摘要:
A method adjusts a pressure in a substrate processing device. The substrate processing device has a processing chamber for executing a predetermined processing for a substrate to be processed mounted on a mounting table; a pressure adjustment unit for the processing chamber which adjusts a pressure within the processing chamber; a transfer chamber connected to the processing chamber via a gate valve; and a pressure adjustment unit for the transfer chamber which adjusts a pressure in the transfer chamber and adjusts a pressure within the processing chamber while the gate valve is opened. The method is to adjust a pressure within the processing chamber to a predetermined pressure by using both the pressure adjustment unit for the processing chamber and the pressure adjustment unit for the transfer chamber.
摘要:
An automatic urine collection apparatus includes a collection container for accumulating urine transferred from a urine receiver through a tube and a main body for supporting the collection container, wherein the main body includes a suction pump for sucking the urine received by the urine receiver and carrying the urine to the collection container, a mass sensor for measuring the urine accumulated in the collection container, a control board for calculating a volume of the urine based on the measured mass of the urine, and an indicator for indicating the calculated volume of the urine.
摘要:
A vacuum treatment device, comprising a vacuum treatment chamber (1) etching a semiconductor wafer (W) as a body to be treated and a preliminary vacuum chamber (2) communicating with the vacuum treatment chamber (1), wherein a transfer arm (5) and first and second buffers (6, 7) for temporarily supporting the wafer (W) are installed in the preliminary vacuum chamber (2), the transfer arm (5) is provided with a flexible arm part (5a) and a support part (16) supporting the wafer (W), the arm part (5a) is extended and retracted by the rotations of a drive side swing arm (14) and a driven side swing arm (15) forming the arm (5a) so as to move the support part (16) straight forward and backward while maintaining it in its attitude, and the first and second buffers (6, 7) are disposed on the motion route of the support part (16) of the transfer arm (5).
摘要:
An unstable weighing due to the plunger sliding resistance in a prepla type injection molding machine is prevented by dividing control of the plunger retraction movement for the weighing into speed control and pressure control. A plastic resin supply start position and a forced retraction release position are set along the way of the plunger retraction stroke by reference to a weighing start position. A plunger is moved from the weighing start position after injection and pressure-keeping to a weighing stop retraction position. Plastic resin is supplied to the forward portion of the injection cylinder when the plunger attains the supply start position from the weighing start position. The plunger is moved by forced retraction up to the forced retraction release position by speed control; the weighing is stabilized by changing the speed control to the pressure control once the plunger attains the forced retraction release position.
摘要:
In a lens periphery edge processing apparatus comprising lens rotating shafts 16, 17 for putting and holding an objective lens therebetween, a carriage 15 rotatable around a pivot, and a grindstone rotating shaft 9 provided with a grindstone 5 for grinding the objective lens L, the lens rotating shaft 17 is provided with a reference globe 70 having a predetermined radius.
摘要:
A laser system for surveying, which comprises a laser light source unit, an optical system for irradiating a laser beam from the laser light source unit toward a given direction, whereby said laser light source unit is at least thermally isolated from the optical system, and the laser beam from the laser light source unit is guided toward the optical system by an optical fiber. Because the laser light source unit, or at least a heat generating portion of the light source unit is isolated from the optical system, no influence of heat from the laster light source unit is exerted on the optical system, and it is possible to prevent decrease of accuracy due to heat and to maintain the laser system for surveying in a condition to provide measurement at high accuracy.
摘要:
A zoom lens system for use in a camera having a color filter and a CCD achieves a magnification ratio of about 2.9 or greater and a back focus of about 9.2 or greater. The zoom lens system includes in order from an object side of the lens system, a first lens group having a negative refracting power, a second lens group spaced from the first lens group and having a positive refracting power and a third lens group spaced from the second lens group and having a positive refracting power. One or both of the fifth and an eighth lens surface has an aspherical surface, the fifth and eighth lens surfaces being counted from the object side. The second lens group includes five lenses with an extra lens being located at a far end of the second lens group relative to the object side. Each of the first, second and third lens groups is movable from a first position when the lens system is in a wide position to a second position when the lens system is in a tele position.
摘要:
A tilt detecting device of the present invention comprises a bubble tube 21, a light emitting element 22 for emitting detection light and photodetector elements 23 and 24 arranged opposite to each other with the bubble tube therebetween, and at least a light shading plate 35 disposed on an optical path of the detection light 26 and for partially blocking off light components entering the photodetector elements from the light emitting element, whereby a part of the detection light entering the photodetector elements is blocked off and it increase difference and ratio of light amounts between the case where the detection light passes through the air bubble of the bubble tube and the case where it passes through only the liquid portion of the bubble tube, and tilt detection accuracy is improved.