Gas Enclosure Systems and Methods Utilizing Multi-Zone Circulation and Filtration

    公开(公告)号:US20190193436A1

    公开(公告)日:2019-06-27

    申请号:US16242000

    申请日:2019-01-08

    Applicant: Kateeva, Inc.

    Abstract: The present teachings relate to various embodiments of a gas enclosure system that can have a particle control system that can include a multi-zone gas circulation and filtration system, a low-particle-generating X-axis linear bearing system for moving a printhead assembly relative to a substrate, a service bundle housing exhaust system, and a printhead assembly exhaust system. Various components of a particle control system can include a tunnel circulation and filtration system that can be in flow communication with bridge circulation and filtration system. Various embodiments of a tunnel circulation and filtration system can provide cross-flow circulation and filtration of gas about a floatation table of a printing system. Various embodiments of a gas enclosure system can have a bridge circulation and filtration system that can provide circulation and filtration of gas about a printing system bridge and related apparatuses and devices. Accordingly, various embodiments of a gas circulation and filtration system as disclosed herein can effectively remove both airborne particulate matter, as well as particulate matter generated proximal to a substrate during a printing process. As such, various embodiments of a gas circulation and filtration system in conjunction with various embodiments of a gas purification system of the present teachings can provide for a controlled manufacturing environment resulting in a high-yield of OLED various devices.

    Gas enclosure systems and methods utilizing multi-zone circulation and filtration

    公开(公告)号:US10214037B2

    公开(公告)日:2019-02-26

    申请号:US15839942

    申请日:2017-12-13

    Applicant: Kateeva, Inc.

    Abstract: The present teachings relate to various embodiments of a gas enclosure system that can have a particle control system that can include a multi-zone gas circulation and filtration system, a low-particle-generating X-axis linear bearing system for moving a printhead assembly relative to a substrate, a service bundle housing exhaust system, and a printhead assembly exhaust system. Various components of a particle control system can include a tunnel circulation and filtration system that can be in flow communication with bridge circulation and filtration system. Various embodiments of a tunnel circulation and filtration system can provide cross-flow circulation and filtration of gas about a floatation table of a printing system. Various embodiments of a gas enclosure system can have a bridge circulation and filtration system that can provide circulation and filtration of gas about a printing system bridge and related apparatuses and devices. Accordingly, various embodiments of a gas circulation and filtration system as disclosed herein can effectively remove both airborne particulate matter, as well as particulate matter generated proximal to a substrate during a printing process. As such, various embodiments of a gas circulation and filtration system in conjunction with various embodiments of a gas purification system of the present teachings can provide for a controlled manufacturing environment resulting in a high-yield of OLED various devices.

    Gas Enclosure Systems and Methods Utilizing Multi-Zone Circulation and Filtration

    公开(公告)号:US20180162151A1

    公开(公告)日:2018-06-14

    申请号:US15839942

    申请日:2017-12-13

    Applicant: Kateeva, Inc.

    Abstract: The present teachings relate to various embodiments of a gas enclosure system that can have a particle control system that can include a multi-zone gas circulation and filtration system, a low-particle-generating X-axis linear bearing system for moving a printhead assembly relative to a substrate, a service bundle housing exhaust system, and a printhead assembly exhaust system. Various components of a particle control system can include a tunnel circulation and filtration system that can be in flow communication with bridge circulation and filtration system. Various embodiments of a tunnel circulation and filtration system can provide cross-flow circulation and filtration of gas about a floatation table of a printing system. Various embodiments of a gas enclosure system can have a bridge circulation and filtration system that can provide circulation and filtration of gas about a printing system bridge and related apparatuses and devices. Accordingly, various embodiments of a gas circulation and filtration system as disclosed herein can effectively remove both airborne particulate matter, as well as particulate matter generated proximal to a substrate during a printing process. As such, various embodiments of a gas circulation and filtration system in conjunction with various embodiments of a gas purification system of the present teachings can provide for a controlled manufacturing environment resulting in a high-yield of OLED various devices.

    Gas enclosure systems and methods utilizing multi-zone circulation and filtration
    35.
    发明授权
    Gas enclosure systems and methods utilizing multi-zone circulation and filtration 有权
    采用多区循环和过滤的气体封闭系统和方法

    公开(公告)号:US09278564B2

    公开(公告)日:2016-03-08

    申请号:US14801653

    申请日:2015-07-16

    Applicant: Kateeva, Inc.

    Abstract: The present teachings relate to various embodiments of a gas enclosure system that can have a particle control system that can include a multi-zone gas circulation and filtration system, a low-particle-generating X-axis linear bearing system for moving a printhead assembly relative to a substrate, a service bundle housing exhaust system, and a printhead assembly exhaust system. Various components of a particle control system can include a tunnel circulation and filtration system that can be in flow communication with bridge circulation and filtration system. Various embodiments of a tunnel circulation and filtration system can provide cross-flow circulation and filtration of gas about a floatation table of a printing system. Various embodiments of a gas enclosure system can have a bridge circulation and filtration system that can provide circulation and filtration of gas about a printing system bridge and related apparatuses and devices. Accordingly, various embodiments of a gas circulation and filtration system as disclosed herein can effectively remove both airborne particulate matter, as well as particulate matter generated proximal to a substrate during a printing process. As such, various embodiments of a gas circulation and filtration system in conjunction with various embodiments of a gas purification system of the present teachings can provide for a controlled manufacturing environment resulting in a high-yield of OLED various devices.

    Abstract translation: 本教导涉及可以具有粒子控制系统的气体封闭系统的各种实施例,其可以包括多区域气体循环和过滤系统,用于移动打印头组件相对的低颗粒生成X轴直线轴承系统 衬底,服务束壳体排气系统和打印头组件排气系统。 粒子控制系统的各种部件可以包括可与桥梁循环和过滤系统流通的隧道循环和过滤系统。 隧道循环和过滤系统的各种实施例可以提供围绕打印系统的漂浮台的气流的循环和过滤。 气体封闭系统的各种实施例可以具有桥梁循环和过滤系统,其可以提供围绕打印系统桥梁和相关设备和装置的气体的循环和过滤。 因此,本文公开的气体循环和过滤系统的各种实施例可以有效地去除在空气传播的颗粒物质以及在印刷过程中靠近基底产生的颗粒物质。 因此,结合本教导的气体净化系统的各种实施例的气体循环和过滤系统的各种实施例可以提供受控的制造环境,从而产生高产量的OLED各种装置。

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