公开(公告)号：US07438982B2

公开(公告)日：2008-10-21

申请号：US11065142

申请日：2005-02-24

申请人： Takahiro Suwa ,  Mitsuru Takai ,  Kazuhiro Hattori ,  Shuichi Okawa ,  Mikiharu Hibi

发明人： Takahiro Suwa ,  Mitsuru Takai ,  Kazuhiro Hattori ,  Shuichi Okawa ,  Mikiharu Hibi

IPC分类号： G11B5/66 ,  G11B5/72

CPC分类号： G11B5/855 ,  Y10T428/24355 ,  Y10T428/24479 ,  Y10T428/24488 ,  Y10T428/24537 ,  Y10T428/2457

摘要： A magnetic recording medium includes at least a disk substrate, a magnetic recording layer formed with a predetermined concavo-convex pattern on the disk substrate, and a non-magnetic layer formed in concave portions of the concavo-convex pattern. Convex shapes made of a non-magnetic material are formed on the magnetic recording layer or the non-magnetic layer. Each convex shape is formed, for example, into a mountain-like shape whose upper surface width is made smaller than a width of each convex portion of the magnetic recording layer or a width of each concave portion where the non-magnetic layer 6 is formed.

摘要翻译： 磁记录介质至少包括盘基片，在盘基片上形成有预定的凹凸图案的磁记录层，以及形成在凹凸图案的凹部中的非磁性层。 在磁记录层或非磁性层上形成由非磁性材料制成的凸形。 每个凸形形成为例如其上表面宽度小于磁记录层的每个凸部的宽度或形成非磁性层6的每个凹部的宽度的山形形状 。

公开(公告)号：US20070231473A1

公开(公告)日：2007-10-04

申请号：US11785532

申请日：2007-04-18

申请人： Takahiro Suwa ,  Mitsuru Takai ,  Kazuhiro Hattori

发明人： Takahiro Suwa ,  Mitsuru Takai ,  Kazuhiro Hattori

IPC分类号： B05D5/12

CPC分类号： G11B5/855 ,  G11B5/8408

摘要： A magnetic recording medium and a method for manufacturing the same are provided, which provide high surface recording density and high recording/reading performance. The magnetic recording medium is manufactured by forming an intermediate protective layer between a continuous recording layer and a mask layer, dividing the continuous recording layer to form divided recording elements and removing the mask layer while leaving the intermediate protective layer on the top of the divided recording elements. Further, gaps between the divided recording elements are filled with a non-magnetic material while leaving the intermediate protective layer on the top of the divided recording elements.

摘要翻译： 提供一种提供高表面记录密度和高记录/读取性能的磁记录介质及其制造方法。 通过在连续记录层和掩模层之间形成中间保护层来制造磁记录介质，分割连续记录层以形成分割的记录元件，并且除去掩模层，同时将中间保护层留在分割记录的顶部 元素。 此外，分割的记录元件之间的间隙被非磁性材料填充，同时将中间保护层留在分割的记录元件的顶部。

公开(公告)号：US07247343B2

公开(公告)日：2007-07-24

申请号：US10924991

申请日：2004-08-25

申请人： Takahiro Suwa ,  Mitsuru Takai ,  Kazuhiro Hattori ,  Shuichi Okawa

发明人： Takahiro Suwa ,  Mitsuru Takai ,  Kazuhiro Hattori ,  Shuichi Okawa

IPC分类号： B05D5/12

CPC分类号： G11B5/855

摘要： A method for manufacturing a magnetic recording medium for efficiently and certainly manufacturing a magnetic recording medium. The magnetic recording medium has a recording layer formed to have predetermined concavo-convex pattern and an adequately flat surface. According to this method, a non-magnetic material is deposited on and filled into a member to be processed 10 by adjusting sputtering conditions in such a manner as to satisfy the following Eq I: 0.1≦V/V0−0.003×(L·d/t)+1.2 Eq I where V represents a deposition rate which is the film thickness per unit of time, V0 represent a deposition rate in a case that the bias power is zero, t represents the film thickness of the deposited non-magnetic material, L represents the width of a recording element, and d represents the depth of a recessed portion between the recording elements.

摘要翻译： 一种用于制造磁记录介质的方法，用于有效且肯定地制造磁记录介质。 磁记录介质具有形成为具有预定凹凸图案和足够平坦表面的记录层。 根据该方法，通过调整溅射条件，使非磁性材料沉积在待加工构件10中，并满足以下等式I：<？in-line-formula description =“In- 线公式“end =”lead“？> 0.1 <= V / V <0> -0.003x（Ld / t）+1.2 Eq I <？in-line-formula description =”In-line Formulas “end =”tail“？>其中V表示作为每单位时间的膜厚度的沉积速率，V 表示在偏置功率为零的情况下的沉积速率，t表示 沉积的非磁性材料的膜厚度L表示记录元件的宽度，d表示记录元件之间的凹部的深度。

公开(公告)号：US20070062450A1

公开(公告)日：2007-03-22

申请号：US11600728

申请日：2006-11-17

申请人： Kazuhiro Hattori ,  Mitsuru Takai ,  Takahiro Suwa

发明人： Kazuhiro Hattori ,  Mitsuru Takai ,  Takahiro Suwa

IPC分类号： C23F1/00 ,  C23C16/00

CPC分类号： G11B5/855 ,  B82Y10/00 ,  G11B5/74 ,  G11B5/743 ,  G11B5/851 ,  G11B11/10582

摘要： A production apparatus, which enable the efficient production of a discrete type magnetic recording medium, while reliably preventing any deterioration of the partitioned recording elements. The magnetic recording medium production apparatus includes: recording layer processing device, which by forming a plurality of grooves, with a spacing therebetween in a planar direction, in an intermediate product of a magnetic recording medium comprising a continuous recording layer, partitions the continuous recording layer into a plurality of partitioned recording elements; non-magnetic body filling device for filling the grooves between the partitioned recording elements with a non-magnetic body; protective layer formation device for forming a protective layer on the partitioned recording elements and the non-magnetic body; and vacuum retention device which houses the recording layer processing device, the non-magnetic body filling device, and the protective layer formation device, and maintains the environment surrounding the intermediate product in a state of vacuum.

摘要翻译： 一种制造装置，其能够有效地生产分立型磁记录介质，同时可靠地防止分隔的记录元件的任何劣化。 磁记录介质制造装置包括：记录层处理装置，其在包括连续记录层的磁记录介质的中间产物中，在平面方向上以间隔形成多个凹槽，分隔连续记录层 分成多个划分的记录元件; 非磁性体填充装置，用于用非磁性体填充分隔的记录元件之间的凹槽; 用于在分隔的记录元件和非磁性体上形成保护层的保护层形成装置; 以及容纳记录层处理装置，非磁性体填充装置和保护层形成装置的真空保持装置，并且在真空状态下保持围绕中间产品的环境。

公开(公告)号：US20070062396A1

公开(公告)日：2007-03-22

申请号：US10556052

申请日：2004-04-28

申请人： Mitsuru Takai ,  Kazuhiro Hattori ,  Minoru Fujita

发明人： Mitsuru Takai ,  Kazuhiro Hattori ,  Minoru Fujita

IPC分类号： B41K1/56

CPC分类号： B29C59/02 ,  B29C33/50 ,  B29C37/0007 ,  B29C37/0017 ,  B29L2017/005 ,  G11B7/261

摘要： An imprinting apparatus according to the present invention is configured to be capable of removing a stamper having one surface thereof formed with a concave/convex portion and having flexibility, from a resist layer to which shapes of the concave/convex portion of the stamper have been transferred by pressing the concave/convex portion of the stamper against the resist layer on a disk-shaped substrate. The imprinting apparatus comprises a suction device (a suction section, an air pump, and a restrictor) configured to be capable of sucking a predetermined part of the other surface of the stamper to thereby remove the predetermined part from the resist layer such that a removal completion range of the stamper can be gradually expanded from a state where the predetermined part is removed from the resist layer by the suction device.

摘要翻译： 根据本发明的压印装置被配置为能够从压模的凹/凸部分的形状的抗蚀剂层移除其一个表面形成有凹/凸部并具有柔性的压模 通过将压模的凹部/凸部按压在盘状基板上的抗蚀剂层上而转印。 压印装置包括吸引装置（抽吸部，空气泵和限流器），其构造成能够吸引压模的另一个表面的预定部分，从而从抗蚀剂层移除预定部分，使得去除 可以通过抽吸装置从预定部分从抗蚀剂层移除的状态逐渐扩大压模的完成范围。

公开(公告)号：US20070031706A1

公开(公告)日：2007-02-08

申请号：US10555670

申请日：2004-09-09

申请人： Shuichi Okawa ,  Kazuhiro Hattori ,  Takahiro Suwa ,  Mitsuru Takai

发明人： Shuichi Okawa ,  Kazuhiro Hattori ,  Takahiro Suwa ,  Mitsuru Takai

IPC分类号： G11B5/65 ,  B05D5/12

CPC分类号： G11B5/855

摘要： A method for manufacturing a magnetic recording medium, which enables efficient and ensured manufacture of a magnetic recording medium having a recording layer formed in a concavo-convex pattern and a satisfactorily flat surface, and a magnetic recording medium are provided. According to the method for manufacturing a magnetic recording medium, a material whose state is selectable between a flowing state and a cured state is used as a non-magnetic material 36. After the non-magnetic material 36 is formed in a flowing state on a surface of an object to be processed 10 including a recording layer 32 formed in a concavo-convex pattern over a glass substrate 12, then the non-magnetic material 36 is cured.

摘要翻译： 提供了一种制造磁记录介质的方法，其能够有效且确保制造具有形成为凹凸图案和令人满意的平坦表面的记录层的磁记录介质和磁记录介质。 根据制造磁记录介质的方法，将其状态在流动状态和固化状态之间可选择的材料用作非磁性材料36.在非磁性材料36以流动状态形成在 包括在玻璃基板12上形成为凹凸图案的记录层32的待处理物体10的表面，然后使非磁性材料36固化。

公开(公告)号：US20060021966A1

公开(公告)日：2006-02-02

申请号：US10535265

申请日：2004-07-28

申请人： Kazuhiro Hattori ,  Mitsuru Takai ,  Shuichi Okawa

发明人： Kazuhiro Hattori ,  Mitsuru Takai ,  Shuichi Okawa

IPC分类号： C23F1/00 ,  H01L21/306

CPC分类号： G11B5/855

摘要： A manufacturing method of a magnetic recording medium, and the like are provided, which can suppress misalignment of a processed shape of divided recording elements and magnetic degradation and can efficiently manufacture a magnetic recording medium having good magnetic characteristics. In the manufacturing method, ion beam etching is used as a dry etching technique for a continuous recording layer 20. Before dry etching of the continuous recording layer 20, a resist layer 26 is removed. As the material for a first mask layer covering the continuous recording layer, diamond like carbon is used.

摘要翻译： 提供了一种磁记录介质的制造方法等，其可以抑制分割的记录元件的加工形状的不对准和磁性劣化，并且可以有效地制造具有良好磁特性的磁记录介质。 在制造方法中，使用离子束蚀刻作为连续记录层20的干蚀刻技术。 在连续记录层20的干蚀刻之前，去除抗蚀剂层26。 作为覆盖连续记录层的第一掩模层的材料，使用类金刚石碳。

公开(公告)号：US20050193405A1

公开(公告)日：2005-09-01

申请号：US11056976

申请日：2005-02-14

申请人： Kazuhiro Hattori ,  Yoshikazu Soeno ,  Mitsuru Takai ,  Shuichi Okawa

发明人： Kazuhiro Hattori ,  Yoshikazu Soeno ,  Mitsuru Takai ,  Shuichi Okawa

IPC分类号： G11B5/65 ,  G11B5/00 ,  G11B5/012 ,  G11B5/02 ,  G11B5/147 ,  G11B5/62 ,  G11B5/64 ,  G11B5/72 ,  G11B5/738 ,  G11B5/74 ,  G11B5/855 ,  G11B7/08 ,  G11B7/085 ,  G11B7/09 ,  G11B11/00 ,  G11B11/10

CPC分类号： B82Y10/00 ,  G11B5/012 ,  G11B5/65 ,  G11B5/74 ,  G11B5/743 ,  G11B5/855 ,  G11B2005/0002 ,  G11B2005/0005 ,  G11B2005/001 ,  G11B2005/0021 ,  G11B2005/0029

摘要： A magnetic recording and reproducing device includes: a magnetic recording medium in which a magnetic recording layer is formed in a concavo-convex pattern so that tracks are formed by convex portions of a predetermined track width and arranged in parallel in the track width direction; a heating head for heating the magnetic recording medium to partially reduce coercivity of the tracks; a recording head for applying a recording magnetic field to a heated portion of the magnetic recording medium to record magnetic data on the tracks; and a reproducing head for detecting a reproducing magnetic field of the tracks. In this configuration, an effective recording area has an effective recording width that is equal to or more than the track width, and equal to or less than a sum of the track width and a doubled value of width of concave portions between the tracks.

摘要翻译： 磁记录和再现装置包括：磁记录介质，其中磁记录层形成为凹凸图案，使得轨道由预定轨道宽度的凸部形成并沿轨道宽度方向平行布置; 用于加热磁记录介质以部分地降低轨道的矫顽力的加热头; 记录头，用于将记录磁场施加到磁记录介质的加热部分，以将磁数据记录在轨道上; 以及用于检测轨道的再现磁场的再现头。 在该配置中，有效记录区域具有等于或大于轨道宽度的有效记录宽度，并且等于或小于轨道宽度和轨迹之间的凹部宽度的双倍值之和。

公开(公告)号：US20050185561A1

公开(公告)日：2005-08-25

申请号：US11059532

申请日：2005-02-17

申请人： Kazuhiro Hattori ,  Mitsuru Takai

发明人： Kazuhiro Hattori ,  Mitsuru Takai

IPC分类号： G11B5/65 ,  G11B5/64 ,  G11B5/66 ,  G11B5/82 ,  G11B5/855 ,  G11B7/24

CPC分类号： B82Y10/00 ,  G11B5/65 ,  G11B5/743 ,  G11B5/82 ,  G11B5/855

摘要： A magnetic recording medium is provided, which has a recording layer formed in a concavo-convex pattern and makes it possible to obtain the stable flying characteristics of a head. In the magnetic recording medium, concave portions between recording elements are filled with a non-magnetic material. Thus, the surface of the magnetic recording medium takes a concavo-convex shape which is different from the concavo-convex pattern of the recording layer. Also, the arithmetical mean deviation of the assessed profile of the concavo-convex shape in the surface is restricted to 1 nm or less.

摘要翻译： 提供一种磁记录介质，其具有以凹凸图案形成的记录层，并且可以获得头部的稳定的飞行特性。 在磁记录介质中，记录元件之间的凹部填充有非磁性材料。 因此，磁记录介质的表面呈现与记录层的凹凸图案不同的凹凸形状。 此外，将表面中的凹凸形状的评估轮廓的算术平均偏差限制在1nm以下。

公开(公告)号：US20050048198A1

公开(公告)日：2005-03-03

申请号：US10924991

申请日：2004-08-25

申请人： Takahiro Suwa ,  Mitsuru Takai ,  Kazuhiro Hattori ,  Shuichi Okawa

发明人： Takahiro Suwa ,  Mitsuru Takai ,  Kazuhiro Hattori ,  Shuichi Okawa

IPC分类号： G11B5/65 ,  G11B5/84 ,  G11B5/855 ,  B05D5/12

CPC分类号： G11B5/855

摘要： A method for manufacturing a magnetic recording medium for efficiently and certainly manufacturing a magnetic recording medium. The magnetic recording medium has a recording layer formed to have predetermined concavo-convex pattern and an adequately flat surface. According to this method, a non-magnetic material is deposited on and filled into a member to be processed 10 by adjusting sputtering conditions in such a manner as to satisfy the following equation (I): 0.1≦V/V0≦−0.003×(L·d/t)+1.2  (I) where V represents a deposition rate which is the film thickness per unit of time, V0 represent a deposition rate in a case that the bias power is zero, t represents the film thickness of the deposited non-magnetic material, L represents the width of a recording element, and d represents the depth of a recessed portion between the recording elements.

摘要翻译： 一种用于制造磁记录介质的方法，用于有效且肯定地制造磁记录介质。 磁记录介质具有形成为具有预定凹凸图案和足够平坦表面的记录层。 根据该方法，通过以满足下述式（I）的方式调整溅射条件，将非磁性材料沉积并填充到待加工构件10中：0.1 <= V / V0 <= 0.003 x（Ld / t）+1.2（I）其中V表示作为每单位时间的膜厚度的沉积速率，V0表示在偏置功率为零的情况下的沉积速率，t表示沉积的膜厚度 非磁性材料，L表示记录元件的宽度，d表示记录元件之间的凹部的深度。