所述第一带电粒子束暴露的相同位置上，并且通过使用 相应的第一和第二成形孔的相对侧与用于第一形状的那些相对。